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Project: SAKAMOTO ORIENT CHEMICAL CORP.

EXPANSION AREA CLEAN ROOM


LOCATION:CAIP, Brgy Aplaya Bauan, Batangas

Clean Room Certification procedure and Report

SUMISITSU MITSUI CONSTRUCTION, CO.

2010 March

owner contractor
項目 クリーンルーム性能検査実施計画書 Reference
number
Item Clean Room Certification procedure

検証項目 1). HEPAフィルターの確認                

   The check of each HEPA filter leakage


certification 2). 清浄度の確認                      
Item    Measurement of cleaness of each room

3). 室間差圧・気流方向の確認                
   Measurement of room differential pressure and direction of air flow

実施期間
2010. 3. 3 ~ 2010. 4. 3
Enforcement period
項目 1). HEPAフィルタ-のリークテスト Reference
number
Item  leak check of HEPA filter

目的 ・HEPAフィルタ-の性能を確認するために、大気塵によるリ-クテストを行い、

Object その結果をデ-タシ-トとして記録する。 HEPAフィルターの仕様:0.5μm、99.99% 以上


Leakage test should be done by air dust to confirm performance of HEPA Filter.
The result is recorded as a data sheet. HEPA Filter Specification : 0.5 micrometers 99.99% over

評価基準 ・スキャニングテストにおいて 0.5µm以上の粒子が連続的にカウントされる局所的なリ-クがないこと。

Valuation  計測中粒子が計数された場合その位置で10秒以上連続測定を行い連続カウントがなければ付着塵と

Standard  判断し先に進む。すなわち連続カウントなき場合を合格とする。

There should be no local leak which a particle 0.5 micrometers or more counts continuously
in a scanning test.
If the particle is counted during measurement, scanning test should be done at same position
in over 10 seconds. Without continuous particle count, it will be judged as success.

添付資料 ・HEPAフィルタ-のリ-クテスト要領 (添付-1)


Appendix The leak test procedure of HEPA filter (Appendix -1)
Data ・HEPAフィルタ-番号図 (添付-2)
HEPA filter number drawing (Appendix -2)
・リ-ク測定結果報告書 (添付-3)
Leak measurement result report (Appendix -3)
HEPAフィルタースキャンテスト要領
Appendix-1 HEPA filter scan test procedure

1.測定器
Measuring instrument

光散乱式計数器(レーザーカウンター)
Laser based airborne particle counters

2.測定方法
Measuring method

2-1)フィルター枠とケーシング部の間でパッキン及びケーシングのリークを確認する
Leak from packing and casing is checked between a filter frame and a casing part.

2-2)フィルター濾材のピンホールリ-クの確認を行う又、濾材と枠の接合部も確認する
it checks pin hole leakage of filter media, and conection part of media and a frame.

2-3)スキャン速度は約 50mm/secとする
Scanning speed is about 50 mm/sec.

2-4)スキャン位置はフィルター下面約 25mmとする
scanning position is about 25mm below of filter undersurfaces.

2-5)送風機運転による大気塵による
It is based on the air dust by A/C operation.

3.測定回数
The number of times of measurement

1回とする
One time.

4.判定基準
Judgment standard

・スキャニングテストにおいて 0.5µm以上の粒子が連続的にカウントされる局所的なリ-クがないこと。

 計測中粒子が計数された場合その位置で10秒以上連続測定を行い連続カウントがなければ付着塵と
 判断し先に進む。すなわち連続カウントなき場合を合格とする。

There should be no local leak which a particle 0.5 micrometers or more counts continuously
in a scanning test.
If the particle is counted during measurement, scanning test should be done at same position
in over 10 seconds. Without continuous particle count, it will be judged as success.
RG Filling Room
DG Filling Room
1) Appendix - 3 Leak measurement result report

measured date : 4-Mar-10

Room name : 1) RG Filling Room owner attend : Ryan Amul / Mabel Calalo
2) DG Filling Room check person : Jerico Medel

mesurement person : Bobin Panganiban

HEPA mesurement of 判定 HEPA mesurement of 判定


NO. particle(0.5µm) Judgment NO. particle(0.5µm) Judgment

1 0 ok / fail

2 0 ok / fail
項目 2). 清浄度の確認 Reference
number
Item measurement of cleanliness

目的 ・清浄度を確認するために、クリ-ンル-ム内の塵埃をパ-ティクルカウンタ-により測定し、
Object その結果をデ-タシ-トとして記録する。
measuring cleanliness in the clean room by particle counter, and the result is recorded as a data sheet.

評価基準
Valuation ・0.5µm以上の浮遊粒子数が各々の室のクラス以下とする。

Standard The number of airborne particles of 0.5 micrometers or over must be less than specified class as below.

Inspection room : class 100,000

添付資料 ・清浄度測定要領 (添付-1)


Appendix measurement methodology of cleanliness (Appendix -1)

Data ・清浄度測定位置図 (添付-2)


measurement point of cleanliness (Appendix -2)
・清浄度測定結果報告書 (添付-3)
recording sheet of cleanliness (Appendix -3)
清浄度測定要領
2) Appendix -1 measurement methodology of cleanliness

1.測定方法
Measuring method

0.5µm以上の粒子の個数を立方フィ-ト当たりの個数(個 /cf)として記録する。
測定点は床上 1.0mの高さとする。
The number of a particle 0.5 micrometers or over is recorded as the number per cubic feet (a piece/cf).
measuring point is 1.0m height above floor level.

2.測定機器
Measurement equipments
光散乱式計数器(レーザーカウンター)
Laser based airborne particle counters

3.測定場所・測定回数
measurement points and measurement times

測定場所は、添付資料の清浄度測定位置図による。
1ポイントにつき1分間を 3回計測する。
A measurement points is showned in appendix drawing.
mesurement(1 minuit for one time) to be done 3 times at every point

4.判定
Judgment

 1つの測定点に対し 3回測定し、その平均値が設計基準値以内であること。
 この各測定点の平均値がすべての測定点で設計基準値をクリアしていること。
the average value of 3 times mesurement of each point should be less than design-criteria value.
the average value of all of this measuring point in the room should be less than design-criteria value.

6.その他
Condition
HEPAフィルタ-のリ-クテストが完了していること。
The leak test of a HEPA filter should be completed.
測定以外の室内作業が行われていないこと。
any work except measurement should not be done.
室内の陽圧が調整されていること
Room Pressure adjustment should be completed.
 室内の換気回数が調整されていること
Air flow adjustment should be completed
2)Appendix-3 measurement report of cleanliness

measured date : March 4, 2010

owner attend : Ryan Amul / Mabel Calalo


check person : Jerico Medel
design cleanliness : class 100,000 (0.5 micrometer) mesurement person : Bobin Panganiban

Room name : RG Inpection Room


Time: 4:30 PM Time: 1:20 PM

≥ 5µm particles / ft ≥ 5µm particles / ft


point judgement point judgement
1st time 2nd time 3rd time Average 1st time 2nd time 3rd time Average

1 4378 4191 4280 4283 ok / fail 1 517 511 549 526 ok / fail
2 4490 4471 4443 4468 ok / fail 2 479 483 463 475 ok / fail
3 4749 5192 4889 4943 ok / fail 3 311 421 420 384 ok / fail
4 4956 5016 4880 4951 ok / fail 4 461 489 497 482 ok / fail
5 4600 4683 4739 4674 ok / fail 5 466 514 462 481 ok / fail

average of total 4664 OK / FAIL average of total 470 OK / FAIL

mesuring condition record


a. condition of room At Rest At Operation
b. operation of OAC unit Stop 1 hr Operating
c. operation of Exhaust Fan Stop 1 hr Operating
e. operation of AC unit Stop 1 hr Operating
f. final cleaning Finish Finish
g. filter leak test Finish Finish
h. worker inside room 1 person 1 person
I. production machine not yet installed not yet installed
k. remark Failed Passed
RG Inspection Room

pt 1 pt 2

pt 5

pt 4 pt 3
2)Appendix-3 measurement report of cleanliness

measured date : March 3, 2010

owner attend : Ryan Amul / Mabel Calalo


check person : Jerico Medel
design cleanliness : class 100,000 (0.5 micrometer) mesurement person : Bobin Panganiban

Room name : DG Inpection Room


Time: 2:25 PM Time: 3:25 PM

≥ 5µm particles / ft ≥ 5µm particles / ft


point judgement point judgement
1st time 2nd time 3rd time Average 1st time 2nd time 3rd time Average

1 8346 7576 7506 7809 ok / fail 1 524 496 526 515 ok / fail
2 6761 6757 6140 6553 ok / fail 2 770 678 676 708 ok / fail
3 6897 6645 6715 6752 ok / fail 3 561 635 732 643 ok / fail
4 6432 6819 6324 6525 ok / fail 4 709 690 670 690 ok / fail
5 6173 5928 6094 6065 ok / fail 5 785 736 720 747 ok / fail

average of total 6741 OK / FAIL average of total 661 OK / FAIL

mesuring condition record


a. condition of room At Rest At Operation
b. operation of OAC unit Stop 1 hr Operating
c. operation of Exhaust Fan Stop 1 hr Operating
e. operation of AC unit Stop 1 hr Operating
f. final cleaning Finish Finish
g. filter leak test Finish Finish
h. worker inside room 1 person 1 person
I. production machine not yet installed not yet installed
k. remark Failed Passed
DG Inspection Room
2)Appendix-3 measurement report of cleanliness

measured date : March 3, 2010

owner attend : Ryan Amul / Mabel Calalo


check person : Jerico Medel
design cleanliness : class 100,000 (0.5 micrometer) mesurement person : Bobin Panganiban

Room name : RG Filling Room


Time: 3:00 PM Time: 4:45 PM

≥ 5µm particles / ft ≥ 5µm particles / ft


point judgement point judgement
1st time 2nd time 3rd time Average 1st time 2nd time 3rd time Average

1 5220 5110 5152 5161 ok / fail 1 5419 4960 4945 5108 ok / fail
2 5152 5288 5397 5279 ok / fail 2 4825 4949 4975 4916 ok / fail
3 5505 5608 5407 5507 ok / fail 3 4877 4897 4834 4869 ok / fail
4 5175 5012 5496 5228 ok / fail 4 4690 4708 4707 4702 ok / fail
5 5672 5471 5653 5599 ok / fail 5 4713 4792 4853 4786 ok / fail

average of total 5355 OK / FAIL average of total 4876 OK / FAIL

mesuring condition record


a. condition of room At Rest At Operation
b. operation of OAC unit Stop 1 hr Operating
c. operation of Exhaust Fan Stop 1 hr Operating
e. operation of AC unit Stop 1 hr Operating
f. final cleaning not yet not yet
g. filter leak test Finish Finish
h. worker inside room 1 person 1 person
I. production machine installed installed
k. remark Failed Failed
RG Filling Room

pt 1 pt 2

pt 5

pt 4 pt 3
2)Appendix-3 measurement report of cleanliness

measured date : March 4, 2010

owner attend : Ryan Amul / Mabel Calalo


check person : Jerico Medel
design cleanliness : class 100,000 (0.5 micrometer) mesurement person : Bobin Panganiban

Room name : DG Filling Room


Time: 10:45 AM

≥ 5µm particles / ft ≥ 5µm particles / ft


point judgement point judgement
1st time 2nd time 3rd time Average 1st time 2nd time 3rd time Average

1 9126 10389 9958 9824 ok / fail


2 6996 7828 7710 7511 ok / fail
3 8022 7901 8031 7985 ok / fail
4 10453 11349 11742 11181 ok / fail
5 9477 9451 9797 9575 ok / fail

average of total 9215 OK / FAIL

mesuring condition record


a. condition of room At Rest
b. operation of OAC unit Stop
c. operation of Exhaust Fan Stop
e. operation of AC unit Stop
f. final cleaning not yet
g. filter leak test Finish
h. worker inside room 1 person
I. production machine installed
k. remark Failed
DG Filling Room
項目 3) 室間差圧・気流方向の確認 Reference
number
Item measurement of room differential pressure and the direction of an air current

目的 ・熱源及び送風機の運転を行い、差圧・気流方向が安定している事を確認するために、
Object クリ-ンル-ム内のマノメ-タ及び差圧ダンパ-により測定し、その結果を
デ-タシ-トとして記録する。
Operation of a heat source and a fan is performed, in order to check that differential pressure and
the direction of an air current are stable, it measures with manometer and the differential pressure
damper in a clean room, and the result is recorded as a data sheet.

評価基準 ・差圧はマノメ-タの目視により、目標室圧に調整されていること。
Valuation By reading of manometer, differential pressure should be adjusted at target.

Standard ・気流方向は差圧ダンパ-の開度方向が正常であること。
The direction of an air current has the normal degree direction of valve travel of a differential
pressure damper.

pressure target
Inspection room : 10 pa ~ 15 pa

添付資料 ・室間差圧確認位置図 (添付-1)


Appendix Room differential pressure check position drawing (Appendix -1)

Data ・室間差圧測定結果報告書 (添付-2)


Room differential pressure measurement result report (Appendix -2)
5) Appendix - 2 Room differential pressure measurement result report

measured date : March 04, 2010

owner attend : Ryan Amul / Mabel Calalo


check person : Jerico Medel
mesurement person : Bobin Panganiban

Differential pressure Measured value


Differential pressure detection part Judgment remark
design ( pa ) Pa

1 RG inspection room VS other room 10 ~ 15 2 ok / fail re-adjust after

2 DG inspection room VS other room 10 ~ 15 2 ok / fail re-adjust after

10

11

12

13

14

15

16

17

18

19

mesuring condition record


a. condition of room As Built / At Rest / At operation

b. operation of OAC unit operating / stop

c. operation of Exhaust Fan operating / stop

d. adjustment of room pressure finish / not yet

e. operation of AC unit operating / stop

f. final cleaning finish / not yet

g. filter leak test finish / not yet

h. worker inside room mesuring staff ( 2 person) / other worker ( 3 person)

I. production mashine not yet / installed / test operation / production operation

j. wall opening for production mashine none / closed / open

k. remark Failed (Under observation)

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