FCC Connector Admissible temperatures

Safety Installation Technical Data Storage - 40 °C … +65 °C

Measurement principle Cold cathode ionization mea- Operation
Symbols Used Vacuum Connection surement circuit (according to of all types + 5 °C … +55 °C
the inverted magnetron prin- of long types 250 °C in bakeout area, see
ciple) dimension drawing
Caution
Skilled personnel Measurement range (air, N2) 5×10-11 … 1×10-2 hPa Bakeout
short types 250 °C 2) (without electronics
Vacuum component Accuracy
unit)
All work described in this document may only be carried 1×10-9 … 1×10-3 hPa ≈ ±30 %
Dirt and damages impair the function of the vac- long types 250 °C 2) in bakeout area, see
out by persons who have suitable technical training and uum component. beyond this range up to factor 2
dimension drawing
the necessary experience or who have been instructed by When handling vacuum components, take ap- Repeatability
Relative humidity max. 80% up to +31°C
the end-user of the product. propriate measures to ensure cleanliness and 1×10-9 … 1×10-3 hPa ≈ ±5 % decreasing to 50 % at +40°C
prevent damages. Electrical connection
Application for indoor use only
INS TR UC TION S HE E T Pin 1 Supply Output signal altitude up to 2000 m
DANGER
Pin 2 Supply common (measuring signal) ≈ 0 V … ≈ +10.5 V
Pin 3 Signal output Type of protection IP 40
Caution Measurement range 1.96 V … 8.6 V
(measuring signal) 2)
Any magnetic shielding (accessory) must be removed.
Information on preventing any kind of physical injury. Pin 4 Identification Voltage vs. pressure logarithmic, 0.8 V / decade
Dirt sensitive area
Pin 5 Signal common Error signal <0.5 V (no supply)
Touching the product or parts thereof with bare case connector case 8-pin
Translation of the original instructions
hands increases the desorption rate. Dimensions [mm]
Pin 6, 7, 8: n.c. FCC68 Output impedance 2×10 Ω
WARNING Hirschmann connector
Always wear clean, lint-free gloves and use connector
IKR 270 clean tools when working in this area. Minimum load 10 kΩ, short-circuit proof
Information on preventing extensive equipment and envi-
BG 5115 BDE / A (2018-10)

Compact Cold Cathode Gauge, All-metal Response time pressure dependent

ronmental damage. p > 10-6 hPa <10 ms
DANGER
p = 10-8 hPa ≈1 s

Caution The gauge must be electrically connected to the Gauge identification 7.15 kΩ resistance refer-
grounded vacuum chamber. This connection enced to supply common
Information on correct handling or use. Disregard can lead must conform to the requirements of a protective Operation
to malfunctions or minor equipment damage. connection according to EN 61010: Supply
• CF flanges fulfill this requirement. When voltage is being supplied to the gauge, the measuring
Validity signal is available between pins 2 and 3 (Hirschmann con- DANGER
This document applies to products with part numbers: Note nector), or between pins 3 and 5. (→ Technical data for the
relationship between the measuring signal and the pressure). The gauge may only be connected to supply or
Hirschmann connector WARNING
measurement units that conform to the require-
PT R21 251 (DN 40 CF-F flange short type) The green lamp on the gauge indi- Supply voltage ments of a grounded protective extra-low voltage
PT R21 261 (DN 40 CF-F flange long type) Electric arcing cates the operating state: present.
General Safety Information (PELV). The connection to the gauge has to be
FCC connector Helium may cause electric arcing with detri- No supply fused 1).
• Adhere to the applicable regulations and take the neces- mental effects on the electronics of the product. voltage.
PT T14 358 002 (DN 40 CF-F flange short type)
sary precautions for the process media used. Before performing any tightness tests put the
PT T14 858 002 (DN 40 CF-F flange long type) FCC connector
• Consider possible reactions between the materials product out of operation and remove the electro- Voltage at the gauge 14.5 ... 30.0 V=
The part number can be taken from the product nameplate. (→ Technical Data) and the process media. nics unit. (ripple max. 1 Vpp)
Caution
We reserve the right to make engineering changes without • Adhere to the applicable regulations and take the neces- Power consumption ≤2 W
prior notice. sary precautions for all work you are going to do and con- The gauge may be mounted in any orientation. A horizontal to Turn on the gauge only at pressures <10-2 hPa to Fuse 1) ≤1 AT
sider the safety instructions in this document. upright orientation is to be preferred, to keep condensates prevent excessive contamination.
and particles from getting in.
• Before beginning to work, find out whether any vacuum If you are using a Pfeiffer Vacuum measurement Electrical connection
About this document components are contaminated. Adhere to the relevant When making CF flange connections, it can be advantageous unit with at least two gauge connections, the cold PT R21 xxx Hirschmann compact
regulations and take the necessary precautions when han- to temporarily remove the magnet (→  [1]). cathode gauge can be controlled, for example, connector type GO 6,
This document describes the installation and operation of dling contaminated parts. by a Pirani gauge. 6-pin, male
the products listed above. The space necessary can be gathered from the diagram
(→ "Technical Data"). PT T14 xxx xxx FCC68 connector, 8-pin
For further information please refer to the Operating In- Cable
DANGER Gas Type Dependence
structions which is separately available  [1]. PT R21 xxx 5-pin plus screen
Magnetic fields The measurement value is gas dependent. The display ap-
Power Connection plies to dry air, N2, O2, and CO (→ technical data). For other
PT T14 xxx xxx 5-pin plus screen
Strong magnetic fields can disturb electronic Cable length max.
devices like heart pacemakers or impair their Make sure that the gauge is correctly flanged (see above). gases, it has to be converted (→ technical data). This can be PT R21 xxx 100 m (0.25 mm² conductor)
Intended use function. If no sensor cable is available, make one according to the done by entering the corresponding calibration factor on the
150 m (0.34 mm² conductor)
diagram. Pfeiffer Vacuum measurement unit. (→ respective ).
The above Compact Cold Cathode Gauges have been de- Maintain a safety distance of ≥10 cm between 500 m (1.0 mm² conductor)
signed for vacuum measurement of gases in a pressure the magnet and the heart pacemaker or prevent PT T14 xxx xxx 50 m (0.14 mm² conductor)
range of 5×10-11 ... 1×10-2 hPa. the influence of strong magnetic fields by anti- Hirschmann Connector Ignition delay
magnetic shielding.
The gauge with Hirschmann connector can be operated in When the cold cathode gauge is switched on, an ignition Operating voltage
connection with a Pfeiffer Vacuum controller for compact delay occurs. The delay time increases at low pressures and (in the measuring chamber) ≤3.3 kV Weight 950 g (DN 40 CF-F flange short type)
gauges or with another appropriate controller. for clean, degassed gauges it is typically: Operating current 1100 g (DN 40 CF-F flange long type)
Communicate the safety instructions to all other users.
10-7 hPa ≈ 0.1 minute (in the measuring chamber) ≤100 µA
The gauge with FCC connector can be operated in connec-
10-8 hPa ≈ 1 minute
tion with an appropriate controller.
10-9 hPa ≈ 5 minutes Grounding concept → "Electrical Connection"
Responsibility and Warranty 10-10 hPa ≈ 20 minutes
Vacuum flange - connected via 10 kΩ
Pfeiffer Vacuum assumes no liability and the warranty be- 5×10-11 hPa ≈ 30 minutes measuring common (max. voltage differential
comes null and void if the end-user or third parties with resp. to safety ±50 V
Functional Principle The ignition is a static process. Already a small amount of
• disregard the information in this document depositions on the inner surfaces can have a strong influence with resp. to accuracy ±10 V)
The Compact Cold Cathode Gauge IKR 270 functions with a on it.
cold cathode ionization measurement circuit (according to the • use the product in a non-conforming manner Supply common - signal conducted separately; for
common cable lengths (≥10 m) differ-
inverted magnetron principle). • make any kind of interventions (modifications, alterations, Electrical connection
Pin 1 Identification ential measuring is recom-
Over the whole display range, the measuring signal is output etc.) on the product
Pin 2 Signal output mended
as logarithm of the pressure. • use the product with accessories not listed in the corre- Adjusting the Gauge
(measuring signal)
sponding product documentation.
Pin 3 Signal common Materials on the vacuum
The gauge is factory calibrated and ready for use. It cannot
The end-user assumes the responsibility in conjunction with Pin 4 Supply side
Hirschmann 6-pin be readjusted.
the process media used. Pin 5 Supply common Feedthrough isolation ceramic (Al2O3)
Gauge failures due to contamination or wear and tear, as well Pin 6 Screening soldering side Internal seal Ag
as expendable parts (e.g. seals), are not covered by the war- Flange stainless steel
ranty. (1.4306 / AISI 304L)
Anode Mo
Ignition aid stainless steel (1.4310 / AISI
301)
Internal volume ≈ 20 cm³
Pressure max. ≤1000 kPa (absolute), limited
to inert gases and tempera-
tures <100 °C

1) bg5115ben/ a
Pfeiffer Vacuum controllers for compact gauges fulfill this re-
Original: German BG 5115 BDE / A (2018-10)
quirement.
Output Signal vs. Pressure Maintenance, Troubleshooting Returning the Product Disposal EU Declaration of Conformity
Pressure p
1E+00 →  [1] We, Pfeiffer Vacuum, hereby declare that the
1E–01 Pa
If the gauge is operated under high pressures or under dirty WARNING WARNING equipment mentioned below comply with the
1E–02 hPa conditions, it must be regularly cleaned. provisions of the following Directives:
Forwarding contaminated products Substances detrimental to the environment
1E–03 Torr Gauge failures due to contamination or wear and tear, as well • 2014/30/EU, OJ L 96/79, 29.3.2014
1E–04 as expendable parts (e.g. seals), are not covered by the war- Products returned to Pfeiffer Vacuum for service Products, operating materials etc. may require (EMC Directive; Directive relating to electro-
sensor error

underrange

overrange
1E–05 ranty. or repair should preferably be free of harmful disposal in accordance with special regulations. magnetic compatibility)
substances (e.g. radioactive, toxic, caustic or Dispose of environmentally detrimental sub- • 2011/65/EU, OJ L 174/88, 1.7.2011
1E–06
microbiological). stances according to local regulations. (RoHS Directive; Directive on the restriction of
1E–07
Adhere to the forwarding regulations of all in- the use of certain hazardous substances in
1E–08
volved countries and forwarding companies and electrical and electronic equipment)
1E–09
enclose a completed declaration of contamina-
1E–10 tion *). DANGER
1E–11
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.5 10.0 10.5
Product
*)
Form under www.pfeiffer-vacuum.com Contaminated parts
Output signal U [V]
Products that are not clearly declared as "free of harmful Contaminated parts can be detrimental to your IKR 270
substances" are decontaminated at the expense of the cus- health.
⇔
1.25×U-d
U = c + 0.8×log10 p p = 10
tomer. Before you begin to work, find out whether any
parts are contaminated. Adhere to the relevant Standards
When returning a product for service, put it in a tight and
impact resistant package. regulations and take the necessary precautions Harmonized and international/national standards and specifi-
U p c d when handling contaminated parts. cations:
[V] [hPa] 10.2 12.75
• EN 61000-6-2:2005 (EMC: generic immunity standard)
[V] [µbar] 7.8 9.75
Separating the parts • EN 61000-6-3:2007 + A1:2011 (EMC: generic emission
[V] [Torr] 10.3 12.875
After disassembly of the product separate the parts into the standard)
[V] [mTorr] 7.9 9.875 following categories for disposal: • EN 61010-1:2010 (Safety requirements for electrical equip-
ment for measurement, control and laboratory use)
U p c d • Components with exposure to process gases
• EN 61326-1:2013; Group 1, Class B (EMC requirements
[V] [micron] 7.9 9.875 Components which have been exposed to radioactive, tox-
for electrical equipment for measurement, control and labora-
ic, caustic, or microbiological process gases must be dis-
[V] [Pa] 8.6 10.75 tory use)
posed of in accordance with the relevant national regula-
[V] [kPa] 11.0 13.75 tions.
Components which have been exposed to other process Manufacturer / Signatures
where: gases must be separated according to their materials and
U output sig- valid in -11
5×10 hPa < p recycled. Pfeiffer Vacuum GmbH, Berliner Straße 43, D-35614 Aßlar
nal the <1×10-2 hPa • Components without exposure to process gases Aßlar, 25. October 2018
p pressure range
3.75×10-11 Torr < p Such components must be separated according to their
c, d constants
<7.5×10-3 Torr materials and recycled.
(dependent
on pressure 5×10-9 Pa < p < 1 Pa
unit) Dr. Ulrich von Hülsen
General Manager

Gas Type Dependence Conversion Table

Indicated pressure
(Gauge calibrated for air) mbar bar Pa hPa kPa Torr
p (hPa)
mm HG
Luft / Air -3
4
O2 mbar 1 1×10 100 1 0.1 0.75
CO
2 Xe Kr Ar N2 H2 bar 1×103 1 1×105 1×103 100 750
-5
0.01 1×10 7.5×10-3
-3
10-3
8 Pa 0.01 1×10 1
6
4 hPa 1 1×10-3 100 1 0.1 0.75
2 kPa 10 0.01 1×103 10 1 7.5
10-4 Torr -3
8 1.332 1.332×10 133.32 1.3332 0.1332 1
6 mm HG
4
1 Pa = 1 N/m2
2

10-5
8
6
4

10-6
8
6
4 Further Information
2
 [1] www.pfeiffer-vacuum.com
10-7
10-7 2 4 6 10-6 2 4 6 10-5 2 4 6 10-4 2 4 6 10-3 2 4 6 10-2 Operating Instructions IKR 270
peff (hPa) BG 5008 BDE (German)
BG 5008 BEN (English)
BG 5008 BFR (English)
Indication range below 10-5 hPa
In the range below 10-5 hPa the pressure indication is linear.
For gases other than air the pressure can be determined by
means of a simple conversion formula:

peff = K × indicated pressure

where: gas type K

air (N2, O2, CO) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H2 2.4
Ne 4.1
He 5.9

Berliner Straße 43
D–35614 Asslar
Deutschland
Tel +49 (0) 6441 802-0
Fax +49 (0) 6441 802-1202
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com