measurement report

Description = Proba 1 1x1mm 10x10um

Scan description
Sensor = CF III Speed = 8.0 mm/s
Sensor sample rate = 800 Hz Range X = 1.000 mm
Range y = 1.000 mm
Scantype = Plane Resolution X = 0.0100 mm
Scanprofile = X-Direction Resolution Y = 0.0100 mm

Nanofocus AG
30.00
Profile
W avyness
[µm] Roughness

20.00

10.00

0.00

-10.00

5.00 µm

-20.00
0.0 202.0 404.0 606.0 808.0 1010.0
[µm]
Profile description Roughness parameters
Position = 0.456 mm Filter = DIN EN ISO 11562
Profile no. = 46 LC (CutOff) = 0.800 mm
Length = 1.010 mm Lr = 0.800 mm
Points = 101 NeedleFilter = 0.000 mm
Points/mm = 100 No of Lr N = 1
Minimum = 9.466 µm Not conform with DIN EN ISO 4287
Maximum = 27.178 µm Cutoff wave length not conform with DIN EN ISO 4288
Range = 17.712 µm Ra = 3.602 µm
Mean = 18.500 µm Rz = 17.434 µm
Std-Dev. = 4.729 µm Rt = 17.434 µm
Rq = 4.281 µm
Rmax = 17.434 µm
Rms S. = 00.165
Wt = = 10.029 µm
Date : 1/23/2014
SEP 1940II(prEN 10049 C=0,5µm)
Rpc = 50.633 1/cm
User : Cornel SUCIU

Signature : ____________________

p1 v2.oms 5/6/2006