Lasers-based Manufacturing

Applications
Εφαρμογές Κατασκευαστικής με Βάση
το Λέιζερ
#11
Laser Ablation & Cleaning

Claus G. Rebholz, Ph.D.

LASER TECHNOLOGY – Fall 2020

Today’s Program
• Laser (revisited)
• Characteristics
• Principle of a Laser
• Laser Material Interaction
• Pulsed Laser Deposition
• Laser Cleaning

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 What do you remember –
Quick Review:

- Pulsed Laser Deposition (PLD)

Pulsed Laser Deposition (PLD)

Παλμική Εναπόθεση με Λέιζερ
Lens
Mirror
φακός Excimer Laser λέιζερ
καθρέπτης

Substrate
υποστρώματα

Quartz Window Παράθυρο Χαλαζία

Plume
Vacuum Chamber Χώρος Κενού

Reactive Gas Ανενεργό Αέριο

Target Στόχος

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Subsurface Boiling Υπόστρωμα
Βρασμού
• Laser superheats subsurface layer before surface reaches
evaporation point. Στρώμα υπερθέρμανσης λέιζερ πριν την
επιφάνεια.
• Surface breaks apart into large (micron-sized) globule
particles when the subsurface expands. Η επιφάνεια
διαχωρίζεται σε μεγάλα σωματίδια (μεγέθους μικρόμετρου)
σφαιριδίων όταν η υπόγεια επιφάνεια διογκώνεται.

Shock Wave Recoil Pressure

Expulsion Εκτόξευση Πίεσης
Ανακύκλωσης Κύματος Εκκένωσης
• Expansion of plume causes sudden drop in pressure just
above surface. Επέκταση της απότομης πτώσης της πίεσης
ακριβώς πάνω από την επιφάνεια.
• Shock wave pulls droplets of liquid off of surface. Το κύμα
σοκ σταγόνες σταγόνες του υγρού από την επιφάνεια.

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Regarding a Laser

Regarding a Laser

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Regarding a Laser - Characteristics

Regarding a Laser - Principle

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Regarding a Laser - Principle

Processes in PLD

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 Laser Material Interaction

Laser Material Processing

(a) Material processing using a (b) Scanning of a laser over a surface.

focused laser beam.

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 Influence of Laser Parameters

Diagram for the analysis of the influence of laser parameters in laser-material

interaction.

Laser Ablation

Schematic of fundamental phenomena and aspects of laser ablation.

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 Laser Ablation

Influence of pulse length.

Pulsed Laser Deposition

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 Thin Film Deposition
Transfer atoms from a target to a vapor (or
plasma) to a substrate

After an atom is on surface, it diffuses according to:

D=Doexp(-eD/kT)
eD is the activation energy for diffusion ~ 2-3 eV
kT is energy of atomic species.

Want sufficient diffusion for atoms to find best sites.

Either use energetic atoms, or heat the substrate.

Ways to Deposit Thin Films

substrate substrate
Ar+
Chemical Vapour
target Deposition (CVD) target

Evaporation Sputtering
(Physical Vapour substrate (PVD)
Deposition - PVD)
gas

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 Ways to Deposit Thin Films
Low energy deposition High energy deposition
(Evaporation): ~0.1 eV (Sputtering ~ 1 eV)

may get islanding unless smoother films at lower

you pick right substrate or substrate temperatures,
heat substrate to high but may get intermixing
temperatures

Pulsed Laser Deposition (PLD)

CCD
/spectrometer laser beam

Substrates

Target

Target: Just about anything! (metals,

semiconductors…)
Laser: Typically excimer (UV, 10 nanosecond pulses)
Vacuum: Atmospheres to ultrahigh vacuum

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 Advantages of PLD
• Flexible, easy to implement
• Growth in any environment
• Exact transfer of complicated materials
• Variable growth rate
• Epitaxy at low temperature
• Atoms arrive in bunches, allowing for much more
controlled deposition
• Greater control of growth (e.g., by varying laser
parameters)
• …

Disadvantages of PLD

• Uneven coverage
• High defect or particulate concentration
• Not well suited for large-scale film growth
• Mechanisms and dependence on parameters not
well/entirely understood

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 Processes in PLD

Laser pulse

Processes in PLD

e-
e- e-
e-
e- e-
e-
e- e-
e- e-
e-
e-
e-

Electronic excitation

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 Processes in PLD

e-
e- e-
e- e-
e- e-
e- e-
e-
lattice e-
e-
e-
e-

Energy relaxation to lattice (~1 ps)

Processes in PLD

lattice

Heat diffusion (over microseconds)

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 Processes in PLD

lattice

Melting (tens of ns), Evaporation, Plasma

Formation (microseconds), Resolidification

Processes in PLD

lattice

If laser pulse is long (ns) or repetition rate is

high, laser may continue interactions

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 PLD
Incredibly Non-Equilibrium !!!

At peak of laser pulse, temperatures on

target can reach >105 K (> 40 eV!)

Plasma Temperatures 3000-5000 K

Ablated Species with energies 1–100 eV

PLD - Opportunities

• Ultrahigh quality films

• Circuit writing
• New Materials
• Nanoparticle production
• …

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Laser Ablation/Cleaning

Laser Cleaning - Definition

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 Laser Cleaning – Basic Principle

Laser Cleaning – Process Characteristics

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Laser Cleaning – Potential Applications

Laser Cleaning – Potential Applications

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Laser Cleaning – Potential Applications

Laser Cleaning – Comparisons of

Cleaning Processes

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Laser Cleaning – Various Results

Laser Cleaning – Various Results

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 Laser Cleaning – Various Results

Laser Cleaning – Applications

Facades / Exterior Surface Cleaning

Before After

Source: Clean Lasersysteme

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 Laser Cleaning – Applications
Laser Cleaning System and ‘Head’

Source: Clean Lasersysteme

Laser Cleaning – Applications

Degree of Reflection for Mineral Building Materials
Tiles, ceramic side
Excimer laser Sand lime stone
Marble, polished side
Clay brick
Reflectivity [%]

Fire clay brick

Nd:YAG laser

Slate, polished side

Wavelength [nm]

Contamination Covering layer Base material

Stone

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 Laser Cleaning – Applications
Cleaning of forms with Nd:YAG Laser

Before After

Laser Cleaning – Applications

Org.
substances, Oxides
Covering layer Lacquer Colour alteration Soot scales Oel2 Plastics
/ coating varnish layers rust rubber

Base
Plastics

Plastics

Plastics
Plastics

Plastics

Plastics
Stone
Metal

Metal
Wood

Metal
Wood

Stone

Stone

Metal
Metal

Metal
Wood

material
Glass

Laser systems

very suitable unsuitable 1 Layer thickness in the µm range

adequately suit. unknown 2Depending on absorption properties
conditionally suitable of the oel

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Laser Cleaning – Conservation

Extract from: more info at

http://www.science4heritage.org/COSTG7/booklet/Chapter_2.2.pdf

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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Laser Cleaning – Conservation

Laser Cleaning – Conservation

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THE END

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