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BSIM-BULK Accurate Compact Model For Analog and RF Circuit Design
BSIM-BULK Accurate Compact Model For Analog and RF Circuit Design
3
3
/dx
70 1.5
enhancements of the industry standard BSIM-BULK (formerly Solid : 3rd Deriv of IDS Black: WI VGS=1.2 V cg
csd
60 2
Dashed: 4th Deriv of IDS Blue : SI 1.0
/dVx3(x 10-3)
BSIM6) model. BSIM-BULK is the latest body referenced com- 50
VBS=0 V cb
/dx , d
1
pact model for bulk MOSFETs having a unified core, which 0.5
/dVx4
csd
(x 10 )
40
3
is developed by the BSIM group for accurate design of analog 30 0.0 0
cb
DS
and RF circuits. The model satisfies the symmetry test for DC
DS
20
/dx , d
d
-0.5 -1
and AC, correctly predicts harmonic slope, and exhibits accurate
3
d
10
cg
improve the model accuracy for transconductance (gm ) and -10 -1.5
d
-3
output conductance (gds ), an analytical model for bulk charge -0.4 -0.2 0.0 0.2 0.4 -0.4 -0.2 0.0 0.2 0.4
VX(V) VX(V)
effect, in both current and capacitance, is implemented. Several
other advanced models are added to capture real device physics. (a) (b)
These include: parasitic current at the shallow trench isolation Fig. 1: GST: (a) DC GST for VG = 0.5V (WI) and VG =
edges; leakage current components in zero threshold voltage
1.2V (SI) IDS versus VX where VX = (VD - VS )/2, where
native devices; new model for NQS to capture the NQS effects
up to the millimeter wave regime; self heating effect; and heavily VD = −VS . (b) AC symmetry test. It indicates differential
halo implanted MOSFET’s anomalous gm , flicker noise and IDS capacitances: δcg , δcb and δcsd versus VX [7], [8].
mismatch. All these enhancements have been implemented to
high standards of computational efficiency and robustness.
While the similarity with BSIM4 preserves the excellent
I. I NTRODUCTION user experience; BSIM-BULK has many advanced models
which are necessary for state-of-the art devices. We have
A compact model is an indispensable link between the discussed various enhancements, which are implemented in the
circuit designers and process development. Robust device DC I-V model of BSIM-BULK, which include: a) Anomalous
modeling and simulation capabilities are required to reap behavior of gm , a parameter critical to analog circuit design,
the optimum performance of any circuit design. In order in the presence of strong halo implants [9]. b) Modeling
to extract the device characteristics accurately, along with a of punch-through and sub-surface leakage phenomena expe-
high computational efficiency, and to restrict the requirement rienced by the zero threshold voltage (VT H ) native devices,
of the number of fitting parameters in the compact models, which are used for low power circuit design [10]–[12]. c)
the physics based real-device effects should be incorporated Modeling of parasitics current due to edge effect in the shallow
inside the model. Although BSIM4 provides a very good trench isolation (STI). d) Analytical model for the bulk charge
fitting flexibility to the analog and RF engineers while fitting effect. Furthermore, the enhancements in the RF and noise
the measured data up to 28 nm technology node, it exhibits models of BSIM-BULK have also been explained in this
the symmetry issue around VDS = 0 in the model, which paper, this consist of: a) The impedance field based compact
is very important for analog and RF design [1], [2]. To model to capture the anomalous trends of flicker noise [13].
overcome this major issue, BSIM group has developed a more b) An improved physical model capturing NQS effects in the
advanced model for bulk MOSFET, named by BSIM-BULK millimeter wave band [14], [15]. c) Modeling of self heating
(formerly BSIM6) [3]. BSIM-BULK is the latest industry effect (SHE). Finally, statistical modeling i.e., IDS mismatch
standard compact model for bulk MOSFET with the unified in BULK-MOSFET is also discussed in this work [16].
charge based core, which had inherited all real device effects
from BSIM4 [3]–[6]. The model shows excellent convergence II. E NHANCEMENT IN DC I-V M ODEL
in circuit simulation for RF, DC, small signal and transient
simulations, and also it is well suitable for high speed analog A. Modeling gm in Strong Halo MOSFETs
applications. In addition to this, it also guarantees symmetry Halo or pocket implants are ion-implantations angled into
around VDS = 0 [7]. As shown in Fig. 1(a) and Fig. 1(b), the channel of a MOSFET inducing higher doping on the
the BSIM-BULK model successfully passes both DC and AC source/drain edges of the channel. They are necessary to sup-
GST tests [7], [8]. press short channel effects and enable low leakage for digital
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NMOS 100 L=2 m 2
10
10-2 VDS=1.21V
0.2 W=2 m
|V |=1.98V
(mA)
DS
(mA)
VB=0,-275m,-550m
A)
0
A)
10
10-5 V =0, 0.45 V
B
(
50
0.1
DS
(
DS
DS
DS
I
I
10-8
-2
I
PMOS 10
I
L=2 m W=2 m Solid Lines : Model
Symbols : Exp. Data
-11
10 0.0 0 10
-4
0.0 0.5 1.0 1.5 2.0 -2.0 -1.5 -1.0 -0.5 0.0
VGS (V) V
GS
(V)
(a) (a)
g'm (mA/V2)
gm (mA/V)
75
gm (mA/V)
W=2 m V =0, 0.45V
B
0.0 PMOS
0.0 0 0.0
0.0 0.5 1.0 1.5 2.0 -2.0 -1.5 -1.0 -0.5 0.0
VGS (V) V
GS
(V)
(b) (b)
Fig. 2: Anomalous gm behavior of halo implanted at different Fig. 3: Anomalous gm behavior of halo implanted at different
body biases for NMOSFET. (a) IDS −VGS (b) gm −VGS . The body biases for PMOSFET. (a) IDS − VGS (b) gm − VGS . The
proposed model successfully captures gm trends across body proposed model successfully captures gm trends across body
biases [9]. Solid Line: Model and Symbol: Measured data biases [9]. Solid Line: Model and Symbol: Measured data
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-4
10
L = 60 nm, W = 1 m
VBS=0V
-6
10
VDS increases V = 0.1, 0.5, 1 V
(a.u.)
(a.u.)
DS
(A)
-8
10
DS
DS
-10
I
10
DS
L=0.3um W=10um
I
I
-12
10
V = 0 V
BS
-14
10
VGS (a.u.)
-3 -2 -1 0 1
V (V)
GS
(a) (a)
VBS=0V
-4
L=0.3um W=10um 10
L = 60 nm, W = 1 m
-6
10
(a.u.)
VGS increases
(A)
-8 T = 300, 350, 375 K
10
DS
DS
I
-10
10
I
-12
10 V = 0 V
BS
-14
10
VDS (a.u.) -3 -2
V
-1
GS
(V)
0 1
(b) (b)
Fig. 4: Measurement verification of proposed model for punch- Fig. 5: Measurement verification of proposed model for sub-
through leakage in weak inversion region: (a) IDS − VGS surface leakage in the accumulation region: (a) IDS − VGS
characteristics for zero VT H nMOSFET for different VDS (0.1, characteristics for zero VT H nMOSFET for different VDS (0.1,
0.5, 1 V) and VSB = 0V . (b) IDS −VDS characteristics for low 0.5, 1 V) and VSB = 0V . (b) IDS − VGS characteristics for
VGS values [10]. Solid Line: Model and Symbol: Measured different temperatures [12]. Solid Line: Model and Symbol:
data TCAD data
that the operating point threshold voltage of MOSFET can be represent the distances between isolation edge to Poly from
directly extracted in BSIM-BULK [4], [18]. one and the other side, respectively) data for different body
C. EDGEFET Model bias. Fig. 7(a) and Fig. 7(b) on the other hand, show the model
validation with the measured data for SA = SB = 657 nm.
With rapid decreasing of the feature size, it becomes desir- Please note that to increase the further fitting flexibility of
able to use the shallow trench isolation (STI) over the LOCOS Iedge model, we have considered the mechanical stress effects
bird’s peak process [19], [20]. However, the inner fringing in EDGEFET model too (in Iedge ).
gate field lines associated with the STI device terminate on
the charges present in the STI edges (corners), leading to D. Bulk Charge Model
the formation of inversion charge layer near the STI edges. The analytical model to capture the variation of bulk charge
It is very important to model its effect in BSIM-BULK, along the lateral direction (from source side to the drain
since the presence of this parasitic current will impact a key side) for VDS = 0 is not taken into the consideration in the
figures of merit like gm /IDS , gm etc. We have modeled it by unified-core models. As a result, these models overestimate the
adding the parasitic edge current (Iedge ) with the main channel inversion charge density, and hence, exhibits larger channel
current [19], [21]. Also, we have validated our model for Iedge current. So, the transconductance (gm ), output conductance
with the measured IDS versus VGS data at VDS = 50mV (gds ), and capacitances of a long channel MOSFET in the
across body bias. It is evident from Fig. 6(a) and Fig. 6(b) saturation region as predicted by these compact models show
that the new model, which is implemented in BSIM-BULK, a slight deviation from measured results. Though these de-
excellently matches with the measured current as well as its viations do not affect the accuracy significantly, rectifying
3rd derivative for SA = SB = 2.034 μm (where, SA, SB them is crucial for harmonic distortion simulations needed for
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VDS = 50 mV
Hump
(a.u)
(a.u)
(a.u)
(a.u)
Hump
DS
DS
DS
DS
VDS= 50 mV
I
I
I
VBS= 0 to -3 V VBS = 0 to -3 V
0 1 2 3 4 5 0 1 2 3 4 5
VGS(V) VGS(V)
(a) (a)
VDS= 50 mV VDS = 50 mV
d3IDS/dVGS3(a.u)
d3IDS/dVGS3(a.u)
Hump Hump
VBS= 0 to -3 V VBS = 0 to -3 V
0 1 2 3 4 5 0 1 2 3 4 5
VGS(V) VGS(V)
(b) (b)
Fig. 6: Accurate modeling of parasitic STI effect: Comparison Fig. 7: Accurate modeling of parasitic STI effect: Comparison
of the EDGEFET model with measured data for the long of the EDGEFET model with measured data for the long
channel length MOSFET. (a) IDS vs VGS (b) 3rd derivative channel length MOSFET. (a) IDS vs VGS (b) 3rd derivative
of IDS at VDS = 50mV across body bias for SA = SB = of IDS at VDS = 50mV across body bias for SA = SB = 657
2.034 μm. Solid: Model, Symbols: measured data. nm. Solid: Model, Symbols: measured data.
RF applications. To overcome this issue, the analytical model
of bulk charge effect in-line with BSIM4 has been added in
the BSIM-BULK for both DC and capacitance modules. It hence, the existing conventional compact models for 1/f noise
is evident from Fig. 8(a) that the model without Abulk, a for uniformly doped devices are no longer valid for halo pocket
parameter representing the bulk charge effect in current and devices [13]. Here, we have used the impedance field theory
capacitances [2], cannot give a good fit, whereas our proposed based compact model to capture the anomalous trends of 1/f
model, which has been implemented in BSIM-BULK shows noise [13], [23], which is also included in BSIM-BULK model.
the drastic improvement in the gds fitting. Whereas, Fig. 8(b) Here, we consider two transistors in series i.e., one for source
shows the validation of CGG versus VGS trends with the halo and another for both channel and drain halo regions.
TCAD data, it can be seen that for the high gate and drain Total drain current noise power spectral density (PSD) for halo
bias, the model without this new model cannot give a good implanted MOSFETs is [13]:
fit. However, BSIM-BULK with Abulk model exhibits a large
amount of improvement in the CGG fitting. 2
gm,ch + gd,ch
SID =SID,h ·
III. E NHANCEMENT IN N OISE AND RF M ODELS gm,ch + gd,ch + gd,h
2
gd,h
A. Flicker Noise Model for Halo Implanted MOSFETs + SID,ch · (1)
gm,ch + gd,ch + gd,h
Strong halo implants have been found to degrade the 1/f
noise of device, particularly for a long channel devices. The where nq , μ, Cox , and Vt are the slope factor, effective
peculiar 1/f noise behavior is attributed to extra trap states mobility, oxide capacitance per unit area and thermal voltage
being formed due to implantation process [13], [22]. As a respectively. Whereas, qs,ch , qd,ch , qs,h and qd,h are the
result, noise behavior in strong halo pocket devices is very normalized inversion charge densities at the source and drain
different as compared to the uniformly doped devices, and ends of channel and halo transistor, respectively. Fig. 9(a)
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(a) (a)
(b) (b)
Fig. 8: Effect of the Abulk model: (a) gds versus VDS Fig. 9: IDS 1/f noise PSD vs IDS at VDS = 0.55V ,
validation of new Abulk model against experimental data for normalized to W. The proposed model successfully captures
L = 1-μm and W=10-μm NMOSFET at VBS = 0.0 V and VGS SID trends. The conventional compact models for flicker
= 0.4, 0.8, 1.2 V (b) Model validation with the TCAD data noise valid for uniformly doped MOSFET, can not capture a
for CGG versus VGS . Solid Lines: Model including Abulk, typical low frequency behavior especially for a long channel
Dashed Lines: Model without Abulk and Symbol: Data. MOSFET [13]. Solid: Model, Symbols: measured data.
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1000
1000 420
102 400
101 950
A)
900 380
T(K)
360
(
DS
TCAD
I
1
New NQS Model 10-1
800
VDS= 1.2 V 340
10
( A)
900
Real (Y12) [mS]
VGS= 1.2 V
DS
100 L=2 m Wf=5 m Nf=10 850
I
Vgs=Vds=1.5V 10 -5
IDS from SHE
10-7 800 IDS from sweeping of T
10-1
but SHE = 0
10-9
750
300 320 340 360 380 400 420
10-2 10-11
109 1010 1011 T(K)
Frequency (Hz) (a)
(a) 800
-1
10
10-2 600
-2
10 Measured data
Real (Y21) [mS]
Real (Y12) [mS]
( A)
This work
1st order NQS model
10-4
10-3 400
10-segmented model DS
10-4
Dashed: SHE = 1
200
10-8
10-5 L=2 m Wf=5 m
10-6
Nf=10 10-10
Vgs=0.9V,Vds=0.8V 0
0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4
10 -7
10 -12
VDS(V)
108 109 1010
Frequency (Hz) (b)
Fig. 12: (a) Benchmark test for Self heating model: Compari-
(b)
Fig. 10: Measurement verification of proposed model for son of drain current from two different approaches. Inset plot
Real(Y12 ) (Left Y-axis) and Real(Y21 ) (Right Y-axis): (a) variation of temperature and current with thermal resistance,
with TCAD data. (b) with measured data. The BSIM-BULK when self heating model is on. (b) Effect of self heating on
NQS model and 10-segmented model fail at high frequency drain current. Inset figure is the RC thermal network. Self
region [14], [15]. Solid: Model, Symbols: data. heating effect is proactive mainly at high power [5].
20
enabled and for the fixed drain and gate biases, the thermal
S
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10-1
L=1 mW=1 m
D/ D
-2
VDS = 0.1 V VBS = 0 V L=1 mW=1 m
10
VDS = 1.2 V
D D
/
Normalized
-3
10
Calibrated TCAD
Our proposed model VBS = -0.6 and 0 V
10-4 Conv. model to fit WI region
Conv. to fit SI linear region Solid Lines : Model
Symbols : Measured Data
10-5
0.2 0.4 0.6 0.8 1.0 1.2 0.2 0.4 0.6 0.8 1.0 1.2
VGS(V) VGS(V)
(a) (a)
VGS = 0.6 V
Solid Lines : Model
VGS = 0.8 V
10-3 Symbols : Measured Data
D/ D
VGS = 1.1 V
Normalized
/
L = 5 m W = 0.12 m VBS = 0 V
VDS = 1.2 V
-4
10
VBS = 0 V L=1 mW=1 m
models for IDS mismatch, can not capture a typical σIDS /IDS trends. The conventional compact models for IDS mismatch,
behavior [16]. Solid: Model, Symbols: data. can not capture a typical σIDS /IDS behavior [16]. Solid:
Model, Symbols: measured data
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based proposed model indeed reduces to the UD model. [10] C. Gupta, H. Agarwal, Y. Lin, A. Ito, C. Hu, and Y. S. Chauhan,
“Analysis and modeling of zero-threshold voltage native devices with
V. C ONCLUSION industry standard bsim6 model,” Japanese Journal of Applied Physics,
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variation of bulk charge in the lateral direction due to VDS , we Y. S. Chauhan, and C. Hu, “Modeling of subsurface leakage current in
have implemented a new model for the bulk charge effect in low vth short channel mosfet at accumulation bias,” IEEE Transactions
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10.1109/TED.2018.2853989
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