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https://doi.org/10.1007/s12633-021-01095-3
ORIGINAL PAPER
Abstract
Short channel effects (SCEs) along with mobility degradation has a great impact on CMOS technology below 100 nm. These
effects can be overcome by using gate and channel engineering techniques which will improve mobility of the charge carriers,
thus eventually improving drain current and trans-conductance of the device. In this work, the speed of operation for DG
MOSFET is improved by reducing the channel length where dual-material gate-stack is deployed to avoid the drain-induced
barrier lowering (DIBL) and hot carrier effects. In the presented device, the metal closer to the source and drain has higher and
lower work function, respectively which causes a significant decrement in the peak electric field at the drain side and so the SCEs.
The carrier mobility is also increased due to enhanced electric field in the channel, near the source, caused by higher work
function gate material which, in turn, increases the MOSFET’s driving current. The screening effect reducing SCEs and an
increment in the acceleration of the charge carriers in the channel are mainly attributed due to higher and lower threshold voltage
found near the source and drain, respectively.
1 Introduction effects change the device performance. On the whole the main
characteristics that occur in short-channel MOSFETs are
In the last decade, advancement in wireless and microwave DIBL, Hot Carrier Effect, Impact Ionisation and Mobility
communications along with acceleration of Moore’s law has degradation. Therefore, an additional gate with same source
an aggressive thrust for scaling in the standard MOSFET and drain combination along with existing channel is required
structures [1]. Better analog and digital application along with to be incorporated [5]. In short channel devices, the source
higher cut-off frequency can be achieved if the gate length is come closer to drain so the horizontal electric field starts af-
reduced [2]. However, below 50 nm new configuration [3, 4] fecting, thus decreasing the barrier width of the channel. This
must be proposed to have the better performance along with phenomenon is called as Drain Induced barrier lowering
reduced short-channel effects (SCEs) than the orthodox (DIBL) [6, 7]. With the decrease of channel length the poten-
MOSFET structures. As the channel length decreases, many tial contour becomes gradually two dimensional from a one
* Umakanta Nanda 1
Department of Electronics and Communication Engineering, Silicon
uk_nanda@yahoo.co.in Institute of Technology, Bhubaneswar, Odisha, India
Satish K. Das 2
School of Electronics Engineering, VIT-AP University, Inavolu,
satish.das@silicon.co.in Beside AP Secretariat, Near Vijayawada, Andhra Pradesh, India
Sudhansu M. Biswal
sudhansu.mohan@silicon.ac.in 3
Department of Electronics and Instrumentation Engineering, Silicon
Institute of Technology, Bhubaneswar, Odisha, India
Chandan Kumar Pandey
chandankumarpandey@gmail.com
4
Department of Electronics and Communication Engineering, NIT,
Lalat Indu Giri Goa, Ponda, Goa, India
lalat_indu@yahoo.com
Silicon
Fig. 4 a. Single material DG-MOSFET with channel length 26 nm. b. Dual metal DG-MOSFET with channel length 26 nm
of SiO2 and HfO2 where spacers are taken as air for the pur- parameters, such as drain current, transconductance, gate ca-
pose of simulation. Work function of metal 1 and metal 2 are pacitance, cut-off frequency and maximum frequency are an-
considered as 4.1 eV and 4.4 eV, respectively. alyzed for the proposed device.
Figure 5. a shows the Id vs Vgs for single and dual material
DGMOSFET. This result shows a clear distinction that for
3 Results and Discussion dual material DG MOSFET the current is higher at a certain
Vgs as compared to single material DG MOSFET. This indi-
From simulation result the transfer characteristics obtained for cates better switching characteristics for the proposed dual
DM and SM DG-MOSFET has been compared. And the ef- material DG MOSFET for polysilicon and dual metal.
fect of gate material and work function variations on DG Figure 5 (b) depicts the variation of the trans-conductance
MOSFET has been analysed. with respect to Gate Voltage (gm vs Vgs) for single and dual
material DGMOSFET. It can be seen that the dual material
3.1 Impact of Dual-Material on DG-MOSFETs DGMOSFET has higher trans-conductance value as com-
pared to single material DGMOSFET up to a certain gate
In this section, the impact of two gate material laterally con- voltage. Transconductance is the measure of rate of change
nected with different work function along with gate-stack on in the drain current with respect to the change in gate-source
performance of the DG MOSFET is investigated and analyzed voltage. As the metal-semiconductor work-function differ-
in details. Various significant DC and analog/RF performance ence (Φ MS ) increases for dual-material DG-MOSFET,
Silicon
channel inversion happens at lower gate-source voltage and inversion layer in the channel at comparatively lower gate-
eventually, transconductance in dual-material DG-MOSFET source voltage.
is found to be more as compared to Single-material DG- Figure 7 (a) shows the variation of cut-off frequency with
MOSFET for low range of gate voltage. respect to gate voltage for single and dual material DG
Figure 6 (a) demonstrates the variation of the gate to drain MOSFET. Initially in dual metal the cut-off frequency is more
capacitance as a function of Gate Voltage (Cgd vs Vgs) for up to a certain gate voltage but after that it decreases as com-
single and dual material DGMOSFET. It is observed that the pared to poly silicon. This mainly happens because the Cgg is
dual material DGMOSFET have higher gate to drain capaci- inversely proportional to cut-off frequency (Ft). The variation
tance value as compared to single material DGMOSFET for a of maximum frequency (fmax) with Vgs is demonstrated in
given gate voltage. Figure 6 (b) shows the variation of the gate Fig.7 (b). Here it can be observed that above a level of Vgs
to source capacitance as a function Gate Voltage (Cgs vs Vgs) the fmax is higher in case of proposed double gate structure.
for single material and dual material DGMOSFET. It is ob- Table 1 demonstrates some of the important RF parameters of
served that the dual material DG MOSFET have higher gate to both single material and dual material DGMOSFET when
source capacitance value as compared to single material gate terminal is biased at 1 V.
DGMOSFET for a given gate voltage. Figure 6 (c) shows
the variation of the gate capacitance as a function Gate 3.2 Influence of Metal Gate Work Function on DG
Voltage (C g g vs V g s ) for single and dual material MOSFETs
DGMOSFET. It is observed that the dual material
DGMOSFET have higher gate capacitance value as compared The effect of change of gate materials of the projected Gate
to single material DGMOSFET for a given gate voltage. By Stack DGMOSFET on various performance parameters are
neglecting the overlap capacitances and considering inner and demonstrated here. Various significant performance parame-
outer fringing capacitances at source and drain terminals, Cgs ters are analyzed for the proposed device, such as trans-
and Cgd are mainly composed of parasitic and intrinsic capac- conductance with respect to gate voltage (gm vs Vgs), drain
itances [25]. In case of the dual-metal used in the proposed current with respect to gate voltage (Id vs Vgs), and gate ca-
device, inversion capacitances near both source and drain re- pacitance with respect to gate voltage (Cgg vs Vgs) parameters.
gions increase due to the lower work function of gate metal Short channel effects (SCEs) are dominating the performance
used for the device. An increment in the metal-semiconductor of nano scale devices as the threshold voltage is reducing day by
work-function difference (ΦMS) causes the formation of day. To reduce these effects, the poly-Si gate materials are
Fig. 6 (a) Variation of the gate to drain capacitance (b) gate to source capacitance, and (c) gate capacitance as a function Gate Voltage
Silicon
Table 1 RF parameters of both single material and dual material Table 2 Assumed dimension of the proposed DG MOSFET
DGMOSFET at Vgs = 1 V
Name Length (nm) Width (nm)
Parameters at Dual-Material DG- Single-Material DG-
(Vgs =1 V) MOSFET MOSFET Channel (Si) 26 16
Metal1 26 1
gm(S) 3.05×10−3 2.95×10−3
Metal2 26 1
Cgg(fF) 80 53
Oxide (SiO2) 26 1
fT(GHz) 0.7 1.15
Oxide (HfO2) 26 1
fm(GHz) 0.15 0.2
Source (Si+) 10 16
Drain (Si+) 10 16
replaced with metal gate materials. The threshold voltage can be
changed by changing the work function of different metals
(a) shows the graph of Cgd with respect to Gate voltage and we
employed in the gate of the MOSFET. Consequently, the leak-
can observe that the device with higher metal work function
age current can be controlled by properly choosing the threshold
(4.6 eV) has more Cgd initially with respect to the device with
voltage without changing the supply voltage. It also reduces the
lower metal work function (4.1 eV), but after a certain thresh-
SCEs. This change (reduction) in work function can be achieved
old gate voltage the capacitance of the device having higher
by heavily implanting nitrogen. However, the original function-
metal work function has less gate to drain capacitance than the
ality of the device remains unchanged.
device with lower metal work function.
The proposed DG MOSFET (Fig. 4.b) is uniformly doped
Figure 8 (b) shows the graph of Gate Capacitance (Cg) vs
whose dimensions are depicted in Table 2. This structure is
Gate voltage and we can observe that the device with higher
simulated in Silvaco tools to analyse the influence of work
metal work function (4.6 eV) has less or almost equal Cg
function engineering on the device. To avoid more threshold
initially with respect to the device with lower metal work
variation while controlling the degradation of carrier mobility,
function (4.1 eV), but after a certain threshold gate voltage
the doping concentration is considered as light as 1016 cm−3.
the capacitance of device having higher metal work function
Silicon film thickness and oxides (SiO2, HfO2) thickness are
has more gate capacitance than the device with lower metal
16 nm, 2 nm, 2 nm respectively. The channel length is consid-
work function. Figure 8 (c) shows the graph of Cgs vs Gate
ered to be 26 nm. The proposed DG MOSFET having metals of
voltage and we can observe that the device with higher metal
various work functions (4.8 4.1, 4.8 4.4, 4.8 4.6ev) is simulated.
work function (4.6 eV) has less Cgs initially with respect to the
device with lower metal work function (4.1 eV), but after a
3.3 Impact of Varying Work Function Screen Gate certain threshold gate voltage the capacitance of device having
higher metal work function has more gate capacitance than the
As per the results obtained, keeping the work function of one device with lower metal work function. Figure 9 (a) shows the
metal constant, it can be observed that the DG MOSFETs with graph of variation of Drain current with respect to Gate volt-
second metal having higher work function has low leakage age for different metal work function. The device with higher
current and higher threshold voltage as compared to DG metal work function has less drain current variation as com-
MOSFETs having lower work function. Variation of capaci- pared to the device with lower metal work function. Figure 9
tances (Gate capacitance, Gate to source capacitance, Gate to (b) shows the graph of Gm vs Gate voltage. The device with
drain capacitance) with gate voltage are also plotted. Figure 8. higher metal work function has less Gm initially with respect
Fig. 7 (a) Variation of cut off frequency with Gate-Source voltage for polysilicon and dual metal (b) Variation of max frequency of oscillation with Gate-
Source voltage for polysilicon and dual metal
Silicon
Fig. 8 Variation of (a) Gate to Drain capacitance (b) Gate capacitance (c) Gate-Source capacitance with Gate-Source voltage for dual metal with
changing metal work function
to the device with lower metal work function (4.1 eV). The gm g g
former is reduced than the later after certain threshold voltage. fT ¼ ffi≈ m
sffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi ≈ m ð1Þ
C gd 2π C gd þ C gs 2πC gg
Figure 10 (a) shows the variation of cut-off frequency with 2πC gs 1 þ 2
respect to gate bias voltage. The result shows that if we in- C gs
crease the work function of other metal keeping one metal gm
work function constant in dual metal DG MOSFET, then the f max ≈ sffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffiffi
ffi ð2Þ
C gd
cut-off frequency decreases. Figure 10 (b) shows the variation 2πC gs 4 Rs þ Ri þ Rg gds þ gm
of maximum frequency of oscillation with respect to gate bias C gs
voltage. The result shows that if we increase the other metal
Where gm is the trans-conductance, Cgs is the gate to source
work function keeping one metal work function constant in
capacitance, Cgd is the gate to drain capacitance, Cgg is the
dual metal DG MOSFET, then the maximum frequency of
gate capacitance.
oscillation also decreases.
Figure 11 (a) shows that in dual metal DG MOSFET the
The approximate expression of important Radio Frequency
trans-conductance generation factor is higher when the work
figure of merits such as, fT, and fmax are given by
function difference of the two metal gates is lower and vice rffiffiffiffiffiffiffiffiffiffiffiffi
g
versa. Figure 11 (b) shows that in dual metal DG MOSFET VIP3 ¼ 24 m ð4Þ
g m3
initially the gain bandwidth is higher when the work function
difference of the two metal gates is higher but above certain ∂I D
, gm ¼ ∂∂VI2D and gm ¼ ∂∂VI3:D
2 3
Where gm ¼ ∂V
gate voltage the gain bandwidth is lower for the device where gs gs gs
the difference in work function between the metals is higher. From fig. 12(a) and (b) it is concluded that there is a max-
imum peak at low VGS for M1 = 4.8 and M2 = 4.6, in compar-
ison to others. However, at M1 = 4.8 and M2 = 4.6 the plot is
3.4 Linearity Analysis more linear than others.
Today it is required the modern communication system should
be less distortion and achieve better analog/RF performance.
Nonlinearity effect degrades the system performance. So it is 4 Conclusion
very necessary to control the non-linearity effect. For nonline-
arity performance various figure of merits(FOM) such as sec- As SCEs and mobility degradation dictate the overall perfor-
ond order voltage intercept point(VIP2), third order voltage mance of the MOSFETs, in this paper an approach has been
intercept point (VIP3) is studied. To suppress the non-linear adopted to reduce the above dominance. The enhanced field in
activities and better linearity performance given by gm2 and the channel near the source built by dual-material gate helps
gm3 (second order and third order derivative of gm1) the optimal greatly to increase the mobility of the charge carriers, thus im-
bias point is determined by gm3, at that point it suppress the proving the device’s driving current. Furthermore, the peak elec-
noise formed by gm3 [26]. From equation() and () we under- tric field at drain side is reduced because of the dual work function
stood that VIP2 is proportional to the ratio of gm1/ g2 and VIP3 is provided by different metals at source and drain, the short channel
proportional to the ratio of gm1 / gm3 respectively [27, 28]. effects are also reduced. In fact, dual-material with different work
function introduces a sharp abrupt change in threshold voltage
gm
VIP2 ¼ 4 ð3Þ along the channel which further leads to the screening effect at
g m2 drain, thus suppressing the SCEs. With dual-material
configuration, the performance of MOSFETs has been improved the performance of non-uniformly doped DG-MOSFET, in
Devices for Integrated Circuits (DevIC), Kalyani
both in subthreshold and above threshold regime. Moreover, an
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