Professional Documents
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Basic Cleanroom Practice
Basic Cleanroom Practice
Oxide
Si
80
60
Oxide th
40
20
0
0 50 100 150 200
Oxidation time (min)
Silicon VLSI Technology, J. D. Plummer, M. D. Deal, P. B. Griffin
Anil Kottantharayil, IIT-B 10
Contaminants, impact & sources
(5)
• Particle contamination
– Size of typical air borne particles can be of the
order of magnitude of the structural dimensions
of your devices and structures you make
– Sources
• Air
• Human beings: 5000000 to 10000000
p
particles/minute
• Clean room walls
• Gases and chemicals
• Processes and equipment
Anil Kottantharayil, IIT-B 11
Contaminants, impact & sources
(6)
• Particle contamination (cont.)
– Example
H
Human h
hair
i
80μm
With permission
i i ffrom www.semguy.com
Courtesy: Seena
Particle/fiber
mask
5
10
4
10 class 100000
Particles per c
3
10 10000
2
10 1000
1 100
10 10
0 1
10
0.1 1 10 100
Particle size (m)
Silicon VLSI Technology, J. D. Plummer, M. D. Deal, P. B. Griffin
Anil Kottantharayil, IIT-B 16
Contaminants, impact & sources
(10)
• Summary of sources of contamination
– Air
Ai
– Gases
– Liquid chemicals
– Solid chemicals
– Processingg equipment
q p
– Inspection equipment
– Processes
– Tools
• Equipment maintenance
• Handling of wafers
Fresh
HEPA Clean
Filters Cooling
air Filters room
Filters
Pressure
Perforated
floor
To
AHU
Filters
Pressure
To To
AHU AHU
http://www.millipore.com/labwater/lw3/watertypes
– Hair
– Costumes