1.

期末考範圍: Metal–semiconductor junction ~ MOS transistor

2. Close Book
3. 可攜帶計算機, 嚴禁攜帶手機
4. 題目卷請務必簽名繳回, 否則以零分計

kT q = 0.0259 V at 300K, q = 1.6 10−19 C , ni = 1010 cm−3 , Eg(silicon) = 1.12 eV

 s (silicon) = 11.9  8.85 10−14 F / cm ,  ox = 3.9  8.85 10−14 F / cm

qbi = qBn − ( Ec − EF )
 q(B − V )   2 mn kT   q(B − V ) 
3/2
2kT
n = Nc exp  −  = 2  exp −  vthx =
 kT   h
2
  kT   mn
1 4 qmn k 2 2  q   qV   qV 
J S →M = qnvthx = T exp  − B  exp    J 0 exp  
 kT   kT   kT 
3
2 h
 q  4 qmn k 2
  qV  
I 0 = AKT 2 exp  − B  K= ≈ 100 A/(cm2/K2) I = I 0  exp   − 1
 kT   kT  
3
h 
 8 2 m  W s
P  exp  −2T
 2 (V H − E ) 

T  dep = (Bn − V )
 h  2 2 qN d

 H  4
P  exp  −
 ( Bn − V ) 

H  s mn
 N d  h
1 1  H (Bn − V ) 
J S →M = qN d vthx P = qN d vthx exp  − 
2 2  N
 d 
V 2exp H Bn N d
Rc  =
( )
J qvthx H N d
 q 
Vfb =  g - s ps = N a exp  − s 
 kT 
Qsub Qsub  ox
Vg = Vfb + s + Vox =− Vox = oxTox = − Cox =
ox
 ox Cox Tox

2 ss kT  N a 
Wdep = Qdep = −qN aWdep st = 2B = 2 ln  
qN a q  ni 

Qsub Q + Qinv
Vt = Vfb + s + Vox = Vfb + st − = Vfb + 2B − dep
Cox Cox
Qdep qN a 2 s 2B
Vt  Vfb + 2B − = Vfb + 2B +
Cox Cox

1
 qN d 2 s st kT  N d 
Vt = Vfb + st − st = −2B = −2 ln  
Cox q  ni 

1 1 1 s CoxCdep Cox Cox

= + Cdep = C= = =
C Cox Cdep Wdep Cox + Cdep 1 + Cox Cdep  ox W dep
1+
 s T ox
Qox Q
Vfb = Vfb0 − =  g - s − ox qN polyWdpoly =  ox ox
Cox Cox
−1 −1
 1 1 1  T W T   ox 
Coxe =  + +  =  ox + dpoly + inv  = = ox
 Cox C poly Cinv    ox s s  Tox + Wdpoly 3 + Tinv 3 Toxe
 
Qinv = −Coxe Vg − Vt( )
I ds = WQinvvd
s   
( )
C
Cdep = Qinv = −Coxe Vgs − Vt 0 + CdepVsb = −Coxe  Vgs −  Vt 0 + dep Vsb  
Wd max   Coxe 

( )
Cdep
Qinv ( x) = −Coxe Vgs − mVcs ( x) − Vt m =1+
Coxe

 m  Vgs − Vt
W W
( )
2
I ds = Coxe ns  Vgs − Vt − Vds Vds Vdsat = I dsat = Coxe ns Vgs − Vt
L  2  m 2mL
ns
vd = = 2vsat ns
1+
sat
sat

I ds = WQinvvd = WCoxe Vgs − mVcs − Vt ( ) 1 +ns

sat
long - channel I ds
I ds =
V (
I ds = WQinvvd = WCoxe Vgs − Vt − mVdsat vsat )
1 + ds
sat L
1 m 1 long - channel I dsat
= + I dsat =
Vdsat Vgs − Vt sat L
V −V
1 + gs t
m sat L

kT q = 0.0259 V at 300K, q = 1.6 10−19 C , ni = 1010 cm−3

2
 
n( E ) = Dc ( E ) f ( E ) n=

0
Dc ( E ) f ( E )dE

8 mn 2mn ( E − Ec ) 8 m p 2m p ( Ev − E )
Dc ( E ) = E  Ec Dv ( E ) = E  Ev
h3 h3
1  E − EF 
f (E) = f ( E ) = exp  − 
 E − EF   kT 
1 + exp  
 kT 
 2 mn kT 
3/2
 Ec − EF 
n = Nc exp  −  when Ec − EF  3kT , where Nc = 2  
 kT   h 
2

 2 m p kT 
3/2
 EF − Ev 
p = Nv exp  −  when EF − Ev  3kT , where N c = 2  
 kT  2
 h 

 E − Ei   Ei − Ev 
ni = N c exp  − c  = N v exp  − 
 kT   kT 
np = ni 2 n + Na = p + Nd
3 1
kT = mnvth2
2 2
q  mp q
m p v = q  mp v = = p  p = mp
mp mp

J p ,drift = qpv = qp p J n,drift = −qnv = qnn J drift = J n,drift + J p,drift = ( qnn + qp p )
 = qnn + qp p
dp dn
J p ,diffusion = −qD p
J n,diffusion = qDn
dx dx
dV 1 dEc 1 dEv Dn kT Dp kT
=− = = = =
dx q dx q dx n q p q
d n n d p p  t
=− =− n(t ) = n(t = 0)exp  − 
dt  dt   
 E − EFn   E − Ev 
n = Nc exp  − c  p = Nv exp  − Fp 
 kT   kT 
3
 kT  N d N a  d  d 2V d 
bi = ln   = = − = −
q  ni 2  dx  s dx 2 dx s
2 s Na 2 s Nd
xN = − bi , xN = bi
q Nd ( Na + Nd ) q Na ( Na + Nd )
2 s  1 1  2 s  1 1 
Wdep =  + (
 bi − V A ) =  +  ( poential barrier height )
q  Na Nd  q  Na Nd 
 E − EFn   Ec − EFp   EFn − EFp   qV  ni
2
 qV 
n( xP ) = N c exp  − c  = N c exp  −  exp   = nP 0 exp  = exp  
 kT   kT   kT   kT  Na  kT 
 qV  ni  qV 
2
p( xN ) = pN 0 exp  = exp  
 kT  Nd  kT 
  qV     qV  
n( xP )  n( xP ) − nP 0 = nP 0  exp   − 1 p( xN )  p( xN ) − pN 0 = pN 0  exp   − 1
  kT     kT  
dJ p 2
d p p
− P =q qD p 2 = q
dx  dx p
d 2 p p p d 2 n n n
= = 2 Lp = Dp p = = 2 Ln = Dn n
dx 2
Dp p Lp dx 2
Dn n Ln
  qV    x − xN 
p ( x) = pN 0  exp  −
 1 exp  −  x  xN
  kT    Lp 
  qV    x − xp 
n( x) = nP 0  exp  −
 1 exp   x  xP
  kT    Ln 
d p ( x) D   qV    x − xN 
J pN ( x) = −qDP = q p pN 0  exp  −
 1 exp  − 
dx Lp   kT    Lp 
d n( x) D   qV    x − xP 
J nP ( x) = qDn = q n nP 0  exp   − 1 exp  
dx Ln   kT    Ln 
 D D   qV  
J = J pN ( xN ) + J nP ( xP ) =  q p p N 0 + q n nP 0   exp   − 1 at all x
 L L   kT  
 p n 
  qV    Dp Dn 
I = I 0  exp  −
  1 where I = qAn i 
2
+ 
  kT  
0 L N
 p d Ln N a 
 E − EFn   EFp − Ev   qV   qV 
np = Nc exp  − c  Nv exp  −  = ni exp 
2
 n  p  ni exp  
 kT   kT   kT   2kT 
  qV   ni   qV  
I = I 0  exp   − 1 + qAWdep  exp   − 1
  kT    dep   2kT  
s 2

p = ( x = 0) =
2qN
s
(bi + Vr ) VB =
2qN
crit
− bi

4
 s 1 Wdep 2 2 (bi + Vr )
Cdep = A = =
Wdep Cdep 2 A2 s 2 qN  s A2