Implantable Biomedical

Microelectromechanical System

Mark G. Allen
Moore Professor of Electrical and Systems Engineering; an
Director, Singh Center for Nanotechnology
University of Pennsylvania
mallen@upenn.edu
hp://mems.seas.upenn.edu

MSMA Research Laboratory s University of Pennsylvania

 Outline

• Some historical perspecves on MEMS

• Medical microsystems and medical needs
• Implantable sensor examples
• Conclusions and acknowledgements

MSMA Research Laboratory s University of Pennsylvania

MEMS: Using Microfabricaon to Produc
Mechanical Structures and Transducers

Inkjet
microphones
print heads pressu

accelerometers
chemical se
MSMA Research Laboratory s University of Pennsylvania
 Medical Microsystems/MEMS

Microsystems based on the use of

microfabricaon and nanofabricaon
techniques to create mechanical structu
sensors, and actuators that can interface
parts of the human body, either in-vitro o
vivo, to diagnose or treat disease

MSMA Research Laboratory s University of Pennsylvania