EE 424 Integrated Circuits Fabrication

Course Specifications

Institution Taibah University Date June 2022

College/Department Engineering/ Electrical Engineering

A. Course Identification and General Information

1. Course title and code: EE 424 Integrated Circuits Fabrication

2. Credit hours 3 hours
3. Program(s) in which the course is offered.
(If general elective available in many programs indicate this rather than list programs)
Electrical Engineering
4. Name of faculty member responsible for the course Dr. Khalil Alluhaybi

5. Level/year at which this course is offered 9th level or 10th level / 5th year
6. Pre-requisites for this course (if any) EE 304

7. Co-requisites for this course (if any)

8. Location if not on main campus

9. Mode of Instruction (mark all that apply)

a. traditional classroom √ What percentage? 100

b. blended (traditional and online) What percentage?

c. e-learning What percentage?

d. correspondence What percentage?

f. other What percentage?

Comments:
B Objectives

1. What is the main purpose for this course?

At the completion of this course, each student should be able to do the following:
1. Describe common safety concerns associated with chemicals used in microfabrication
[ABET 1]
2. Demonstrate proper operation of fabrication facilities including: [ABET 1]
a. Wafer cleaning.
b. Standard lithography process.
c. Thermal oxidation.
d. Physical Vapor Deposition (PVD): Sputtering, and thermal evaporation.
e. Wet chemical etching (of SiO2, Si3N4, and/or TiN).
f. Reactive Ion Etching (RIE).
g. Thermal oxidization of wafers.
3. Fabricate silicon diodes, capacitors, resistors, and MOSFETs. [ABET 2]
4. Measure the electrical transport properties of the devices made. [ABET 2]
5. Cultivate the practices of safety and professional ethics. [ABET 4]
6. Build up the written and oral communication skills by engaging the students in group-
based small design projects. [ABET 3]

2. Briefly describe any plans for developing and improving the course that are being
implemented. (e.g. increased use of IT or web based reference material, changes in
content as a result of new research in the field)

The use of email group has been implemented for communicating with students and uSOading
course materials.

C. Course Description (Note: General description in the form used in Bulletin or handbook)

Course Description:

This course gives students a hands-on introduction to Integrated Circuit Fabrication.

The lectures introduce the theoretical background and application of each major IC
fabrication processes: eg. oxidation, doping, depositions, photolithography and etching.
Process simulation tools will be used throughout the course help understand each
process.

1. Topics to be Covered
List of Topics No. of Contac
Weeks t hours
 Introduction – History and Market, Gown Sizing 1 3
 Chemicals, Safety
 Semiconductor Physics 1 3
 Lithographic Process – wafer cleaning 3 9
 Lithographic Process – oxidation
 Lithographic Process – patterning, etching
 Lithographic Process – etching
 Diffusion & Ion Implantation 1 3
 Physical Vapor Deposition 1 3
 Chemical Vapor Deposition 2 6
 Interconnects and Contacts 1 3
 Device Characterization 2 6
 Packaging & Yield 1 3
 MOS Process Integration 2 6

2. Course components (total contact hours and credits per semester): 45 hours per
semester and 3 credit hours
Lecture Tutorial Laboratory Practical Other: Total
or Studio
Contact 45 45
Hours
Credit 3 3

3. Additional private study/learning hours expected for students per week.

6

4. Course Learning Outcomes in NQF Domains of Learning and Alignment with

Assessment Methods and Teaching Strategy
On the table below are the five NQF Learning Domains, numbered in the left column.
First, insert the suitable and measurable course learning outcomes required in the
appropriate learning domains (see suggestions below the table). Second, insert
supporting teaching strategies that fit and align with the assessment methods and
intended learning outcomes. Third, insert appropriate assessment methods that
accurately measure and evaluate the learning outcome. Each course learning outcomes,
assessment method, and teaching strategy ought to reasonably fit and flow together as
an integrated learning and teaching process. (Courses are not required to include
learning outcomes from each domain.)

Code NQF Learning Domains Course Teaching Course Assessment

 # And Course Learning Outcomes
1.0 Knowledge
1.1 To introduce basic technologies and
knowledge of IC fabrication.
1.2 The students will learn how to
fabricate semiconductor devices and
integrated circuits starting from bare
silicon wafers.
Strategies Methods
Lectures and interactive Quizzes and exams
learning process through
questions and answers during
class hours
Lectures and interactive Quizzes and exams
learning process through
questions and during class
hours

2.0 Cognitive Skills

2.1 To test devices/circuits and analyze By assigning computer Grades in Projects
their performance using knowledge projects in which the students
of semiconductor physics and will evaluate performance of
electronics. soft-switching methods
3.0 Interpersonal Skills & Responsibility
3.1 Express the practices of safety Through emphasizing about Through observing
awareness and professional ethics. safety awareness and students' ethical
professional ethics in lectures behaviors and safety
practices in projects
and exams
4.0 Communication, Information Technology, Numerical
4.1 Develop written reports and oral By assigning mini-projects in Through individual
communication skills group and presenting it in the grading of projects
final project and presentation of
the projects
5.0 Psychomotor
Not Applicable

By the end of the course, the student will be able to:

1. To understand the IC processing steps in detail, including oxidation, dopant diffusion, ion
implantation, lithography, thin film deposition, and etching.
2. Learn how these steps combine to build modern IC devices.
3. Learn how software packages are used to simulate and model the physics and chemistry of
IC fabrication.
4. Work in team settings.
5. Communicate convincingly generated design ideas, procedures and conclusions

5. Map course LOs with the Program LOs. (Place course LO #s in the left column and
Program LO #s across the top.)
Program Learning Outcomes/ Student Outcomes
Course
Outcome
s (COs) SO1 SO2 SO3 SO4 SO5 SO6 SO7 SO8 SO9
1.1 1
1.2 0.5 0.5
2.1 0.4 0.2 0.4
 3.1 0.5 0.5
4.1 0.5 0.5

6.Assessment task (e.g. essay, test, group project, examination, Proportion of Total
speech, oral presentation, etc.) Assessment
1
Midterm Exam 30%
2
Quizzes 15%

4 Homework 15%
4
Final Exam or Final Projects 40%

D. Student Academic Counseling and Support

1. Arrangements for availability of faculty and teaching staff for individual student
consultations and academic advice. (include amount of time teaching staff are expected
to be available each week)

Communications made thru emails, mailing groups, and direct appointments.

Each faculty is required to be available in his office to devote at least 3 hr/week for
students’ consultation and academic advice.

E Learning Resources

1. List Required Textbooks

[1] Introduction to Microelectronic Fabrication, 2nd Ed. by Richard C. Jaeger, Volume V in the
Modular Series on Solid State Devices, Prentice Hall, New Jersey, (2002).

2. List Essential References Materials (Journals, Reports, etc.)

The IEEE Transactions on Semiconductor Manufacturing

3. List Recommended Textbooks and Reference Material (Journals, Reports, etc)

Fundamentals of Microfabrication: The Science of Miniaturization, 3 rd Ed. by M. J.
Madou, CRC Press, Boca Raton, FL, (2012).

4. List Electronic Materials, Web Sites, Facebook, Twitter, etc.

PDF files send thru email group

5. Other learning material such as computer-based programs/CD, professional standards

or regulations and software.

Gmail email group

F. Facilities Required

Indicate requirements for the course including size of classrooms and laboratories (i.e.
number of seats in classrooms and laboratories, extent of computer access etc.)
1. Accommodation (Classrooms, laboratories, demonstration rooms/labs, etc.)
- Classrooms need to be large enough to accommodate maximum of 40 students, with
relaxed seats.
- Classrooms need to be equipped with:
a. large blackboard as well as a white wide rolling down screen and mounted head
projector for slide show presentations
b. a fixed computer linked directly to the head projector
2. Computing resources (AV, data show, Smart Board, software, etc.)

- Computer with data show facilities

- A computer lab that can accommodate maximum of 40 students need to be equipped
with updated computers and structural software.
- Computer labs need to be operated at extended hours so that students can have easy
access within their suitable free time.

3. Other resources (specify, e.g. if specific laboratory equipment is required, list

requirements or attach list)
Web-guided course material download and emails

G Course Evaluation and Improvement Processes

1 Strategies for Obtaining Student Feedback on Effectiveness of Teaching

Student course evaluation at the conclusion of the course.

Web-based student feedback by University

2 Other Strategies for Evaluation of Teaching by the Instructor or by the Department

- Faculty assessment of the course and effectiveness of teaching delivery.

- Periodic self- assessment of the program.

-External observer on class activities could be added

3 Processes for Improvement of Teaching

- Undergraduate Committee will review deficiencies based on the student evaluation,

faculty input, course file, and program assessment.
- Feedback from emSOyers and alumni surveys and graduating students’ input are used
to identify any deficiencies in students’ ability in applying knowledge of engineering
 mechanics.
- Organize workshop on effective teaching methods to enable instructors to improve
their teaching skill.
- Teaching method will focus on students’ learning and on course learning outcomes.
-Tab-based teaching with online resources should be available

4. Processes for Verifying Standards of Student Achievement (e.g. check marking by an

independent member teaching staff of a sample of student work, periodic exchange and
remarking of tests or a sample of assignments with staff at another institution)

Student and Faculty performance is evaluated on continual basis by the Quality

Committee through student and faculty (peer to peer) surveys and feed backs

5 Describe the planning arrangements for periodically reviewing course effectiveness

and planning for improvement.

Self- assessment at every two years and the external assessment by the invited faculty
member at every four years will be carried out. The feedback received from these
assessments will be used to plan for further improvement in the course syllabus,
teaching method, and delivery of course materials.

Name of Instructor: ________________________________________

Signature: ______________ Date Report Completed:

Name of Field Experience Teaching Staff _____________________________________

Program Coordinator:_____________________________________________________

Signature: __________________________ Date Received: ___________________