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NMOS Falitevrahen áoeA

Sp CenuldeP Aubatvatey adding tmeust meusihe


+ he puse i wdju
ltke br6e) wtth he Boe
Lemtentrobn peu tm 9esiativity is ast
pe dOn Oea.

alapr
(Puarole pheosotien

RACovel the total Austo.te o P-AubAtrate wit


wth
ST0 l0el with drametts Kto I0mm and
O.Umm thikneu
10, laye

P-substrode
sldDap

ep3 phor lithogahy


Cover he Autate o 0 lay wtHh
yt photorea4t
Photoresut lopl
e0, aue
P-Altote

Sty Undl
photoltthography
Cove he Ausfate
and
QUnd
dituAitn
dusien
with the mOsk,
tothe hegitnu nto which toty espeme
diyui on toke place
uy 9.a

E:0
PAabahok

R h e oseas wheseveswe have maue pintd


0t
neguly ed t cuit and al the htoierd
the
Aufale enpitd tn the
etehet9ethe ond the
fovm o window
-Sid,(not pure

tep-6 Coves the totaul Autace wth i0, layu


wlth the thickntM o0. 14m Ete
-0 )um Si0, laye (Pue)

PAubyate

poly Ailicon mateaikl the


Consid et a for
~Polysliuevn
901-e teYmînal.

P u L a t a l e
in the a tas whet
Step-: lea the ST0, lauyeL
to yeate
uot have to Qdd he impiaith e n-ne
n-typt mt
tor &ouste and drain Heyminols photoltthoq1a
Reptat photolttnoafos
pABCed or Inakting n-typt matesial and to tmove

03ta
ST, laye in that p0ltiulas>po lysthuên

S10

PuAe
(P-subrt

Trdute n-AuLatyatt byodding phoiphorus atom t


the
p-3ubstraBe and wdelgo the pAoceA b cifuuien
make them Ottive P y s l u e n

10

P-AubATat
Inpuae

Ompale Sio0
(Pbubbtyole

DCovaCoye the Aufate with met alp cemat


holes
Meto
0ude

P-Bubat

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