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HEIDARI et al.: A CMOS CURRENT-MODE MAGNETIC HALL SENSOR WITH INTEGRATED FRONT-END 1271
TABLE I
SENSITIVITY OF HALL DEVICES IN VOLTAGE AND CURRENT MODE
Fig. 3. Block diagram of the proposed magnetic current-mode Hall sensor mi-
crosystem.
(1)
Fig. 4. Current spinning technique and output offset of a single cross-shaped Fig. 7. Schematic diagram of the twin sensor with biasing and common mode
Hall plate during the four possible states. feedback circuits.
(3)
where the currents, , proportional to the current mode sen-
sitivity, depend on the sensor geometry, physical parameters,
and temperature.
As evident from Fig. 6, the differential output current is twice
the Hall current. The solution is also suitable for the current
spinning technique.
Fig. 10. Schematic diagram of the two stage fully differential amplifier.
TABLE II
MODEL PARAMETERS
Fig. 13. Simulated input and output currents of the current-mode Hall plate
without any mismatch.
Fig. 18. Simulated output currents ( and ) of the twin Hall sensor as
Fig. 16. Simulated sensitivity as a function of the temperature. a function of the magnetic field.
Fig. 19. Hall sensor microphotograph: (a) whole chip including pads and (b)
detail of the sensor plates area (with back-annotated layout).
Fig. 24. Measured sensor differential output voltages as function of the mag-
netic field and its nonlinearity error.
Fig. 21. Measured sensor output current before interface as a function of the
biasing current at different magnetic fields.
Fig. 22. Measured sensor sensitivity without interface as a function of the bi- Fig. 25. Output voltages transient response measured with active probes.
asing current at different magnetic fields.
TABLE III
PERFORMANCE SUMMARY AND COMPARISON TABLE OF THIS WORK WITH
RECENTLY PUBLISHED CMOS HALL SENSORS
measured power consumption is about 120 . The readout [16] J. Jiang, W. J. Kindt, and K. A. A. Makinwa, “A continuous-time ripple
section consumes 54 . The sensor and the relevant switches reduction technique for spinning-current hall sensors,” IEEE J. Solid-
State Circuits, vol. 49, no. 7, pp. 1525–1534, Jul. 2014.
for current spinning measured power consumption is 65 .
V. CONCLUSION
Hadi Heidari (M’15) is working at the Integrated
This paper described a magnetic current-mode Hall mi- Microsystem (IMS) group of the University of Pavia,
crosystem. Two Hall plates operating in the current mode and Italy, as a Ph.D. student under supervision of Prof.
able to provide differential currents at the output nodes have Franco Maloberti since November 2011. During a
first project of his Ph.D., he worked on integrated
been fabricated in a standard 0.18- CMOS process. The use CMOS horizontal Hall sensor microsystems. In a
of a low-noise chopper stabilized operational amplifier enables second chip, he designed a multi-sensors prototype
the integration of the signal current and ensures good voltage of four different vertical Hall sensors. A third chip
sensitivity. The measurement cycle starts with a reset phase was on the design of a magnetic sensor with interface
for NMR system integration. To realize this project,
followed by the integration of a multiple of full current spinning he cooperated with the State Key Laboratory of
cycles. Measurement results show that the Hall sensor can Analog and Mixed-Signal VLSI at the University of Macau. His current
achieve a sensitivity after the sensor interface better than 1660 research interests include analog/mixed-signal circuit design, CMOS sensors,
interface circuits for microsensors, magnetic sensors, and FEM simulations. He
V/A/mT when the magnetic field is in the range from 0 to 7 mT is a reviewer of the IEEE SENSORS JOURNAL. He received honorary mention
( , 512 ). The use of the crossed-shaped Hall paper award at the IEEE ISCAS 2014 and gold leaf award at IEEE PRIME
plates and a current-mode approach enables current spinning 2014 conferences.
technique for offset cancellation. The overall measured offset,
power consumption and the achieved voltage sensor sensitivity
after the sensor interface are remarkable. Edoardo Bonizzoni (M’06) was born in Pavia, Italy,
in 1977. He received the Laurea degree (summa cum
laude) in electronic engineering from the University
REFERENCES of Pavia in 2002. From the same university, he
[1] R. S. Popovic, Hall Effect Devices, 2nd ed. Boca Raton, FL, USA: received the Ph.D. degree in electronic, computer,
CRC, 2010. and electrical engineering in 2006. In 2002 he joined
[2] C. Schott and S. Huber, Modern CMOS Hall Sensors With Integrated the Integrated Microsystems Laboratory of the
Magnetic Concentrators. Berlin/Heidelberg, Germany: Springer , University of Pavia as a Ph.D. candidate. During
2008, pp. 3–21. his Ph.D., he worked on development, design, and
[3] M. Pastre, M. Kayal, and H. Blanchardl, “A hall sensor analog front testing of non-volatile memories with particular
end for current measurement with continuous gain calibration,” IEEE regard to phase-change memories. From 2006 his
Sensors J., vol. 7, no. 5, pp. 860–867, May 2007. research interests are mainly focused on the design and testing of DC-DC and
[4] A. Ajbl, M. Pastre, and M. Kayal, “A fully integrated hall sensor mi- A/D converters. In this period he worked on single-inductor multiple-output
crosystem for contactless current measurement,” IEEE Sensors J., vol. DC-DC buck regulator solutions and on both Nyquist-rate and oversampled
13, no. 6, pp. 2271–2278, 2013. A/D converters. Recently, his research focuses on the design of high precision
[5] G. Boero, D. Memierre, P. A. Besse, and R. S. Popovic, “Micro-hall amplifiers and ultra-low voltage voltage reference circuits as well. Presently,
devices: Performance, technologies and applications,” Sensors Actua- he is an Assistant Professor at the Department of Electrical, Computer, and
tors A, no. 106, pp. 314–320, 2003. Biomedical Engineering of the University of Pavia. Dr. Bonizzoni coauthored
[6] Y.-J. Min, C.-K. Kwon, H.-K. Kim, C. Kim, and S.-W. Kim, “A CMOS more than 70 papers and he is corecipient of the IEEE International Symposium
magnetic hall sensor using a switched biasing amplifier,” IEEE Sensors on Circuits and Systems (ISCAS) 2014 honorary mention paper award of the
J., vol. 12, no. 5, pp. 1195–1196, May 2012. Sensory Systems Track, of the IEEE/IEEJ Analog VLSI Workshop (AVLSIWS)
[7] T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, “Surface- 2010 best paper award, of the IEEE European Solid-State Circuits Conference
micromachined 1 MHz oscillator with low-noise pierce configuration,” (ESSCIRC) 2007 best paper award and of the IEEE/IEEJ Analog VLSI
in Proc. IEEE Solid-State Sensor Actuator Workshop, 1998. Workshop (AVLSIWS) 2007 best paper award. Since 2011, he is an Associate
[8] J. Verd, G. Abadal, J. Teva, A. Uranga, N. Barniol, J. Esteve, M. Editor of the IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS—PART II:
Duch, and F. Perez-Murano, “High-sensitivity capacitive readout EXPRESS BRIEFS. Dr. Bonizzoni has been nominated Best TCAS-II Associate
system for resonant submicrometer-scale cantilevers based sensors,”
Editor for the 2012–2013 term. Since 2013 he is a TPC member of the IEEE
in Proc. IEEE Int. Symp. Circuits Syst. (ISCAS), May 2005, vol. 5, pp.
Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).
4209–4212.
[9] H. Heidari, U. Gatti, E. Bonizzoni, and F. Maloberti, “Low-noise low-
offset current-mode hall sensors,” in Proc. IEEE Conf. Ph.D. Res. Mi-
croelectron. Electron. (PRIME), Jun. 2013, pp. 325–328.
[10] M. Belloni, E. Bonizzoni, A. Fornasari, and F. Maloberti, “A microp- Umberto Gatti (M’91) received the Laurea degree
ower chopper-CDS operational amplifier,” IEEE J. Solid-State Cir- (summa cum laude) in electronic engineering and
cuits, vol. 45, no. 12, pp. 2521–2529, Dec. 2010. the Ph.D. degree in electronics and information en-
[11] H. Heidari, E. Bonizzoni, U. Gatti, and F. Maloberti, “A current-mode gineering from the University of Pavia, Italy, in 1987
CMOS integrated microsystem for current spinning magnetic hall sen- and 1992, respectively. From 1993 to 1999, he worked
sors,” in Proc. IEEE Int. Symp. Circuits Syst. (ISCAS), May 2014, pp. in the Central R&D Lab of Italtel, Italy, and then in the
678–681. R&D Lab of Siemens, Italy, as Senior ASIC Engineer.
[12] A. Bilotti, G. Monreal, and R. Vig, “Monolithic magnetic hall sensor Besides developing analog and mixed analog-digital
using dynamic quadrature offset cancellation,” IEEE J. Solid-State Cir- CMOS/BiCMOS ICs for telecom (data converters,
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[13] M.-A. Paun, J. M. Sallese, and M. Kayal, “Temperature influence in- interfaces), he was the coordinator of funded projects
vestigation on hall effect sensors performance using a lumped circuit under the frameworks of FP and Eureka, focused on high-speed Nyquist-rate
model,” Proc. IEEE Sensors, pp. 382–385, 2012. and sigma-delta converters. In 2007 he joined Nokia Siemens Networks, Italy,
[14] H. Heidari, E. Bonizzoni, U. Gatti, and F. Maloberti, “A 0.18- where he was a Sr. Power Supply Architect for telecom equipment (both at rack
CMOS current-mode hall magnetic sensor with very low bias current and boards level). Currently he is with Redcat Devices, Italy, as Senior Micro-
and high sensitive front-end,” Proc. IEEE Sensors, pp. 1467–1470, electronic Engineer and also holds cooperation with the University of Pavia in
Nov. 2014. the Hall sensors field. His current research interests are in the area of CMOS
[15] E. L. Bronaugh, “Helmholtz coils for EMI immunity testing: Stretching mixed-signal ICs, in particular in rad-hard digital libraries and SRAMs, data
the uniform field area,” in Proc. IEEE Int. Conf. Electromagn. Compat., converters, and testing techniques under irradiations. He holds 2 international
Aug. 1990, pp. 169–172. patents and is coauthor of more than 50 papers.
1278 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS—I: REGULAR PAPERS, VOL. 62, NO. 5, MAY 2015
Franco Maloberti (F’96) received the Laurea degree on journals or conference proceedings, four books, and holds 30 patents. Dr. Mal-
in physics (summa cum laude) from the University of oberti was the recipient of the XII Pedriali Prize for his technical and scientific
Parma, Parma, Italy, in 1968, and the Doctorate Hon- contributions to national industrial production, in 1992. He was corecipient of the
oris Causa in electronics from the Instituto Nacional 1996 Institute of Electrical Engineers Fleming Premium, the best Paper award,
de Astrofisica, Optica y Electronica (Inaoe), Puebla, ESSCIRC-2007, and the best paper award, IEEJ Analog Workshop—2007 and
Mexico, in 1996. He was a Visiting Professor at The 2010. He was the President of the IEEE Sensor Council from 2002 to 2003
Swiss Federal Institute of Technology (ETH-PEL), and Vice-President, Region 8, of the IEEE CAS Society from 1995 to 1997
Zurich, Switzerland and at the EPFL, Lausanne, and an Associate Editor of IEEE TCAS-II. He served as VP-Publications of
Switzerland. He was the TI/J. Kilby Chair Professor the IEEE CAS Society 2007–2008. He was distinguished lecturer of the IEEE
at Texas A&M University, and the Distinguished Solid State Circuits Society 2009–2010 and distinguished lecturer of the Circuits
Microelectronic Chair Professor at the University of and Systems Society 2012–2013. He received the 1999 IEEE CAS Society
Texas at Dallas. Presently he is Professor of Microelectronics and Head of the Meritorious Service Award, the 2000 CAS Society Golden Jubilee Medal, and
Micro Integrated Systems Group, University of Pavia, Italy. His professional the 2000 IEEE Millennium Medal. He received the IEEE CAS Society 2013 Mac
expertise is in the design, analysis, and characterization of integrated circuits and Van Valkenburg Award. He is an IEEE Fellow. In 2009 he received the title of
analog digital applications, mainly in the areas of switched-capacitor circuits, Honorary Professor of the University of Macau and he is currently the chairman
data converters, interfaces for telecommunication and sensor systems, and CAD of the Academic Committee of the Microelectronics Key-Lab of Macau. He is
for analog and mixed A/D design. He has written more than 450 published papers President Elect of the IEEE Circuits and Systems Society.