姓名：贺喜 学号：22723746

Homework 2 (Part 1)

5.1 According to the equation：

λ λ λ λ
=R k=
1 0.6 ，while DOF =
± k2 ±0.5
=
( NA)
2
NA 0.6 0.36

The equations are plotted below. The wavelength of ArF, KrF, g-line and i-
line are 193nm, 248nm, 436nm and 365nm respectively, which are sketched in
the plot. The intersection points of those lines are the considered proper
exposure wavelength that could be used in lithography.
1.4

1.2

g-line
0.8
Resulotion (μm)

i-line
0.6

KrF

ArF
0.4

0.2

0 200 400 600 800 1000 1200

Exposure Wavelength (nm)

According to the solution, ArF source is adequate for 0.13 μm and 0.1 μm
technology generations.

5.3 The equivalent wavelength of 1 keV X-Ray is given by:

hc hc 4.14 ×10−15 × 3 ×1010
E
= hv
= ∴ λ== 1.24 ×107 cm =
= 1.24nm
λ E 103
As a result, the resolution could be expressed by equation:

R= λ g= 1.24 ×10−3 × 20= 0.15μm

6.12
a. In H2O at 1200°C:
 0.78 
B =3.86 ×102 exp  −  =0.829 µ m / h
2

 KT 
B 3.86 ×102  0.78 
 15.86 µ m / h
2
= exp  −=
A 0.052  KT 
If the initial oxide grown at 1200°C , it would taken longer to grow:
xi2 + Axi 0.32 + 0.052 × 0.3
=τ = = 0.127h
B 0.829
The time required to grow 0.8μm at 1200°C is
xi2 + Axi 0.82 + 0.052 × 0.8
=τ = = 0.822h
B 0.829
Thus, the time required to add 0.5μm to an existing 0.3μm film is 0.822-
0.127=0.695hr.

b. At 1200°C, in dry oxygen,

 1.23 
7.72 ×102 exp  −
B= 0.048µ m 2 / h
 =
 K (1200 + 273 )
B 7.72 ×102  1.23 
 =0.899 µ m / h
2
= exp  −
A 0.053  K (1200 + 273 )
The initial oxide would have taken 2.206 hours to grow in dry oxygen, it would
require 14.217 hours to grow 0.8μm, thus would requre an additional 12 hours
to add 0.5μm to an existing 0.3μm film.

6.23 At 900°C in H2O, the oxidation rate constants are given by:
 0.78 
3.86 ×102 exp  −
B= −5 =0.17 µ m 2 / h
 8.62 × 10 × 1173 
B 1.63 ×108  2.05 
= exp  − −5 =0.152 µ m 2 / h
A 1.68  8.62 ×10 ×1173 
The total use of time is:
1 + 0.17 / 0.152
=τ = 12.46h
0.17
So, the thickness is:
0.17  13.64 
=t  1 + = − 1  1.064 µ m
2 × 0.152  1.112 / (4 × 0.17) 