Pasricabn of ophca fr%¢rs9

Sehemah'e llftahan ofe rafor pal cleperihty

techniq weol n
oph'ca ibe
Srely, Sifo, Ge lu, BCl, 0 ee

Stau
afew

Chinvcol raper elepetien

flame hyehuoi

a chivaleM
Vapo Oufsicle Vapr Mocli'fecl CLem Plama
Axi ical taboy Ckemical taper
PhUe oxiclahod deporipion(MC
Deposihm| pA Ocetuovpo) olepuihon PevD

1
Coll apse fo
PLe fom

Paam
eaf ZNe
Puun@nce

apr-Phave Oxrelt ai a
ctsiele
eguted gat Cmapofi hem
Ja t PLoceu e
dehotifed la/esally fom acop
kydo1yeiag ha Kalicle ap in dn OxYgen-yolujeg
engh te appesheitate
Jlame Ox1gtn i paded
oalputs Ze Lemon'g
pili'eon cetnhoun (i.tSRC1aJ cNch u
an nehiuike Dopan Ju CL
U Ue (ly or 7eCly auc
 a cleleel A he nuixfuu / 0/0 un fungh f1e
oNJgonyaltogun lame
ta folfsuij Lsathou,
keal

SrClyt H,0. S0, f YHc/

(abe) (ralpr) (ptid)Ju
Stcly t 0A sro,+ 0,
(ratiel)
ecly t 0
(raper) gu (sutid
0 Ticlyt0 Ae TO 7

rabr) auy (salidy g)

qenesalad ay a h e Jotobcs
T/ dlica
ilica 7e
aeh7 nua od1e).
i olepodi/ced o ccol

ame 0 e h u n e r i Levseel
6ack 2 ft
manole.e) Yah a ulit'e
Ov ng o he
olehetife/
(app eo)
aue

of Silica
na
oaye
e manclt el w
lLan h poc U Uup lered
3 potu mat o Jilic f
Lemotreol e
leued (to fonm bidy
do, + thahabelc
yyburne vapo anolee

ca)- Sot elehaitëy

Pig
75) efm
C) fiser diauiy
founa Parn
 c(adel g/useo
nay otain bofA (oAe
. 7he pefm duwj
e olopanft cMentuahoy duw
propa ly rayg Ki/omefu (arounel fo em
. Setu
ptoceif been
leotie Sert ate been pLo d clced)
Lodet Cad)
vautt/er

o120Um
coLe
callapsi-g A cloSi
pte form 5y
can 5e l t ar cwr pom th
cenfeal kele.

cuutuof he
idex geaaliensfr aadeel index
Pine h
be aceutec) w fu ptoceu a

50 may
e achh
Can 6e adwled a l h cmmplehia of
qa lows

Tia puity o 9laer stn dleheneli e puit

ofeaeli mafw X all upas te mduat
pom e expol e o ilica to
OH npuity
in he lame.
Cbafu rapr
DiraduanFau oOvfo

ci CLa ckt mayJge

olue p theti cmeenfhahm
iside a l cdhen Hhe
he Sulace of the
mandse remoueo.

cir) Reac fire index profi/e ku a censral olehettiog

olut fo he coflapreol ole cohan fi%er s

c ia pesteuoieck linuf ifr we

ahch
for vefume ptsdu ch of ophcal fL ert
fr
 Pla/ma -achrttd Cti cq) Vapu Depoti h m

Ataiah
10 ct/D ehniq cuu
plauma duph enu
we tyh lahmcn Loliel u
of Lalrel
epur p
xela h -
Lewe o

fr h
le velop ec ty zufpes koewgs
TLis c fhe
d fidt
Iacle eel cLou ca ar altpoiheu
jattolur
Plasma -
i ca fa5 a l w) in 7
diede a

Msra i o u a v e I m - i r o f H U n a s

Plwmn

Silica Heah
Cnfo tuse
U

is e p}inulahon o/ Arele fmmaRern

)MICVD p200etr
meons nm- iroMema Plwa wuain fain eol af
uucAo W y ( r GHz]
ls pRessw e in a a
wlick JwLo Un
wick e fuse.
uwcAo w tu e plasna opeua a
ito h u m a l
nm e a Chc
e Lenwca
Dow be e fiwe i alo

Jilica fule
helel as unpeealla i s e
bure c
LacalAfec/ eo
AR ol ee

a hA& u (toc d a v c
in wi glat filus
LrtLaCo p t
Les o na opahng al&Uf H Lea Chcep
tube fo a chrrqCe ctun ca
inlicde he
 clea gla malcrU o'kcct1y
a
procedd deputit
07he tuse wall e e U no o fomahen. Thw
Lequireo) lLen one h a depotkd
noGinu- u collaprec
hA elilked g/U Jtknerr He fule
McUD Case.
i fomn u w n Le
a
e

is hAei/cc6ackWuds frwvc
The eacho 20me
uico cua ve Caufy
alng by tndol 6 H
He fuse
Qol a OLtulaly Jmmeuc 1ayar f fond
irrfr
uu a
al lly
ly
elepaifen
Kspahon o/ th tube euperat occ
l u Defaihm con
(oo,4fided clopine
Cofnl
couftr
o o al so C 6u a hig

exaariu ty2 cack o f plu

ha Cawe

fube i ealad do auo und (0so

lo6oCC ol uurg
aluuwg ,
Hace e ne
a Ufahmauy fung
odehosiio9 urn allo he
he
effcieay allo u
aleherho09
The Kgh be
accalely
vae
to
c u p ot i h m JLuN
Len
hiawe
kue ac/an.
eeac/ 9nk,
o vapeA
Cnlol ack waud
maweol aprely
P l a s nua 2ne
Layer depuihoy
a n layer
Veuy pin depuiheoy
vey
alm he tube
wad juirgte
fmnahe) o/ o
acutuco
nay be na6/ u y go0e
hcliviel ua
ayew Tit
SouD e
Aeaized h
gades Index baaPlu fo
Optrnnuru

a
clge opbopi mahm t
aLe

nea hasaboie piopil han 0.6sns km

ec
o pulie olsheuim 4 d6 km,
uif atenuehen o 6elwten
ers
aa w 4uljea1T o 0.8Sum.1
 (30
MCUD Cntoclied CLendeas alsr Defotikm)
cOMmmly w ed a ruY Jow
Tis eckn9ut
paipon alt in e jenicmeluchr indu to
PAoduce tofechve So filu m dilin /Cni-
cmduchy o l r ' c ( 7 w f e e h u g tt w pi me e ee
6y Bell (ab01af u)J i d e
phave
oielahia (7V/o)
Mcv) ir alto kn0un a Uapir
Un fest
alepaiF
Koahern
Siajasy Depaipa
(oAe

clacleli

Vab Silica
uavyi
pkay Keas u e tuse
Leachn

Cabmfunane

Pyca)
Pse

Diagom ho wj9 t cUD metdtr e peehaaaAerg

op hal f 5rSCa) olepeaihim ( col lapre to
oLa wlq
pAo elu
(halide y oxg)pats
pcel
apr fhawe seacf
3 onngh a ho2ome jo hda ubdfanh'

Leachm i omounslu
fasf o hA
pauhrlu fomned oluu) i
Leath aves
4lac
qlac
uif gas flw a olepaifeo o pe all
h lica fule
alwu u
L ude uay fon he cladeling
dtucfue otih
wually 8 a e l y duppeug an
nceelee ealed on autride by
ta n fotupuatuu getutty
Oxy7-yeu
(ALaled
9o6bco" Tiuw a ol
ZMe

erafuue oxielahay Laach'tng

co eacauago Lg- fluu

(Uapr)a) 6olidlo)
Ked

Ge Cly 4 03 Ge,120

T:cly f O 7:0t c
(ald)
Lea theiv e clues hs oH ufuwty mesefny
Ti
Levreb 4elod stuns in
fibtcd prepausd by
w ok Hamt kyleelit,
Ay di ele Oxielath
ir col Sack A fort a/ axg he tule
of 2ne

u ofer sy
palhclo to 6e depaedota
allowin1
i t i - a i n e tdftospares gilies filnu
ayer be cepfo
fuLe. T i / a y
u h all o nanfahed

o Lm in ik ner A unitmity

hades fuatkue
taelex brofle ce 6 CAeale

7
1 Chag
glagy depotifed e4jieveasiknct

e Uewe
a b c e n fomed by
duetetive
vapoeiead chleureleo of
ATner f
ta
d1aelci,
 (32

U tO d m (Ge u ) 0 phoshhtna (Pocl) aue adelecd

Te cote 7/ass f han fommed 67 t oleþseih'ery

uccetirelayu o geLnaqn 0uilicale or phasf4e
dilicaCe g/a Tre c/nclelig ayu u
inuporsonf
a acr a bauies 'due prece O asuphian
&s olue fo
tlifwm o
dilica tuse in tu COLqasr av alehaifesl
4e e depaitiday ir copletto h tuferdtiuue
/n(acOecs hblwe e (w 19 ' c Te tuse u

en cellabted to vea deliel pae fom dc

Aa 6 iaw n 6 t
f6e af ewpulue of

4duresdagu,
This fechniqae u nMaf wndely wed al
LUC a ifallows fasncanm al Ler wit
Hsssuf oLs
J.Ahauf fom ta seclt ced 0H tnpuity Cnafauunaheag
Mp pAocels
a he adranaj Aal deporihag
oCCCu oittin an enc/7ecd aCf cfur Aich lnjuu
aa vuy cleon entuioLn mes. Hence aepiu pah'edatc
inuhuh0 May be avndec eluiag 6fh he Laen

eputhon Peform coll apre pve.

S Teuit pLote Cs alfo all owt fa dhg le-wode fisen
nuN MU w Los nly 0.4 oll kKm al a wavelengtt
Um
 33
Uabr axial Dapfiho) (VAD)
(rw
r u devu"ped Tzav
detulsped y Tzad i'n Deaschs
Tis ftocecs
COn Pnugle (1att an
du chier) of Lo
ust opheal fisd
frte plu

U
antnd-n olepth n cno
7e AD fetlaigu
an in 9
e
a
fat9 w e
Uapou2.0o
Leacf to fom) pilica
dilica
couhfuanfr ed
cue 'cfcd pm surntrt
JoF y flans hydalgde
Tidehuifed enel o 4 d}autg
n axial elirechkom fomuiy a
tlhd posny
tauge oule.
6ule.
he Jlape 6
a
n
qlas prefmm
he axi cdrechiz
ale wick uLueapnndkfo
upsaud al a
isdled
tate. J inih'ally ole hy eluoled
grwk
e aCfm

HO SOC H + S0,
(/apor (apr) gad ga)
AJ elehy eluah'm if iafeueos int a faliel pafom
inaapa uisfancefungale a an eleualef
epuafue of uound Swc.
LLfUe u PLo Ce lg nmay e ecolah eo fo oltacd
S
iser
fiser Cominuu altlough al
peven fenc fo
opualed a a 6ahch po Ce paufly be catuue
Loaltel prfomm c a n e k ) haULe lok

oibe
6 Lefra ckue iade pto/e My be ace ted 0ig
dehosiheomsbuhU o10- Ge0, pauhdes wttin fa
0X77e-AydioJon fltme