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Interferometers
✔ Whereas an interferometer works on the same basic
principle as that of an optical flat, it is provided with
arrangements in order to control the lay and orientation of
fringes.
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Laser Interferometers
Interference fringes can be observed with a light intensity that is 1000 times more
than any other monochromatic light source.
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Laser Interferometers
✔ In interferometry, laser light exhibits similar properties as that
of any ‘normal’ light.
✔ The fixed unit called the laser head consists of laser, a pair of
semi- reflectors and two photo-diodes. The sliding unit will have
a corner cube mounted on it.
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Laser Interferometers
Other Applications
flatness, straightness, velocity and vibrations,
etc.
www.optonor.no
Surface Metrology Concepts
✔ If one takes a look at the topology of a surface, surface irregularities
are superimposed on a widely spaced component of surface texture
called waviness.
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Surface Irregularities
Surface irregularities arise primarily due to the following
factors:
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Terminology
✔ Roughness
✔ Waviness
✔ Lay
✔ Flaws
✔ Surface
texture
✔ Error of Form 8
Terminology
Surface finish, also known a surface texture or surface
topography, is the nature of a surface. It comprises the
small local deviations of a surface from the perfectly flat
ideal (a true plane).
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Analysis of Surface Traces
Root Mean Square (R.M.S.)
Value
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1. Root-Means-Square roughness (Ra or RMS)
Closely related to the roughness average (Ra)
Square the distances, average them, and determine the square root of the
result The resulting value is the index for surface texture comparison
2. Usually
Maximum11% higher than the
Peak-Valley Ra value (R or R )
Roughness max t
Determine the distance between the lines that contact the extreme outer and
inner point of the profile
Second most popular method in
industry See figure A
3. Ten-Point Height (Rz)
Averages the distance between the five peaks and five deepest valleys within
the sampling length
See figure B
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Analysis of Surface Traces
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Symbols of Surface Texture
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Methods of Measuring Surface Finish
✔ There are basically two approaches for the
measurement of surface finish, namely, by comparison
and direct measurement.
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Stylus System of Measurement
✔ A skid or shoe drawn over the work-piece surface such that it follows the
general contours of the surface as accurately as possible. The skid also
provides the datum for the stylus
✔ A stylus which moves over the
surface along with the skid,
such that its motion vertically
is relative to the skid. This
factor enables the stylus to
capture the contours of
surface roughness independent
of surface waviness.
✔ A recording device to
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produce a trace or record of
the surface profile
Tomilson Surface Meter
✔ This is a mechanical-optical instrument designed by Dr
Tomlinson of the National Physical laboratory of U.K.
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Tomilson Surface Meter
✔ The sensing element is the stylus, which moves up and
down depending upon the irregularities of the work-piece
surface.
✔ The coils form part of a bridge circuit. A skid or shoe provides the datum to
plot surface roughness. The measuring head can be traversed in a linear
path by an electric motor.
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Taylor Hobson Talysurf
✔ As the stylus moves up and down due to surface irregularities,
the armature is also displaced. This causes variation in the air
gap and causes an imbalance in the bridge circuit.
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Wavelength, Frequency and Cutoff
✔ Skids simplify surface assessment
while using stylus instruments.
However, there is distortion
because of phase relationship
between the stylus and the skid.
✔ It projects a two-dimensional
magnified image of the work-
piece on to a viewing screen to
facilitate measurement.
Profile optical projector
comparator
Tool Maker’s Microscope
https://www.youtube.com/watch?v=SxvC 5
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Tool Maker’s Microscope
✔ It features a vertical supporting column, which is robust
and carries the weight of all other parts of the microscope
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Nanometrology
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Types of Nanomaterials
Type of Material Diameter
nanomateri /
al thickness
in ‘nm’
Nanocrystals Metals, Inorganic materials (oxides, 1-50
nitrides, sulphides, etc)
Nanofilms Layers of quantum dots made of lead 1-10
selenide, indium arsenide, etc
Nanowires Metals, oxides, nitrides, sulphides, etc 1-100
3
0
Applications of Nanotechnology
✔ Nanosensors
✔ Water Purification
✔ Lighting
✔ Nanocomputers
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1
Nanometrology Techniques
Sl. No. Parameter / Property Measurement Technique
1 Morphology: size and shape of Transmission Electron
particles, Crystallographic information: Microscopy (TEM)
detection of atomic scale defects
2 Topography: the surface features, Scanning Electron Microscopy
Morphology: shape and size of the (SEM)
particles, Composition: the elements
and compounds the sample is
composed of, Crystallographic
Three dimensional surface topology:
3 size, shape, roughness, defects, Scanning Tunneling
Microscopy
electronic structures (STM)
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2
Nanometrology Techniques
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4
Transmission Electron Microscope
3
5
Transmission Electron Microscope
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Scanning Electron Microscope
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Scanning Electron Microscope
Sample preparation
✔ All samples must be of an appropriate size to fit in the
specimen chamber and are generally mounted rigidly on a specimen
holder called a specimen stub. Several models of SEM can examine
any part of a 6- inch (15 cm) semiconductor wafer, and some can tilt
an object of that size to 45°.
✔ For conventional imaging in the SEM, specimens must be
electrically conductive, at least at the surface, and electrically
grounded to prevent the accumulation of electrostatic charge at the
surface.
✔ Metal objects require little special preparation for SEM except
for cleaning and mounting on a specimen stub.
✔ Nonconductive specimens: They are usually coated with an
ultrathin coating of electrically conducting material, deposited on
the sample either by low-vacuum sputter coating or by high-vacuum
evaporation. Conductive materials in current use for specimen coating
gold/palladium
include gold, alloy, and 41
graphite.
Scanning Electron Microscope
SEM images
SEM of polymer
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fibers.
Scanning Electron Microscope
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Scanning Tunneling Microscope
✔ A scanning tunneling microscope (STM) is an instrument for
imaging surfaces at the atomic level. Its development in 1981
earned its inventors, Gerd Binnig and Heinrich Rohrer (at IBM
Zürich), the Nobel Prize in Physics in 1986.
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Atomic Force Microscope
✔ An AFM is rather different from other microscopes, because
it does not form an image by focusing light or electrons onto
a surface, like an optical or electron microscope.
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Atomic Force Microscope
Laser Deflection contact
AFM
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X-ra Diffraction System (XRD)
X Ray Diffraction System (XRD)
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X Ray Diffraction System (XRD)
Bragg’s Law
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X Ray Diffraction System (XRD)
Bragg
Law
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2D X Ray Diffraction System (XRD)
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Overview
⚪ Coordinate measuring machines (CMMs) are
extremely powerful metrological instrument
⚪ It is a device for measuring the physical
geometrical characteristics of an object
⚪ This machine may be manually controlled by an
operator or it may be computer controlled.
⚪ Measurements are defined by a probe attached to
the third moving axis of this machine
⚪ This probe touches the part of interest and allows
collecting discrete points on the object's surface.
Measuring using CMM
THE ROLE OF COORDINATE
MEASURING MACHINES
⚪ Manual
⚪ Manual computer assisted
⚪ Motorized computer assisted
⚪ Direct computer controlled
Manual
Cylindricity
Flatness
Roundness
Flatness = 6 faces
Parallelism = 3
Perpendicularity = 12
Total = 21 tolerances
⚪ Dial Indicators
⚪ Test mandrels
⚪ Straight edges
⚪ Spirit levels
Major Tests on Machine Tools
Fig 1
Fig 3
SURFACE PLATE
• The foundation of all geometric accuracy and indeed of all
dimensional measurement is the flat plane.
• The surface plates should be made from a material which will
provide a high degree of rigidity
• Freedom from warping and capable of taking a high finish and the
surface must be resistant to wear.
• Most commonly used material for this purpose is either the plain
or alloyed close-grained cast iron of good quality.
• Granite is also inherently stable, non-magnetic, has excellent
vibration damping characteristics, and will not rust.
• Another material is glass.
• Most surface plates are rectangular, having 4 : 3 length: width
ratio.
The working surface The underside
Squareness Testing
Fig 1
Fig 2
Fig 3
Optical test for squareness
(By using optical square)
• A pentaprism is a five-sided reflecting prism used to deviate a beam
of light by a constant 90°, even if the entry beam is not at 90° to the prism.
• The beam reflects inside the prism twice,allowing the transmission of an
image through a right angle without inverting it as an ordinary right-angle
prism or mirror would.
ASSESSMENT OF ROUNDNESS ERRORS