Lecture 7.

Vacuum Technology

7-1. Kinetic theory of gases

A. Molecular velocity.

Steady-state distribution of molecular velocity.

2
1 dn 4 M 3  Mv 2 
f (v) =  =   v 2  exp  −  Maxwell − Boltzman formula
n dv  2 RT  2 RT 

f (v) : fractional number of molecules f (v) ~ M , T

n : # of gases unit volume

M : Molecular Weight
 2 RT
vm = most probable derivation?
M

v=
8 RT
average =
 0
vf (v) dv
M 
 0
f (v)dv

3RT 3RT
v2 = v2 =
M M

1 3
Kinetic energy ( K .E.) =   M v 2 =   RT
2 2

B. Pressure.

1 nM 2 nRT
P = v =  ideal − gas law
3 NA NA

mean free path

kT
mfp =  : collision cross-section
1.414 P  

for ambient air

5  10−3
mfp = mfp [cm], P [torr ]
P

C. Gas Impingement on surfaces.

1
 1 dnx M  M  vx2 

2
= v x dnx  f (v x ) = =  exp  − 
0 n dv x 2 RT  2 RT 

1
n M   M  vx2  RT

2
=   v x  exp  −  dv x = n
1
RT 0
 2 RT  2 M
(2 )2
 P  moles 
  / NA =  
2 MRT  cm 2  sec 

P  moles 
  = 3.513  1022   P [torr ]
MT  cm 2  sec 
10−6 torr  s = 1L [ Langmuir ] sticking probability = 1

characteristic contamination time  c derivation?

for complete monolayer cov erage of a surface containing 1015 atoms / cm 2

1 1
1015 ( MT ) 2 −8 ( MT )
2
c = = 2.85  10 sec P [torr ] (assuming S = 1)
3.513  1022 P P

1atm   c = 3.49  10−9 sec

10−10 torr   c = 7.3hr
 7-2. Gas Transport

A. Gas flow regime: f (P, T type of gas)

Molecular flow Kn < 1 UHV

Intermediate flow 1 < Kn < 110

(transition)
Viscous flow Kn > 110 CVD

Dp
Kn = K n : Knudsen number D p : chamber ( pipe) diameter
mpf
mpf : mean free path

These regimes depend on P, T, Gas, Geometry of the system.

D p  P < 5  10-3cm  torr for Molecular flow

In Air,
D p  P > 5  10-1cm  torr for Viscous flow
B. Conductance, C [L/s]

P1 A P2

P1 > P2
orifice

Gas throughput Q = C ( P1 – P2 ) Analogy : I = V/R (Ohm’s Law)

[torrL/sec] Driving force

Conductance
 When conductances are joined in series

1 1 1 1
= + + + 
Csys C1 C2 C3

C
1
=
i i

When conductances are joined in parallel

Csys = C1 + C2 + C3 +  = C i
i

※ “ It is always desirable to have as large as a conductance as possible. ”

C. Pumping speed

Pumping speed
chamber

Q
S2 =
C P2 P2

P1
Pump

At steady state,

Q Q
Q = C  ( P1 − P2 ) = C   −  Q : gas load
 S1 S 2 

1 1 1
 = − S1 : effective pumping speed
C S1 S 2
S 2 : speed of the pump
S2
 S1 =
1 + S2 / C
D. Pumpdown time.

Mass balance for a system which is being pumped down

for const volume

dP
−V = Qoutput − Qinput = SP − Qinput
dt

for const. Qinput and S

Qinput  Qinput   S 
P= − − Pinitial   exp  −  t 
S  S   V 

where V / S : time const.

Qinput
t →  then P = = ultimate pressure
S

E. Creating a vacuum.

* Vacuum system = chamber + pump.

Viscous flow Transition flow Molecular flow

Liquid-like Quick Random molecular

(even population) ~ negligible motion

C = F1  Pa  D 4 / L C = F2  D3 / L

C: conductance [L/s], F1 = 2950 [inch], Pa= average pressure [torr]

F2 = 78
F. Pumping down.

Low vacuum ⎯⎯⎯⎯⎯⎯

→ High vacuum or UHV

Viscous flow ⎯⎯⎯⎯⎯

Transition flow
⎯→ Molecular flow

Volume ⎯⎯⎯⎯⎯⎯
→ Surface
10−4 ~ 10−7 torr
Composition  const. H 2O H2
Bake − out required Ti sub lim ation pump

# Chamber material and surface treatment is very important !!!