NanoGener

ator

I
NTRODUCTI
ON
1.
1Backgr
ound
Thenanogener
ator
spr
ojecthasbeendev
elopi
ngandexpandi
ngsi
nce2001
af
tert
hei
deawasconcei
vedbyDr
.ZongLi
nWang.
Hei
nvent
edawayt
o
pr
oduce f
ree el
ect
ri
cener
gybyhar
nessi
ng t
he pi
ezoel
ect
ri
cef
fect
,some
mat
eri
alhav
eonmi
croscal
esi
mpl
ybyshaki
ng,
vi
brat
ingorbendi
ngt
hezi
nc
oxi
de(
zno)nanowi
resWangwasabl
etopr
oduceanel
ect
ri
cchar
ge.
Wear
abl
esensor
sar
ebecomi
ngsmal
l
erandi
ncr
easi
ngl
ywi
del
yused,
r
esul
ti
ngi
nani
ncr
easi
ngneedf
ori
ndependentandcompactpowersuppl
i
es.
El
ect
rochemi
calbat
ter
ies,t
he mostcommon powersuppl
i
es f
orwear
abl
e
sensor
s,cannotmeett
heneedbecauseoft
hei
rli
mit
edener
gyst
oragecapaci
ty
andpot
ent
ialenv
ironment
alandheal
thr
isks,
emer
gingasacr
it
icalbot
tl
eneckf
or
wear
abl
e sensor
s.Thi
s has dr
iven t
he dev
elopment of wear
abl
e ener
gy
har
vest
ers,whi
chhar
vestt
hemechani
calener
gydi
ssi
pat
edi
nhumanmot
iont
o
pr
ovi
de r
enewabl
e and cl
ean ener
gy.Sev
eralconcept
s ofwear
abl
e ener
gy
har
vest
ers based on di
ff
erent mechani
sms hav
e been st
udi
ed,such as
el
ect
romagnet
ic , el
ect
rost
ati
c, t
her
moel
ect
ri
c , Nano-
tr
iboel
ect
ri
c and
pi
ezoel
ect
ri
c.Pi
ezoel
ect
ri
cener
gyhar
vest
ersandNano-
tr
iboel
ect
ri
cgener
ator
s
canconv
ertmechani
calener
gyi
ntoel
ect
ri
cener
gydi
rect
ly,t
hust
hei
rst
ruct
ures
ar
emor
ecompactand si
mpl
eri
n compar
ison t
othoseofot
hert
ypes.The
mat
eri
alsf
orNano-
tr
iboel
ect
ri
cgener
ator
sar
egener
all
ynotaccessi
blei
nthe
mar
ket
,hence t
his wor
kfocuses on pi
ezoel
ect
ri
c ener
gy har
vest
ers.Lead
zi
rconat
eti
tanat
e(PZT)andpol
yvi
nyl
i
denedi
fl
uor
ide(
PVDF)ar
ethet
womost
i
mpor
tantpi
ezoel
ect
ri
c mat
eri
alsf
orener
gyhar
vest
ing,owi
ng t
othei
rhi
gh
pi
ezoel
ect
ri
cper
for
mance.PZTi
sri
gid,br
it
tl
e,andheav
y,br
ingi
ngl
i
mit
ati
onsi
n
wear
abl
e appl
i
cat
ions wher
efl
exi
bil
i
tyi
s necessar
y.PVDF has consi
der
abl
e
f
lex
ibi
l
ity
,goodst
abi
l
ity
,andi
seasyt
ohandl
eandshape.Taki
ngi
ntoaccountt
he
humanmot
ionchar
act
eri
sti
csofhi
ghampl
i
tudeandl
owf
requency
,PVDFi
smor
e
appr
opr
iat
eforwear
abl
eappl
i
cat
ionst
hanPZT.PVDFhasbeenusedi
nwear
abl
e
ener
gyhar
vest
erst
hatar
eimpl
ement
edi
nshoes,
bags,
and cl
othi
ng.Ky
missi
s.
dev
elopedani
nsol
emadeofei
ght
-l
ayerst
acksof28μm PVDFsheet
swi
tha
cent
ral2mm f
lexi
blepl
ast
icsubst
rat
e.I
thar
nessedt
hepar
asi
ti
cener
gyi
nshoes
andt
heav
eragepowerr
eached1.
1mW at1Hz.Gr
anst
rom,etal
.ut
il
izedPVDF
BBDNI
TM Dept
.ofEE Page1
NanoGener
ator

st
rapsasbackpackshoul
derst
rapst
ocol
l
ectmechani
calener
gypr
oducedbyt
he
backpack,wi
thanav
eragepowerof45.
6mW dur
ingawal
ki
ngof0.
9–1.
3m/
s.
YangandYun f
abr
icat
edaPVDFshel
lst
ruct
uregener
ati
nganout
putpowerof
0.
87mW ataf
oldi
ngangl
eof80°andaf
oldi
ng-
and-
unf
oldi
ngf
requencyof3.
3Hz,
whi
chcoul
dbewor
nont
heel
bow j
ointt
ohar
vestener
gyf
rom humanmot
ion.
Themechani
calener
gydi
ssi
pat
edi
nshoescanev
enpoweracomput
er,ser
ving
asanat
tract
iveener
gysour
cef
orwear
abl
ehar
vest
ers.Thi
spaperdev
elopsa
shoe-
embeddedpi
ezoel
ect
ri
cener
gyhar
vest
er,
whi
chcanbei
ntegr
atedi
nashoe
r
eadi
l
yforener
gyhar
vest
ingf
rom humanl
ocomot
ionwi
thl
i
ttl
edi
scomf
ortf
ort
he
wear
ers.Thehar
vest
eri
sbasedonaspeci
all
ydesi
gnedsandwi
chst
ruct
ure,
r
esul
ti
ng i
nat
hin geomet
ri
calf
orm,a hi
gh per
for
mance and an excel
l
ent
dur
abi
l
ity
.Twohar
vest
erpr
otot
ypesar
emadeandt
est
ed.Thef
ir
stonei
smade
upofamul
ti
lay
erPVDFf
il
m andast
ruct
ureofengi
neer
ingpl
ast
ics,whi
chi
s
pl
acedundert
heheel
.Thesecondonei
sdesi
gnedasani
nsol
eshapeandused
asanor
mali
nsol
e,consi
sti
ngofast
ruct
ureoff
lexi
blesi
l
iconer
ubberandt
wo
mul
ti
lay
erPVDFf
il
ms.Mor
epowercanbegener
atedbyt
hef
ormerpr
otot
ype,
whi
l
etheot
heronehasanadv
ant
ageofr
emar
kabl
ecomf
ort
.Inor
dert
ost
oret
he
har
vest
ed ener
gy and pr
ovi
de a const
ant DC out
put v
olt
age,a power
managementci
rcui
tisdesi
gned.

I
nthepastdecade,t
hei
nter
esti
nener
gyhar
vest
ingt
echnol
ogi
eshasgr
own
subst
ant
ial
l
y.Tr
adi
ti
onalpower suppl
i
es such as bat
ter
ies hav
einher
ent
l
i
mit
ati
onsi
ncl
udi
ngi
mmobi
l
ity
,li
mit
edl
i
fet
ime,mai
ntenancedi
ff
icul
ty,andt
oxi
c
hazar
ds.Wi
thpr
oli
fer
ati
onofwi
rel
esssensor
sandconsumerel
ect
roni
cs,t
hose
pr
obl
emsbecomepr
omi
nent
.Forexampl
eov
er1.
7bi
l
li
oncel
lphoneswer
esol
d
wor
ldwi
dei
n2012al
one.Howev
er,
theneedoff
requentbat
ter
ychar
gingposesa
maj
orpr
obl
em especi
all
yforuser
swhoar
einl
ong-
dist
ancet
rav
elandwhohav
e
heav
yusageoft
hei
rcel
l
phones.Ther
efor
e,i
tishi
ghl
ydesi
rabl
etodev
elopa
mi
niat
uri
zedpor
tabl
epowersour
cef
orchar
gingconsumerel
ect
roni
cswhenev
er
andwher
everneeded.Aper
pet
ualpowersour
cet
hrought
headdi
ti
onofener
gy
har
vest
edf
rom t
heenv
ironmentwoul
dser
veasapr
opersol
uti
on.

BBDNI
TM Dept
.ofEE Page2
NanoGener
ator

1.
2Mot
ivat
ion
Thewast
ageofener
gywhi
chi
spr
oducedbyt
hemot
ionormov
ementof
humanbodypar
tsi
nthef
orm ofwal
ki
ng,
vibr
ati
on,
orbl
oodpr
essur
eofbodycan
beut
il
isedandcanbeconv
ert
edt
oEl
ect
ri
calEner
gyandsamecanbeut
il
isedt
o
powerNanodev
icessuchasi
Pods,
mobi
l
eset
c.
Nanogener
ator
sar
ethef
utur
etechnol
ogydev
iceswhi
char
esel
f-
power
ed
dev
iceswhi
chwheni
mpl
ement
edcanut
il
iset
heener
gyf
rom t
hedayt
odayl
i
fe
act
ivi
ti
es,t
hesameener
gycanbeusedf
ordev
icessuchasmobi
l
es,i
Pods
wi
thoutbei
ngconnect
edt
oext
ernal
sour
cesofsuppl
y.

1.
3Tr
iboel
ect
ri
cNanogener
ator
s
I
n 2012,a new t
ype oft
echnol
ogycal
l
ed Tr
iboel
ect
ri
c nanogener
ator
(
TENG)wasi
nvent
edf
orhar
vest
ingambi
entmechani
calener
gy.I
toper
atesi
na
uni
quepr
inci
plebycoupl
i
ngt
ri
boel
ect
ri
cef
fectwi
thel
ect
rost
ati
cinduct
ion.The
TENGbr
ingst
oget
herhi
ghper
for
mance,mi
niat
uri
zat
ion,
l
owcost
,scal
abi
l
ityand
appl
i
cabi
l
ity
.Si
ncet
hen,t
wobasi
coper
ati
ngmodeshav
ebeendev
elopedi
.e.
cont
actmodeandf
ri
cti
onmode,whi
chhav
ebeenut
il
izedi
nav
ari
etyofdesi
gns
t
ohar
vestmechani
cal
mot
ionsunderdi
ff
erentci
rcumst
ances.

BBDNI
TM Dept
.ofEE Page3
NanoGener
ator

TYPESOFNANOGENERATORS

2.
1Pi
ezoel
ect
ri
cNanogener
ator
:

Api
ezoel
ect
ri
cNanogener
atori
sanener
gyhar
vest
ingdev
iceconv
ert
ing
t
he ext
ernalki
net
ic ener
gy i
nto an el
ect
ri
calener
gy based on t
he ener
gy
conv
ersi
onbyNanost
ruct
uredpi
ezoel
ect
ri
cmat
eri
al.Al
thoughi
tsdef
ini
ti
onmay
i
ncl
udeanyt
ypesofener
gyhar
vest
ingdev
iceswi
thNano-
str
uct
ureconv
ert
ingt
he
v
ari
oust
ypesoft
heambi
entener
gy(
e.g.sol
arpowerandt
her
malener
gy)
,iti
s
used i
n mostoft
imest
o speci
fi
cal
l
yindi
cat
ethe ki
net
icener
gyhar
vest
ing
dev
icesut
il
izi
ngNano-
scal
edpi
ezoel
ect
ri
cmat
eri
al.

Al
thoughst
il
li
ntheear
lyst
ageoft
hedev
elopment
,ithasbeenr
egar
dedas
apot
ent
ialbr
eakt
hrought
owar
dthef
urt
hermi
niat
uri
zat
ionoft
heconv
ent
ional
ener
gyhar
vest
er,possi
blyl
eadi
ngt
hef
aci
l
eint
egr
ati
onwi
tht
heot
hert
ypesof
ener
gyhar
vest
erconv
ert
ingt
hedi
ff
erentt
ypesofener
gyandt
hei
ndependent
oper
ati
onofmobi
l
eel
ect
roni
cdev
iceswi
tht
her
educedconcer
nsf
ort
heener
gy
sour
ce.

2.
2Tr
iboel
ect
ri
cNanogener
ator
:
At
ri
boel
ect
ri
cNanogener
atori
sanener
gyhar
vest
ingdev
icet
hatconv
ert
s
t
heext
ernalmechani
calener
gyi
ntoel
ect
ri
cit
ybyaconj
unct
ionoft
ri
boel
ect
ri
c
ef
fectandel
ect
rost
ati
cinduct
ion.Thi
snew t
ypeofNanogener
atorwasf
ir
stl
y
demonst
rat
edi
nPr
of.ZhongLi
nWang'
sgr
oupatGeor
giaI
nst
it
uteofTechnol
ogy
i
nthey
earof2012.Asf
ort
hispowergener
ati
onuni
t,i
nthei
nnerci
rcui
t,a
pot
ent
iali
scr
eat
edbyt
het
ri
boel
ect
ri
cef
fectduet
othechar
get
ransf
erbet
ween
t
wot
hinor
gani
c/i
nor
gani
cfi
l
mst
hatexhi
bitopposi
tet
ri
bo-
pol
ari
ty;i
ntheout
er
ci
rcui
t,el
ect
ronsar
edr
ivent
ofl
owbet
weent
woel
ect
rodesat
tachedont
heback
si
desoft
hef
il
msi
n or
dert
o bal
ancet
hepot
ent
ial
.Si
ncet
hemostusef
ul
BBDNI
TM Dept
.ofEE Page4
NanoGener
ator

mat
eri
alsf
orTENG.

Ev
ersi
ncet
hef
ir
str
epor
toft
heTENGi
nJanuar
y2012,t
heout
putpower
densi
tyofTENG hasbeeni
mpr
oved f
orf
iveor
der
sofmagni
tudewi
thi
n12
mont
hs.Thear
eapowerdensi
tyr
eaches313W/
m2,
vol
umedensi
tyr
eaches490
kW/
m3,
andaconv
ersi
onef
fi
ciencyof~60%hasbeendemonst
rat
ed.Besi
dest
he
unpr
ecedent
ed out
putper
for
mance,t
his new ener
gyt
echnol
ogyal
so has a
numberofot
heradv
ant
ages,
suchasl
ow cost i
n manuf
act
uri
ng
and f
abr
icat
ion, excel
l
ent r
obust
ness and r
eli
abi
l
ity
, env
ironment
al-
f
ri
endl
y.

2.
3Py
roel
ect
ri
cNanogener
ator
:
A py
roel
ect
ri
c nanogener
atori
s an ener
gyhar
vest
ing dev
ice conv
ert
ing t
he
ext
ernalt
her
malener
gy i
nto an el
ect
ri
calener
gy by usi
ng Nano-
str
uct
ured
py
roel
ect
ri
cmat
eri
als.Usual
l
y,har
vest
ingt
her
moel
ect
ri
cener
gymai
nlyr
eli
eson
t
heSeebeckef
fectt
hatut
il
izesat
emper
atur
edi
ff
erencebet
weent
woendsoft
he
dev
icef
ordr
ivi
ngt
hedi
ff
usi
onofchar
gecar
ri
ers.Howev
er,i
nanenv
ironment
t
hatt
het
emper
atur
eisspat
ial
l
yuni
for
m wi
thoutagr
adi
ent
,suchasi
nout
doori
n
ourdai
l
yli
fe,
theSeebeckef
fectcannotbeusedt
ohar
vestt
her
malener
gyf
rom a
t
ime-
dependentt
emper
atur
efl
uct
uat
ion.I
nthi
scase,
thepy
roel
ect
ri
cef
fecthast
o
bet
hechoi
ce,whi
chi
saboutt
hespont
aneouspol
ari
zat
ioni
ncer
tai
nani
sot
ropi
c
sol
i
dsasar
esul
toft
emper
atur
efl
uct
uat
ion.Thef
ir
stpy
roel
ect
ri
cnanogener
ator
wasi
ntr
oducedbyPr
of.ZhongLi
nWangatGeor
giaI
nst
it
uteofTechnol
ogyi
n
2012

BBDNI
TM Dept
.ofEE Page5
NanoGener
ator

TENG-
WORKI
NGPRI
NCI
PLE
3.
1wor
kingpr
inci
ple(
case1)

FI
G3.
1Di
rectcur
rentout
put

Thewor
kingpr
inci
plef
ort
hef
ir
stcasei
sexpl
ainedbyav
ert
ical
l
ygr
own
nanowi
resubj
ect
edt
othel
ater
all
ymov
ingt
ip.Whenapi
ezoel
ect
ri
cst
ruct
urei
s
subj
ect
ed t
othe ext
ernalf
orce byt
he mov
ing t
ip,t
he def
ormat
ion occur
s
t
hroughoutt
hest
ruct
ure.Thepi
ezoel
ect
ri
cef
fectwi
l
lcr
eat
etheel
ect
ri
calf
iel
d
i
nsi
det
henanost
ruct
ure;
thest
ret
chedpar
twi
tht
heposi
ti
vest
rai
nwi
l
lexhi
bitt
he
posi
ti
veel
ect
ri
calpot
ent
ial
,wher
east
hecompr
essedpar
twi
tht
henegat
ivest
rai
n
wi
l
lshowt
henegat
iveel
ect
ri
calpot
ent
ial
.Thi
sisduet
other
elat
ivedi
spl
acement
ofcat
ionswi
thr
espectt
oani
onsi
nit
scr
yst
all
i
nest
ruct
ure.Asar
esul
t,t
het
ipof
t
henanowi
rewi
l
lhav
eanel
ect
ri
calpot
ent
ialdi
str
ibut
iononi
tssur
face,whi
l
ethe
bot
tom oft
henanowi
rei
sneut
ral
i
zedsi
ncei
tisgr
ounded.Themaxi
mum v
olt
age
gener
atedi
nthenanowi
recanbecal
cul
atedbyt
hef
oll
owi
ngequat
ion:

BBDNI
TM Dept
.ofEE Page6
NanoGener
ator

,
wher
eκ0i
stheper
mit
ti
vi
tyi
nvacuum,
κist
hedi
elect
ri
cconst
ant
,e33,
e15ande31
ar
ethepi
ezoel
ect
ri
ccoef
fi
cient
s,νi
sthePoi
ssonr
ati
o,ai
sther
adi
usoft
he
nanowi
re,li
sthel
engt
hoft
henanowi
reandν
max i
sthemaxi
mum def
lect
ionof
t
henanowi
re'
sti
p.

Theel
ect
ri
calcont
actpl
aysani
mpor
tantr
olet
opumpoutchar
gesi
nthesur
face
oft
het
ip.Theschot
tkycont
actmustbef
ormedbet
weent
hecount
erel
ect
rode
andt
het
ipoft
henanowi
resi
ncet
heohmi
ccont
actwi
l
lneut
ral
i
zet
heel
ect
ri
cal
f
iel
dgener
atedatt
het
ip.I
nor
dert
ofor
m anef
fect
iveschot
tkycont
act
,the
el
ect
ronaf
fi
nit
y(Ea)mustbesmal
l
ert
hant
hewor
kfunct
ion(
φ)oft
hemet
al
composi
ngt
hecount
erel
ect
rode.Fort
hecaseofZnOnanowi
rewi
tht
heel
ect
ron
af
fi
nit
yof4.
5eV,Pt(
φ=6.
1eV)i
sasui
tabl
emet
alt
oconst
ructt
heschot
tky
cont
act
.Byconst
ruct
ingt
heschot
tkycont
act
,theel
ect
ronswi
l
lpasst
othe
count
erel
ect
rodef
rom t
hesur
faceoft
het
ipwhent
hecount
erel
ect
rodei
sin
cont
actwi
tht
her
egi
onsoft
henegat
ivepot
ent
ial
,wher
easnocur
rentwi
l
lbe
gener
atedwheni
tisi
ncont
actwi
tht
her
egi
onsoft
heposi
ti
vepot
ent
ial
,int
he
caseofn-
typesemi
conduct
ivenanost
ruct
ure(
p-t
ypesemi
conduct
ivest
ruct
ure
wi
l
lexhi
bitt
her
ever
sedphenomenonsi
ncet
hehol
eismobi
l
eint
hiscase)
.The
f
ormat
ionoft
heschot
tkycont
actal
socont
ri
but
est
othegener
ati
onofdi
rect
cur
rentout
putsi
gnal
consequent
ly.

BBDNI
TM Dept
.ofEE Page7
NanoGener
ator

CASE3.
2:wor
kingpr
inci
ple(
case2)

FI
G3.
2Al
ter
nat
ingcur
rentout
put

A modelwi
thav
ert
ical
l
ygr
ownnanowi
rest
ackedbet
weent
heohmi
c
cont
actati
tsbot
tom andt
heschot
tkycont
actati
tst
opi
sconsi
der
ed.Whent
he
f
orcei
sappl
i
ed t
owar
dthet
ip oft
henanowi
re,t
heuni
axi
alcompr
essi
vei
s
gener
atedi
nthenanowi
re.Duet
othepi
ezoel
ect
ri
cef
fect
,thet
ipoft
henanowi
re
wi
l
lhav
eanegat
ivepi
ezoel
ect
ri
cpot
ent
ial
,incr
easi
ngt
heFer
mil
evelatt
het
ip.
Si
ncet
heel
ect
ronswi
l
lthenf
lowf
rom t
het
ipt
othebot
tom t
hrought
heext
ernal
ci
rcui
tasar
esul
t,t
heposi
ti
veel
ect
ri
calpot
ent
ialwi
l
lbegener
atedatt
het
ip.The
schot
tkycont
actwi
l
lbar
ri
cade t
he el
ect
rons bei
ng t
ranspor
ted t
hrough t
he
i
nter
face,t
her
efor
emai
ntai
ningt
hepot
ent
ialatt
het
ip.Ast
hef
orcei
sremov
ed,
t
hepi
ezoel
ect
ri
cef
fectdi
mini
shes,andt
heel
ect
ronswi
l
lbef
lowi
ngbackt
othe
t
opi
nor
dert
oneut
ral
i
zet
heposi
ti
vepot
ent
ialatt
het
ip.Thesecondcasewi
l
l
gener
ateal
ter
nat
ingcur
rentout
putsi
gnal
.

3.
3Basi
cmodesandmechani
sms
3.
3.1Ver
ti
cal
Cont
act
-Separ
ati
onMode

BBDNI
TM Dept
.ofEE Page8
NanoGener
ator

FI
G3.
3.Ver
ti
ca
lCont
act
-
Separ
ati
on

The wor
king mechani
sm of t
he t
ri
boel
ect
ri
c nanogener
atorcan be
descr
ibedast
heper
iodi
cchangeoft
hepot
ent
ialdi
ff
erencei
nducedbyt
hecy
cled
separ
ati
on and r
econt
actoft
he opposi
tet
ri
boel
ect
ri
c char
ges on t
he i
nner
sur
facesoft
het
wosheet
s.Whenamechani
calagi
tat
ioni
sappl
i
edont
othe
dev
icet
obendorpr
essi
t,t
hei
nner
ssur
facesoft
het
wosheet
swi
l
lgeti
ntocl
ose
cont
actandt
hechar
get
ransf
erwi
l
lbegi
n,l
eav
ingonesi
deoft
hesur
facewi
th
posi
ti
vechar
gesandt
heot
herwi
thnegat
ivechar
ges.Thi
sisj
ustt
het
ri
boel
ect
ri
c
ef
fect
.Whent
hedef
ormat
ioni
srel
eased,
thet
wosur
faceswi
thopposi
techar
ges
wi
l
lsepar
ate aut
omat
ical
l
y,so t
hatt
hese opposi
tet
ri
boel
ect
ri
c char
ges wi
l
l
gener
ateanel
ect
ri
cfi
eldi
nbet
weenandt
husi
nduceapot
ent
ial
dif
fer
enceacr
oss
t
het
opandbot
tom el
ect
rodes.I
nor
dert
oscr
eent
hispot
ent
ialdi
ff
erence,t
he
el
ect
ronswi
l
lbedr
ivent
ofl
ow f
rom oneel
ect
rodet
otheot
hert
hrought
he
ext
ernall
oad.Theel
ect
ri
cit
ygener
atedi
nthi
spr
ocesswi
l
lcont
inueunt
ilt
he
pot
ent
ial
soft
het
woel
ect
rodesgetbackt
oev
enagai
n.Subsequent
ly,whent
he
t
wo sheet
s ar
e pr
essed t
owar
ds each ot
heragai
n,t
he t
ri
boel
ect
ri
c-char
ge-
i
nducedpot
ent
ialdi
ff
erencewi
l
lbegi
ntodecr
easet
ozer
o,sot
hatt
het
ransf
err
ed
char
geswi
l
lfl
ow backt
hrought
heext
ernall
oad,t
ogener
ateanot
hercur
rent
pul
sei
ntheopposi
tedi
rect
ion.Whent
hisper
iodi
cmechani
caldef
ormat
ionl
ast
s,
t
heal
ter
nat
ingcur
rent(
AC)si
gnal
swi
l
lbecont
inuousl
ygener
ated.

3.
3.2Lat
eral
Sli
dingMode

BBDNI
TM Dept
.ofEE Page9
NanoGener
ator

FI
G3.
3.Lat
eral
Sli
ding

Ther
ear
etwobasi
cfr
ict
ionpr
ocesses:nor
malcont
act
,andl
ater
alsl
i
ding.
Wedemonst
rat
edher
eaTENG t
hati
sdesi
gnedbasedont
hei
n-pl
anesl
i
ding
bet
weent
het
wosur
facesi
nlat
eraldi
rect
ion.Wi
thani
ntensi
vet
ri
boel
ect
ri
fi
cat
ion
f
aci
l
itat
edbysl
i
dingf
ri
cti
on,aper
iodi
cchangei
nthecont
actar
eabet
weent
wo
sur
facesl
eadst
oal
ater
alsepar
ati
onoft
hechar
gecent
ers,whi
chcr
eat
esa
v
olt
agedr
opf
ordr
ivi
ngt
hef
low ofel
ect
ronsi
ntheext
ernall
oad.Thesl
i
ding-
i
nducedel
ect
ri
ci
tygener
ati
onmechani
sm i
sschemat
ical
l
ydepi
ctedi
nthef
igur
e.
I
ntheor
igi
nalposi
ti
on,t
het
wopol
ymer
icsur
facesf
ull
yov
erl
apandi
nti
mat
ely
cont
actwi
theachot
her
.Becauseoft
hel
argedi
ff
erencei
ntheabi
l
ityt
oat
tr
act
el
ect
rons,t
het
ri
boel
ect
ri
fi
cat
ionwi
l
lleav
eonesur
facewi
thnetposi
ti
vechar
ges
andt
heot
herwi
thnetnegat
ivechar
geswi
thequaldensi
ty.Si
ncet
het
ri
bo-
char
gesont
hei
nsul
ator
swi
l
lonl
ydi
str
ibut
eint
hesur
facel
ayerandwi
l
lnotbe
l
eakedoutf
oranext
endedper
iodoft
ime,t
hesepar
ati
onbet
weent
heposi
ti
vel
y
char
gedsur
faceandnegat
ivel
ychar
gedsur
facei
snegl
i
gibl
eatt
hisov
erl
appi
ng
posi
ti
on,and t
hust
her
e wi
l
lbe l
i
ttl
e el
ect
ri
cpot
ent
ialdr
op acr
osst
he t
wo
el
ect
rodes.Oncet
het
oppl
atewi
tht
heposi
ti
vel
ychar
gedsur
facest
art
stosl
i
de
out
war
d,t
hei
n-pl
anechar
gesepar
ati
oni
sini
ti
atedduet
othedecr
easei
ncont
act
sur
facear
ea.Thesepar
atedchar
geswi
l
lgener
ateanel
ect
ri
cfi
eldpoi
nti
ngf
rom
t
her
ightt
othel
eftal
mostpar
all
elt
othepl
ates,
induci
ngahi
gherpot
ent
ialatt
he
t
opel
ect
rode.Thi
spot
ent
ialdi
ff
erencewi
l
ldr
iveacur
rentf
low f
rom t
het
op
el
ect
rodet
othebot
tom el
ect
rodei
nor
dert
ogener
ateanel
ect
ri
c

BBDNI
TM Dept
.ofEE Page10
NanoGener
ator

pot
ent
ialdr
op t
hatcancel
sthe t
ri
bo-
char
ge-
induced pot
ent
ial
.Because t
he
v
ert
icaldi
stancebet
weent
heel
ect
rodel
ayerandt
het
ri
bo-
char
gedpol
ymer
ic
sur
facei
snegl
i
gibl
ecompar
edt
othel
ater
alchar
gesepar
ati
ondi
stance,t
he
amountoft
het
ransf
err
edchar
gesont
heel
ect
rodesappr
oxi
mat
elyequal
stot
he
amountoft
hesepar
atedchar
gesatanysl
i
dingdi
spl
acement
.Thus,t
hecur
rent
f
lowwi
l
lcont
inuewi
tht
hecont
inuat
ionoft
heongoi
ngsl
i
dingpr
ocesst
hatkeeps
i
ncr
easi
ngt
hesepar
atedchar
ges,
unt
ilt
het
oppl
atef
ull
ysl
i
desoutoft
hebot
tom
pl
ateandt
het
ri
bo-
char
gedsur
facesar
eent
ir
elysepar
ated.Themeasur
edcur
rent
shoul
dbedet
ermi
nedbyt
her
ateatwhi
cht
het
wopl
atesar
ebei
ngsl
i
dapar
t.
Subsequent
ly,whent
het
oppl
atei
srev
ert
edt
osl
i
debackwar
ds,t
hesepar
ated
char
gesbegi
nst
ogeti
ncont
actagai
nbutnoanni
hil
ati
onduet
othei
nsul
ator
nat
ure oft
he pol
ymermat
eri
als.The r
edundantt
ransf
err
ed char
ges on t
he
el
ect
rodeswi
l
lfl
ow backt
hrought
heext
ernall
oadwi
tht
hei
ncr
easeoft
he
cont
actar
ea,i
nor
dert
okeept
heel
ect
rost
ati
cequi
l
ibr
ium.Thi
swi
l
lcont
ri
but
eto
acur
rentf
low f
rom t
hebot
tom el
ect
rodet
othet
opel
ect
rode,al
ongwi
tht
he
secondhal
fcy
cleofsl
i
ding.Oncet
het
wopl
atesr
eacht
heov
erl
appi
ngposi
ti
on,
t
hechar
gedsur
facesgeti
ntof
ull
ycont
actagai
n.Ther
ewi
l
lbenot
ransf
err
ed
char
gesl
eftont
heel
ect
rode,andt
hedev
icer
etur
nst
othef
ir
stst
ate.I
nthi
s
ent
ir
ecy
cle.

3.
3.3Si
ngl
e-El
ect
rodeMode

BBDNITM Dept
.ofEE
Page11
NanoGener
ator

FI
G3.
3.Si
ngl
e-El
ect
rode

A si
ngl
e-el
ect
rode-
basedt
ri
boel
ect
ri
cnanogener
atori
sint
roducedasa
mor
epr
act
icalandf
easi
bledesi
gnf
orsomeappl
i
cat
ionssuchasf
inger
ti
p-dr
iven
t
ri
boel
ect
ri
cnanoagener
ator
.Thewor
kingpr
inci
pleoft
hesi
ngl
e-el
ect
rodeTENG
i
sschemat
ical
l
yshowni
nthef
igur
ebyt
hecoupl
i
ngofcont
actel
ect
ri
fi
cat
ionand
el
ect
rost
ati
cinduct
ion.I
ntheor
igi
nalposi
ti
on,t
hesur
facesofski
nandPDMS
f
ull
y cont
actwi
th each ot
her
,resul
ti
ng i
n char
ge t
ransf
erbet
ween t
hem.
Accor
dingt
othet
ri
boel
ect
ri
cser
ies,el
ect
ronswer
einj
ect
edf
rom t
heski
ntot
he
PDMSsi
ncet
hePDMSi
smor
etr
iboel
ect
ri
cal
l
ynegat
ivet
hanski
n,whi
chi
sthe
cont
actel
ect
ri
fi
cat
ionpr
ocess.Thepr
oducedt
ri
boel
ect
ri
cchar
geswi
thopposi
te
pol
ari
ti
esar
eful
l
ybal
anced/
scr
eened,l
eadi
ngt
onoel
ect
ronf
lowi
ntheext
ernal
ci
rcui
t.Once a r
elat
ive separ
ati
on bet
ween PDMS and ski
n occur
s,t
hese
t
ri
boel
ect
ri
c char
ges cannotbe compensat
ed.The negat
ive char
ges on t
he
sur
faceoft
hePDMScani
nduceposi
ti
vechar
gesont
heI
TOel
ect
rode,dr
ivi
ng
f
ree el
ect
rons t
ofl
ow f
rom t
he I
TO el
ect
rode t
o gr
ound.Thi
s el
ect
rost
ati
c
i
nduct
ion pr
ocess can gi
ve an out
putv
olt
age/
cur
rentsi
gnali
fthe di
stance
separ
ati
ng bet
ween t
he t
ouchi
ng ski
n and t
he bot
tom PDMS i
sappr
eci
abl
y
compar
abl
etot
hesi
zeoft
hePDMSf
il
m.Whennegat
ivet
ri
boel
ect
ri
cchar
geson
t
hePDMS ar
eful
l
yscr
eened f
rom t
hei
nduced posi
ti
vechar
geson t
heI
TO
el
ect
rodebyi
ncr
easi
ngt
hesepar
ati
ondi
stancebet
weent
hePDMSandski
n,no
out
putsi
gnal
scanbeobser
ved,asi
l
lust
rat
ed.Mor
eov
er,whent
heski
nwas
r
evert
edtoappr
oacht
hePDMS,
thei
nducedposit
ivechar
gesont
heI
TOel
ect
rode
BBDNITM Dept.ofEE
Page12
NanoGener
ator

decr
easeandt
heel
ect
ronswi
l
lfl
ow f
rom gr
oundt
otheI
TOel
ect
rodeunt
ilt
he
ski
nandPDMSf
ull
ycont
actwi
theachot
heragai
n,r
esul
ti
ngi
nar
ever
sedout
put
v
olt
age/
cur
rentsi
gnal
.

APPLI
CATI
ONSOFTENG
4.
1Power
ingpacemaker
s

Fl
exi
blepi
ezoel
ect
ri
cNanogener
atordi
rect
lysi
mul
atedal
i
vingr
atshear
t
usi
ngel
ect
ri
calener
gyconv
ert
edf
rom t
hesmal
lbodymov
ement
soft
her
at.Thi
s
t
echnol
ogycoul
dfaci
l
itat
etheuseofsel
f-
power
edf
lexi
bleener
gyhar
vest
ers,
not
onl
ypr
olongi
ngt
hel
i
fet
imeofcar
diacpacemaker
sbutal
sor
eal
i
zingr
eal
-t
ime
hear
tmoni
tor
ing

4.
2Har
vest
ingener
gyf
rom humanbodymot
ion

Si
ncet
her
eisabundantmechani
calener
gygener
atedonhumanbodi
esi
n
peopl
e'
sev
ery
dayl
i
fe,wecanmakeuseoft
het
ri
boel
ect
ri
cnanogener
atort
o
conv
ertt
hisamountofmechani
calener
gyi
ntoel
ect
ri
cit
y,f
orchar
gingpor
tabl
e
el
ect
roni
csandbi
omedi
calappl
i
cat
ions.Thi
swi
l
lhel
ptogr
eat
lyi
mpr
ovet
he
conv
eni
ence ofpeopl
e'
sli
fe and expand t
he appl
i
cat
ion oft
he per
sonal
el
ect
roni
cs.Apackagedpower
-gener
ati
ngi
nsol
ewi
thbui
l
t-i
nfl
exi
blemul
til
ayer
ed
t
ri
boel
ect
ri
cNanogener
atorhasbeen demonst
rat
ed,whi
ch enabl
ehar
vest
ing
BBDNITM Dept
.ofEE
Page13
NanoGener
ator

mechani
calpr
essur
edur
ingnor
malwal
ki
ng.TheTENGusedher
erel
i
esont
he
cont
act separ
ati
on mode and i
s ef
fect
ivei
nrespondi
ng t
othe per
iodi
c
compr
essi
onoft
hei
nsol
e.Usi
ngt
hei
nsol
easadi
rectpowersour
ce,
wedev
elop
af
ull
ypackagedsel
f-
li
ght
ingshoet
hathasbr
oadappl
i
cat
ionsf
ordi
spl
ayand
ent
ert
ainmentpur
poses.

4.
3Sel
f-
power
edact
ivest
rai
n/f
orcesensor
s
Ant
ri
boel
ect
ri
cnanogener
atoraut
omat
ical
l
ygener
atesanout
putv
olt
age
andcur
rentoncei
tismechani
cal
l
ytr
igger
ed.Themagni
tudeort
heout
putsi
gnal
si
gni
fi
es t
he i
mpactoft
he mechani
caldef
ormat
ion and i
tst
ime-
dependent
behav
iour
.Thi
sist
hebasi
cpr
inci
pleoft
heTENG canbeappl
i
edasasel
f-
power
ed pr
essur
e sensor
.The v
olt
ageout
putsi
gnalcan r
efl
ectt
he appl
i
ed
pr
essur
einducedbyadr
opl
etofwat
er.Al
lty
pesofTENGshav
eahi
ghsensi
ti
vi
ty
and f
astr
esponset
otheex
ter
nalf
orceand show asa shar
p peaksi
gnal
.
Fur
ther
mor
e,t
her
esponset
othei
mpactofapi
eceoff
eat
her(
20mg,~0.
4Pai
n
cont
actpr
essur
e)canbedet
ect
ed.Thesensorsi
gnalcandel
i
cat
elyshowt
hese
det
ail
soft
heent
ir
epr
ocess.Theexi
sti
ngr
esul
tsshow t
hatoursensorcanbe
appl
i
edf
ormeasur
ingt
hesubt
lepr
essur
einr
eal
li
fe.
I
nacaset
hatwemakeamat
ri
car
rayoft
het
ri
boel
ect
ri
cNanogener
ator
,a
l
argear
ea,andsel
f-
power
edpr
essur
emapappl
i
edonasur
facecanber
eal
i
zed.
Ther
esponseoft
heTENG ar
raywi
thl
ocalpr
essur
ewasmeasur
edt
hrougha
mul
ti
-channelmeasur
ementsy
stem.Ther
ear
etwot
ypesofout
putsi
gnal
sfr
om
t
heTENG:openci
rcui
tvol
tageandshor
tci
rcui
tcur
rent
.TheOpenci
rcui
tvol
tage
i
sonl
ydi
ctat
edbyt
hef
inalconf
igur
ati
onoft
heTENGaf
terappl
yi
ngamechani
cal
t
ri
gger
ing,sot
hati
tisameasur
eoft
hemagni
tudeoft
hedef
ormat
ion,whi
chi
s
at
tri
but
edt
othest
ati
cinf
ormat
iont
obepr
ovi
dedbyTENG.Theout
putcur
rent
dependsont
her
ateatwhi
cht
hei
nducedchar
gewoul
dfl
ow,sot
hatt
hecur
rent
si
gnali
smor
esensi
ti
vet
othedy
nami
cpr
ocessofhowt
hemechani
calt
ri
gger
ing
i
sappl
i
ed.

Theact
ivepr
essur
esensorandt
hei
ntegr
atedsensorar
raybasedont
he
t
ri
boel
ect
ri
cef
fecthav
esev
eraladv
ant
agesov
erconv
ent
ionalpassi
vepr
essur
e
sensor
s.Fi
rst
,theact
ivesensori
scapabl
eofbot
hst
ati
cpr
essur
esensi
ngusi
ng
BBDNITM Dept
.ofEE
Page14
NanoGener
ator

t
heopen-
cir
cui
tvol
tageanddy
nami
cpr
essur
esensi
ngusi
ngt
heshor
t-
cir
cui
t
cur
rent
,whi
l
econv
ent
ionalsensor
sar
eusual
l
yincapabl
eofdy
nami
csensi
ngt
o
pr
ovi
det
hel
oadi
ngr
atei
nfor
mat
ion.Second,t
hepr
omptr
esponseofbot
hst
ati
c
anddy
nami
csensi
ngenabl
est
her
eveal
i
ngofdet
ail
saboutt
hel
oadi
ngpr
essur
e.
Thi
rd,t
hedet
ect
ionl
i
mitoft
heTENGf
ordy
nami
csensi
ngi
sasl
ow as2.
1Pa,
owi
ngt
othehi
ghout
putoft
heTENG.Four
th,
theact
ivesensorar
raypr
esent
edi
n
t
hiswor
khasnopowerconsumpt
ionandcoul
dev
enbecombi
nedwi
thi
tsener
gy
har
vest
ingf
unct
ional
i
tyf
orsel
f-
power
edpr
essur
emappi
ng.Fut
urewor
ksi
nthi
s
f
iel
dinv
olv
ethe mi
niat
uri
zat
ion oft
he pi
xelsi
ze t
o achi
eve hi
gherspat
ial
r
esol
uti
on,andt
hei
ntegr
ati
onoft
heTEASmat
ri
xont
oful
l
yfl
exi
blesubst
rat
efor
shape-
adapt
ivepr
essur
eimagi
ng.

ADVANTAGES&DI
SADVANTAGE
5.
1Adv
ant
ages
 Pi
ezoel
ect
ri
candt
ri
boel
ect
ri
cNanogener
atorhav
eenoughout
putsui
tabl
e
f
orsel
fpower
edsy
stem
 Tr
iboel
ect
ri
cNanogener
atort
heout
puti
sgoodanddon’
tneedpol
i
ng.Bot
h
or
gani
candi
nor
gani
cmat
eri
alcanbeusedbasedont
ri
boel
ect
ri
cbehav
iour
 Thepi
ezoel
ect
ri
cNanogener
ator
scoul
dconv
ert[
mechani
calmov
ement
,
bl
oodpr
essur
e,v
ibr
ati
onener
gy]i
ntoel
ect
ri
cener
gyf
orsel
fpower
ingNano
dev
ices
 Nanogener
ator
scanhar
vestwast
eener
gyf
rom env
ironmentandt
hus
bei
ngasust
ainabl
eener
gysour
ce

BBDNITM Dept
.ofEE
Page15
NanoGener
ator

5.
2Di
sadv
ant
ages
 Amountofpowergener
atedbyNanogener
ator
siscompar
ati
vel
ysmal
l
 Shel
f-
li
fe meanshow l
ong t
hese mat
eri
all
ast
,in ot
herwor
dsor
gani
c
mat
eri
alsdecayv
eryqui
ckl
y
 Nanogener
ator
sar
eli
mit
edt
osmal
ldut
ycy
cle

FUTURESCOPE&CONCLUSI
ON
6.
1Fut
ureScope
 Nanogener
atorf
orhar
vest
ingmechani
cal
ener
gy;
sel
f-
power
ed
Nanosy
stems
 Sol
arener
gy
 Nano-
piezot
roni
cs
 Bi
o-i
nter
faci
ng,
bio-
inspi
redf
abr
icat
ion&bi
oengi
neer
ing
 Mi
croscopy&f
unct
ional
mat
eri
als
6.
2Concl
usi
on
 Mi
niat
uri
zat
ioni
sthebeaut
yofNanogener
ator
.
BBDNITM Dept
.ofEE
Page16
NanoGener
ator

 Gener
ati
onofpowerneedst
obeupdat
edwi
thi
nvent
ions.
 Fur
therr
esear
chesi
nthi
sfi
eldcansav
ethenon-
renewabl
e
sour
ceofener
gy
 Thei
nvent
ionofNanogener
ator
smaypr
ovet
obet
hest
artof
newer
aint
hehi
stor
yofmanki
nd

REFERENCE:

[
1]S.
P.Beeby
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J.Tudor
,N.
M.Whi
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[
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[
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A.Par
adi
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T.St
arner
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vasi
veComput
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P.
D.Mi
tcheson,E.
M.Yeat
man,G.
K.Rao,A.
S.Hol
mes,T.
C.Gr
een,i
n:

BBDNITM Dept
.ofEE
Page17
NanoGener
ator

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[
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[
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[
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J.Bennet
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R.Dupl
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nal
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heAmer
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.ofEE
Page18