CN104614073B

System and method for polarization detection based on silicon-based liquid crystal

Inventor: Fu Songnian | Hong Zhikun | Yu Dawei | Tang Ming | Liu Deming

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Classifications:

IPC - G01J4/00; G01J9/00;

Priority data: CN201510032561A | 2015-01-22

Application data: CN201510032561A | 2015-01-22

Abstract

The invention discloses a system and a method for polarization detection based on a silicon-based
liquid crystal; the polarization detection system comprises a polarization analyzer, a light detector, a
silicon-based liquid crystal driving module, a control unit and a silicon-based liquid crystal for phase
modulation; the silicon-based liquid crystal performs phase modulation to the to-be-detected light under
the driving of the silicon-based liquid crystal driving module, acquires a series of polarization light and
acquires the polarization information of the to-be-detected light by the analysis of a series of the
polarization light; and the polarization information comprises amplitudes and phase differences in the
vertical direction and the horizontal direction. The system detects and controls the polarization state
under precise programmable control and is not limited by the similar wavelength sensitivity of wave
plates; with adoption of the silicon-based liquid crystal for phase modulation, the response time is
optimized remarkably; meanwhile, the system has the characteristic of realizing light polarization state
detection and control integration and has wide application scenes.
Claims

1. a kind of Polarization Detection system based on liquid crystal on silicon, it is characterised in that
the Polarization Detection system include liquid crystal on silicon, Liquid crystal on silicon drive module,
analyzer, photo-detector and control unit；

The liquid crystal on silicon, the analyzer and the photo-detector are sequentially placed in the rectilinear
direction of light beam to be measured, are respectively provided with In the range of the collimation of
the light beam to be measured；

The control end of the liquid crystal on silicon connects the outfan of liquid crystal on silicon drive
module, the liquid crystal on silicon drive module it is defeated Enter the outfan of end connection
described control unit, the input of described control unit connects the outfan of the photo-detector；

What the liquid crystal on silicon reception was incident treats light-metering, under the control of the
liquid crystal on silicon drive module treats that light-metering is entered to described The continuous
phase-modulation of row, obtains the first light beam, and the analyzer is hung down with analyzer
optical direction in filtering first light beam The second light beam is obtained after Nogata light upwards
；The photo-detector detects the intensity of second light beam, obtains serial light intensity value；
And after opto-electronic conversion being carried out to the serial light intensity value feed back to
described control unit；Described control unit is according to the number for receiving According to
acquisition phase place is with light intensity curve and recognizes the phase place and two trough
points on light intensity curve；Obtained according to the trough point The P light obtained in
polarization state is poor with the accurate phase of S light；And according to any two on the phase
contrast and phase place and light intensity curve The light intensity value of point obtains the amplitude
of two polarized components with loading phase place.

2. Polarization Detection system as claimed in claim 1, it is characterised in that the liquid crystal on
silicon, analyzer and photo-detector May be contained within the central axis of light beam to be
measured.

3. the method that the Polarization Detection system described in a kind of employing claim 1 or 2
carries out Polarization Control, it is characterised in that institute The method of stating is specially：
According to described control unit obtain polarization state parameter and user's request, liquid crystal
on silicon load phase place with Change the incident polarization state for treating light-metering, obtain
the emergent light with adjustable polarization state.

4. the method that the Polarization Detection system described in a kind of employing claim 1 or 2
carries out optical element polarization characteristic detection, its It is characterised by, methods
described is specific as follows：

Optical element to be measured is placed between liquid crystal on silicon and analyzer, on central axis
of the liquid crystal on silicon with analyzer；

A light source is provided, the light source sends the polarized light of polarization state determination,
and the polarized light is through the Polarization Detection system Carry out phase-modulation and
filter and the light in analyzer optical direction vertical direction, obtain outgoing beam, and pass through
control unit The polarization information of the outgoing beam is obtained, polarization information of
the outgoing beam polarization information with the polarized light is compared To the rear polarization
characteristic for obtaining optical element to be measured.
5. described in a kind of employing claim 1 or 2 based on liquid crystal on silicon Polarization Detection
system Polarization Detection method, its feature It is to describe the polarization state of light in the
Polarization Detection method using method of Jones calculus, the polarization state is with along
vertical side The amplitude and the phase of both direction polarized component of the P-polarization
component to vibration and the S-polarization component along horizontal direction vibration Potential
difference is characterizing；The method comprising the steps of：

(1) by the phase theta of 0 to 2 π is loaded on the P-polarization component of light beam to be
measured for inciding liquid crystal on silicon, change described The polarization state of light beam to
be measured, obtains a series of polarized light；

(2) filter in a series of polarized light with analyzer optical direction vertical direction on light；

(3) light intensity value I of the light Jing after step (2) is filtered is obtained by photo-detector detection
；

(4) θ-I curves are obtained with the discrete coordinate that light intensity value I is constituted according
to the phase theta of the loading；

(5) obtain the coordinate (θ of two troughs on θ-I curvesi, Ii), θiRepresent IiThe phase place loaded
under light intensity, i=1 or 2；

(6) θ determined according to step (5)i, obtain P, the phase contrast of two polarized components of S
；

(7) light intensity value according to corresponding to the phase place and loading phase place that
load in phase contrast, step (1) that step (6) is obtained, Obtain P, two polarized component amplitudes
of S.

6. Polarization Detection method as claimed in claim 5, it is characterised in that two polarized

component phase of step (6) the acquisition P, S The method of potential difference is specific as
follows：

(6.1) obtain the first trough (θ1, I1) consecutive points (θm, Im), the second trough (θ2, I2) consecutive
points (θn,In), m In n；

(6.2) compare (θm, Im) and (θn,In) two point light intensity values size；

(6.3) if (θm, Im) light intensity value put is more than (θn,In) light intensity value put, then two polarized
component phase contrasts be 2 π- θ1；If (θm, Im) light intensity value put is less than (θn,In) light
intensity value put, then two polarized component phase contrasts are π-θ1。

7. the Polarization Detection method as described in claim 5 or 6, it is characterised in that step (7) the
acquisition P, S two polarization point The method of amount amplitude is specific as follows：

(7.1) set up the mathematical model of light beam to be measured track of output beam Jing after liquid
crystal on silicon enters line phase loading：

Wherein, ExFor P directions electric field intensity, EyFor S directions electric field intensity, a is P-
polarization component amplitude, and b shakes for S-polarization component Width；For light beam
P-polarization component to be measured and the phase contrast of S-polarization component, θ is the
phase place of loading；

(7.2) optical direction of analyzer is arranged at an angle with X-axis positive axis direction, with Y-axis
positive axis direction into (90 ° of-α) angle；Y direction electric field intensity E of analyzer output beam
is obtained according to the optical direction of analyzeryWith X-axis side To electric field intensity
ExRelation be Ey=(tan α) Ex；

(7.3) according to two direction electric-field strengths in the output beam track mathematical model
and step (7.2) set up in step (7.1) Degree relation, sets up the functional relationship of light intensity
and loading phase place：

Wherein, light intensities of the I for polarized light under corresponding loading phase place, k
represent optical direction slope and k=tan α；

(7.4) according to loading phase theta, light intensity I for detecting and the phase contrast obtained in
step (6), according to step (7.3) institute The functional relationship stated obtains P, S two polarized
component amplitude a and b.

8. Polarization Detection method as claimed in claim 7, it is characterised in that the phase value of
loading is entered with light intensity probe value Row data analysiss are obtaining the polarization state
parameter for treating light-metering；The data analysiss are iterated using data fitting method,
concrete to wrap Include following steps：

A, presetting light polarization parameter to be measured isWherein ajP-polarization component

amplitude in expression iteration j；bj S-polarization component amplitude in j iteration of expression
；Represent the phase contrast of P-polarization component and S-polarization component in iteration
j；j Take the integer more than 1；

B, according to light intensity and the functional relationship of loading phase place, obtains the light
intensity value of calculation of iteration j；

C, obtains light beam light strength investigation value to be measured；

D, obtains the error of light intensity probe value and light intensity value of calculation, uses Δ
IjRepresent；

E, changing default polarization state parameter isRepeat step b-d, is obtained light intensity probe
value and is changed with this In generation, obtains the error of light intensity value of calculation, uses
Δ Ij+1Represent；

F, relative error Δ IjWith error delta Ij+1；If Δ Ij+1More than Δ Ij, showCloser to polarization state to be
measured The actual value of parameter,On the basis of to P, amplitude and the phase contrast of S
both directions add random value respectively, repeat Iteration；If Δ Ij+1Less than Δ Ij, then showThe
actual value of closer polarization state parameter to be measured,On the basis of to P, amplitude and
the phase contrast of S both directions add random value, iteration respectively；

G, iteration, until continuous n time acquisitionIt is identical, n>2；

H, what last time iteration was obtainedThe polarization state parameter of light-metering is treated as.
Description

A kind of Polarization Detection system and method based on liquid crystal on silicon

Technical field

The invention belongs to polarization state is detected and polarization control technology field in optical
field, more particularly, to a kind of base In the Polarization Detection system and method for liquid
crystal on silicon.

Background technology

Polarization is one of fundamental characteristics of light, and polarized light has had and is widely
applied, such as 3D films, LCD Display Techniques, High definition camera work, polarization
multiplexing of optical communication field etc.；In each field of polarized light application, all refer to
the inclined of light Polarization state is detected or is controlled.For example, in optical fiber
telecommunications system one section of optical fiber of needs assessment or a set of communication
system polarization Mode dispersion, the wherein first step need the polarization information of accurate
detection transmission signal, then can just carry out follow-up analysis.At which In his optical
instrument, related device, the polarization state of light such as the polarization such as MZ
interferometers, polarization spectroscope, Polarization Controller Be the important parameter for
affecting instrument service behaviour, need analysis to be made to the polarization state of light.

Liquid crystal on silicon is a kind of device related to polarization well, and the phase place for
polarization selectivity is carried out to light is adjusted System, phase modulation depth are controlled
by the driving voltage being applied on liquid crystal on silicon, and can be by changing driving voltage
in real time Realize real-time phase controlling.

In existing Polarization Detection system, wave plate has been applied generally to.Such as application
publication number is CN103616077A's Involved polarization state detecting system in patent
application document, by fan-shaped aperture, two wave plates, liquid crystal spatial light modulations
can be revolved Device, reflecting mirror, vertical polaroid, CCD camera and computer
composition.However, further investigations have shown that, it is this to employ ripple The Polarization
Detection system of piece, due to the wavelength dependence characteristic of wave plate so that the
application scenarios of polarization state detecting system are subject to ripple It is long to limit；
Therefore be necessary to make existing Polarization Detection system in association area and further
improve, to obtain application scenarios more Extensively, the more simple detecting system of
structure.

The content of the invention

For the disadvantages described above or Improvement requirement of prior art, the invention provides
a kind of polarization based on liquid crystal on silicon is examined Examining system and method, its
object is to by the controllable phase modulation of liquid crystal on silicon to realize the detection of
light polarization with control System, thus solves the limited technical problem of existing Polarization
Detection system application scenarios.

For achieving the above object, according to one aspect of the present invention, there is provided a
kind of Polarization Detection based on liquid crystal on silicon System, the Polarization Detection
system include that liquid crystal on silicon (Liquid Crystal on Silicon, LCOS), liquid crystal on silicon
drive Dynamic model block, analyzer, photo-detector (photon detector, PD) and control unit；The liquid
crystal on silicon, the analyzer It is sequentially placed in the rectilinear direction of light beam to be
measured with the photo-detector, may be contained within the range of the collimation of the light
beam to be measured；
The control end of the liquid crystal on silicon connects the outfan of liquid crystal on silicon drive
module, the liquid crystal on silicon drive module Input connect the outfan of described control unit, the
input of described control unit connects the output of the photo-detector End；

What the liquid crystal on silicon reception was incident treats light-metering, to described to be
measured under the control of the liquid crystal on silicon drive module Light exports the first light beam
after entering line phase loading, and the analyzer filters vertical with analyzer optical direction in first
light beam The second light beam is exported after light on direction；The photo-detector detects the
intensity of second light beam, and photoelectricity turn is carried out to which Described control unit is
fed back to after changing；Described control unit obtains polarization state parameter after carrying
out data analysiss；The liquid crystal on silicon Drive module drives liquid crystal on silicon to load
phase place to incident illumination according to the control signal that control unit sends.

Preferably, in the Polarization Detection system based on liquid crystal on silicon, the liquid crystal on
silicon, analyzer and photo-detector May be contained within the central axis of light beam to be
measured.

It is another aspect of this invention to provide that there is provided a kind of method of Polarization
Control, methods described is using present invention offer The Polarization Detection system based
on liquid crystal on silicon, according to the polarization information and user's request that detect, load
phase in liquid crystal on silicon Position obtains the emergent light with adjustable polarization state to
change incident light polarization state.

According to another aspect of the present invention, there is provided a kind of method of optical
element polarization characteristic detection, methods described are adopted The Polarization
Detection system based on liquid crystal on silicon provided with the present invention, by optical
element to be measured be placed in liquid crystal on silicon and analyzer it Between, on central axis
of the liquid crystal on silicon with analyzer；

Light source sends the polarized light of polarization state determination, carries out phase-modulation
through the Polarization Detection system and filters and inspection Light partially in device optical
direction vertical direction, is obtained outgoing beam, and the polarization of the outgoing beam is
obtained by control unit Information, obtains the polarization of optical element to be measured after
the outgoing beam polarization information and incident beam polarization information are compared
Characteristic.

According to another aspect of the present invention, there is provided a kind of Polarization Detection
method based on liquid crystal on silicon, in the polarization The polarization state of light, the
polarization state P polarization vibrated along vertical direction point are described using method of
Jones calculus in detection method Amount and along horizontal direction vibration the amplitude of S-
polarization component and the phase contrast of both direction polarized component characterizing；
It is described Method is comprised the following steps：

(1) by the phase theta of 0 to 2 π is loaded on the P-polarization component of light beam to be
measured for inciding liquid crystal on silicon, change The polarization state of incident illumination,
obtains a series of polarized light；

(2) filter in a series of polarized light with analyzer optical direction vertical direction on light；

(3) light intensity value I of the light Jing after step (2) is filtered is obtained by photo-detector detection
；

(4) discrete coordinate according to light intensity value I with the phase theta composition of loading
obtains θ-I curves；

(5) obtain the coordinate (θ of two troughs on θ-I curvesi, Ii), θiRepresent IiThe phase place loaded
under light intensity, i=1 Or 2；
(6) θ determined according to step (5)i, obtain P, the phase contrast of two polarized components of S
；

(7) light intensity according to corresponding to the phase place and loading phase place that load in
phase contrast, step (1) that step (6) is obtained Angle value, obtains P, two polarized component
amplitudes of S.

Preferably, the step (6) obtains P, and the method for two polarized component phase contrasts of S is
specific as follows：

(6.1) obtain the first trough (θ1, I1) consecutive points (θm, Im), the second trough (θ2, I2) consecutive
points (θn,In), m It is not equal to n；

(6.2) compare (θm, Im) and (θn,In) two point light intensity values size；

(6.3) if (θm, Im) light intensity value put is more than (θn,In) light intensity value put, then two polarized
component phase contrasts be 2π-θ1；If (θm, Im) light intensity value put is less than (θn,In) light
intensity value put, then two polarized component phase contrasts are π-θ1。

Preferably, the step (7) obtains P, and the method for two polarized component amplitudes of S is
specific as follows：

(7.1) set up the mathematical model of light beam to be measured track of output beam Jing after liquid
crystal on silicon enters line phase loading：

Wherein, ExFor P directions electric field intensity, EyFor S directions electric field intensity, a is P-
polarization component amplitude, and b is S-polarization component Amplitude；For light beam P-
polarization component to be measured and the phase contrast of S-polarization component, θ is the
phase place of loading；

(7.2) optical direction of analyzer is arranged at an angle with X-axis positive axis direction, with Y-axis
positive axis direction into (90 ° of-α) angle；Y direction electric field intensity E of analyzer output beam
is obtained according to the optical direction of analyzeryWith X-axis side To electric field intensity
ExRelation be Ey=(tan α) Ex；The X-direction be horizontal direction, X-axis positive axis direction be
level to the right Direction；Y direction is vertical direction, and Y-axis positive axis direction is direction
straight up；

(7.3) it is electric with two directions in step (7.2) according to the output beam track mathematical
model set up in step (7.1) Field intensity relation, sets up the functional relationship of light intensity and
loading phase place：

Wherein, light intensities of the I for polarized light under corresponding loading phase place, k
represent optical direction slope and k=tan α；

(7.4) according to loading phase theta, light intensity I for detecting and the phase contrast obtained in
step (6), according to (7.3) institute The mathematical model stated obtains P, S two polarized
component amplitude a and b.

Preferably, the phase value of loading and light intensity measured value are carried out data analysiss
to obtain polarization state parameter；

The phase value of loading and light intensity probe value are carried out data analysiss to obtain the
polarization state parameter for treating light-metering；It is described Data analysiss are iterated using
data fitting method, specifically include following steps：

A, presetting light polarization parameter to be measured isWherein ajP-polarization component in

expression iteration j Amplitude；bjS-polarization component amplitude in j iteration of expression；
Represent the phase of P-polarization component and S-polarization component in iteration j Potential
difference；J takes the integer more than 1；

B, according to light intensity and the functional relationship of loading phase place, obtains the light
intensity value of calculation of iteration j；

C, obtains light beam light strength investigation value to be measured；

D, obtains the error of light intensity probe value and light intensity value of calculation, uses Δ
IjRepresent；

E, changing default polarization state parameter isRepeat step b-d, obtains light intensity probe value
and this Secondary iteration obtains the error of light intensity value of calculation, uses Δ Ij+1Represent
；

F, relative error Δ IjWith error delta Ij+1；If Δ Ij+1More than Δ Ij, showIt is closer to treat that light-
metering is inclined The actual value of polarization state parameter,On the basis of to P, amplitude
and the phase contrast of S both directions add random value respectively, Iteration；If Δ Ij+1Less than
Δ Ij, then showThe actual value of closer polarization state parameter to be measured,On the basis of
to P, amplitude and the phase contrast of S both directions add random value, iteration respectively；

G, iteration, until continuous n time acquisitionIt is identical, n>2；

H, what last time iteration was obtainedThe polarization state parameter of light-metering is treated as.

In general, by the contemplated above technical scheme of the present invention compared with prior
art, can obtain down and show Beneficial effect：

(1) research of the invention shows, as LCOS has the phase-modulation function of polarization
selectivity, can use liquid crystal on silicon Replace wave plate to carry out phase retardation
modulation, therefore the present invention is on the basis of existing Polarization Detection system,
using liquid crystal on silicon Replace wave plate, thus obtain the prominent improvement of two
aspects：One is that the Polarization Detection system for breaching prior art receives wave plate ripple
Long restriction；Two are a simplified polarization related device, only need two polarizers of LCOS
and analyzer, simplify system structure；

(2) as LCOS can be carried out the phase-modulation of 0 to 2 complete π to the light in a wavelength
range, so this Invention is adapted to the detection of the polarized light of different wave length；The
relation of phase modulation values and voltage under certain wavelength need to only be known, you
can with Realize carrying out Polarization Detection to the light of specific wavelength, compared to the
wave plate being closely related with wavelength, the polarization inspection that the present invention
is provided The range of application of examining system is more extensive；

(3) detecting system that the present invention is provided does phase adjusted using LCOS, the ripple
controlled compared to machinery or manually Piece is adjusted, and the fast response time of LCOS,
the response time of detecting system are significantly optimized；

(4) in the present invention, the phase adjusted of LCOS is to realize automatically controlled regulation
by drive module under the control of the control unit, Compared to wave plate Mechanical course or
control manually, with controllability is good, high precision the characteristics of, and then cause the
inspection of the system Survey precision to be greatly improved；

(5) in the preferred version of the present invention, the process availability data point of data analysiss
is carried out using data fitting method Analysis processes software such as matlab and completes, and
realizes automatic detection, can accurately test and analyze polarization state；
(6) detecting system that the present invention is provided is less demanding to the collimation of light
path, it is not necessary to carry out the complexity such as light path coupling Operation, it is possible
to realize that the detection of polarization state is integrated with precise control and complete；

(7) system structure of the invention is compact simple, is suitable for integrated and portable
inspectiont；Except being applied to unknown Light source is carried out outside polarization state
detection, and applying also for the Polarization to unknown optical element is carried out to known
luminaire Polarization beat length, purposes obtain wide spread.

Description of the drawings

Fig. 1 is that the Polarization Detection system of the present invention is used to measure the system
block diagram of incoming polarization state；

Fig. 2 is the Polarization Detection system of the embodiment of the present invention 1 for the system
block diagram that detects to optical element polarization characteristic；

Fig. 3 is the flow chart of the Polarization Detection method of the embodiment of the present invention
2；

Fig. 4 is the flow chart of polarization state supplemental characteristic analysis during 2 automatic
detection of the embodiment of the present invention.

Specific embodiment

In order that the objects, technical solutions and advantages of the present invention become more
apparent, it is below in conjunction with drawings and Examples, right The present invention is further
elaborated.It should be appreciated that specific embodiment described herein is only to explain the
present invention, and It is not used in the restriction present invention.As long as additionally, technical
characteristic involved in invention described below each embodiment Do not constitute conflict each
other can just be mutually combined.

As shown in Figure 1, what the present invention was provided is included based on the Polarization
Detection system of liquid crystal on silicon：Liquid crystal on silicon, silicon substrate liquid Brilliant
drive module, analyzer, control unit and photo-detector；

The control end of the liquid crystal on silicon connects the outfan of liquid crystal on silicon drive
module, the control of liquid crystal on silicon drive module End processed connects the outfan of control
unit, and the input of control unit connects the outfan of photo-detector；

The liquid crystal on silicon, analyzer and photo-detector are sequentially placed in the rectilinear
direction for treating light-metering, may be contained within to be measured In the range of the
collimation of light beam；What the liquid crystal on silicon reception was incident treats light-metering,
to entering under the control of liquid crystal on silicon drive module Light loading phase place is
penetrated, output beam is transmitted on analyzer, filters and transmit with after the light in analyzer
optical direction vertical direction To on photo-detector；Photo-detector detects the intensity of the light
after analyzer, and carries out opto-electronic conversion, and light intensity is converted into Light
intensity value feeds back to control unit and carries out data analysiss.

The Polarization Detection system of the embodiment of the present invention 1 is applied to the system
block diagram of optical element polarization characteristic detection and analysis such as Shown in
Fig. 2, optical element to be measured is placed between LCOS and analyzer, the alignment of three's
central axis；

Light source sends the polarized light of polarization state determination, enters line phase through the
Polarization Detection system and loads and filter and inspection Light partially in device optical
direction vertical direction, obtains outgoing beam, obtains outgoing beam polarization information,
contrast by control unit Outgoing beam polarization information obtains the polarization characteristic
of optical element to be measured with incident beam polarization information.
In the present embodiment, the phase place loading of LCOS is to realize automatically controlled
regulation by drive module under control of the computer, Change the phase place of loading by
changing driving voltage, compared to Mechanical course or the control manually of wave plate, with
controllability The characteristics of good, high precision, and then the accuracy of detection of the
system is greatly improved.

In the embodiment of the present invention 2, analyzer optical direction is set to 45 ° of angles of P light
and S light and places；Control unit is adopted Computer is realized, PLC technology is carried out to
liquid crystal on silicon driver element and data analysiss is carried out to outgoing beam, real Existing
automatic detection.

The flow chart of the Polarization Detection method of embodiment 2 is as shown in figure 3, in specific
modulated process, adjusted with 1 ° of phase place Precision processed, loads by the phase theta of
0 to 2 π on P-polarization component；The intensity level I of a series of light is obtained by photo-
detector detection, Draw out θ-I curves；

There is the coordinate (θ of two troughs on θ-I curvesi, Ii), θiRepresent IiThe phase place loaded under
light intensity, i=1 or 2； The first trough (θ is found on θ-I curves1, I1) consecutive points (θm, Im), the
second trough (θ2, I2) consecutive points (θn,In), m In n；

Functional relation analysis between the light intensity set up according to the present invention and
loading phase place is learnt：Light intensity value is 0 When, corresponding coordinate points are two
trough points on θ-I curves, and the two trough points are correspondingValue be π or 2 π, need
Determine that each trough point is correspondingValue；As trough point light intensity value is 0, it is
impossible to mutually distinguish, and two The light intensity value of the consecutive points of trough
has very big difference, so can determine by the light intensity value of trough consecutive pointsValue
For π or 2 π；Relatively two trough consecutive points (θm, Im) and (θn,In) light intensity value size, if
(θm, Im) light intensity put Angle value is more than (θn,In) light intensity value put, then two polarized
component phase contrastFor 2 π-θ1；If (θm, Im) light intensity value put Less than (θn,In) light
intensity value put, then two polarized component phase contrastFor π-θ1。

Determine phase contrastAfterwards, according to light intensity value I of any two points on θ-I curves
and loading phase theta, two are obtained and is polarized The amplitude a and b of component, it is
specific as follows：

The beam trajectory mathematical model of analyzer output is expressed as follows：

The intensity of analyzer output beam is expressed as follows with the functional relationship of loading
phase place：

Wherein, as analyzer optical direction is arranged to P light and 45 ° of angles of S light, therefore
k=tan45 °=1；Ey= (tan45°)Ex=Ex；

By light intensity probe value I, fixed phase contrastAnd loading phase theta, above-mentioned function
I=f (θ) is substituted into, is obtained The amplitude a and b of two polarized component of P, S.

In embodiments of the invention 2, during automatic detection, the flow process of polarization state
supplemental characteristic analysis is as shown in figure 4, tool Body is：

A, presetting light polarization parameter to be measured isWherein a1Represent that the P-polarization
component in the 1st iteration shakes Width；b1Represent the S-polarization component amplitude in
the 1st iteration；Represent the phase of P-polarization component and S-polarization component in
the 1st iteration Potential difference；J takes the integer more than 1；

B, according to light intensity and functional relationship I=f (θ) of loading phase place, obtains the light
intensity value of calculation of the 1st iteration；

C, obtains light beam light strength investigation value to be measured；

D, obtains the error of light intensity probe value and light intensity value of calculation, uses Δ
I1Represent；

E, changing default polarization state parameter isRepeat step b-d, obtain light intensity probe value
and this Iteration obtains the error of light intensity value of calculation, uses Δ I2Represent；

F, relative error Δ I1With error delta I2；If Δ I2More than Δ I1, showCloser to polarization state to be
measured The actual value of parameter,On the basis of to P, the random value of the amplitude of S
both directions with phase contrast respectively plus very little, Iteration；If Δ I2Less than Δ I1, then
showThe actual value of closer polarization state parameter to be measured,On the basis of to P, the
random value of the amplitude of S both directions with phase contrast respectively plus very little,
iteration；

G, iteration, until continuous 10 times acquisitionsIt is identical；

H, what last time iteration was obtainedThe polarization state parameter of light-metering is treated as.

Polarization state supplemental characteristic analysis process is carried out using data fitting method
above, data analysiss are utilized in embodiment 2 Process software matlab to complete, set automatic
detection by loading phase theta and iterative parameter, with realizing fast accurate to inclined The
analysis of polarization state.

In the case where the polarization state of incident illumination determines (i.e. known to the amplitude
and phase contrast of two polarized component of P, S), move Except analyzer, the arbitrary phase in
the range of 0 to 2 π is loaded by some polarized component to incident illumination, changes former
polarization state, Obtain the determination polarized light after polarization information modulation.

Liquid crystal device is wavelength sensitive device, and same loading phase value produces different
phase places to different wavelength and adjusts System.In general, if liquid crystal on silicon meets
the modulation of 0 to 2 π under wavelength X, can complete wavelength can less than maximum
during λ Modulation effect of the phase modulation more than 2 π, so only need to determine
corresponding phase-modulation effect at a particular wavelength, i.e., The detection and analysis and
control of the polarization state of the light to different wave length can be completed, is not limited by
the strict wavelength of wave plate.

The response speed of liquid crystal on silicon is generally 50ms, and the response time of high-speed
silicon base fluid crystalline substance phase-modulation is up to 7ms, phase Than the manual control
in wave plate or Mechanical course, the present invention is obtained using the response time of the
Polarization Detection system of liquid crystal on silicon It is significant to optimize.Simultaneously as
the phase-modulation of the present invention adopts automatically controlled rather than Mechanical
course or controls manually, its analysis Accuracy of detection is also greatly improved.

As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred
embodiments of the present invention, not to The present invention, all any modification, equivalent and
improvement made within the spirit and principles in the present invention etc. are limited, all should be
included Within protection scope of the present invention.