.

-.

.1 :

Clean Rooms

.............. .

.
.

( )British Standard 5295 :

:
.

.
.

.2 :

.1 : :
.1 .

.2 .

.3 ( ).
.2 : ( )
.

.3 :

( Federal Standard

)209E .

][1

.
-.

0.5( ) .

5 . :

Clean Room
Class

5 m
7
70
700

0.5 m
1
10
100
1000
10000
100000

5 m
1.240
12.400
-

0.5 m
265
2.650
26.500
-

0.2 m
7.5
75
750
-

0.3 m
3
30
300
-

0.1 m
35
350
-

Clean Room
Class

0.3 m
106
1.060
10.600
-

0.2 m
35
353
3.530
35.300
353.000
3.530.000

0.1 m
247
2.470
24.700

Class 100,000
.100000

Federal
Standard 209E
1
10
100
1000
10000
100000

3
4
5
6
7
8

][2

1
10
100
1000
10000
100000

0.5

( )ISO/TC209 14644-1 :

ISO

1
10
100
1000
10000
100000

.
-.

.4 HVAC :
.1 .

.2 .
.3 .

.4 .
.5 HVAC :
HVAC

.1 : 2 0.5


10
.
.

.2 .
.3 : .
.6 (: )HEPA & ULPA

.

:
.A :)High Efficiency Particulate Arrestance( HEPA

. .

( %) 99.997 99.97

][3

0.3

.
-.

.A :)Ultra Low Penetration Air( ULPA

( %) 99.9997
0.12 . .

( . Ultravioled Germicidial Irradition )UVGI

HEPA,ULPA
.

.7 :

:
.1 () ( : )Unidirectional Flow
Class 100 .
.2

() :

1000 .
.3 : .
][4

.
-.

][5

.
-.

.
Air change/hr
350-650
300-600
300-480
150-250
60-120
10-40

Av.Airflow
Velocity m/s
0.355-0.5
0.3-0.56
0.254-0.465
0.2-0.465
0.13-0.2
0.05-0.15

Airflow Type

Clean room class

Unidirectional
Unidirectional
Unidirectional
Mixed
Mixed
Mixed

1
10
100
1000
10000
100000

100

0.5 m/s 20 %
.

( ) .


() .
:
60
fpm 90 .
.
.

][6

.
-.

( 18)

.

.


.

][7

.
-.

.8 :
.

.
0.05
.
.9 :

:


Hepa Filter







.10 :
:
.1 Class 10 20*40*8
.2 Class 1000 40*50*8
.3 Class 10000 40*50*8
: .

][8

.
-.

Hepa Filter
,

Class 10

Class 1000

Class 10000

20*40*8

40*50*8

40*50*8

6400 cuft

16000 cuft

16000 cuft

100 %

30 %

15 %

800 sqft

600 sqft

300 sqft

90 FPM

40 FPM

15 FPM

72000 CFM

24000 CFM

4500 CFM

675 air
change/hr

90 air change/hr

16.8 air
change/hr

Class 10 100 % Hepa Filter

()

.
Class 1000 30 % Hepa Filter
.
Class 10000 15 % Hepa
Filter .

][9

.
-.

][10

.
-.

.11 :

Class 100

Hepa Filter 100 % Make-Up air

) handler (MAH
][11

.
-.

.
.

.
180 :

100% .

Hepa Filter .
][12

.
-.

.12 ( ) :
:

.
.13 :

][13

.
-.

][14

.
-.

.14 :

][15

.
-.

][16