SECTION 01357

OUTGASSING CRITERIA FOR

CLEAN ZONE PRODUCTS

PART 1 -- GENERAL

1.0 WORK INCLUDED

A. This Section specifies the selection and/or testing of critical products within the
Clean Zone with regard to outgassing molecular contaminates.

B. The purpose of this Section is to control the level of airborne molecular

contamination (AMC) from materials outgassing into the Clean Zone environment.
1. Materials that come into contact with the air in the Clean Zone or with the
airstream from air-handling systems that serve the Clean Zone, shall comply
with the material outgassing design criteria specified in this Section.
2. Evaluate critical materials proposed for Clean Zone construction to determine
if the outgassed molecules pose sufficient risk to reject its use in the Clean
Zone.

C. Use this Section in conjunction with other applicable sections for the selection of
Clean Zone materials.

2.0 RELATED WORK

A. Use this Section in conjunction with the following other specifications and related
Contract Documents to establish the total Clean Zone material outgassing
requirements:
1. The Contract.
2. Section 01355 - Clean Zone General Requirements.

B. CAUTION: Use of this Section without including the above-listed items results in
omission of basic requirements.

3.0 DEFINITIONS

A. Specific terms and phrases specific to outgassing as defined in SEMI standard F21
are condensed below for reference:
1. AMC Controller: Provided by the Owner and vested with authority by the
Owner to supervise product approval, testing, and application regarding
compliance with AMC criteria. The AMC controller has the authority to
accept or reject materials proposed for installation in the Clean Zone.

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 2. Acids: a corrosive material whose chemical reaction characteristic is that of an
electron acceptor; any solution with a chemical pH less than 7.
3. Areal Density: the property of a material as it is installed indicating the mass
per unit surface area (gram per square cm).
4. Bases: a corrosive material whose chemical reaction characteristic is that of an
electron donor; any solution with a chemical pH greater than 7.
5. Boilers: a group of compounds with a range of boiling points. Low boilers are
compounds that are less retained on a gas chromatography column than
n-decane. Medium boilers are defined as compounds that elute from a gas
chromatography column between n-decane and n-eicosane. High boilers are
defined as compounds that elute from a gas chromatography column after
n-eicosane. This method of categorization is typically used to avoid
identifying the individual compounds.
6. Clean Zone: a defined general clean area in which the concentration of
airborne particle contamination is controlled to specified limits as defined in
Section 01355, Clean Zone General Requirements. The Clean Zone
encompasses cleanrooms of any cleanliness classification, mini-environments,
and remote special rooms for cleanroom support equipment, including spaces,
materials, and utilities within.
7. Condensables: a substance having a boiling point 150 degrees C above room
temperature at atmospheric pressure, capable of condensation on a clean
surface.
8. Dopants: a chemical element which modifies the electrical properties of a
semiconductive material.
9. Outgassing (Offgassing): The spontaneous evolution of a gas or vapor from a
material. This includes desorption of gases, evaporation of volatile materials,
and evolution of decomposition products.
10. pptrM: parts per trillion (Molar).
11. Target Compound: a contaminant that is, by itself or in combination with
other compounds, detrimental to the manufacturing process.
12. TD-GC-MS: industry abbreviation for analytical test procedure using thermal
desorption-gas chromatography-mass spectrometry.

4.0 SYSTEM DESCRIPTION

A. Product manufacturers and contractors have the obligation to furnish and install
materials, finishes, and assembly techniques that achieve the AMC performance
criteria established for this project. The required contamination level will be defined
by the Owner at the initiation of the project according to SEMI F21.

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5.0 DESIGN CRITERIA

A. Base the project design criteria for the amount of acceptable outgassing upon the
specified molecular contamination level classification as defined in SEMI F21,
Classification of Airborne Molecular Contaminant Levels in Clean Environments.
Consult the Client for Specific Cleanroom AMC contamination levels.

B. Based the Client requirements, the MAU outlet AMC outlet specifications at Annex
10:
1. F <0.167ppb
2. Cl <0.101ppb
3. NO3 <0.865ppb
4. PO4 <=0.042ppb
5. SO4 <0.11ppb
6. NH4 <1.024ppb

C. Submit products for use in the Clean Zone which satisfy one of the following
criteria:
1. Laboratory tests by an approved, independent laboratory confirming the
product does not outgas within the detection limits of the equipment, the
product does not outgas process critical or target compounds, and the product
does not outgas process critical or target compounds at a sufficient rate to pose
a manufacturing yield risk.
2. Approval by the controller based on previous experience and listed in
Section 01357.dat.
3. Waiver by the controller based on exception(s), even when the product exceeds
the outgassing test criteria. Allowable exceptions include, but are not limited
to:
a. The quantity of the product used in the Clean Zone is not sufficient to
pose a contamination risk.
b. The product is sufficiently segregated or remote from the process
affected by the target compound(s).
c. The product areal density is high.
d. The product is not directly in the Clean Zone airstream or is fully
encapsulated.
e. The target compound has a low boiling point and/or is considered low
risk to outgas in cleanroom conditions.

6.0 QUALITY ASSURANCE

A. Review this Section with the controller and incorporate requirements pertaining to
Clean Zone product selection and outgassing test criteria.

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 B. Utilize a test laboratory having documented experience with TD-GC-MS conducted
by qualified technicians.

C. The controller shall review Clean Zone product specifications and material
outgassing test results.

D. Maintain a field file documenting products submitted for outgassing tests,

incorporating matched laboratory test results.

E. Maintain an updated field file listing product manufacturer/type approved for use on
this project.

7.0 SUBMITTALS

A. Test Samples:
1. Provide test samples to the controller for independent testing by an approved
laboratory. If the manufacturer chooses to conduct separate tests, they shall be
performed by a laboratory approved by the controller and conform to the
material outgassing test criteria specified in Part 3.
2. The controller determines the size, shape, weight, quantity, and state of the
sample based on its type and use. Prepare samples requiring joining, mixing,
curing, or priming using manufacturer's recommended methods and
specifically document each preparation step as it occurs.
3. Prepare samples in the same manner in which they would be applied or
installed in the Clean Zone. If specific cleaning procedures are required before
the product enters the Clean Zone, submit these samples in the cleaned state.

4. Where two or more materials have a potential for reacting in combination with
one another to outgas, an additional compatibility test is required. Prepare the
test sample simulating as close as possible the Clean Zone installation and
atmosphere, and submit for tests within 1 week after sample preparation.
5. For compounds requiring mixing or air curing, include dates, field conditions
at time samples were taken (temperature, relative humidity of both the space
and the ambient), and operators' names in the field file.

B. Submit test reports at the time of Bid submittal. Include at a minimum, the
information required by the data sheet provided in Section 01357.dat, Outgassing
Materials Test Results Data Sheet and also include additional data generated from
testing in tabular form.

C. Submit record documents within 2 weeks of completion of cleanroom construction

Stage 4:
1. Assembled in a Standard Three-Ring Binder:
a. Field file of products submitted for outgassing tests.

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 b. Field file of products approved for use on the project.
c. Field file of products rejected for use on the project.
d. Laboratory test results.
e. Maintain an updated field file listing product manufacturer/type
approved for use on this project.
2. Laboratory test results extracted from samples submitted directly to the
controller for independent testing, shall become the property of the controller.
Product manufacturers shall not use these results for promotional or financial
advantage without written release by the controller.
3. One sample of construction products, sealed in plastic or shrinkwrap, for
storage and future testing by the controller. Suitable samples would include
one reasonably-sized segment of floor, wall, ceiling components (minimum
size 1 square foot); tube of sealants; sample from gel pours (1/2-inch deep in a
3/4-inch-wide track 6 inches in length); gaskets; cleaning agents; can of paint
and mastic; etc.

PART 2 -- PRODUCTS

1.0 OUTGASSING CRITERIA FOR PRODUCT ACCEPTANCE

A. Acceptable Laboratories for Product Outgassing Testing:

1. Others as approved by Owner.

B. Outgassing Test Criteria:

1. The controller will determine the outgassing test criteria and acceptance of
each Clean Zone product.
2. The outgassing test criteria will contain but is not limited to the following
parameters:
a. Acceptable levels for the target compounds, expressed as ppmw, ppmM,
ppmV, and/or nanograms per square cm.
b. Time and temperature parameters for the sample treatment prior to
TD-GC-MS analysis.
c. Specific target compounds to be identified in the analysis.
d. Details for sample amounts, composition, preparation, and procedures
for submittal to the testing laboratory.

PART 3 -- EXECUTION

1.0 TEST PROCEDURE

A. Analyze products for outgassing by dynamic head-space method as described in the

technical paper Organic Outgassing from Cleanroom Materials HEPA/LLPA Filter

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 Components - Standardized Test Proposal, presented at the IEST Annual Technical
Meeting of May 1997. Laboratories shall employ the procedures described therein.
For any variations in test conditions, submit system description to the controller for
approval.

B. Outgassing tests performed according to IDEMA Standard Document No. M11-99

are also acceptable.

C. Perform semiquantitative analysis of the amounts of each outgassed compound by

using the response factor for n-decane (C10H22). Where possible, identify the
hydrocarbons. Otherwise, divide results into boiling point ranges as follows:
1. Low Boilers: C6H14 to C10H22.
2. Medium Boilers: C11H22 to C20H42.
3. High Boilers: greater than C20H42.
The above categories are defined based on use of a nonpolar poly (dimethysiloxane)
GC column.

D. Use the latest edition of National Institute for Standards and Technology (NIST), or
Wiley 275,000 Compounds Mass Spectra Library for identification of each
outgassed compound. If there is not a match, interpret mass spectra manually to give
the best estimate of the most probable compound or class of compounds.

E. Analyze an empty standard blank container and a hydrocarbon standard mixture per
EPA Method 524.2 containing 500 ng each of a series of n-alkanes from n-hexane to
n-octacosane (C28C58). Use this standard to calibrate instruments, to assess the
sensitivity of the GC-MS, and to determine the boiling point range of compounds
that can be detected by the instrument.

F. Present the chromatograms produced by the individual samples as part of the test
data. Identify the major outgassed compounds on the chromatogram.

G. Measure and document the areal density (grams per square cm) of the product as part
of the test data.

H. Express outgassing test results as ppmw (parts per million by weight, g per gram)
and nanogram per square centimeter.

I. Summarize test results on a form similar to the outgassing test results data sheet,
included in Section 01357.dat, Outgassing Materials Test Results Data Sheet.

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2.0 INSTALLATION

A. Perform construction activities regarding Clean Zone product handling in

compliance with the requirements of Section 01355, Clean Zone General
Requirements, under the direction and coordination specified in Section 13004,
Clean Zone Systems.

END OF SECTION

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