International Journal of Heat and Mass Transfer 139 (2019) 1031–1036

Contents lists available at ScienceDirect

International Journal of Heat and Mass Transfer

journal homepage: www.elsevier.com/locate/ijhmt

Effect of temperature dependent material properties on thermoelastic

damping in thin beams
Hengliang Zhang a,b,⇑, Seonho Kim b, Geehong Choi b, Danmei Xie a, Hyung Hee Cho b,⇑
a
Hydraulic Machinery Transients Key Laboratory of Ministry of Education, School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China
b
Department of Mechanical Engineering, Yonsei University, Seoul 120749, Republic of Korea

a r t i c l e i n f o a b s t r a c t

Article history: Accurate analysis and control of thermoelastic damping in thin beams are crucial for the design of
Received 26 January 2019 high-performance components such as interferometric gravitational-wave detectors and micro- and
Received in revised form 31 March 2019 nanomechanical resonators. The nonlinear thermoelasticity due to temperature dependent material
Accepted 26 May 2019
properties may be the dominant source of energy dissipation and thermal noise in some cases. In this
Available online 31 May 2019
paper, the effect of temperature dependent material properties on thermoelastic damping is investigated.
Governing equations for nonlinear coupled thermoelasticity in a thin beam with temperature dependent
Keywords:
material properties are described and the perturbation method is used to treat the governing equations.
Quality factor
Thermoelastic damping
An analytical model of thermoelastic damping is derived from the definition of thermoelastic damping,
Temperature dependent material properties and a coefficient n is introduced into the analytical model to represent the effect of temperature depen-
Thermoelasticity dent material properties. Numerical results of the coefficient n in a silicon thin beam with temperature
dependent material properties are presented and validated by the experimental results. From the
obtained numerical results, one can suppress the effect of temperature dependent material properties
by reducing the initial amplitude, cooling the beam and selecting suitable boundary conditions and mode
shapes.
Ó 2019 Elsevier Ltd. All rights reserved.

1. Introduction to the sensitivity of gravitational wave detector [2,3]. For widely

Thermoelastic damping (TED) is a mechanism of structural
damping caused by the coupling between thermal and mechanical
fields. In a bending thermoelastic structure, the portion to the
inside of the bend is forced into compression and that to the out-
side of the bend is forced into tension. As a consequence of the cou-
pling between thermal and mechanical fields, a thermal gradient is
generated and leads to an irreversible heat generation within the
structure. This heat generation will then lead to entropy generation
and eventually energy dissipation.
TED was the dominant mechanism of structural damping in
many applications. For interferometric gravitational-wave detec-
tors, the thermal noise in the suspension wires of the mirrors
due to thermoelastic damping is dominant at room temperature
[1]. TED in suspension wires is one of the fundamental limitations
⇑ Corresponding authors at: Hydraulic Machinery Transients Key Laboratory of
Ministry of Education, School of Power and Mechanical Engineering, Wuhan
University, Wuhan 430072, China (H. Zhang), and Department of Mechanical
Engineering, Yonsei University, Seoul 120749, Republic of Korea (H. H. Cho).
E-mail addresses: zhl8111@sina.com.cn (H. Zhang), hhcho@yonsei.ac.kr
(H.H. Cho).
used micro- and nanomechanical resonators, TED has also been
identified as the dominant loss mechanism at room temperature
in vacuum through both experimental and theoretical studies [4–
8]. Accurate analysis and control of TED are crucial for designing
high-performance components.
The mechanism and amount of linear thermoelastic damping
for a flexural vibrating thin beam have been well studied. The
amount of TED is usually analyzed by the inverse of the quality fac-
tor Q. In 1937, Zener presented a theoretical foundation for TED
and developed an expression to evaluate Quality factor for a thin
beam vibrating in its flexural mode [9,10]. Lifshitz and Roukes pro-
vided an exact expression for TED in a thin beam [11]. To improve
the accuracy of these two models further, many researchers pro-
posed new expressions by taking the deficiencies of these two
models into account. In [12], an analytical study on TED in a
micromechanical resonator operating as a mass sensor by using a
thermal energy approach. The expressions of steady-
state responses for the coupled thermoelastic vibration of a
cracked Euler-Bernoulli beam subjected to a heat flux in [13]. The
effects of size in micro- and nanomechanical beam resonators are
investigated by taking the material length scale parameter, the
phonon mean-free path, and the relaxation time into account in

https://doi.org/10.1016/j.ijheatmasstransfer.2019.05.092
0017-9310/Ó 2019 Elsevier Ltd. All rights reserved.
1032 H. Zhang et al. / International Journal of Heat and Mass Transfer 139 (2019) 1031–1036

[14]. The governing equations of coupled thermoelastic problems As shown in Fig. 1, a thin beam of length L, width c, and thick-
in axisymmetric out-of-plane circular plates are established and ness b is considered and undergoes small flexural vibrations about
the analytical expression for TED is obtained in [15]. the axis of the beam. A Cartesian coordinate system is attached to
At present almost in all of the investigations of TED, material the beam so that the x-coordinate is parallel to the axis, the y- and
properties are assumed to be temperature independent. However, z-axes are parallel to the thickness and width directions, respec-
for most materials, it is a fact that the properties such as the mod- tively. The material properties of the beam are temperature
ulus of elasticity, the thermal conductivity, and the specific heat dependent.
are temperature dependent. To investigate the coupling between If the maximum deflection is less than the beam thickness, and
thermal and mechanical fields, the effect of temperature depen- the distance between node points is greater than ten times the
dent material properties should be evaluated even in a small beam thickness b, the classical Euler–Bernoulli beam theory is
change range of temperature. applicable [19,20]. Under this situation, only pure transverse
Some researchers had studied the effect of temperature depen- motion of the beam in the y direction need to be considered, any
dent material properties on TED preliminarily. The experimental deformation due to Poisson’s effect is neglected [20]. Any plane
results reported in [16] indicate that the change of elastic constants cross section remains plane and perpendicular to the neutral sur-
is the reason of mode sensitivity to doping levels, and the tempera- face during bending. The displacement of the beam in the width
ture dependent elastic constants should be used to predict the direction is zero, the stress in the length direction is the only non-
frequency-temperature dependence of doped silicon resonators. In zero component of the elastic stress tensor, thermal gradients in
[17], a simple analysis of TED in a wire with temperature depen- the plane of the cross section along the y direction are much larger
dence elastic moduli was presented. An interesting conclusion than gradients along the x direction. Thus, the thermal gradients
was drawn that the dependence of the elastic modulus on tempera- along the x direction can be neglected and no thermal gradients
ture will also cause a temperature change upon expansion or con- exist in the z direction [11].
traction of the material. For the case of the suspension fibers used Form the Euler-Bernoulli beam theory, the stress components
in the gravitational wave detectors, this nonlinear thermoelasticity and the axial stain in a thin beam meet:
can be the dominant source of thermal noise. In [18], Shirin Ghaffari,
et al., investigated the effect of temperature dependent material
ryy ¼ rzz ¼ rxy ¼ rxz ¼ ryz ¼ 0; rxx ¼ Eexx  Eah ð1Þ
properties by using finite element method and presented that the and
crystallographic and temperature dependence of TED will be mostly
@ 2 wðx; tÞ
determined by the temperature dependent materials parameters, exx ¼ y ; ð2Þ
such as thermal conductivity and specific heat, which will deter- @x2
mine the strength of TED. To accurately predict the temperature where rij is stress component, eij is strain component, E is Young’s
dependence of TED, the temperature dependence of all the relevant modulus, a is the thermal expansion coefficient, and w(x,t)
material properties should also be carefully accounted for in the describes the deflection of the one-dimensional beam in the y direc-
models for all dissipation mechanisms. tion at some position x.
The dependence of material properties on temperature will @2
By replacing the operator r2 with @y2
and assuming h << T ref ,
cause a temperature change upon expansion or contraction of the
one can obtain the following energy equations in elastic objects
material and affect TED. In this paper, the effect of temperature
subject to small deformations [11]:
dependent material properties on TED is investigated. Firstly, the
nonlinear coupled thermoelastic equations in a thin beam with tem- @ @ @h @ exx
r  ðkrhÞ ¼ ðk hÞ ¼ qC e ðhÞ þ T ref EðhÞaðhÞ ð3Þ
perature dependent material properties are described. Then, the @y @y @t @t
perturbation method is used to treat the nonlinear coupled ther-
where C e is the specific heat, T is temperature, Tref is reference tem-
moelastic equations and a new analytical model of TED is derived.
perature, h ¼ T  T ref is the temperature increment, k is the thermal
A coefficient n is introduced to investigate the effect of temperature
conductivity and q is density.
dependent material properties on TED. The effects of the initial
The equation of motion for an Euler-Bernoulli beam can be
amplitude, the reference temperature, the boundary conditions of
expressed as:
displacements and the mode shape of a vibrating beam on the coef-
ficient n are studied. Finally, numerical results of the coefficient n in Z
@ 2 wðx; tÞ @2
a silicon thin beam with temperature dependent material properties qA ¼ 2 rxx ydA þ f ð4Þ
@t 2 @x A
are presented and validated by the experimental results.

2. Governing equations of nonlinear coupled thermoelasticity

in a thin beam with temperature dependent material properties

In this section, we describe the nonlinear coupled thermoelastic

equations in a thin beam with temperature dependent material
properties. The following two assumptions are used in this paper:

(1) Only thin beams undergoing small flexural vibrations are

considered. Thus, the Euler-Bernoulli beam theory can be
used to describe the governing equations.
(2) To avoid the fluid effects and focus on TED, the beam will be
placed in vacuum and there is no heat flow across the
boundaries of the beam. This condition is reasonable
because in many cases micro/nano-scaled resonators oper-
ate under a high vacuum condition to achieve high quality
factors. Fig. 1. The distribution of the transverse displacement -0 ðxÞ along the x direction.
 H. Zhang et al. / International Journal of Heat and Mass Transfer 139 (2019) 1031–1036 1033

where A = bc is the area of the cross sections and f is the transverse Inducing the same order term of 1, we have:
load. 10 :
Eqs. (3) and (4) describe the governing equations of nonlinear
@ @ @h0 @ @2w
coupled thermoelastic problems in an Euler-Bernoulli beam with  ðk0 h0 Þ ¼ qc0  E0 a0 T ref y ð 2 Þ ð12Þ
temperature dependent material properties. Because the frequency @y @y @t @t @x
of a nonlinear coupled thermoelastic problem may be not a con- and
stant, to investigate the effect of temperature dependent material
properties on TED, the complex-frequency approach is not suitable @2w @4w
qA ¼ E0 I 4 ð13Þ
and we will deduce the expression of TED from its definition. @t 2 @x
Assume that the material properties are linear functions of tem-
11 :
perature [21,22]:
k ¼ k0 ð1 þ k1 hÞ; C e ¼ c0 ð1 þ c1 hÞ; E ¼ E0 ð1 þ E1 hÞ;
@
@y
@
 ðk0 @y @
h1 Þ þ @y @
 ðk0 h0 @y h0 Þ ¼ qc0 @h@t1 þ q c0kc11 h0 @h@t0
ð14Þ
a ¼ a0 ð1 þ a1 hÞ ð5Þ þT ref yð E0k1E1 a0 h0  a0k1a1 E0 h0 Þ @t@ ð@x
@2
2 wÞ;

From the definition of TED, the resonant frequency must hold a The boundary conditions must meet the requirement that there
real value to calculate the energy dissipation and the total energy be no flow of heat across the boundaries of the beam, thus,
per cycle of vibration. To meet this requirement, the transverse
load f is assumed to be: @h0 @h1
j b¼ j ¼0 ð15Þ
Z @y y¼2 @y y¼b
@2 2
f ¼ 2 ðrxx þ E0 exx ÞydA ð6Þ
@x A Eqs. (12) and (13) describe the governing equations of linear
coupled thermoelasticity for a free vibration, while Eq. (14)
that is, a distributed external force rxx þ E0 exx is applied to the
describes the governing equation of linear heat transfer in a beam
beam.
due to an internal heat source. Thus, using the perturbation
Thus the equation of motion will be expressed as:
method, the nonlinear equations have been treated.
@ 2 wðx; tÞ @ 4 wðx; tÞ
qA ¼ E0 I ð7Þ
@t 2 @x4 4. Thermoelastic damping
R
where I ¼ A y dA. 2
In this section we present a new expression of TED from its
Eq. (7) is the well-known linear free vibration equation, and the
definition.
resonant frequency of Eq. (7) will hold a real value as well as the
The solutions of Eqs. (12) and (13) with the boundary condition
elastic dilatation.
of Eq. (15) can be expressed as [11]:
3. Linearization of nonlinear governing equations by using the
wðx; tÞ ¼ Re½-0 ðxÞeixt ; h0 ðx; y; tÞ ¼ Re½#0 ðx; yÞeixt  ð16Þ
perturbation method
" #
In this section we will treat the nonlinear governing equations E0 a0 T ref @ 2 -0 ðxÞ sinðpyÞ
Here #0 ðx; yÞ ¼ y  ; ð17Þ
by using the perturbation method. The perturbation method is a qc 0 @x2 kcosðbp
2
Þ
powerful tool and used widely to obtain approximate solutions
and
of nonlinear ordinary differential equations. In this method, the
solutions are expanded in Taylor series of the perturbation param- -0 ðxÞ ¼ U½A sinðqxÞ þ B cosðqxÞ þ C sinhðqxÞ þ D coshðqxÞ; ð18Þ
eter 1, the series will be convergent when j1j << 1 and will con- qffiffiffiffiffiffiffiffiffiffiffiffiffiffi
verge quickly when j1j << 0:1. From the theory of the where p ¼ i qck00x, x is the real frequency, U is the initial ampli-
perturbation method, usually we only need to keep the zeroth tude, the coefficients A, B, C and D and the allowed values of q are
and first orders of the series and the results will be accurate determined by the boundary conditions of displacements at the
enough if j1j << 0:1. two ends of the beam.
For most materials, jk1 j << 0:1, thus we can take 1 ¼ k1 as a Eq. (14) describes the linear heat transfer equation induced by
perturbation parameter for convenience and express the material an internal heat source with a driving frequency of 2x. One can
properties as:
    assume the response to the internal heat source as:
c1 E1
k ¼ k0 ð1 þ 1hÞ; C e ¼ c0 1 þ 1h ; E ¼ E0 1 þ 1 h ; h1 ðx; y; tÞ ¼ Ref#1 ðx; yÞe2ixt g ð19Þ
k1 k1
 
a1 Substituting Eqs. (16) and (19) into Eqs. (14), we have:
a ¼ a0 1 þ 1h ð8Þ
k1 @
@y
@
 ðk0 @y @
#1 Þ þ @y @
 ðk0 #0 @y #0 Þ ¼ 2ixqc0 #1 þ ixq c0kc11 #20
Expanding h into Taylor series of 1 and neglecting the second ð20Þ
þixT ref yð E0k1E1 a0 #0  a0k1a1 E0 #0 Þð@x 2 -0 Þ
2
@
and higher order terms, one can obtain:
hðx; y; tÞ  h0 ðx; y; tÞ þ 1h1 ðx; y; tÞ ð9Þ The solution of Eq. (20) can be expressed as:

#0 Þ  2qrefc0 ðE0kE1 1 a0 #0 þ a0ka1 1 E0 #0 Þ @@x-20

T y 2
@ @
Substituting Eqs. (8) and (9) into Eqs. (3) and (7), we have: #1 þ c2k
0 c1
#20  2ixq
1
c0
 k0 ð#0 @y
@y
1
pffiffiffi pffiffiffi
@
@y
 ½k0 ð1 þ 1hÞ @y
@
h ¼ qc0 ð1 þ kc11 1hÞ @h
@t ¼ Msinð 2kyÞ þ Ncosð 2kyÞ:
ð10Þ
T ref yðE0 a0 þ E0k1E1 a0 1h þ a0ka1 1 E0 1hÞ @t@ ð@x ð21Þ
2
@
2 wÞ

@#1
and From the boundary condition j
@y y¼2b
¼ 0, we have:

@2w @4w M¼0 ð22Þ

qA ¼ E0 I 4 : ð11Þ
@t 2 @x and
1034 H. Zhang et al. / International Journal of Heat and Mass Transfer 139 (2019) 1031–1036

2
ð @ 2 -0 Þ E1 a1 E0 a0 T ref 2 temperature, boundary conditions and mode shape are selected,
2
2 bp
N ¼ pffiffiffi@x pffiffi ð1 þ þ Þð Þ ½b  tanð Þ: ð23Þ the effect of temperature dependent material properties on TED
2
4 2psinð 2 pbÞ k1 k1 qc0 p 2
will be canceled when n ¼ 0.
Thus,
@ @
5. Results and discussion
#1 ¼  c2k
0 c1
#20 þ 2ixq
1
c0 @y
 ðk0 #0 @y #0 Þ
ð24Þ
1
pffiffiffi
 2qrefc0 ð E0kE1 1 a0 #0  a0ka1 1 E0 #0 Þ @x 2 -0 þ Ncosð
T y @2
2pyÞ; In this section we present the numerical results of the displace-
ment, temperature increment and the coefficient n in a silicon thin
and beam with temperature dependent material properties. The effects
of the initial amplitude, the reference temperature, the boundary
h  h0 þ k1 h1
conditions of displacements and the mode shape of the beam on
¼ #0 eixt þ ½ c21 #20 þ 2ikxq
0 k1
c0
@
@y
@
 ð#0 @y #0 Þ TED are investigated.
pffiffiffi
a þ E0 a0 a1 #0 Þ @x2 -0 þ k1 Ncosð 2pyÞ  e2ixt :
T y @2 - 4
þ 2qrefc0 ðE0 E1 0 #0 The length of the beam L is taken as 10 m, the thickness of the
- 6
ð25Þ beam b is taken as 5  10 m, and the reference temperature is
taken as 300 K. The temperature dependent material properties
The thermoelastic damping is defined as the ratio of the energy of silicon over the range T = 253– 353 K are [18]:
dissipation to the total energy per cycle:
1 DEloss Thermal conductivity:k ¼ 150  0:29  h ðw=m=KÞ,
Q 1 ¼ ð26Þ Specific heat:C e ¼ 700 þ 1:32  h ðJ=Kg=KÞ,
2p Etotal
Linear expansion coefficient:a ¼ ð2:6 þ 0:0082  hÞ  106 ð1=KÞ,
where Etotal and DEloss are the total energy and loss per cycle,
Elastic module:E ¼ ð160  0:01  hÞ  109 ðPaÞ,
respectively.
Density: q ¼ 2320ðkg=m3 Þ.
Because the resonant frequency and the elastic dilatation are
constants, DEloss can be obtained from the cycle net work produced
Firstly, the beam clamped at both ends and vibrating at its fun-
by the external force rxx þ E0 exx per cycle:
damental flexural mode (qn L ¼ 4:73) is considered. The initial
R R period
DEloss ¼ V 0
Re ½ðrxx  E0 exx Þ @@t
exx
dVdt amplitude U is taken as 1:5  10 - 6 m. Fig. 1 shows the distribution
R R period of the transverse displacement -0 ðxÞ. Fig. 2 shows the distribution
¼ Re ½ðE0 þ E0 E1 hÞexx
V 0
of temperature increment Ref#0 ðxÞg considering constant material
ðE0 þ E0 E1 hÞða0 þ a0 a1 hÞh  E0 exx  @@t
exx
dVdt ð27Þ properties.
R R period
 V 0 Re ½k1 E0 E1 h1 exx  E0 a0 h0 From Eq. (30), the effect of temperature dependent material
exx properties will increase with the initial amplitude. Fig. 3 shows
k1 ðE0 E1 a0 þ E0 a0 a1 Þh0 h1  @@t dVdt
the coefficient n for different initial amplitudes. From Fig. 3,
The maximum stored elastic energy in the beam can also be because the coefficient n will increase with the initial amplitude,
expressed as [13,23,24]: one can suppress the effect of temperature dependent material
properties by reducing the initial amplitude.
1
Etotal ¼ qAL2 x2 U 2 ð28Þ From Eqs. (17) and (24), one can arrive at h0 / T ref and h1 / T 2ref .
2
Thus the reference temperature will also affect the coefficient n.
The thermoelastic damping can be obtained by substituting Eq. Fig. 4 shows the coefficient n calculated with a constant initial
(27) and Eq. (28) into Eq. (26):
amplitude U ¼ 1:5  10 - 6 m and qn L ¼ 7:853 for different refer-
R R period exx
Re ½k1 E0 E1 h1 exx  E0 a0 h0  k1 ðE0 E1 a0 þ E0 a0 a1 Þh0 h1  @@t dVdt ence temperatures. From Fig. 4, the coefficient n will increase with
Q 1  V 0 the reference temperature in this case.
1
2
q AL x
2 2 2
U
To investigate the effects of boundary conditions and mode
¼ ð1  nÞ  Q 1
0 shapes on the coefficient n, as shown in Fig. 5, we calculated the
ð29Þ coefficient n using different qn L (determinated by boundary condi-
where Q 0- 1
is TED of the beam with constant material properties tions and mode shapes). The initial amplitude U is 1:5  10 - 6 m
and has been given in [11], the coefficient n represents the effect and the reference temperature is 300 K. From Fig. 5, the coefficient
of temperature dependent material properties on TED and provides
a relation among the energy dissipation, temperature dependent
material properties and TED. The coefficient n can be expressed as
R R period exx
Re ½k1 E0 E1 h1 exx  k1 ðE0 E1 a0 þ E0 a0 a1 Þh0 h1  @@t dVdt
n¼ V 0
R R period @ exx
V 0
Re ðE0 a0 h0 Þ @t dVdt
R
Re ½k1 E0 E1 #1 exx  k1 ðE0 E1 a0 þ E0 a0 a1 Þ#0 #1 y @
2
wðx;tÞ
@x2
dV
¼ V
R
2 V Re ðE0 a0 #0 Þy @ wðx;tÞ
2

@x2
dV
ð30Þ

From Eqs. (17), (18), (24) and (30), one can arrive at n / U 2 ,
meaning that n will increase with the initial amplitude. The larger
the initial amplitude is, the larger the effect of temperature depen-
dent material properties on TED is. The reference temperature, the
boundary conditions of displacements and the mode shape of the
beam involved in the expressions of h0 and h1 will also affect the Fig. 2. The distribution of temperature increment Ref#0 g along the thickness and
coefficient n. Specially, if suitable initial amplitude, reference length direction.
 H. Zhang et al. / International Journal of Heat and Mass Transfer 139 (2019) 1031–1036
Fig. 3. The coefficient n calculated with qn L ¼ 4:73 for different initial amplitudes in
the y direction.
Fig. 4. The coefficient n for different reference temperatures with a constant initial
amplitude U = 1.5  106 m in the direction and qn L ¼ 7:85.
Fig. 5. The coefficient n for different qnL.
n will increase with qn L if the initial amplitude is a constant. If the
beam is vibrating in its fundamental flexural mode, that is
qn L ¼ 1:875 or qn L ¼ 4:73, the coefficient n is very small and the
effect of temperature dependent material properties can be
neglected. However, if qn L > 6 and the beam is vibrating in its sec-
ond or higher flexural mode, the effect of temperature dependent
material properties cannot be neglected and one must take the
effect of temperature dependent material properties into account.
One can suppress the effect of temperature dependent material
properties by selecting suitable boundary conditions and mode
shapes for the purpose of reducing qn L. In comparison with the
result in Fig. 3, Fig. 6 shows the coefficient n calculated with
qn L ¼ 1:875 for different initial amplitudes. From Fig. 6, if the beam
1035
Fig. 6. The coefficient n calculated with qn L ¼ 1:875 for different initial amplitudes
in the y direction.
Fig. 7. The coefficient n calculated by Eq. (30) for different initial amplitudes
compared with the experimental results measured in [25].
is clamped at one end and free at the other vibrating in its funda-
mental flexural mode, the coefficient n is very small even when
U ¼ b ¼ 5  106 m.
Finally, to validate the models and numerical results presented
in this paper, we compared the results calculated by Eq. (30) with
those measured by the experiment in [25]. The beam used in the
experiment is fabricated as a fixed-free silicon cantilever and
- 4
placed in vacuum. The length L of the silicon beam is 10 m, the
- 6
thickness b of the beam is 5  10 m. As we know, if the material
properties are constants, TED is independent of the resonant
amplitude. However, the TED measured in [25] is affected by the
resonant amplitude. Fig. 7 shows the coefficient n calculated by
Eq. (30) for different initial amplitudes compared with the experi-
mental results measured in [25]. From Fig. 7, the results of the
coefficient n calculated by Eq. (30) agree well with the experimen-
tal results measured in [25].
6. Conclusions
We have described governing equations for nonlinear coupled
thermoelasticity in a thin beam with temperature dependent
material properties. By using the perturbation method, the nonlin-
ear thermoelastic problem in a vibrating beam with temperature
dependent material properties aretreated and transformed into
two linear problems. The analytical expression of TED is derived
from its definition, and the coefficient n has been introduced to
represent the effect of temperature dependent material properties
on TED. Numerical results of the coefficient n in a silicon thin beam
1036 H. Zhang et al. / International Journal of Heat and Mass Transfer 139 (2019) 1031–1036
with temperature dependent material properties are presented.
The effects of the initial amplitude, the reference temperature,
the boundary conditions of displacements and the mode shape of
the beam on the coefficient n are investigated. By comparing the
results calculated by Eq. (30) and the experimental results, the
method and the coefficient n presented in this paper is validated.
From the obtained numerical results, TED will increase with the
initial amplitude and the reference temperature. One can suppress
the effect of temperature dependent material properties by reduc-
ing the initial amplitude or cooling the beam.
The boundary conditions of displacements and the mode shape
of a vibrating beam will also affect the coefficient n. The effect of
temperature dependent material properties may be neglected if
the beam is vibrating in its fundamental flexural mode, while the
effect of temperature dependent material properties must be taken
into account if the beam is vibrating in its second or higher flexural
mode. One can also suppress the effect of temperature dependent
material properties by selecting suitable boundary conditions and
mode shapes for the purpose of reducing qn L.
Declaration of Competing Interest
We declare that we have no conflict of interest including any
financial, personal or other relationships with other people or orga-
nizations within three years of beginning the submitted work that
could inappropriately influence, or be perceived to influence, our
work.
Acknowledgments
This work was supported by the Korean Institute of Energy
Technology Evaluation and Planning (KETEP) under a grant funded
by the Korean government Ministry of Trade, Industry and Energy
(No. 20144030200560) and the National Research Foundation of
Korea (NRF) under a grant funded by the Korea government (MEST)
(No. 2011-0017673), the National Natural Science Foundation of
China (Approval Nos. 51376140 and 51776142).
Appendix A. Supplementary material
Supplementary data to this article can be found online at
https://doi.org/10.1016/j.ijheatmasstransfer.2019.05.092.
References
[1] J.E. Logan, J. Hough, N.A. Robertson, Aspects of the thermal motion of a mass
suspended as a pendulum by wires by wires, Phys. Lett. A 183 (1993) 145–152.
[2] Takashi Uchiyama, Shinji Miyoki, Souichi Telada, Kazuhiro Yamamoto,
Masatake Ohashi, Kazuhiro Agatsuma, Koji Arai, Masa-Katsu Fujimoto,
Tomiyoshi Haruyama, Seiji Kawamura, Osamu Miyakawa, Naoko Ohishi,
Takanori Saito, Takakazu Shintomi, Toshikazu Suzuki, Ryutaro Takahashi,
Daisuke Tatsumi, Reduction of thermal fluctuations in a cryogenic laser
interferometric gravitational wave detector, Phys. Rev. Lett. 108 (2012),
141101.
[3] G. Cagnoli, Effects of nonlinear thermoelastic damping in highly stressed
fibers, Phys. Rev. B 65 (2002) 174111.
[4] S. Reid, G. Cagnoli, D.R.M. Crooks, J. Hough, P. Murray, S. Rowan, M.M. Fejer, R.
Route, S. Zappe, Mechanical dissipation in silicon flexures, Phys. Lett. A 351
(2006) 205–211.
[5] T. Syed Hossain, Stewart McWilliama, Atanas A. Popov, An investigation on
thermoelastic damping of high-Q ring resonators, Int. J. Mech. Sci. 106 (2016)
209–219.
[6] Yuming Fang, Pu Li, Thermoelastic damping in thin microrings with two-
dimensional heat conduction, Phys. E: Low-Dimens. Syst. Nanostruct. 69
(2015) 198–206.
[7] Zuo-Yang Zhong, Jian-Ping Zhou, Hai-Lian Zhang, Wen-Ming Zhang, Guang
Meng, Thermoelastic damping in fluid-conveying microresonators, Int. J. Heat
Mass Transf. 93 (2016) 431–440.
[8] Amy Duwel, Rob N. Candler, Thomas W. Kenny, Mathew Varghese, Engineering
MEMS resonators with low thermoelastic damping, J. Microelectromech. Syst.
15 (6) (2006) 1437–1445.
[9] C. Zener, Internal friction in solids I: Theory of internal friction in reeds, Phys.
Rev. 52 (1937) 230–235.
[10] C. Zener, Internal friction in solids II: General theory of thermoelastic internal
friction, Phys. Rev. 53 (1938) 90–99.
[11] R. Lifshitz, M.L. Roukes, Thermoelastic damping in micro- and nano
mechanical systems, Phys. Rev. B 61 (2000) 5600–5609.
[12] S.Y. Chen, X. Niu, F.L. Guo, Thermoelastic damping in micromechanical
resonators operating as mass sensors, Eur. J. Mech. A. Solids 71 (2018) 165–
178.
[13] X. Zhao, Q.J. Hua, W. Crossley, C.C. Du, Y.H. Li, Analytical solutions for the
coupled thermoelastic vibrations of the cracked Euler-Bernoulli beams by
means of Green’s functions, Int. J. Mech. Sci. 128–129 (2017) 37–53.
[14] Hengliang Zhang, Taehwan Kim, Geehong Choi, Hyung Hee Cho, Thermoelastic
damping in micro- and nanomechanical beam resonators considering size
effects, Int. J. Heat Mass Transf. 103 (2016) 783–790.
[15] Yuxin Sun, Hironori Tohmyoh, Thermoelastic damping of the axisymmetric
vibration of circular plate resonators, J. Sound Vib. 319 (2009) 392–405.
[16] Eldwin J. Ng, Vu A. Hong, Yushi Yang, Chae Hyuck Ahn, Camille L.M. Everhart,
Thomas W. Kenny, Temperature dependence of the elastic constants of doped
silicon, J. Microelectromech. Syst. 24 (2015) 730–741.
[17] G. Cagnoli, P.A. Willems, Effects of nonlinear thermoelastic damping in highly
stressed fibers, Phys. Rev. B 65 (2002) 174111-1–9.
[18] Shirin Ghaffari, Eldwin Jiaqiang Ng, Chae Hyuck Ahn, Yushi Yang, Shasha
Wang, Vu A. Hong, Thomas W. Kenny, Accurate modeling of quality factor
behavior of complex silicon MEMS resonators, J. Microelectromech. Syst. 24
(2015) 276–288.
[19] J.H. Ginsberg, Mechanical and Structural Vibrations: Theory and Applications,
Wiley, New York, 2001.
[20] Sairam Prabhakar, Srikar Vengallatore, Theory of thermoelastic damping in
micromechanical resonators with two-dimensional heat conduction, J.
Microelectromech. Syst. 17 (2) (2008) 494–502.
[21] Zhang hengliang, Online thermal monitoring models for induction machines,
IEEE Trans. Energy Convers. 30 (4) (2015) 1279–1287.
[22] Hengliang Zhang, Danmei Xie, Yanzhi Yu, Liangying Yu, Online optimal control
schemes of inlet steam temperature during startup of steam turbines
considering low cycle fatigue, Energy 117 (2016) 105–115.
[23] Zhili Hao, Thermoelastic damping in the contour-mode vibrations of micro-
and nano-electromechanical circular thin-plate resonators, J. Sound Vib. 313
(2008) 77–96.
[24] Shueei-Muh Lin, Analytical solutions for thermoelastic vibrations of beam
resonators with viscous damping in non-Fourier model, Int. J. Mech. Sci. 87
(2014) 26–35.
[25] Weibin Zhang, Energy Dissipations in MEMS Resonators: Fluid Damping of
Flexural Resonators and Thermoelastic Damping, Ph.D. dissertation, University
of California, Santa Barbara, USA, 2006.