Calibration and PM Guide NSx220

NSX220 Calibration Procedures and Preventive Maintenance
Calibration
Lock the desktop by clicking on the Lock button. The Lock button will change to
Frontside.
1. Click on the Calibration tab.
2. Click on the Calibrate button in the upper right hand corner of the screen.
3. Click on the Calibration Procedure Tree to bring up the list of procedures.
Load Wafer
1. Home the system before starting any calibrations.

2. Load the 2D standard calibration wafer.
Note: The calibration wafer can also be loaded using the manual control section in the
XCluster software.
3. Click on Wafer Handling.

4. Click on Prepare to Load

5. Load a Calibration Wafer using the XPort software.
6. Click on Accept Wafer.
7. Click Next
8. Click on the Calibration Wafer radio button.
9. Click on Next.
SCS X, Y and Z Origin

The SCS X, Y and Z Origin calibration aligns the X, Y and Z axes to the center of the optical
axis. The preferred objective for this calibration is the 20X objective because it will provide
the highest resolution and repeatable position for X, Y and Z. In case the 20X cannot be used,
it is acceptable to use the 10X objective.
1 If not already at Stage Coordinate System (SCS) X, Y and Z Origin select it from Procedure
Tree.
2 Select the 20X objective from the dropdown list on the upper left.
3 Click on Zoom to Fit
Note: If the center of the wafer and the crosshair are not in the field of view (FOV) select the
10X objective, if the crosshair is still not in the FOV reteach the load position.
4 Move the Spin Center of the wafer to the crosshair. Use the Motion Control to get the spin
center close or right click on the Spin Center.
Note: You can also place the cursor on the center of wafer target and right click the target
should move to the crosshair.
5 Press the Calibrate button on the lower-left of the X, Y, and Z Origin screen.
6 The Z stage will automatically home and then the tool will take multiple images at different
theta positions. Once all images are acquired the tool will calculate the spin center.
7 Press the Next button when complete.
Note: Changing the X and Y origin could change any trained stage positions other than load
position.
The SCS origin calibration should be performed at initial tool set-up or when a hardware
change has been made which significantly changes the relative position between the stage and
the optical system.
Motion Limits
This calibration need only be performed at initial tool setup, when a stage has been moved
or replaced or when a limit sensor has been replaced or adjusted. There is no required accuracy
tolerance for this calibration.
1 Check the boxes for X, Y, and Z all On.

2 Click on Calibrate. The system will now automatically search for the hardware flags and
calculate the new software limits.
3 Press Next when all three axes have completed calibration.
Load Position
The Load Position screen enables calibration of the X, Y, Z and Theta positions of the
inspection platform for loading and unloading wafers. The screen also enables testing the
wafer center relative to the stage coordinate system.
Wafer Placement
The Wafer Placement screen enables calibration of the system’s stage coordinate system
relative to a wafer’s placement on the inspection platform. The X, Y and Theta values should
be as close to zero as possible.
This calibration should be performed after the stage coordinate system and/or load
position is recalibrated.
Inspection Camera Defect

The inspection camera may have individual pixels which are defective in terms of their
brightness for a given amount of light received. These defects are usually expressed in terms of
gain and offset deviation from a normal pixel. In some cases, a pixel may be too defective to
be corrected using gain and offset and must be replaced by a neighboring pixel. This
calibration provides a means for correcting these defective pixels so that they do not cause
false defects to occur during inspection.
The inspection camera pixel defects should not change during the lifetime of the camera.
Therefore the gain, offset and bad pixel map files should only change when a camera is
replaced.
Strobe Limits
This calibration need only be performed at initial tool setup, when strobes have been
changed or when the Z-axis has been worked on.
Inspection Camera Angle
The Inspection Camera Angle calibration is used to align the camera Y-axis parallel to the
stage X-axis.
The camera rotation calibration should be performed on initial tool set-up, when the
camera is replaced or the camera mount is loosened.
Objective Nominal Focus
This calibration is used to determine the Z best-focus position for each objective with respect
to the SCS Z origin.
The nominal focus position calibration should be performed on initial tool set-up, when an
objective is moved or replaced, or when any change to the relative height between the chuck
and the optical system occurs. The preferred approach is to recalibrate all objectives rather than
just one to ensure that all calibrations are with respect to the same datum plane.
Inspection Camera Pixel Size

The purpose of this calibration is to determine the magnification of the objective so that it can
be utilized during inspection to properly convert image locations into wafer and die
coordinates. The calibration determines the average magnification of each objective across the
field of view and provides a pixel scale factor expressed as microns per pixel. The
magnification provided by each objective is an inherent property of the objective and cannot be
modified. However, an objective which is too far from the expected nominal focus should be
replaced.
This calibration should be performed at initial tool set-up or when an objective is moved
or replaced.
Inspection Objective X and Y Alignment
This calibration determines the X and Y offset (in SCS coordinates) between each objective.
The accuracy of this calibration determines how well centered an object will be when changing
from one objective to another.
or replaced.
1 Select the 2X objective. Drive the stage so the center of the cross hairs is at an identifiable
object for all magnifications.
2 Autofocus and align the cross hairs to the selected object.
3 Repeat steps 1 and 2 for all objectives.

4 Click on Calibrate.
5 Once finished drive to the coarse alignment target. Center the crosshairs up at 20x and then
cycle through all the objectives to verify they are all aligned.
6 Click on Next when complete.
Inspection Hot Spot

This calibration corrects internal reflections within the 1x and 2x objectives called hot spots.
This calibration should be performed at initial tool set-up or when an objective or other
optical component (lamp) is replaced or moved.
Inspection Illumination Flat Fielding

In normal operation the optical system will not evenly illuminate the entire field of view.
Typically the edge of the field of view will be darker than the center for a given object. This
effect will vary between objectives. The system must provide a means for determining the
illumination “flatness” for each objective and must produce a correction image that will be
used to remove the illumination non-uniformity during inspection and recipe creation
operations. Additionally, local areas of non-uniformity may be caused by contamination on the
camera imager or other optical surfaces. The same calibration operation may be used to correct
these sources of non-uniformity.
This calibration should be performed during initial tool setup, when an objective or other
optical component (lamp) is replaced or moved, when consistent illumination non-uniformity
is observed in the image and during normal periodic maintenance.
Note: Reference models deleted when performing this calibration. Detector training required if
performing this procedure.
Inspection Illumination Offset
The Inspection Illumination Offset screen calibrates illumination power offsets for each
objective. Doing so helps the system maintain consistent lighting as it changes objectives.
This calibration should be performed at initial tool setup, when strobes have been changed
or when Z axis has been worked on.
1 Select the 1X objective and focus on a wafer feature.

2 If not already there, drive the stages so that the entire field of view is on the single
reflectance target of the wafer.
4 Click on Next when done.
Review Camera
The review camera calibration steps include all of the items required for the inspection camera
plus an additional white balancing step
Review Camera Defect

The Review camera may have individual pixels which are defective in terms of their brightness
for a given amount of light received. These defects are usually expressed in terms of gain and
offset deviation from a normal pixel. In some cases, a pixel may be too defective to be
corrected using gain and offset and must be replaced by a neighboring pixel. This calibration
provides a means for correcting these defective pixels so that they do not cause false defects to
occur during inspection.
The Review camera pixel defects should not change during the lifetime of the camera.
Therefore the gain, offset and bad pixel map files should only change when a camera is
replaced.
Review Camera Gain Matching

The Review camera is a Bayer type color camera which requires camera gain matching to
produce true color images. The camera gain matching calibration produces gain factors for
each color plane (red, green, and blue) to get to a given ray level.
This calibration should be performed during initial tool setup and during normal periodic
maintenance.
1 Move the X and Y stage so that the entire field of view is on the single reflectance target of
the wafer.
2 Click on Match.
3 Click on Next when the calibration is complete.
Strobe Limits
The software provides an automatic calibration method of the power levels for the Brightfield
strobe. The system sets the limits so the accuracy is not that critical.
This calibration need only be performed at initial tool setup, when strobes have been
changed or when the Z-axis has been worked on.
1 Verify the single reflective surface is in the entire field of view and no debris is in The FOV.
2 Verify Brightfield is shown in the Select Illumination Source drop-down menu.
3 Click on Calibrate. The system will slowly drop bright field strobe power starting at 100%
until it begins to detect missed frames.
4 Click the Next button when complete.
Review Camera Angle

The Review Camera Angle calibration is used to align the camera Y-axis parallel to the stage
X-axis
The camera rotation calibration should be performed on initial tool set-up, when the
camera is replaced or the camera mount is loosened.
1 Select the 1x objective

2 The system should move to the Center Mark Target area if it doesn’t use Motion Control to
view the area of interest.
3 Click and drag to create a region of interest box over your desired wafer feature.
4 Click on Calibrate. The system will move the stages and automatically calculate the angle of
the inspection camera to the stage movement.
5 Click on Next when complete.
Review Objective Nominal Focus

This calibration is used to determine the Z best-focus position for each objective with respect
to the SCS Z origin.
The nominal focus position calibration should be performed on initial tool set-up, when an
objective is moved or replaced, or when any change to the relative height between the chuck
and the optical system occurs. The preferred approach is to recalibrate all objectives rather
than just one to ensure that all calibrations are with respect to the same datum plane.
Review Camera Pixel Size
The purpose of this calibration is to determine the magnification of the objective so that it can
be utilized during inspection to properly convert image locations into wafer and die
coordinates.
or replaced.
Review Objective X and Y Alignment

This calibration determines the X and Y offset (in SCS coordinates) between each objective.
or replaced.
Review Hot Spot

This calibration corrects internal reflections within the 1x and 2x objectives called hot spots.
Since the hot spot is primarily caused by an internal reflection, its intensity is a function of the
bright-field illumination intensity only and is unaffected by the reflectance of the object being
imaged.
This calibration should be performed at initial tool set-up or when an objective or other
optical component (lamp) is replaced or moved.
1. Click on Calibrate.
2. Click on Next when calibration is done.
Review Illumination Flat Fielding

In normal operation the optical system will not evenly illuminate the entire field of view.
Typically the edge of the field of view will be darker than the center for a given object. This
effect will vary between objectives. The system must provide a means for determining the
illumination “flatness” for each objective and must produce a correction image that will be
used to remove the illumination non-uniformity during inspection and recipe creation
operations. Additionally, local areas of non-uniformity may be caused by contamination on the
camera imager or other optical surfaces. The same calibration operation may be used to correct
these sources of non-uniformity.
This calibration should be performed during initial tool setup, when an objective or other
optical component (lamp) is replaced or moved, when consistent illumination non-uniformity
is observed in the image and during normal periodic maintenance.

2 Drive the stages so that the entire field of view is on the single reflectance target.
Review Illumination Offset

The Review Illumination Offset screen calibrates illumination power offsets for each objective.
Doing so helps the system maintain consistent lighting as it changes objectives.
This calibration should be performed at initial tool setup, when strobes have been changed
or when Z axis has been worked on.

Point Sensor
XFrontside provides a method to calibrate the point sensor SCS XY origin offset and nominal
focus position.
This calibration should be performed during initial tool setup, when the point sensor is
moved or replaced and when a chuck (top plate) is replaced.

Top Plate (Chuck Contour)

In order to allow the motion system to track variations in the height of a wafer due to imperfect
chuck tilt and flatness, the system provides a method to create a contour map of a wafer placed
on the chuck.
This calibration should be performed during initial tool setup and when a chuck (top plate)
is replaced.
1.Click on Calibrate. The system will use the point sensor to measure the points selected on the
calibration wafer and determine the flatness of the top plate.
Note: The Theta Axis Position drop-down menu has no effect on this calibration and is used
for viewing different angles of the resulting contour map only.
2. Click on Finish when done.

3. Click on Close to complete the calibration process.
Basic Preventive Maintenance
Quarterly
Annually
Annually
Monthly
Weekly
Semi-
Maintenance Task
Verify Vacuum and Pressure

Wipe Down Outer Surfaces
Perform System Backup
Perform Data Backup
Clean the Top Plate
Test the ESTOP and EMO Functions
Clean and Lubricate Rail Surfaces
Cleaning and Lubricating the Rails
Clean the Calibration Wafer
Calibrate Inspection Strobe Limits
Calibrate Inspection Camera Angle
Calibrate Inspection Objective Nominal Focus
Calibrate Inspection Camera Pixel Size
Calibrate Inspection Objective X and Y Alignment
Calibrate Inspection Hot Spot
Calibrate Inspection Illumination Flat Fielding
Calibrate Inspection Illumination Offset
Calibrate Review Camera Gain Matching
Calibrate Review Camera Strobe Limits
Calibrate Review Camera Angle
Calibrate Review Objective Nominal Focus
Calibrate Review Camera Pixel Size
Calibrate Review Camera Objective X and Y Alignment
Calibrate Review Hot Spot
Calibrate Review Illumination Flat Fielding
Calibrate Review Illumination Offset
Replace the Light Source Module (Recommended every
6 months before doing calibration above )
Verify Wafer Load and Unload Position
Cleaning and Lubricating the Rails
Calibrate Inspection Camera
Calibrate Review Camera
Calibrate Laser Focus Sensor
Calibrate Top Plate (Chuck Contour)
Replace the Vacuum Filter
Replace the Top Plate Vacuum O-Ring
Perform System Backup in XCluster

D:\XTool\
In addition, back up the following directory:
D:\InspectionRecipes\
NOTE: The customer is responsible for performing all system backup and disk drive
maintenance.
Perform Data Backup
In addition to system configuration and recipe files, you should periodically backup other data
files associated with your product training and inspections including database files, images,
product setups and recipes not included in the previous and following backup procedures.
XCluster SQL Server 2008 Database Backup

NOTE: Follow this procedure if the tool has Microsoft® SQL Server 2008.
1 Run the SQL Server Management Studio from the All Programs menu.
2 Select the XComponentManager database in the tree control.

3 Right click to bring up the context menu. Choose Tasks > Back Up...
4 Set the Back Up dialog as shown.

5 Click the Add button.
6 Click the browse button (...) to select the backup file name.
a. The backup file must be on a local disk.
b. Choose a temporary directory for the backup on the C: drive.
c. This file may be copied to a network drive after the backup is complete.
7 Click OK to return to the Back Up dialog

8 Select the Options tab and set the options as shown below.
9 Click OK to start
10 Once the backup is completed, a message will be displayed.
11 Browse to the backup location using Explorer and copy the database backup file to the
network drive.
Restore XComponent Database

NOTE: This procedure is only for use with Microsoft® SQL Server 2008.
1 Shut down all Explorer systems connected to the database.
2 On the Windows desktop, point to Start, point to All Programs, and click SQL Server
Management Studio.
3 On the SQL Server Management Studio window, point to XComponent Database and
right click to access the context menu.
4 Click Tasks, click Restore, and click Database.

5 On the Restore Database - XComponent Manager General page dialog box, click From
device and then click the browse button.
6 On the Specify Backup dialog box, click Add.

7 On the Locate Backup File dialog box, find the backup file and click OK.
8 On the Restore Database – XComponent Manager dialog box on the General page, click
the Restore check box and then click Options to display the Options page.
9 On the Restore Database – XComponent Manager Option’s page dialog box, click the
Overwrite the existing database check box.
10 Click the Leave the database ready to use... check box.
11 Click OK. The backup progress is shown on the lower left of the dialog box.
12 Click OK on the completion dialog box.

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NSX220 Calibration Procedures and Preventive Maintenance

1. Click on the Calibration tab.

3. Click on the Calibration Procedure Tree to bring up the list of procedures.

1. Home the system before starting any calibrations.

3. Click on Wafer Handling.

4. Click on Prepare to Load

SCS X, Y and Z Origin

1 Check the boxes for X, Y, and Z all On.

Inspection Camera Defect

Inspection Camera Angle

Objective Nominal Focus

Inspection Camera Pixel Size

Inspection Objective X and Y Alignment

3 Repeat steps 1 and 2 for all objectives.

6 Click on Next when complete.

Inspection Hot Spot

Inspection Illumination Flat Fielding

Inspection Illumination Offset

1 Select the 1X objective and focus on a wafer feature.

Review Camera Defect

Review Camera Gain Matching

Review Camera Angle

1 Select the 1x objective

Review Objective Nominal Focus

Review Camera Pixel Size

Review Objective X and Y Alignment

Review Hot Spot

Review Illumination Flat Fielding

1 Select the 1X objective and focus on a wafer feature.

Review Illumination Offset

1 Select the 1X objective and focus on a wafer feature.

1 Select the 1X objective and focus on a wafer feature.

4 Click on Next when done.

Top Plate (Chuck Contour)

2. Click on Finish when done.

Basic Preventive Maintenance

Verify Vacuum and Pressure

Perform System Backup in XCluster

In addition, back up the following directory:

Perform Data Backup

XCluster SQL Server 2008 Database Backup

2 Select the XComponentManager database in the tree control.

4 Set the Back Up dialog as shown.

5 Click the Add button.

7 Click OK to return to the Back Up dialog

10 Once the backup is completed, a message will be displayed.

Restore XComponent Database

4 Click Tasks, click Restore, and click Database.

6 On the Specify Backup dialog box, click Add.

12 Click OK on the completion dialog box.

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