MICROSENSORS

BY: GLORIA LISA HASCARYENGTYAS

OUTLINE

• Introduction
• Principle
• Application & Example
• Conclusions
 SENSORS CONTROLLER ACTUATORS

MICROSENSORS
TREND IN SENSOR TECHNOLOGY

• Miniaturization
• Integration (sensor, signal processing and actuator)
1. Sensor with signal processing for linearising sensor output, etc.
2. Sensor with built-in actuator for automatic calibration, change of sensitivity, etc.
• Sensor Arrays
1. One-function units (to improve reliability)
2. Multiple-function units
MICROSENSORS

• Microsensors are millimeter-sized two- and three-dimensional micromachined

structures that have smaller size, improved performance, better reliability, and lower
production costs than many alternative forms of sensors
• Typical sizes of microsensors range between 10 μm (0.01 mm or 10−5 m) up to 5 mm.
• Devices to measure temperature, pressure, force, acceleration, rotational velocity,
humidity, sound, magnetic fields, radiation, optical, biological, biomedical, and
chemical parameters are either in production or at advanced stages of research.
MICROSENSORS

• Materials: Microsensors are usually constructed

from a silicon semiconductor material, but are
sometimes fabricated from other materials, such
as metals, plastics, polymers, glasses, and
ceramics deposited on a silicon base.
• Fabrication Process: CVD (Chemical Vapor
Deposition)-LPCVD, PVD (Physical Vapour
Deposition).
CLASSIFICATION OF SENSOR
PIEZORESISTIVE PRESSURE SENSOR

• Piezoresistors integrated in the

membrane
• Pressure deflects the membrane
• Resistance changes propotional to
deflection and thus to pressure
• Resistance change measure with
Wheatstone Bridge
INTERDIGITAL TRANSDUCER SENSOR

• Interdigitasl transducers using capacitive

measurement are often used in chemical
sensors
• The capacitance can be adjusted by
changing the dielectric properties of the
sensitive layer.
• E.g. resistance of SnO2 sensitive layer
changes when it interacs with certain
substances.
 APPLICATION

• Automobile industry
• Enviromental protection
• Production and process technology
• Military sector
• Medical device and equipment
 APPLICATION

• Automobile industry
• Environmental protection
• Production and process technology
• Military sector
• Medical device and equipment

MICROSENSOR AND SYSTEM FOR WATER QUALITY DETERMINATION

 APPLICATION

• Automobile industry
• Enviromental protection
• Production and process technology
• Military sector
• Medical device and equipment

MICROSENSOR AND SYSTEM FOR INDUSTRIAL INSPECTION

 APPLICATION

• Automobile industry
• Enviromental protection
• Production and process technology
• Military sector
• Medical device and equipment

MICROSENSOR AND SYSTEM FOR MILITARY DEVICES

 APPLICATION

• Automobile industry
• Enviromental protection
• Production and process technology
• Military sector
• Medical device and equipment MICROSENSOR AND SYSTEM FOR MEDICAL DEVICES
CONCLUSIONS

• Microsensors or integrated sensor chips measure many different values at the

same time.
• Demand put on industry: high accuracy, high safety for man and material,
ability to deliver reliable result in real time.
THANK YOU 
REFERENCE:

• www.sciencedirect.com
• https://www.sciencedirect.com/book/9780128138106/sensors-for-
mechatronics#book-description
• http://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf