Physics department

Phyx.430
Experiment #. 1
Vacuum Technology
Student ‘s Name: Rand Aqra
Student ‘s #.: 1153333
Partner’s Name: Khattab Aburub
Partner’s #.: 1152544
Instructor: Prof: E.sader
Date: 19 / 09/ 2018

1
Abstract:
The aim of doing this experiment is to Study the vacuum system,
and familiarize with it. Also to measure the pumps evacuation
speeds (of the mechanical evac.200 vacuum pump and M4
diffusion pump.).and the method we used in our experiment: the
pressure as a function of time was measured in the lab for two
parts (Mechanical Pump part and Diffusion Pump part), these data
were taken and plotted in two graphs for each part “P Vs. t” and
“ln(P-Pu) Vs. t” to study the behavior of pressure as a function of
time, then the system speed of evacuation was calculated:
𝑉×(ln(𝑃0 −𝑃𝑢 )−ln(𝑃−𝑃𝑢 ))
𝑆= and the conductance was calculated:
∆𝑡
180 𝐷4 12𝐷3
𝐶= 𝑃 for viscous flow (mechanical part) and 𝐶 = for
𝐿 𝐿
molecular flow (diffusion part). Finally, the speed of vacuum
1 1 1
pump (SP) was calculated: = + , and its values were plotted
𝑆 𝑆𝑃 𝐶
With pressure in a “SP VS. P” graph to study it as a function of
pressure.

 Theory:
 Introduction to vacuum:
A vacuum is a volume devoid of matter, or we can say it is a
volume filled with gas at any pressure under atmosphere.
The necessary of creating a vacuum conditions formed from its
importance in many physics fields as condensed matter physics, its
uses in many surface processing steps, and to try the experiments
that we want do in the space.
- Vacuum Category:
High vacuum 10-3-10-4 Torr
Very high vacuum 10-5-10-8 Torr
Ultra high vacuum 10-9 Torr and below

2
 We can express the quantity of vacuum using the pressure.
- Pressure units:
1 𝑎𝑡𝑚 = 760 𝑇𝑜𝑟𝑟 = 1 × 105 𝑃𝑎 = 1.013 𝐵𝑎𝑟
 Ideal gas and kinetic theory:
Since the gases at low pressure behave like ideal gases, we can use
the ideal gas low for a vacuum system.
𝑃𝑉 = 𝑁𝑅𝑇.
For the gas molecules in the vacuum chamber, where the
molecules are in a constant motion, during their motion they will
collide with the chamber walls and transfer momentum to the
walls. The average transferred momentum over many collisions
observed as the pressure.
For 1 molecule with mass m and velocity, and If the chamber high
is L and its walls area A:
∆𝑃 2𝑚𝑣 2 𝑚𝑣 2
𝐹= = →𝑃=
∆𝑡 𝐿 𝑉
For N particles:
𝑚𝑣̅𝑝2 𝑛𝑚𝑣̅ 2 3𝐾𝑇
𝑃=𝑁 →𝑃= → 𝐾𝐸 =
𝑉 3 2
 Mean free path:
We can define it as the average distance that the molecule traveled
before collision with another one. This quantity is important for
determine the gas flow properties, thermal conductivity and the
viscosity.
𝑣𝑎𝑣𝑔 𝐾𝑇
𝜆= =
𝑓𝑐𝑜𝑙𝑙𝑖𝑠𝑖𝑜𝑛 20.5 ×𝜋×𝜎 2 ×𝑃
 Gas flow:
- Viscous flow: which prevails in low vacuum, not low
pressure, in viscous flow there are frequent collisions between
molecules, but less frequently with chamber walls, in this case
the mean free path is small.
The conductance formula in viscous flow:

3
 180 𝐷4
𝐶= 𝑃
𝐿

- Molecular flow: which prevails in high vacuum, low pressure,

in molecular flow there are frequent collisions with chamber
walls, but less frequently collisions between molecules, in this
case the mean free path is big.
The conductance formula in viscous flow:
12 𝐷3
𝐶=
𝐿
- Transition flow: between the viscous and molecular, prevails
in medium vacuum.
 Vacuum Pumps:
- Mechanical Pump: the pump is used for viscous flow region,
which includes the pressure from atmospheric pressure to limit
of 10-3Torr. They are used as a “backup” pumps to create the
rough vacuum, and for the operation of mechanical Pump.
The lowest pressure can be measured in this pump is the
ultimate pressure, which is the pressure limited by the pressure
of oil employed.
- Diffusion Pump: the pump is used for molecular flow region,
which includes the pressure from 10-4 to 10-9 Torr. In this pump,
the gas molecule moved from inlet to outlet by transferred
momentum from the oil vapor. The oil is evaporated in an
electrically heat boiler at the bottom of the pump.
 Vacuum gauges:
- Thermocouple gauge: it used for the pressure from
atmospheric pressure to limit of 10-3Torr. The measurements is
carried out by heating an element, where the element makes the
heat, and a thermocouple sensor is spot-welded to it to measure
the temperature.
4
 It works in two methods:
I. Constant temperature:
The temperature of the element should stay constant while
no colder molecules hit it, when they hit it, the
temperature of the element will decrease. So, a current
will pass through the element to keep its temperature
constant.
The amount of the current is used as measurements of the
pressure.
ℎ𝑖𝑔ℎ 𝑝𝑟𝑒𝑠𝑠𝑢𝑟𝑒 → 𝑙𝑎𝑟𝑔𝑒 𝑛𝑢𝑚𝑏𝑒𝑟 𝑜𝑓 𝑚𝑜𝑙𝑒𝑐𝑢𝑙𝑒𝑠 ℎ𝑖𝑡 𝑡ℎ𝑒 𝑒𝑙𝑒𝑚𝑒𝑛𝑡 → 𝑙𝑎𝑟𝑔𝑒 𝑎𝑚𝑜𝑢𝑛𝑡 𝑜𝑓 ℎ𝑒𝑎𝑡 𝑙𝑜𝑠𝑒 → ℎ𝑖𝑔ℎ 𝑐𝑢𝑟𝑟𝑒𝑛𝑡

𝑙𝑜𝑤 𝑝𝑟𝑒𝑠𝑠𝑢𝑟𝑒 → 𝑠𝑚𝑎𝑙𝑙 𝑛𝑢𝑚𝑏𝑒𝑟 𝑜𝑓 𝑚𝑜𝑙𝑒𝑐𝑢𝑙𝑒𝑠 ℎ𝑖𝑡 𝑡ℎ𝑒 𝑒𝑙𝑒𝑚𝑒𝑛𝑡 → 𝑠𝑚𝑎𝑙𝑙 𝑎𝑚𝑜𝑢𝑛𝑡 𝑜𝑓 ℎ𝑒𝑎𝑡 𝑙𝑜𝑠𝑒 → 𝑙𝑜𝑤 𝑐𝑢𝑟𝑟𝑒𝑛𝑡

II. Constant current:

The current of the element should stay constant, when the
colder molecules hit the element, the temperature of the
element will decrease, and the amount of temperature is
used as measurements of the pressure.
- Ionization gauge: it used for the pressure from limit of 10-3
Torr and below. It works by ionizing the gas atoms in the
vacuum volume and collecting and measuring the ion current
produced. And the amount of ion current is used as a
measurements of the pressure.
 Speed of Pumps:
- The system speed:
𝑑𝑃 𝑆
= − (𝑃 − 𝑃𝑢 )
𝑑𝑡 𝑉
𝑃𝑢 𝑡2
𝑑𝑃 𝑆
∫ = −∫ 𝑑𝑡
𝑃0 (𝑃 − 𝑃𝑢 ) 𝑡1 𝑉
𝑆
ln(𝑃 − 𝑃𝑢 ) − ln(𝑃 − 𝑃0 ) = − 𝑡
𝑉

5
 𝑉 × (ln(𝑃0 − 𝑃𝑢 ) − ln(𝑃 − 𝑃𝑢 ))
𝑆=
𝑡
- Throughput (Q):
The volume of gas that entering or leaving the vacuum per unit
time multiplied to pressure, and its related to the mass flow.
𝑄=𝑆𝑃
For the pump speed:
𝑄𝑝 = 𝑆𝑝 𝑃𝑝
𝑎𝑙𝑠𝑜 𝑄 = 𝐶(𝑃1 − 𝑃2 ), where P1 and P2 are the pressure at the
two ends of the system.
𝑄𝑝 = 𝑆𝑝 𝑃𝑝 = 𝐶(𝑃 − 𝑃𝑃 )
This implies that the vacuum system speed is proportional to the
conductance also,

1 1 1
= +
𝑆 𝑆𝑃 𝐶
Procedure:
1) The exhaust hose was taken out from the room.
2) The Vacuum GAUGE CONTROLLER was switched on, then the pressure
reading was taken –which is the reading of the pressure at BZU-.
3) The mechanical pump was switched on.
4) The roughing valve was opened gradually.
5) When the roughing valve is completely open, the readings of the pressure
inside the chamber were taken every 20 seconds.
6) We stop taking readings when the ultimate pressure (nearly 50 mTorr) is
attained.
7) The roughing valve was closed, then the backup diffusion valve was opened
gradually.
8) The cooling water was opened.
9) The high vacuum valve was opened.
10) The heater of the diffusion pump was switched on.
11) Wait until the pressure on the vacuum gauge controller becomes
nearly 1 mTorr.

6
 12) When the pressure becomes nearly 1mTorr, the Ion 8 device was
switched on and the pressure readings were taken every 15 seconds.
13) The vacuum system was shut off following the shut off procedure.
Data:
 The radius of the vacuum chamber (R) = 15.4 cm.
 The height of the vacuum chamber(h) = 60 cm.
 The volume of the vacuum chamber (V) = 44.7 L.
 Part 1: Mechanical Pump:
 The total length of the pipes (L)= 106 cm.
Pipe L (cm)
1 27
2 27
3 34
4 18
 The diameter of the pipes (d) = 2.54 cm.
Time(s) P (Torr)
0 176
20 51.2
40 19.6
60 7.02
80 2.21
100 9.57E-01
120 4.32E-01
140 2.27E-01
160 1.48E-01
180 1.06E-01
200 8.57E-02
220 7.35E-02
240 6.50E-02
260 5.94E-02
280 5.49E-02
300 5.16E-02
320 4.86E-02
 Pressure at BZU = 657 Torr
 Ultimate pressure (Pu) = 16 mTorr.

7
  Part 2: Diffusion Pump:
 The length and the diameter of the tube connected the
diffusion pump with vacuum chamber is: L= 72 cm and
D = 14 cm.

t P t P t P
0 9.00E-04 375 4.30E-05 750 1.80E-05
15 8.20E-04 390 4.20E-05 765 1.70E-05
30 8.80E-04 405 4.00E-05 780 1.70E-05
45 5.80E-04 420 4.00E-05 795 1.60E-05
60 2.40E-04 435 3.80E-05 810 1.60E-05
75 1.80E-04 450 3.70E-05 825 1.60E-05
90 1.40E-04 465 3.60E-05 840 1.60E-05
105 1.20E-04 480 3.50E-05 855 1.60E-05
120 1.10E-04 495 3.40E-05 870 1.50E-05
135 1.00E-04 510 3.40E-05 885 1.40E-05
150 9.20E-05 525 3.30E-05 900 1.40E-05
165 8.40E-05 540 3.20E-05 915 1.40E-05
180 7.80E-05 555 3.00E-05 930 1.40E-05
195 7.40E-05 570 2.80E-05 945 1.40E-05
210 6.90E-05 585 2.70E-05 960 1.30E-05
225 6.50E-05 600 2.60E-05 975 1.30E-05
240 6.20E-05 615 2.40E-05 990 1.30E-05
255 5.80E-05 630 2.40E-05 1005 1.30E-05
270 5.60E-05 645 2.20E-05 1020 1.20E-05
285 5.40E-05 660 2.20E-05 1035 1.20E-05
300 5.20E-05 675 2.00E-05 1050 1.20E-05
315 5.00E-05 690 2.00E-05 1065 1.20E-05
330 4.80E-05 705 1.90E-05 1080 1.20E-05
345 4.60E-05 720 1.80E-05 1095 1.20E-05
360 4.40E-05 735 1.80E-05 1110 1.10E-05

Data Analysis and Calculations:

 Part 1: Mechanical Pump:
Pu= 16 mTorr
180 𝐷4
𝐶= 𝑃
𝐿
8
 time(s) P(Torr) (P -Pu) ln(P -Pu)
0 176 175.984 5.170393
20 51.2 51.184 3.935427
40 19.6 19.584 2.974713
60 7.02 7.004 1.946481
80 2.21 2.194 0.785726
100 9.57E-01 0.941 -0.06081
120 4.32E-01 0.416 -0.87707
140 2.27E-01 0.211 -1.5559
160 1.48E-01 0.132 -2.02495
180 1.06E-01 0.09 -2.40795
200 8.57E-02 0.0697 -2.66355
220 7.35E-02 0.0575 -2.85597
240 6.50E-02 0.049 -3.01593
260 5.94E-02 0.0434 -3.1373
280 5.49E-02 0.0389 -3.24676
300 5.16E-02 0.0356 -3.33541
320 4.86E-02 0.0326 -3.42344

mechanical pump
P vs t
200

150
P (Torr)

100

50

0
0 50 100 150 200 250 300 350
t (s)

9
 mechanical pump
Ln(P-Pu) vs t
6
5
4
3
2
Ln(P-Pu)

1
0
-1
-2
-3
-4
0 50 100 150 t (s) 200 250 300 350

C1 C2 C3 C4 1/C1 1/C2 1/C3 1/C4 1/Ceq

48837.8206 48837.8206 38779.44946 2152.080083 2.04759E-05 2.05E-05 2.58E-05 0.000465 0.000531
14207.36599 14207.36599 11278.79433 1638.048384 7.0386E-05 7.04E-05 8.87E-05 0.00061 0.00084
5438.757295 5438.757295 4315.487421 1238.168994 0.000183866 0.000184 0.000232 0.000808 0.001407
1947.963072 1947.963072 1543.386126 810.186734 0.000513357 0.000513 0.000648 0.001234 0.002909
613.2476337 613.2476337 483.4650429 327.0440037 0.001630663 0.001631 0.002068 0.003058 0.008387
265.5556495 265.5556495 207.3567026 -25.31192347 0.003765689 0.003766 0.004823 -0.03951 -0.02715
119.8746506 119.8746506 91.66885044 -365.0641042 0.008342047 0.008342 0.010909 -0.00274 0.024854
62.98968907 62.98968907 46.49549866 -647.613287 0.015875614 0.015876 0.021507 -0.00154 0.051715
41.06816733 41.06816733 29.08723139 -842.8492223 0.02434976 0.02435 0.034379 -0.00119 0.081892
29.41368741 29.41368741 19.83220322 -1002.262633 0.033997778 0.033998 0.050423 -0.001 0.117421
23.78068878 23.78068878 15.3589396 -1108.655279 0.042050927 0.042051 0.065109 -0.0009 0.148309
20.39533985 20.39533985 12.67057428 -1188.744602 0.049030808 0.049031 0.078923 -0.00084 0.176143
18.03669511 18.03669511 10.79753286 -1255.326917 0.055442529 0.055443 0.092614 -0.0008 0.202702
16.48276445 16.48276445 9.563529108 -1305.841119 0.060669435 0.060669 0.104564 -0.00077 0.225137
15.23407018 15.23407018 8.571918947 -1351.403971 0.065642339 0.065642 0.11666 -0.00074 0.247205
14.31836104 14.31836104 7.844738162 -1388.30231 0.069840396 0.06984 0.127474 -0.00072 0.266434
13.48589819 13.48589819 7.183664722 -1424.944556 0.074151531 0.074152 0.139205 -0.0007 0.286806

10
 S 1/S 1/Sp Sp

2.760149048 0.362299 0.361459 2.766563

2.453672505 0.407552 0.406145 2.462173
2.401814131 0.416352 0.413443 2.418713
2.449932484 0.408175 0.399787 2.501331
2.338348697 0.427652 0.454805 2.198743
2.252679974 0.443916 0.419062 2.386282
2.147608354 0.465634 0.41392 2.415928
2.010199888 0.497463 0.415571 2.40633
1.881954088 0.531363 0.413942 2.415799
1.750887369 0.571139 0.42283 2.365014
1.630811095 0.613192 0.437048 2.288076
1.524703586 0.655865 0.453163 2.206712
1.428283427 0.700141 0.475004 2.105245
1.343738518 0.744192 0.496988 2.012122
1.267364594 0.789039 0.522604 1.913493
1.200451465 0.83302 0.546214 1.830784

mechanical pump
Sp Vs. P
3

2.5

2
Sp(L\s)

1.5

0.5

0
0 10 20 30 40 50 60
P (Torr)

11
 Mechanical Pump:
SP Vs. P
Logarithmic scale
3

2.5

2
SP (L\s)

1.5

0.5

0
0.01 0.1 1 10 100
P (Torr)

 Part 2: Diffusion Pump:

12 𝐷3 12 (14)3
𝐶= = = 457.3
𝐿 72
1
= 2.19 × 10−3
𝐶
1 mbar = 0.750061683 torr
t P (mbar) P (torr) ln (P) S 1/S 1/ Sp Sp
0 9.00E-04 6.75E-04 -7.30072
15 8.20E-04 6.15E-04 -7.39381 22.03354203 0.045385 0.043195 23.15064
30 8.80E-04 6.60E-04 -7.32319 10.91155084 0.091646 0.089456 11.17868
45 5.80E-04 4.35E-04 -7.74008 7.688481738 0.130065 0.127875 7.820156
60 2.40E-04 1.80E-04 -8.62247 6.423741243 0.155673 0.153483 6.5154
75 1.80E-04 1.35E-04 -8.91015 5.310451509 0.188308 0.186118 5.372938
90 1.40E-04 1.05E-04 -9.16147 4.550195757 0.219771 0.217581 4.595995
105 1.20E-04 9.00E-05 -9.31562 3.965791938 0.252156 0.249966 4.000537
120 1.10E-04 8.25E-05 -9.40263 3.502479684 0.285512 0.283322 3.529553
135 1.00E-04 7.50E-05 -9.49794 3.144873534 0.317978 0.315788 3.166683
150 9.20E-05 6.90E-05 -9.58132 2.8552339 0.350234 0.348044 2.8732

12
165 8.40E-05 6.30E-05 -9.67229 2.620312264 0.381634 0.379444 2.635436
180 7.80E-05 5.85E-05 -9.7464 2.420356388 0.413162 0.410972 2.433254
195 7.40E-05 5.55E-05 -9.79905 2.246242691 0.445188 0.442998 2.257347
210 6.90E-05 5.18E-05 -9.869 2.10068797 0.476035 0.473845 2.110397
225 6.50E-05 4.88E-05 -9.92872 1.972506326 0.506969 0.504779 1.981064
240 6.20E-05 4.65E-05 -9.97598 1.858025531 0.538206 0.536016 1.865617
255 5.80E-05 4.35E-05 -10.0427 1.760420517 0.568046 0.565856 1.767234
270 5.60E-05 4.20E-05 -10.0778 1.66842894 0.599366 0.597176 1.674548
285 5.40E-05 4.05E-05 -10.1141 1.586320869 0.630389 0.628199 1.591851
300 5.20E-05 3.90E-05 -10.1519 1.512628134 0.661101 0.658911 1.517656
315 5.00E-05 3.75E-05 -10.1911 1.446163829 0.691485 0.689295 1.450759
330 4.80E-05 3.60E-05 -10.2319 1.385958634 0.721522 0.719332 1.390178
345 4.60E-05 3.45E-05 -10.2745 1.331213809 0.751194 0.749004 1.335106
360 4.40E-05 3.30E-05 -10.3189 1.281265994 0.780478 0.778288 1.284871
375 4.30E-05 3.23E-05 -10.3419 1.232755705 0.811191 0.809001 1.236093
390 4.20E-05 3.15E-05 -10.3654 1.188038981 0.841723 0.839533 1.191138
405 4.00E-05 3.00E-05 -10.4142 1.149422525 0.870002 0.867812 1.152323
420 4.00E-05 3.00E-05 -10.4142 1.108371721 0.902224 0.900034 1.111069
435 3.80E-05 2.85E-05 -10.4655 1.075422835 0.929867 0.927677 1.077962
450 3.70E-05 2.78E-05 -10.4922 1.042224453 0.959486 0.957296 1.044609
465 3.60E-05 2.70E-05 -10.5196 1.011238146 0.988887 0.986697 1.013483
480 3.50E-05 2.63E-05 -10.5478 0.982260367 1.01806 1.01587 0.984378
495 3.40E-05 2.55E-05 -10.5767 0.955112564 1.046997 1.044807 0.957115
510 3.40E-05 2.55E-05 -10.5767 0.927021018 1.078724 1.076534 0.928907
525 3.30E-05 2.48E-05 -10.6066 0.903076469 1.107326 1.105136 0.904866
540 3.20E-05 2.40E-05 -10.6374 0.880538221 1.135669 1.133479 0.88224
555 3.00E-05 2.25E-05 -10.7019 0.861937858 1.160176 1.157986 0.863568
570 2.80E-05 2.10E-05 -10.7709 0.844665777 1.1839 1.18171 0.846231
585 2.70E-05 2.03E-05 -10.8073 0.825786541 1.210967 1.208777 0.827283
600 2.60E-05 1.95E-05 -10.845 0.807953532 1.237695 1.235505 0.809386
615 2.40E-05 1.80E-05 -10.9251 0.794065087 1.259343 1.257153 0.795448
630 2.40E-05 1.80E-05 -10.9251 0.775158775 1.290058 1.287868 0.776477
645 2.20E-05 1.65E-05 -11.0121 0.763161917 1.310338 1.308148 0.76444
660 2.20E-05 1.65E-05 -11.0121 0.745817328 1.340811 1.338621 0.747037
675 2.00E-05 1.50E-05 -11.1074 0.735555262 1.359517 1.357327 0.736742
690 2.00E-05 1.50E-05 -11.1074 0.71956493 1.389729 1.387539 0.720701
705 1.90E-05 1.43E-05 -11.1587 0.707507251 1.413413 1.411223 0.708605
720 1.80E-05 1.35E-05 -11.2127 0.69612419 1.436525 1.434335 0.697187
735 1.80E-05 1.35E-05 -11.2127 0.681917574 1.466453 1.464263 0.682937
750 1.80E-05 1.35E-05 -11.2127 0.668279222 1.496381 1.494191 0.669259
765 1.70E-05 1.28E-05 -11.2699 0.658515553 1.518567 1.516377 0.659467

13
780 1.70E-05 1.28E-05 -11.2699 0.645851792 1.548343 1.546153 0.646767
795 1.60E-05 1.20E-05 -11.3305 0.637074615 1.569675 1.567485 0.637965
810 1.60E-05 1.20E-05 -11.3305 0.625276936 1.599291 1.597101 0.626134
825 1.60E-05 1.20E-05 -11.3305 0.613908265 1.628908 1.626718 0.614735
840 1.60E-05 1.20E-05 -11.3305 0.602945617 1.658524 1.656334 0.603743
855 1.60E-05 1.20E-05 -11.3305 0.592367624 1.688141 1.685951 0.593137
870 1.50E-05 1.13E-05 -11.3951 0.585470334 1.708028 1.705838 0.586222
885 1.40E-05 1.05E-05 -11.4641 0.579031833 1.727021 1.724831 0.579767
900 1.40E-05 1.05E-05 -11.4641 0.569381302 1.756292 1.754102 0.570092
915 1.40E-05 1.05E-05 -11.4641 0.560047182 1.785564 1.783374 0.560735
930 1.40E-05 1.05E-05 -11.4641 0.551014163 1.814835 1.812645 0.55168
945 1.40E-05 1.05E-05 -11.4641 0.542267907 1.844107 1.841917 0.542913
960 1.30E-05 9.75E-06 -11.5382 0.537245623 1.861346 1.859156 0.537878
975 1.30E-05 9.75E-06 -11.5382 0.528980306 1.89043 1.88824 0.529594
990 1.30E-05 9.75E-06 -11.5382 0.520965453 1.919513 1.917323 0.521561
1005 1.30E-05 9.75E-06 -11.5382 0.513189849 1.948597 1.946407 0.513767
1020 1.20E-05 9.00E-06 -11.6182 0.509150693 1.964055 1.961865 0.509719
1035 1.20E-05 9.00E-06 -11.6182 0.501771698 1.992938 1.990748 0.502324
1050 1.20E-05 9.00E-06 -11.6182 0.494603531 2.021821 2.019631 0.49514
1065 1.20E-05 9.00E-06 -11.6182 0.487637284 2.050705 2.048515 0.488159
1080 1.20E-05 9.00E-06 -11.6182 0.480864544 2.079588 2.077398 0.481371
1095 1.20E-05 9.00E-06 -11.6182 0.474277358 2.108471 2.106281 0.47477
1110 1.10E-05 8.25E-06 -11.7052 0.471372176 2.121466 2.119276 0.471859

14
 Diffusion Pump: p vs t
1.00E-03

8.00E-04

6.00E-04
P(Torr)

4.00E-04

2.00E-04

0.00E+00
-80 20 120 220 320 420 520 620 720 820 920 1020 1120
t(s)

Diffusion Pump: ln(P) Vs. t

0

-2

-4

-6
ln(P)

-8

-10

-12

-14
0 100 200 300 400 500 600 700 800 900 1000 1100 1200
t

15
 Diffusion pump: Sp Vs. P
25

20

15
Sp

10

0
0.00E+00 1.00E-04 2.00E-04 3.00E-04 4.00E-04 5.00E-04 6.00E-04 7.00E-04 8.00E-04 9.00E-04 1.00E-03
P

Diffusion Pump:
Logarithmic scale, SP Vs. P
26
24
22
20
18
16
SP (L\s)

14
12
10
8
6
4
2
0
1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E+00
P (Torr)

16
Results and Conclusion:
For the mechanical pump, the pump speed when the pressure is nearly to
atmospheric pressure is large, and it goes smaller as the pressure
deceases, which we can almost notice it in the “SP Vs. P” graph. For the
diffusion pump, the pump speed is slow at first and goes smaller as the
pressure decrease.
 Error sources:
- The vacuum system that we have in our lab is old, hence its
efficiency decreased over time.
- In part 1, there a very small difference between the timer
reading and its pressure reading.
- We assumed that the temperature is constant during our
experiment.
- The errors in the tow devices which we use to measure the
pressure.
 notes:
- The heaters of a diffusion pump should not be turned on unless
a rough vacuum of 10-2 torr has been reached, since otherwise
the oil oxidizes an is unusual for proper pumping action.
- After we switch on the heater of a diffusion pump, the pressure
starts increasing for a temporary period, because of oil vapor
pressure. Then its starts gradually decreasing.

References:
o G.L.weidder. R.W.carlson. Vacuum Physics and
Technology.
o C.Melissinos. 1966. Experiments in Modern Physics.
o Lab. Notes.

17