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UNIT IV
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Electrical Materials and Technology. UNIT IV
In the fourth covalent bond, only one valence electron is available from germanium atom and there is
deficiency of one electron which is called as a hole. Hence for each boron atom added, one hole is created.
Since the holes can accept electrons from neighborhood, the impurity is called acceptor.
The hole may be filled by the electron from a neighboring atom, creating a hole in that position from
where the electron moves. This process continues and the hole moves about in a random manner due to thermal
effects. Since the hole is associated with a positive charge moving from one position to another, this is called as
P-type semiconductor.
In P-type semiconductors, holes are the majority charge carriers and free electrons are the minority
charge carriers.
Conduction in semiconductors:
The two reasons for conduction in semiconductors are
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Electrical Materials and Technology. UNIT IV
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Electrical Materials and Technology. UNIT IV
Einstein’s relation:
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Electrical Materials and Technology. UNIT IV
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Electrical Materials and Technology. UNIT IV
Hall Effect:
When a semiconducting material carrying current I is subjected to a magnetic field in a direction
perpendicular to the direction of current, an electric field E is developed across the material in a direction
perpendicular to both the direction of the magnetic field and the current direction. This phenomenon is called
Hall Effect.
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Electrical Materials and Technology. UNIT IV
In the Figure Current I is in the positive X-direction and magnetic field B is in the positive Z-direction.
So a force will be exerted in the negative Y-direction. If the semiconductor is n-type, so that current is carried
by electrons, these electrons will be forced downward toward side 1. So side 1 becomes negatively charged with
respect to side 2. Hence a potential VH called the Hall Voltage appears between the surface 1 and 2.
In the equilibrium condition, the force due to electric field intensity 'E', because of Hall effect should be
just balanced by the magnetic force.
eE=Bev or E=Bv ----------- (1)
Where v is the drift velocity of carriers and B is the magnetic field intensity.
If d is the thickness of the semiconductor then E=VH/d ----------- (2)
where VH is the Hall voltage.
If W is width of the semiconductor then wd is the cross sectional area, then the current density
J = I/wd ----------- (3)
VH= Ed ----------- (4)
Substitute (1) in (4) VH=Bvd ----------- (5)
But J= nev then v= J/ρ Where ρ is the charge density. ----------- (6)
Substitute (6) in (5) VH = BJd/ ρ But J= I/wd then
If the semiconductor is n-type, then the majority carrier electrons under the influence of electric field will move
towards side 1 and side 2 becomes positive.
On the other hand if side 1 becomes positive, then the semiconductor is P type
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Electrical Materials and Technology. UNIT IV
lowered into the melt. Then the temperature is adjusted and the seed is rotated as it is slowly pulled out of the
molten Silicon. The surface tension between the seed and the molten Silicon causes a small amount to rise with
the seed, as it is pulled and cooled into a perfect monocystalline ingot with the same crystal orientation as
the seed. The furnace that is used for this process is shown in figure. These furnaces also must be very stable
and vibration free since the process takes hours and the slightest jarring of the furnace can break the Ingot from
the seed.
Slicing:
In the next step the Ingots are sliced into wafers using a diamond saw or other type of saw. Deionized
water is used to cool the blade on this saw.
Lapping:
In this step the Ingots have now become rough cut Silicon wafers with saw marks and other defects on
both sides of the wafer. Also at this point the wafer is much thicker than it will be when it is finished. Lapping
the wafers accomplishes several things, it removes saw marks and surface defects from the front and backside
of the wafers and it thins the wafer and relieves a lot of the stress accumulated in the wafer from the sawing
process. Both before and after the lapping process many in-process
checks will be done on the Silicon wafers and more fall-out will occur In
figure you can see a typical lapping machine.
After lapping the wafers go through several cleaning /etching
steps using sodium hydroxide or acetic and nitric acids to remove
microscopic cracks and surface damage caused by the lapping process,
this is followed by followed by deionized water rinses.
Edge grinding or rounding:
It is an important part of the wafer manufacturing process, it is normally done before or after lapping,
this rounding of the edge of the wafer is very important. If it is not done the wafers will be more susceptible to
breakage in the remaining steps of the wafer manufacturing process and the device manufacturing processes to
come.
Polishing:
Polishing is the next step in the wafer manufacturing process. Most Prime wafers go through 2-3
polishing steps using progressively fine slurry (slurry is the polishing compound). The polishing is normally
done on the front side of the wafer, but sometimes it is done on both sides. Polishing is done on huge precision
machines that are capable of extraordinary tolerances. The wafers may also receive a backside coating
of Polysilicon, all these treatments are done to the backsides of the wafer for the purpose
of Gettering defects (later in the device manufacturing process these backside treatments will draw defects in
the Silicon towards the backside of the wafer and away from the front side where the devices are being built,
this is called Gettering). After polishing the wafers are rinsed in water and scrubbed to remove any residual
slurry compounds from the wafer.
Final Cleaning:
The next step in the process after polishing is a rather intense regimen of cleans and scrubs to remove
trace metals, residues and particles from the surface(s) of the finished Silicon wafers. Normally this step
consists of two steps. The first part of this clean is done with Ammonium Hydroxide followed by a dilute
Hydrofluoric acid clean followed by a water Rinse. Next step clean consists of Hydrochloric acid and Hydrogen
peroxide followed by a water rinse. After all this cleaning and rinsing the finished wafers will now go through a
front and backside scrub to remove even the smallest particles. Thus the Silicon Waffers are prepared.
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