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Outline
What is the killer app for
MEMS/NEMS mechanical filters?
Challenges in fabricating and
integrating RF micro/nano resonators
BSAC/BWRC Integrated Microwatt
Transceiver project 2001-2005
BWRC
Motivation for RF
MEMS
RF Transceiver Block
Diagram
FBARs
Agilent (followed by Lucent, TDK, and Samsung)
are nearing production of these 1-5 GHz resonators
Metal Contact
AlN
Metal Contact
Figure: Thin-Film Bulk Acosutic Resonat or (FBAR)
Outline
What is the killer app for
MEMS/NEMS mechanical filters?
Challenges in fabricating and
integrating RF micro/nano resonators
BSAC/BWRC Integrated Microwatt
Transceiver project 2001-2005
BWRC
Progress in MEMS
Resonators
Structures approaching fo = 1 GHz
Harold Craighead (Cornell): Si at 350 MHz
Clark Nguyen (Michigan): poly-Si at >150 MHz
Michael Roukes (Caltech): SiC at 635 MHz
BWRC
Resonator Design
Choices
High frequency
with micro
rather than nano
Poisson effect:
useful coupling
on sides
Deep sub-m gaps
B. Bircumshaw, O. OReilly,
and A. P. Pisano, BSAC
BWRC
Compare another
stiff mode by
Michigan at IEDM-00
Bulk Longitudinal
Resonator
Resonating mass
Drive electrode
Capacitor gap
Suspension tether
Anchor
1 m
SOI
SENSE
ELECTRODE
RESONATOR
RF resonator:
Double-ended tuning fork design
tine width=35nm; length=0.5m;
spacing=55nm;
thickness=50nm;
gap to electrode=80nm
Single-mask process
BWRC
Req
+
vd
Co
Ceq
is
+
Co
sense
structure node
Leq
M eff
2VP
BWRC
Ceq
C
2VP 2
K eff
Req
n M eff
2QVP
Motional Resistance
Scaling
o 2 A21QV p 2
BWRC
BWRC
Implications of Req
Scaling
Further Application
Issues
Dynamic range
Frequency reproducibility
Fabrication variations
Temperature variations
BWRC
drive vd
-
BWRC
Req
Rint
Leq
Ceq
Rint
is
+
Cint
Co
Co
Cint
sense
-
structure node
Applications?
Not a drop-in replacement of a
ceramic or SAW filter!
Features: high Q resonance with
ultra-low power, but with
impedance
matching and
interconnect issues
Candidate application:
LO-less sensor node transceivers
BWRC
Outline
What is the killer app for
MEMS/NEMS mechanical filters?
Challenges in fabricating and
integrating RF micro/nano resonators
BSAC/BWRC Integrated Microwatt
Transceiver project 2001-2005
BWRC
Goals
Reduce power by 100 x over stateof-the art sensor node transceivers
using CMOS + off-chip components
Can autonomy be achieved?
Less than 100 W average power: use
ambient energy scavenging
Applications: CITRIS project
BWRC
Analog OFDM
Subsamping Transceiver
using RF NM Filters
NM Filter
RF Filter
(Low Q)
LNA
fclock
NM Filter
NM Filter
A
D
NM Filter Specs
Motional resistance: 25 k
10 resonators per channel 2.5 k
Transmitter Architecture
NM Filter
Wideband
Pulse
Generator
NM Filter
PA
NM Filter
- Switches select
transmission tones
Polysilicon MEMS-CMOS
Integration
1.02 MHz tuning fork with Pierce amplifier
3000 -thick polysilicon interconnects
(RC low-pass filters)
200
m
Polycrystalline Silicon
Germanium I I I I V
Semiconductor alloy
B
Al
G a
BWRC
C
Si
G e
V
N
P
As
BWRC
Stacked Resonator on
Amplifier
25 m
Andrea Franke, et al, HH 2000.
BWRC
Schematic Cross-Section
Microshell Encapsulation
(anchors not shown)
Poly-SiGe RF
MEMS technology
Shielded Interconnect
to Drive Electrode
Drive Electrode
BLR
Shielded
Vertical Signal
Path to Gate of
Input Transistor
DC Bias to
Resonator
5-level metal
foundry CMOS
BWRC
Sense Electrode
Poly-SiC Liftoff
Process
DSB CVD
poly-SiC
SiO2
Si
HF Treatment
Exploits poor
nucleation on SiO2
Si
XeF2 Etch
released SiC structures
Si
BWRC
Poly-SiC Test
Structures
10m
patterned Si substrate
BWRC
Parallel Microassembly
Processes
NM Resonator
Metrology
modulator
lens
STM tip
Scanning Acoustic
Tunneling Microscope
Prof. Jeff Bokor
BWRC
Taxonomy of
Microassembly
Parallel microassembly
Multiple parts assembled simultaneously
Deterministic: pre-determined destination
for parts
Stochastic: random process determines
part destinations
Serial microassembly
Pick and place on a microscale
BWRC
Stochastic
Microassembly
Pattern complementary
hydrophobic shapes onto
parts and substrates
using SAMs.
no shape constraints on parts
no bulk micromachining of
substrate
submicron, orientational
alignment
Mirrors onto
Microactuators
Self-assemble
mirrors onto
microactuator
arrays
Si (100)
mirrors
Nickel-polySi
bimorph
actuators
BWRC
Mirrors on
Microactuators
assembled mirror
BWRC
Gravitational energy
well
11,000 elements/min
99.99% yield
1 m alignment
BWRC
Alien Technology
Transceiver Integration
Micropart orientation by complementary binding sites
RF passive
NEMS filter bank
Dense vertical
feedthroughs
CMOS transceiver
BWRC
J. S. Smith and
R. T. Howe
Conclusions
Micro/nano resonators:
Ultra-low power is one application space
Fabrication technology
challenges:
Many, but no show-stoppers
Project Personnel
Faculty Investigators:
Roger Howe and Jan Rabaey, co-PIs
Jeff Bokor (metrology)
Tsu-Jae King (poly-SiGe)
Roya Maboudian (poly-SiC)
Al Pisano (NM resonator design)
Steve Smith (integration by assembly)
BWRC
Acknowledgements
DARPA MEMS Program:
Modular SiGe-RF MEMS Project