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Abstract—A compact hybrid-integrated 100 Gb/s (4 lane × exponential growth in data traffic generated in telecommunica-
25.78125 Gb/s) transmitter optical sub-assembly (TOSA) has been tion networks and data center networks. 100 GbE, standardized
developed for a 100 Gb/s transceiver for 40-km transmission over in IEEE 802.3ba [1], has a long reach specification for 10 km
a single-mode fiber. The TOSA has a simple configuration in which
four electro-absorption modulator-integrated distributed feedback or 40 km transmission over single-mode fiber (SMF), namely
(EADFB) lasers are directly attached to the input waveguide end- 100 GBASE-LR4 or 100 GBASE-ER4. The specification de-
face of a silica-based arrayed waveguide grating (AWG) multi- fines a multi-lane configuration that has four 25.78125 Gb/s
plexer without bulk lenses. To achieve a high optical butt coupling lanes with local area network wavelength division multiplexing
efficiency between the EADFB lasers and the AWG multiplexer, (LAN-WDM), which is assigned a wavelength channel spacing
we integrated a laterally tapered spot-size converter (SSC) for the
EADFB laser and employed a waveguide with a high refractive in- of 800 GHz in the 1.3 μm wavelength band. A transceiver for
dex difference of 2.0% for the AWG multiplexer. By optimizing the 100 GbE is also defined in the multi-source agreement (MSA).
laterally tapered SSC structure, we achieved a butt-coupling loss To further reduce both the body size and the power consumption
of less than 3 dB, which is an improvement of around 2 dB com- of the 100 GbE transceiver, a CFP4 transceiver [2] defined in the
pared with a laser without an SSC structure. We also developed an
centum form-factor pluggable MSA or a QSFP28 transceiver [3]
ultracompact AWG multiplexer, which was 6.7 mm × 3.5 mm in
size with an insertion loss of less than 1.9 dB. We achieved this by defined in the quad small form-factor pluggable MSA has been
using a Mach–Zehnder interferometer-synchronized configuration enacted. However, with a multi-lane configuration it is compli-
to obtain a low loss and wide flat-top transmission filter spectra. cated to fabricate such a compact transceiver because we have
The TOSA body size was 19.9 mm (L) × 6.0 mm (W) × 5.8 mm (H). to further miniaturize the optical components installed in the
Error-free operation was demonstrated for a 40-km transmission transceiver such as the transmitter optical sub-assembly (TOSA)
when all the lanes were driven simultaneously with a low EA modu-
lator driving voltage of 1.5 V at an operating temperature of 55 °C. and the receiver optical sub-assembly (ROSA). Nevertheless,
the multi-lane configuration must be a promising approach even
Index Terms—100 Gb/s Ethernet, AWG multiplexer, EADFB for the next generation 400-Gb/s Ethernet (400 GbE), which
laser, hybrid-integration, spot-size converter, transmitter optical
sub-assembly. is currently being discussed by an IEEE task force [4]. There-
fore, an integration technique that satisfies the increasing lane
number is an important technical issue for a future TOSA and
I. INTRODUCTION ROSA.
ORE compact and cost-effective optical transceivers are Various multi-lane configurations for a 100 Gb/s TOSA
M needed for 100 Gb/s Ethernet (100 GbE) to deal with the have been reported [5]–[10]. The TOSA reported in [5],
[6] uses monolithic integration technology. In these cases,
Manuscript received October 8, 2015; revised December 5, 2015; accepted a four-channel laser array with four wavelength lanes and a
December 8, 2015. Date of publication December 16, 2015; date of current 4-input × 1-output multi-mode interferometer (MMI) optical
version February 5, 2016.
T. Ohyama, Y. Doi, S. Kanazawa, K. Takahata, A. Kanda, T. Kurosaki, T.
coupler are monolithically integrated in a single chip. However,
Ohno, and H. Sanjoh are with the NTT Device Innovation Center, Nippon with this approach, it is difficult to obtain sufficient average
Telegraph and Telephone Corporation (NTT), Atsugi-shi 243–0198, Japan optical output power (Pavg ) due to the large intrinsic loss of the
(e-mail: oyama.takaharu@lab.ntt.co.jp; doi-yoshiyuki@ntt-el.com; kanazawa.
shigeru@lab.ntt.co.jp; takahata.kiyoto@lab.ntt.co.jp; kanda.atsushi@lab.ntt.
4 × 1 MMI optical coupler. The TOSAs reported in [7]–[9] are
co.jp; kurosaki.takeshi@lab.ntt.co.jp; ohno.tetsuichiro@lab.ntt.co.jp; sanjoh. constructed by using many optical components such as lenses
hiroaki@lab.ntt.co.jp). and wavelength filters. However, the bulk component assembly
W. Kobayashi, T. Tanaka, and T. Hashimoto are with the NTT De-
vice Technology Laboratories, Nippon Telegraph and Telephone Corporation
approach complicates TOSA fabrication owing to the need for
(NTT), Atsugi-shi 243–0198, Japan (e-mail: kobayashi.wataru@lab.ntt.co.jp; very tight lane-by-lane alignment, which requires sub-micron
tanaka.takuya@lab.ntt.co.jp; hashimoto.toshikazu@lab.ntt.co.jp). order accuracy. The TOSA reported in [10] uses hybrid integra-
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org.
tion technology. In this case, a four-channel electro-absorption
Digital Object Identifier 10.1109/JLT.2015.2508758 (EA) modulators integrated distributed feedback (DFB) laser
0733-8724 © 2015 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications standards/publications/rights/index.html for more information.
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OHYAMA et al.: COMPACT HYBRID INTEGRATED 100-Gb/s TRANSMITTER OPTICAL SUB-ASSEMBLY USING OPTICAL BUTT-COUPLING 1039
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1040 JOURNAL OF LIGHTWAVE TECHNOLOGY, VOL. 34, NO. 3, FEBRUARY 1, 2016
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OHYAMA et al.: COMPACT HYBRID INTEGRATED 100-Gb/s TRANSMITTER OPTICAL SUB-ASSEMBLY USING OPTICAL BUTT-COUPLING 1041
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1042 JOURNAL OF LIGHTWAVE TECHNOLOGY, VOL. 34, NO. 3, FEBRUARY 1, 2016
Fig. 10. Schematic layout of AWG multiplexer. To obtain a flat wide passband
width with a low insertion loss, a MZI was inserted into the output of the AWG. Fig. 12. Photograph of a PLC sub-block. Four carriers with an SSC integrated
Input ports were assigned at a pitch of 1 mm. EADFB laser chip are directly attached to the end of the AWG multiplexer.
Fig. 13. Photograph of a fabricated TOSA with LC-type receptacle and flex-
be the same as that over 370 GHz defined by LAN-WDM with ible printed circuits.
a channel spacing of 800 GHz. To obtain such a wide passband
width with a low insertion loss, we introduced a Mach-Zehnder
interferometer (MZI)-synchronized configuration into the AWG
multiplexer, where the MZI was inserted at the output port of
the AWG circuit [13]. We used a silica-waveguide on silicon
substrate with a Δ of 2% and a core size of 4.5 μm × 4.5 μm
to realize a compact AWG multiplexer. As shown in Fig. 10,
we designed a PLC chip consisting of four input waveguides
at a pitch of 1 mm for the input ports, an MZI-synchronized
AWG multiplexer, and an output waveguide for the output port.
In the middle of each input waveguide, a tap waveguide was
extracted for a monitor port connecting to a monitor PD. A high
Δ of 2% realized an ultra-compact AWG multiplexer size of
6.7 mm × 3.5 mm. Fig. 11 shows the transmission spectra of
the fabricated AWG multiplexer. We obtained an insertion loss Fig. 14. Optical output power (P f ) of a TOSA as a function of injection
of less than 1.9 dB including a 1% tap for monitor ports and a current (If ) at an operating temperature (T o p ) of 55 °C.
0.5 dB-down transmission bandwidth of over 410 GHz for all
channels.
of the EADFB laser chip was positioned 5 μm away from the
edge of the carrier to avoid a direct contact between the edge
III. TOSA FABRICATION of the EADFB laser chip and the end of the input waveguide of
The TOSA fabrication process is described below. First, we the AWG multiplexer. Next, we precisely aligned the EADFB
prepared four SSC integrated EADFB laser chips that had dif- laser chip on the carrier with the input waveguide of the AWG
ferent output wavelengths with a channel spacing of around multiplexer while actively monitoring the optical output power.
800 GHz. Then, each EADFB laser chip was bonded to an alu- Next, we fixed the carrier and the AWG multiplexer at their
minum nitride based carrier using Au-Sn solder. The front edge end-faces with a UV-curable adhesive. We repeated the carrier
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OHYAMA et al.: COMPACT HYBRID INTEGRATED 100-Gb/s TRANSMITTER OPTICAL SUB-ASSEMBLY USING OPTICAL BUTT-COUPLING 1043
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1044 JOURNAL OF LIGHTWAVE TECHNOLOGY, VOL. 34, NO. 3, FEBRUARY 1, 2016
Fig. 18. BER characteristics for BtoB, and after 10, and 40-km transmissions
when all the lanes were driven simultaneously at an EA modulator driving Fig. 19. BER characteristics for BtoB, and after 10, and 40-km transmissions
voltage (V p p ) of 2.0 V. when all the lanes were driven simultaneously at an EA modulator driving
voltage (V p p ) of 1.5 V.
bandwidth. We assume that an often-used bonding wire for multiplexed optical signals of four lanes after transmission were
high frequency electrical connection degrades the bandwidth. selected with a tunable wavelength filter, and then received by
We measured the TOSA dynamic characteristics using elec- a ROSA with a p-i-n photodiode. After the 40 km transmission,
trical signals with a bit rate of 25.78125 Gb/s, a NRZ format, we used a praseodymium-doped fiber amplifier to amplify the
and a PRBS of 231 –1. Fig. 17 shows the eye diagrams through optical signal. We could obtain error-free operation in all the
a fourth-order Bessel filter for a back-to-back (BtoB) transmis- lanes and under all transmission conditions. The power penalty
sion when all the lanes were driven simultaneously. Fig. 17(a) after a 40 km transmission was less than 0.3 dB for a Vpp of
and (b) show eye diagrams obtained with a Vpp of 2.0 and 1.5 V, 2.0 V and less than 0.7 dB for a Vpp of 1.5 V.
respectively. The If was set at 70 mA for all the lanes. Each Vb
value was adjusted to obtain an optical cross point of 50% for
V. CONCLUSION
each lane. Each eye diagram was extracted from the wavelength
multiplexed signals by using a tunable wavelength filter. Clear We developed a compact hybrid-integrated 100 Gb/s TOSA
eye openings were obtained with the DER of over 8.1 dB and employing EADFB lasers and a silica-based AWG multiplexer.
a Pavg of over −2.3 dBm. The variation in the obtained Pavg To simplify the optic fabrication process for the multi-lane
values among lanes was caused by the inherent output power of TOSA, we introduced an optical butt-coupling connection be-
each EADFB laser chip. We consider that the variation can be tween the EADFB laser and the AWG multiplexer. Moreover,
suppressed by chip sorting before the EADFB laser on the car- we integrated a laterally tapered SSC into an EADFB laser to
rier attached to the AWG multiplexer. However, there is some improve the butt-coupling efficiency with the PLC waveguide.
jitter in the waveform compared with that obtained with the sin- By optimizing the laterally tapered SSC structure, we achieved
gle lane driving shown in Fig. 9. We assume that some jitter is an optical butt-coupling loss of 3.0 dB, which was an improve-
caused by electrical crosstalk between lanes within the TOSA ment of more than 2 dB compared with the conventional EADFB
package. laser without an SSC. We designed an AWG multiplexer with
We evaluated the bit-error-rate (BER) characteristics for an MZI-synchronized configuration to obtain a wide passband
BtoB, 10 and 40 km transmissions over SMF when all the lanes width with a low insertion loss. The use of a PLC with a high
were driven simultaneously using the eye diagram condition Δ of 2% enabled us to realize an ultra-compact AWG size of
shown in Fig. 17. Figs. 18 and 19 show the BER characteristics 6.7 mm × 3.5 mm with a low insertion loss of 1.9 dB and a
with Vpp values of 2.0 and 1.5 V, respectively. The wavelength wide 0.5 dB-down passband of over 410 GHz. We confirmed
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OHYAMA et al.: COMPACT HYBRID INTEGRATED 100-Gb/s TRANSMITTER OPTICAL SUB-ASSEMBLY USING OPTICAL BUTT-COUPLING 1045
that the 19.9 mm × 6.0 mm × 5.8 mm TOSA realized a 4-lane Yoshiyuki Doi (M’11) received the B.S. and M.S. degrees in physics, and the
× 25.78125 Gb/s (total bit-rate of over 100 Gb/s) error-free Ph.D. degree in material science from Shinshu University, Nagano, Japan, in
1995, 1997, and 2007, respectively. He joined Nippon Telegraph and Telephone
transmission over a 40 km SMF with an EA modulator driving Corporation (NTT), Atsugi Opto-Electronics Laboratories, in 1997. From 1997
Vpp of 1.5 V at a Top of 55 °C. to 2002, he was engaged in research on microwave photonics using a high-
This hybrid integration technique using an optical butt- speed photonic millimeter-wave light source, a phase-shift-keying modulator,
and a high-power emitting base station. Since 2002, he has been involved in
coupling configuration is an effective way to fabricate a compact the research and development of photonic devices and subsystems using hy-
and cost-effective multi-lane TOSA for a long 100 Gb/s-class brid integration on silica-based planar lightwave circuits, such as high-speed
transmission of over 40 km. receivers, large-scale optical switches, and high-functional optical modulators.
He is currently a Senior Research Engineer at NTT Device Innovation Center,
Kanagawa, Japan. He is a Member of the IEEE Photonics Society, IEEE Mi-
crowave Theory and Techniques Society, and Information and Communication
REFERENCES Engineers (IEICE) of Japan. He received the IEICE 2004 Young Researcher’s
Award and the 2005 Best Paper Award.
[1] IEEE Standard 802.3ba-2010 (Amendment to IEEE Standard 802.3–
2008). 2010.
[2] CFP Multi-Source Agreement (MSA) [Online]. Available: http://www.
cfp-msa.org/
[3] SFF Committee, SFF-8665 Specification for QSFP+ 28 Gb/s 4X Plug- Wataru Kobayashi received B.S. and M.E. degrees in applied physics and the
gable Transceiver Solution (QSFP28), Rev 1.9. (June 29, 2015). [Online]. Dr.Eng. degree in nanoscience and nanoengineering from Waseda University,
Available: http://www.sffcommittee.org/ie/Specifications.html Tokyo, Japan, in 2003, 2005, and 2011, respectively. In 2005, he joined NTT
[4] [Online]. Available: http://www.ieee802.org/3/bs/ Photonics Laboratories, Atsugi, Kanagawa, Japan. He has been engaged in the
[5] S. Kanazawa, T. Fujisawa, N. Nunoya, A. Ohki, K. Takahata, H. Sanjoh, research and development of optical semiconductor devices. He is a Member
R. Iga, and H. Ishii, “Ultra-compact 100 GbE transmitter optical sub- of the Institute of Electronics, Information and Communication Engineers of
assembly for 40-km SMF transmission,” J. Lightw. Technol., vol. 31, Japan.
no. 4, pp. 602–608, Feb. 2013.
[6] W. Kobayashi, S. Kanazawa, Y. Ueda, T. Fujisawa, H. Sanjoh, and M. Itoh,
“4 × 25.8 Gbit/s (100 Gbit/s) simultaneous operation of InGaAlAs based
DML array monolithically integrated with MMI coupler,” IET Electron.
Shigeru Kanazawa received the B.S. and M.S. degrees from the Tokyo Institute
Lett., vol. 51, no. 19, pp. 1516–1517, Sep. 2015.
of Technology, Tokyo, Japan, in 2005 and 2007, respectively. In April 2007, he
[7] T. Saeki, S. Sato, M. Kurokawa, A. Moto, M. Suzuki,
joined Nippon Telegraph and Telephone (NTT) Photonics Laboratories, Atsugi,
K. Tanaka, K. Tanaka, N. Ikama, and Y. Fujimura, “100 Gbit/s com-
Kanagawa, Japan. He has been engaged in the research and development of
pact transmitter module integrated with optical multiplexer,” presented at
optical semiconductor devices and integrated devices for optical communica-
the IEEE Photon. Conf., Bellevue, WA, USA, 2013, Paper TuG3.2.
tions systems. He is currently with the NTT Device Innovation Center. He is a
[8] T. Murao, N. Yasui, T. Shinada, Y. Imai, K. Nakamura, M. Shimono,
Member of the Japan Society of Applied Physics and the Institute of Electronics,
H. Kodera, Y. Morita, A. Uchiyama, H. Koyanagi, and H. Aruga, “In-
Information and Communication Engineers of Japan.
tegrated spatial optical system for compact 28-Gb/s × 4-lane transmit-
ter optical subassemblies,” IEEE Photon. Technol. Lett., vol. 26, no. 22,
pp. 2275–2278, Nov. 2014.
[9] T. Ohyama, A. Ohki, K. Takahata, T. Ito, N. Nunoya, H. Mawatari,
T. Fujisawa, S. Kanazawa, R. Iga, and H. Sanjoh, “Transmitter optical Kiyoto Takahata received the B.E. and M.E. degrees in physical engineering
subassembly using a polarization beam combiner for 100 Gbit/s eth- from Kyoto University, Kyoto, Japan, in 1988 and 1990, respectively, and the
ernet over 40 km transmission,” J. Lightw. Technol., vol. 33, no. 10, Ph.D. degree from the Tokyo Institute of Technology, Tokyo, Japan, in 2010. In
pp. 1985–1992, May 2015. 1990, he joined NTT Opto-electronics Laboratories, Kanagawa, Japan, where
[10] Y. Baek, Y. T. Han, C. W. Lee, D. H. Lee, O. K. Kwon, J. W. Shin, he was initially engaged in research on a wavelength conversion device based
S. H. Park, and Y. H. Leem, “Optical components for 100 G ethernet on a semiconductor laser. Since 1993, he has been engaged in research on
transceivers,” presented at the Opto-Electronics Communications Conf., high-speed monolithically integrated photoreceivers, ultrafast optical packet
Busan, Korea, Jul. 2012, Paper 4D1–2. processing based on optoelectronic circuits, and semiconductor lasers. He is
[11] T. Fujisawa, M. Arai, N. Fujiwara, W. Kobayashi, T. Tadokoro, K. Tsuzuki, currently with the NTT Device Innovation Center. He is a Member of Japan
Y. Akage, R. Iga, T. Yamanaka, and F. Kano, “25 Gbit/s 1.3 μm InGaAlAs- Society of Applied Physics and the Institute of Electronics, Information, and
based electroabsorption modulator integrated with DFB laser for metro- Communication Engineers of Japan.
area (40 km) 100 Gbit/s Ethernet system,” Electron. Lett., vol. 45, no. 17,
pp. 900–901, Aug. 2009.
[12] T. Ishikawa and J. E. Bowers, “Band lineup and in-plane effective mass of
InGaAsP or InGaAlAs on InP strained-layer quantum well,” J. Quantum
Electron., vol. 30, no. 2, pp. 562–570, 1994. Atsushi Kanda (M’95) received the B.E. degree in applied physics from Waseda
[13] C. R. Doerr, L. W. Stulz, and R. Pafchek, “Compact and low-loss integrated University, Tokyo, Japan, and the M.E. degree in information processing from
box-like passband multiplexer,” IEEE Photon. Technol. Lett., vol. 15, the Tokyo Institute of Technology, Tokyo, Japan, in 1988 and 1990, respectively.
no. 7, pp. 918–920, Jul. 2003. In 1990, he joined the NTT Radio Communication Systems Laboratories, where
[14] T. Yoshimatsu, M. Nada, M. Oguma, H. Yokoyama, T. Ohno, Y. Doi, he was engaged in design and evaluation of microwave and millimeter-wave
I. Ogawa, and E. Yoshida, “Compact and high-sensitivity 100-Gb/s (4 × integrated circuits for wireless communications. He is currently with the NTT
25 Gb/s) APD-ROSA with a LAN-WDM PLC demultiplexer,” presented Device Innovation Center, where he is engaged in the development of optical
at the Eur. Conf. Optical Communication, Amsterdam, The Netherlands, and electrical modules for optical networks.
Sep. 2012, Paper Th.3.B.5.
Takeshi Kurosaki received the B.S. and M.S. degrees in electronics engineering
from Hokkaido University, Sapporo, Japan, in 1987 and 1989, respectively.
Takaharu Ohyama received the B.E. degree from the Kyushu Institute of In 1989, he joined the Opto-electronics Laboratories, Nippon Telegraph and
Technology, Kitakyushu, Japan, in 1992, and the M.E. degree from Kyushu Telephone Corporation (NTT), Atsugi, Japan. Since then, he has been engaged in
University, Fukuoka, Japan, in 1994. Since joining NTT Opto-electronics (Pho- research on high-performance distributed-feedback lasers and low-cost optical
tonics) Laboratories, NTT Corporation, Japan, he has been engaged in research modules for optical communication systems. He is currently a Senior Research
on optical integration module. He is currently with the NTT Device Innovation Engineer with NTT Device Innovation Center. He is a Member of the Japan
Center, Kanagawa, Japan. He is a Member of the Institute of Electronics, Infor- Society of Applied Physics and the Institute of Electronics, Information and
mation and Communication Engineers of Japan. Communication Engineers of Japan.
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1046 JOURNAL OF LIGHTWAVE TECHNOLOGY, VOL. 34, NO. 3, FEBRUARY 1, 2016
Takuya Tanaka received the B.E., M.E., and Ph.D. degrees in applied physics Hiroaki Sanjoh received the B.E. and M.E. degrees in applied physics from
from the University of Tokyo, Tokyo, Japan, in 1993, 1995, and 2006, respec- Hokkaido University, Sapporo, Japan, in 1990 and 1992, respectively. Since join-
tively. In 1995, he joined the NTT Opto-electronics Laboratories, Ibaraki, Japan, ing NTT Opto-electronics (Photonics) Laboratories, NTT Corporation, Kana-
where he has been engaged in research on optical waveguide devices for com- gawa, Japan, he has been engaged in the developmental research on optical
munication. He is currently with NTT Device Technology Laboratories. He is a semiconductor devices. He is currently with the NTT Device Innovation Center,
Member of the Institute of Electronics, Information and Communication Engi- Kanagawa, Japan. He is a Member of the Institute of Electronics, Information
neers of Japan and the Japan Society of Applied Physics. and Communication Engineers of Japan.
Tetsuichiro Ohno (M’98) received the B. E. degree in 1989, and the M. E. degree Toshikazu Hashimoto received the B.E. and M.S. degrees in physics from
in 1991, both from Osaka University, Osaka, Japan, and the Ph.D. degree in 1999 Hokkaido University, Sapporo, Japan, in 1991 and 1993, respectively. In 1993,
from Shizuoka University, Shizuoka, Japan. In 1991, he joined NTT Opto- he joined NTT Opto-electronics (Photonics) Laboratories, Ibaraki, Japan, where
electronics Laboratories, and has been engaged in research on opto-electronics he was involved in research on guided-wave optical devices. In 2014, he joined
devices. He is currently a Senior Research Engineer with the NTT Device the NTT Device Technology Laboratories, Atsugi, Japan. He is a Member of the
Innovation Center, Kanagawa, Japan. He is a Member of the IEEE Photonics Institute of Electronics, Information and Communication Engineers of Japan,
Society. and the Physical Society of Japan.
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