HT26000-R599-S7.08-00 - E - Alarm List

HT26000-R599-E12_S7.
08-00
　　　FULLY AUTOMATIC DICING MACHINE
AD３０００Ｔ
Alarm List Ver S7.08-00
本マニュアルをよく読み正しく取扱うことができるようになるまでは、装
Do not perform operation/maintenance/inspection of this machine
置の
until you have read and understood the contents of this manual to
操作・保守・点検調整を行わないでください。また、いつでも参照でき
handle this machine properly. Always keep this manual close to the
machine for immediate reference.
TOKYO SEIMITSU CO., LTD

HT26000-R599-E12_S7.08-00
白紙
Confidential
Event
CODE Severity Error message Recovery
Type
101 Fatal ALM Undefined error is found. Please install software again.
102 Fatal ALM Software version is mismatch. Please install software again.
System environment error if

103 Fatal ALM Please install software again.
occurred.
104 Error ALM FDD I/O access error is occurred., Please replace or format floppy disk.
USB memory may not be inserted to the

105 Warning WRN USB memory could not be used. USB port or there may not be enough free
space.
106 Error ALM There is not enough space on drive. Delete unnecessary data.
Cancel the alarm and restart the

operation.
Acquire the log of the error occurrence
107 Error ALM Processing failed
and contact the field engineer.
If the error recurs, revert to the old
version and try the recovery again.

operation.
108 Error ALM Software detected abnormal activity. and contact the field engineer.
If the error recurs, revert to the
version to the old one and try the
recovery again.

operation.
If the error recurs, there may be
malfunction in the software. Acquire the
log of the error occurrence and contact
the field engineer.
Revert to the old version and try the
recovery again.
please try again processing.\nIf the

Processing was not able to be
110 Error ALM error occurs repeatedly, restart
performed.
machine.

operation.
the field engineer.
recovery again.

operation.
the field engineer.
recovery again.
3/162
Confidential
Event
Type
113 Error ALM error occurs repeatedly, restart
performed.
machine.

114 Fatal ALM error occurs repeatedly, restart
performed.
machine.

operation.
115 Fatal ALM Processing failed
malfunction in the software. Revert to
the old version and contact the field
engineer.
Unused I/O interrupt error is

116 Fatal ALM Please restart machine.
occurred.
117 Error ALM Cannot execute incomplete function. Please install software again.
118 Fatal ALM Sequence cannot be completed. Please restart machine.
119 Warning WRN The alarm has not cleared. Press [Alarm Clear｣ button and continue.
Restart the machine after removing the

120 Error ALM Communication timed out. frame under transfer, if any, on the
[Reject] screen.
Cancel the alarm and continue the

121 Fatal ALM Processing failed operation.
\nIf it recurs, restart the machine.
122 Error ALM Alarm is not cleared. Press [Alarm Clear｣ button continue.
The machine is in running, wait a Execute process while machine is

123 Warning WRN
few second. stopped.

performed.
machine.
Could not restore system

125 Error ALM Please restart machine.
environment.

performed.
machine.
127 Error ALM Failed to download data. Please restart machine.
128 Error ALM Failed to receive message. Please restart machine.
129 Error ALM Failed to system boot. Please restart machine.
Remove work or press [System

130 Warning WRN Specified processing failed initialize]. If the error occurs
repeatedly, contact to ACCRETECH.
Confi
4/162
Confidential
Event
Type
Confi
Execute [System initialize] and resume
the operation. If the error recurs,
there may be malfunction in the
Other operation cannot be carried
software. Acquire the log of the error
131 Error ALM out as the machine is under
occurrence and contact the field
processing.
engineer.
recovery again.

performed.
machine.
Restart the machine.

Other operation cannot be carried malfunction in the software. Acquire the
133 Error ALM out as the machine is under log of the error occurrence and contact
processing. the field engineer.
recovery again.
134 Error ALM Failed to machine safety check. Please check for the error condition.
can not move the axis. because it is Press [System Initialize] for all axes
135 Error ALM
incorrect position. initialization.
Format of the file is incorrect.

Correction map file in the machine
136 Fatal ALM and contact the field engineer.
cannot be read.
Format of the file is incorrect.

Tilting map file in the machine
137 Fatal ALM and contact the field engineer.
cannot be read.
Examine the specified recipe data

again.\n Acquire the active recipe data
138 Error ALM Active recipe data may be broken. and the relevant logs, and contact the
field engineer. Please delete the active
recipe data in question.

Active recipe data may be broken
139 Error ALM and the relevant logs, and contact the
(Incorrect device map).

(Incorrect device map).

(Incorrect cutting information).
5/162
Confidential
Event
Type
(Incorrect cutting information).

(Incorrect alignment information).

(Incorrect alignment information).

(Incorrect shape map information).

(Incorrect shape map information).

(Incorrect work information).

(Incorrect work information).
Lot processing cannot be proceeded due

to the incorrect frame information.
Cancel the lot processing and try
again.\n Restart the machine if the
149 Error ALM Incorrect frame information.
problem persists.
When the problem recurs, acquire
relevant logs and contact the field
engineer.
150 Error ALM Frame info. is not right. Please check for the error condition.
151 Error ALM Cassette info. is not right. Please check for the error condition.
152 Error ALM Cassette info. is not right. Please check for the error condition.
153 Error ALM Pos. info. is not right. Please check for the error condition.
6/162
Confidential
Event
Type
154 Error ALM Pos. info. is not right. Please check for the error condition.
155 Error ALM Correct map info. is not right. Please check for the error condition.
Not enough capacity in external

156 Warning WRN Insert new external media.
media.
Executed reboot machine. Confirm work

Detected failure equipment status.
158 Fatal ALM status and reboot machine, then continue
process.
Please confirm that the data name does

159 Warning WRN zip compression is failed.
not begin with a hyphen.
Error occurred by blade data Retry after few seconds.\nIf the error
161 Error ALM
editing. occurs repeatedly, restart machine.
Shut down the PC and restart the machine

for recovery.
162 Fatal ALM Hang-up is detected
the field engineer.
recovery again.
Please reboot equipment after shut down

163 Fatal ALM The hang-up was detected.
PC in restoration.

PC in restoration.
Please check connection of a removable

USB storage device for auto backup
165 Warning WRN media.\nIf the error occurs repeatedly,
is not connect.
contact to ACCRETECH.
AMM controller's USB communication

166 Error ALM Confirm the AMM controller.
error.
167 Warning WRN I failed in reading of a MTBA file. Please check the existence of a file.
168 Warning WRN I failed in reading of a MTBF file. Please check the existence of a file.
Cannot start DY correction as the Conduct the DY correction once the

169 Warning WRN transfer processing is yet transfer processing has completely
incomplete. stopped.
I repaired, please re-execute. If this

170 Error ALM Data acquisition processing failed.
alarm occurs repeatedly, restart it.
Please note that we are restoring, but

we are discarding data being edited. If
171 Error ALM Data acquisition processing failed.
this alarm occurs repeatedly, restart
it.
Unable to start lot processing because

part of the system settings were
172 Error ALM System Interlock
changed. Please contact the ACCT
engineer in charge.
7/162
Confidential
Event
Type
This operation can not be executed Please unload the Work and execute by
174 Warning WRN
on the work on the cutting table. the new Work.
Incorrect spindle rotation state Please stop spindle rotation and execute
175 Error ALM
during cutting processing again.
176 Error ALM Pause processing for load reduction. Please restart processing after a while.
I failed in reading of an E-MTBF

177 Warning WRN Please check the existence of a file.
file.
Check the connection status (power cable

/ communication LAN cable) of the
Device startup failed due to poor control board to be alarmed, restart the
178 Fatal ALM
connection of control board. unit after reconnecting.\nIf you do not
use this control board, please disable
the Config setting for board.
Check the driver parameter setting

Device startup failed due to
(device type) of the board to be
179 Fatal ALM inappropriate driver parameter
alarmed, restart the device after
setting for board.
resetting.
Check the connection status

Device startup failed due to poor (communication LAN cable) of the control
180 Fatal ALM
connection of control board. board to be alarmed, restart the unit
after reconnecting.
Unable to start lot processing because

273 Error ALM System Interlock
the above parameters were changed.
Follow the procedure below for

Cannot start the operation due to recovery.\n1. Turn ON the driving
301 Warning WRN
the uninitialized axes. power.\n2. Execute [System
initialize].\n3. Touch [START].
This parameter cannot be edited

302 Warning WRN Reject work then edit parameter.
during cutting.
Ensure cutting position.\nPress [START]

303 Guide CAL Alignment pause
to resume.
Verify cutting results. \nPress [START]

304 Guide CAL Paused by cut end pause.
to resume.
305 Guide CAL Kerf check is requested. Execute Kerf check.
Inspect cutting quality. \nPress [START]

306 Guide CAL Paused by kerf check.
to resume.
307 Guide CAL Cutter set request Execute cutter set.
The processing has stopped to check Ensure that correct work is loaded.
308 Guide CAL
the alignment pass. \nPress [START] to resume.
309 Guide CAL Stopped by [STOP] button. Press [START] to resume.
Touch [CUT HOLD] to stop the

310 Guide CAL Press [START] to resume.
processing.
8/162
Confidential
Event
Type
311 Guide CAL Cutting is complete. Press [REJECT] and remove work.
Process cannot be started. work is Remove work inside system, and try
312 Warning WRN
remained in the system. again.
Manual handle work onto cutting

313 Warning WRN Remove work and try again.
table is prohibited.
Verify position for cutting. Press

314 Guide CAL Paused cutting.
[START] to resume.
Work for the inspection pause was

ejected to the inspection tray. Remove
315 Guide CAL Paused by inspection pause.
the work from the tray and check the
cutting quality.
316 Guide CAL Paused by cassette pause. Press [START] to resume.
317 Guide CAL Dress is requested. Execute dressing.
318 Guide CAL YT correction is requested. Please execute alignment.
319 Guide CAL Paused by unload pause. Press [START] to resume.
Process cannot be executed. Axis is Ensure that axis is stopped, then

320 Warning WRN
in operation. continue process.
No need to set this blade at resume

321 Guide CAL Replace to new blade.
blade.
Inconsistent resume informed blade

322 Warning WRN Register identical blade data.
data is found.
323 Warning WRN Blade replacement has not finished. Finish blade replacement.
Blade data has not changed due to After blade replacement and blade data
324 Warning WRN the unexecuted cutter set in the change, conduct the cutter set to
blade replacement. complete the blade replacement.
Edit the active blade data to revert to

Blade size of the active blade data
325 Warning WRN the previous blade size or replace the
has been edited.
blade for recovery.

Flange size of the active blade data
326 Warning WRN the previous flange size or replace the
has been edited.
blade for recovery.

Blade thickness of the active blade
327 Warning WRN the previous blade thickness or replace
data has been edited.
the blade for recovery.
Set OPC unit(ID:20006/20007) ON at User

setting if the optical unit is installed
Operation cannot be executed as the in the machine.
328 Warning WRN
optical unit is not installed. If optical unit is unavailable, optical
cutter set inevitably cannot be
executed.
9/162
Confidential
Event
Type
As the previous cutter set is incomplete
Cannot start cutting as the height
due to the error and such, execute the
329 Warning WRN is undecided due to the incomplete
cutter set again to determine the
cutter set.
cutting height.
Cutter set after the blade Conduct the cutter set on the blade
330 Warning WRN replacement is still incomplete as replacement screen and complete the
it was left so after the failure. replacement.
Table height adjustment is not Execute cutter set at table replacement

331 Warning WRN
executed. screen.
As the cutter set cannot be performed

with the timing of the auto execution
due to the manual loading of a work and
Auto contact cutter set cannot be
332 Warning WRN such, such problem occurs.
executed.
Unload the current work and execute the
contact cutter set to continue the
operation.
After enabling the optical unit, offset

between the optical unit and the table
Operation for the optical cutter set
333 Warning WRN height is not calculated yet.
is not ready yet.
Execute the contact and optical cutter
set to calculate the offset.
Blade name in recipe data and blade Use blade which is defined by recipe
334 Warning WRN
data is inconsistent. data.
Cannot start cutting as the height

335 Warning WRN is undecided for the incomplete Execute contact and optical cutter set.
cutter set.
336 Guide CAL Manual cutting is completed. Execute operation on.
337 Guide CAL Completed BBD error-work process. Please replace blade.
DY correction is required to continue

Process is stopped by DY correction
338 Guide CAL the processing. Perform the DY
interlock.
correction.
339 Warning WRN Chop cut is not executed. Execute chop cut and DY correction.
Alignment correction is not

340 Warning WRN Please execute alignment.
completed.
Cannot run on auto operation. Manual

341 Warning WRN Complete manual cut.
cutting is in process.
342 Guide CAL Dress cut is completed. Inspect dress quality.
Work is being vacuumed, yet not loaded.

343 Warning WRN Work is not loaded. Load the work with the manual load
button.
344 Guide CAL Dress is paused.
Replace the blade as the cutting

Cutting distance of the blade has
345 Guide CAL distance of the blade has exceeded the
exceeded the limit.
limit.
10/162
Confidential
Event
Type
Replace the blade as the number of the
The number of the cutting lines of
346 Guide CAL cutting lines of the blade has exceeded
the blade has exceeded the limit.
the limit.
Cannot start process frame is

347 Warning WRN
semiautocutting.
Check if the blade is actually damaged.

If so, replace the blade. If not
damaged, restart cutting and recheck.
348 Warning WRN Blade damage of %1 was detected. \n[Continue by single SP]: Cutting is
conducted with the single SP only. \n
[Restart]: Check the state of the blade
again and continue cutting.
Check if the blade is actually damaged.

If so, replace the blade. If not
349 Warning WRN Blade damage of %1 was detected. damaged, restart cutting and recheck.
\n[Restart]: Check the state of the
blade again and continue cutting.
350 Guide CAL Alignment is not executed. Execute manual alignment.
Active recipe data cannot be changed Change the active recipe after the
351 Warning WRN
during cutting. cutting.

The cutting distance of the blade
352 Guide CAL distance the blade has exceeded the
has exceeded the warning value.
warning value.
Replace the blade as the number of the

The cutting line number of the blade
353 Guide CAL cutting lines of the blade has exceeded
has exceeded warning threshold.
the warning threshold (ID:50107).
Execute [Table height measurement]. If

Table height measurement is not the work on the cutting table is
354 Warning WRN
executed. unprocessed, execute unload, and then
resume the process.
Cutter set for table replacement is Execute cutter set at table replacement
355 Warning WRN
not executed. screen.
With the use of the auto data change

function of the blade, this error occurs
Detected incorrect blade size in the
356 Warning WRN when the blade size between the target
blade data of the auto data change.
blade data are different.
Adjust the size to be the same.
Specified blade data could not be

Register existing blade data name to the
357 Warning WRN found in the auto data change
recipe.
function.
The processing cannot be continued as

the blade that is currently used and
The operation has stopped by the
that is registered in the recipe are
358 Warning WRN interlock ascribed to the blade
different.
name.
Change to the blade specified in the
recipe to resume the operation.
ARM1 z axis is not initialized and

359 Warning WRN
finger axis is projected.
11/162
Confidential
Event
Type
360 Warning WRN System initialize is canceled.
361 Warning WRN Cannot start. Cassette has ended. Set new cassette.
Cannot start. Work is remained in Press [Insp cancel] and set new work in
362 Warning WRN
inspection tray. inspection tray.
Cannot start the operation as no

Set new cassette or set new work in
363 Warning WRN work is in the cassette or the
inspection tray.
inspection tray.
Found invalid information on Set cassette or work correct or confirm

364 Warning WRN
transport data of cassette1&2. system parameter.
365 Warning WRN Cannot start without frame sensing. Perform cassette sensing then start.
366 Guide CAL Unloaded inspection work. Eject work in inspection tray
367 Guide CAL Paused by unload prewash. Press [START] to start process.
368 Guide CAL Completed cassette UV process. Prepair next cassette.
369 Guide CAL Clean handle work on spinner table. Set work center of spinner table.
370 Guide CAL Completed manual cleaning. Continue production wafer process.
Set next cassette after processing work

371 Guide CAL The last work is in processing.
is completed.
372 Guide CAL Lot processing is complete. Set next cassette.
373 Warning WRN %3 is not found. Set cassette.
374 Warning WRN Work is found in unload %4. Eject work in the slot.
375 Warning WRN No work is found to process. Set cassette with the processed work.
376 Guide CAL Completed the process of %3. Started next cassette process.
377 Guide CAL Canceled the specified LOT process. Set next cassette.
Cannot execute process beacause work

Work was not found in specified
378 Warning WRN information is broken.\nSet cassette
range of %3.
again.
The number of alignment rejected Confirm alignment model data or register

379 Error ALM
work exceeded the limit. model again.
All lines of the work on cut table

380 Warning WRN Will the work be irradiated to UV?
are not completed.
12/162
Confidential
Event
Type
Cannot load work from inspection
381 Warning WRN Execute process on enginneer class.
tray on OPERATOR CLASS.
The frame ID is mismatch to the ID

382 Error ALM Set correct work in inspection tray.
from inspection tray.
Cannot InspectionEnd since work is Eject work on Pre-alignment then execute

383 Warning WRN
on Pre-alignment. again.
If frame sensing result was correct, set

The number of work in barcode and number of work in barcode properly. If
384 Error ALM
sensing result are mismatch barcode data is correct, set correct
number of work in the cassette.
Specify slot No. which is in process

385 Warning WRN Specified %4 is out of range.
range.
Set Start slot No. and End slot No.

386 Warning WRN Cannot specify start/end %4.
correct.
387 Warning WRN Initialize transport axes.
388 Guide CAL Canceled the sensing result. Execute cassette sensing again.
389 Warning WRN No work is found in inspection tray. Set work in inspection tary.
Add specified work as a process WAIT

390 Guide CAL Found new work in the slot.
status work.
Found LOST status on WAIT status

391 Guide CAL Set specified work as LOST status.
work.
As the cassette is being accessed and

can be removed from the machine, some of
the buttons for the cassette operation
392 Warning WRN Cassette is being accessed. are disabled.
Cancel the accessing status by touching
the [Cassette access] again while the
cassette is set in the elevator.
Enable the cassette 2 (ID: 20051) when

it is specified as the target cassette
The cassette 2 is disabled in the in the transfer setting. Specify only
393 Warning WRN
machine configuration. the cassette 1 in the transfer setting
(ID: 22101) when not using the cassette
2.
Check if unprocessed works are placed in

394 Warning WRN Cannot find manual load work.
the cassette and the inspection tray.
Work on the cutting table cannot be

processed, for the command of the active
recipe (ID: 49065) is OFF.
Work on the cutting table cannot be
395 Warning WRN \nChange the recipe to execute the
processed.
cutting.
\nRemove the work by the work reject
when not executing the cutting.
Cannot load work since the work is

396 Warning WRN Unload work then try again.
on load area.
13/162
Confidential
Event
Type
More than the processable number of
397 Warning WRN Work cannot be transferred. works have been detected in the machine.
Remove excess works.
Cannot open frame clamper because Please open the clamping circuit on the
398 Warning WRN there are Spindle and a possibility I/O operation screen after confirming
of interfering. the spindle position.
Active recipe cannot be edited at

399 Warning WRN Save recipe after stopping cutting.
during cutting.
The wear amount of the blade has Replace the blade as the wear amount the
400 Guide CAL
exceeded the warning value. blade has exceeded the warning value.
The remaining exposure has exceeded

401 Guide CAL Prepare a blade for the replacement.
the warning threshold.
Maximum total wear amount is

402 Warning WRN Please remove processing work.
exceeded.
Maximum total Wearing amount is

403 Warning WRN Please remove processing work.
exceeded.
404 Guide CAL Stage dress is requested. Stage dress is requested.
Use [Pre-align reject] button to remove

works intentionally.
In case works are not removed, check if
405 Warning WRN No work is found on Pre-alignment.
any works are dropped inside the
machine, or if anything is wrong with
the pre-alignment sensor.
If works have already been removed,

execute [ARM1 reject].
406 Warning WRN No work is found on ARM1. If any work is dropped in the machine,
remove it, execute [ARM1 reject] and
resume the operation.

execute [ARM2 reject].
407 Warning WRN No work is found on ARM2. If any work is dropped in the machine,
remove it, execute [ARM2 reject] and
Could not find work that should be on

cut table.
408 Warning WRN No work is found on cut table.
Press [Reject] if work is removed.
Press [START] to continue the process.

execute [Spinner reject].
409 Warning WRN No work is found on spinner table. If works are present in the machine,
remove them, execute [Spinner reject]
and resume the operation.
Process cannot be started. Dress Unload dress work in the sstem then
410 Warning WRN
work is remained in system. continue the process.
Limit of blade thickness is

411 Warning WRN Replace blade.
exceeded.
14/162
Confidential
Event
Type
Install/Replace a board and complete the
Installation/Replacement of the
412 Warning WRN replacement on the dress board
dress board is not executed.
replacement screen.
Work cannot be unloaded while the

cassette access is underway and the
cassette is removal from the machine.
Work cannot be unloaded while the While the cassette is set in the
413 Warning WRN
cassette access is underway. elevator, touch [START] to continue the
work unloading after the cassette
access.
See "Help" for details.
Can not sense frame while elevator

414 Warning WRN Wait for the elevator stop then retry.
is in operation.
Inspection end cannot be executed as

415 Warning WRN no work is present in the inspection Set work in inspection tray then retry.
tray.
Can not execute Inspection End while

Inspection End is available only on
416 Warning WRN NOT-Inspection pause status. Press
Inspection pause status
[START] to continue LOT process.
Sensing cannot be conducted as the

cassette is removal from the machine.
Cassette access is underway. Sensing While the cassette is set in the
417 Warning WRN
cannot be conducted. elevator, try the sensing again after
the cassette access.
Remove the work from the inspection tray

Inspection of a work in the to inspect the work. Close the tray
418 Warning WRN
inspection tray is not complete yet. after the inspection to end the
inspection.
Remove the work from the inspection tray

Inspection of a work in the to inspect the work. Close the tray
419 Warning WRN
inspection tray is not complete yet. after the inspection to end the
inspection.
Multi-recipe setting cannot be changed

as the active recipe is determined for
each recipe once the lot processing
Cannot change the setting of multi-
420 Warning WRN started.
recipe setting
Setting can be changed after the
cassette setting and before the lot
start.
Multi-recipe setting cannot be changed

as the active recipe is determined for
each recipe once the lot processing
Cannot change the setting of multi-
421 Warning WRN started.
recipe setting
Setting can be changed after the
cassette setting and before the lot
start.
Release the work in inspection tray then

422 Warning WRN Can not quit inspection mode.
try again.
423 Guide CAL Paused by work pause. Press [START] to resume.
15/162
Confidential
Event
Type
424 Warning WRN No dress board is found.
Cutting can be continued after checking

and adjusting the resume position
The operation has stopped due to the Using the [Release interlock Align.
425 Warning WRN
cutting position check function. Correction] of recovery, correct the
small shift of the cutting position to
resume the cutting.
426 Warning WRN Saw street check should be executed. Saw street check should be executed.
No unprocessed work can be found in the

inspection tray or the cassette, or the
cassette itself cannot be detected.
Processing cassette or work cannot
427 Warning WRN Sensors of the cassette or the
be found.
inspection work may not be reacting.
Check the sensors and cassette setting,
and resume the operation.
Auto optical cutter set is suspended as

the optical unit has been detected as
disabled in the machine configuration.
Auto optical cutter set cannot be Enable the optical unit (ID:
428 Warning WRN
executed. 20006/20007) in the user setting,
continue the operation with the single
spindle, or execute the contact cutter
set after unloading the work.
Enable the optical unit (ID:

Recovery cutting of the single
20006/20007) in the user setting or
429 Guide CAL spindle is ended for the disabled
continue the operation with the contact
optical unit.
cutter set.
Work cannot be transferred to the

inspection tray.
Close the tray after the inspection to
Inspection of the previous work is
430 Warning WRN end the inspection pause. If the
not complete yet.
inspection parameter [SYS:24717]
specifies to stop after unloading, touch
[START] after the operation stops.
Manual loading of a work by hand has Manual loading of a work by hand cannot
431 Warning WRN been detected during inspection be processed during the inspection
pause. pause. Remove the work.
The parameter(ID:%3) cannot be

432 Warning WRN LOT cancel then edit parameter.
edited during LOT operation.
The pre-processing correction function

(fine adjustment of the cutting position
of the 2nd multi-work and after for the
pre-alignment) could not be executed due
to the following reasons.
Execute the pre-processing
① Alignment is executed in the manual
433 Warning WRN correction function in the manual
alignment.
operation.
② Manual alignment correction was tried
by stopping the operation before the
processing.
Execute the pre-processing correction
function in the manual operation.
16/162
Confidential
Event
Type
As the setting is to use 2 cassettes,
A work has been detected in the
434 Warning WRN set an empty cassette to the cassette 1
cassette 1 of the unloading side.
of the work unloading side.
Work load reached the threshold that

requires the dressing specified in the
recipe data. Unload the processing work
435 Guide CAL Dress timing. and execute the dress.
Touch [Skip] to continue the current
work processing. Execute the dressing
after cutting is complete.
Execute the dressing.

The command with the [Skip] button
436 Guide CAL Dress timing. allows the cutting on the next work
skipping the dress. Execute the dressing
after cutting is complete.
A work has been detected in the As the setting is to use 2 cassettes,

437 Warning WRN cassette 2 of the work unloading set an empty cassette to the cassette 2
side. of the work unloading side.
Cannot change dress data during

438 Warning WRN Finish cutting then change dress data.
cutting
As the interlock function of the lot

Processing cannot be started as the start (ID: 23184) is enabled, recipe
439 Warning WRN
recipe is undecided. change is necessary after setting the
cassette. Confirm the recipe.
Specified slot No. exceeds maximum

440 Warning WRN Set slot number in range.
number of slot
Start slot number and end slot Set start slot number and end slot
441 Warning WRN
number is incorrect. number correctly.
Edit the parameter after canceling the

442 Warning WRN Dress cassette is under operation.
dress.
After unloading the dress work,

443 Warning WRN Dress work is being used.
parameter editing becomes available.
Product work cannot be processed as the

current dress is not finished yet.
Auto cassette dress is reserved or
444 Warning WRN After the auto cassette dress or upon
under processing.
the dress skip, execute the product work
processing.
Table cannot be replace during the Replace the table after lot processing
445 Warning WRN
lot processing. or lot cancel.
Stopped by kerf inspection

446 Warning WRN Check the kerf and restart.
interlock.
447 Warning WRN Need realingment. Need realingment.
Kerf check result exceeded DY error

448 Guide CAL DY correction is required.
limit.
Work thickness has already been

449 Warning WRN
measured.
17/162
Confidential
Event
Type
Detection sensor of the tape thickness
is retracted during the measurement due
to an error occurrence and such.
Cannot continue the measurement for
450 Warning WRN Measurement is suspended as it may
the tape thickness.
influence upon the accuracy. In case a
work is on the cutting table, unload it
and restart the operation.
Verify cutting results. \nPress [START]

451 Guide CAL Paused by phase pause.
to resume.
Inch size of the cutting table and

452 Warning WRN Adjust their sizes.
the cassette does not match.
Although the phase cutting is selected,

the first active recipe is not the phase
1.
Touch [START] to continue the operation
453 Guide CAL Active recipe is not phase 1. with the current setting.
In case the operation requires the
cutting from the phase 1, select a
recipe with "-P1" in the name and resume
the operation.
After completing the 1-line alignment,

re-alignment by the auto alignment or
Alignment is complete with the 1-
454 Warning WRN the manual alignment cannot be executed.
line alignment.
Reload the work and execute the
operation.
After completing the processing

operation on the cutting table or
455 Warning WRN Cutting table is under operation. suspending the operation by the work
reject and such, execute the operation
again.
As the interlock function for the

Manually loaded work by hand cannot
456 Warning WRN manually loaded work (ID: 24598) is
be cut.
enabled, the work cannot be processed.
In order to unload the inspection work,

Inspection end cannot be conducted execute the inspection end again after
457 Warning WRN
as a work is in the transfer unit. processing the work in the transfer
unit.
Processing condition of the work loading

has been changed in response to the
The operation cannot be continued recipe parameter change. If the
due to the mismatch of the operation is to be resumed under the
458 Warning WRN
parameter. current status, it will be started with
the new condition defining the work as
the unprocessed work.
Unload the work.
Carrier ID Verification is not Please read the carrier ID, and continue
460 Warning WRN
executed. the process.
SlotMap Verification is not Please verify the SlotMap after the

461 Warning WRN
executed. cassette sensing.
Carrier ID Verification is executing Please finish the carrier ID

462 Warning WRN
now. verification.
18/162
Confidential
Event
Type
SlotMpp verification is executing
463 Warning WRN Please finish the SlotMap verification.
now.
As the loaded work is the jig to adjust

the shape recognition camera, the
464 Warning WRN The work cannot be cut. cutting cannot be performed.
Reject the work and reload an
appropriate work for cutting.
Although [START] button was touched

without selecting a recipe, operation
was stopped as the parameter "Recipe
Select the target recipe as this is
465 Warning WRN change function after the lot end (ID:
the default one.
24746)" was enabled.
Select a recipe and resume the cutting
again.
Though the parameter "Recipe change

function after the lot end (ID: 24746)"
Lot processing cannot be started due is enabled, the lot could not be started
466 Warning WRN to the absence of the default as the default recipe necessary for the
recipe. lot end was absent.
Prepare the "default recipe" and start
the lot.
Though the parameter "Recipe change

function after the lot end (ID: 24746)"
is enabled, the operation was suspended
Recipe could not be changed to the
467 Warning WRN due to the recipe change failure upon
default after the lot end.
the lot end.
Cancel the lot and reset the "default
recipe."
Verify position for cutting. Press

468 Guide CAL Paused auto operation.
[START] to resume.
Alignment is complete. Specify the Check the cutting position.\nTouch

471 Guide CAL
cutting start position. [START] to continue.
The cutting table is evacuated to the

472 Guide CAL Paused cutting. unloading position.\nEnsure cutting
position.\nPress [START] to resume.
Check if the water may be the

disturbance factor, the installation
BBD damage difference check detected
473 Fatal ALM status of the BBD unit is proper or if
the unstable BBD interception ratio.
the cable is not loose, or identify what
triggered the error.
Twin DY relative check result Twin DY relative check result exceeded

474 Guide CAL
exceeded error limit. error limit.
475 Guide CAL Completed cassette1 process. Set next cassette.
476 Guide CAL Completed cassette2 process. Set next cassette.
477 Guide CAL Completed inspection process. Set next cassette.
19/162
Confidential
Event
Type
Please check C.T. water temperature,
Execution time out on environment C.T. area temperature, C.T. area
479 Warning WRN
stabilizer. thermometer condition and C.T. area
monitoring parameter setting.
Please execute round cutting on an auto

480 Warning WRN Round cutting is not completed.
cut screen.
Semi auto cut cannot execute in a round

481 Warning WRN Semi auto cut cannot execute.
cutting recipe.
[Restart]: Recheck blade status and

482 Error ALM Detected blade breakage on %1.
restart cutting.
[Continue by single SP]: Redume cutting

only with another spindle.\n[Restart]:
483 Error ALM Detected blade breakage on %1.
Recheck blade status and restart
cutting.
486 Error ALM Can not unload to inspection tray.
Check the transfer mode indicated on

Transfer cannot be started as wafers title panel of the screen.
487 Warning WRN
and frames are mixed. In case of the wafer transfer mode,
remove frames.
If the TMS cylinder moves up after the

table height measurement, the work
Work thickness cannot be measured as thickness cannot be measured.\nIf the
488 Warning WRN
the TMS cylinder moved up. work on the cutting table is
unprocessed, execute unload, and then
resume the process.
In the work thickness measurement,

shifted measurement position can cause
Work thickness measurement cannot
489 Warning WRN incorrect results or damages to works.
execute due to incomplete alignment.
Conduct the measurement again after the
alignment.
Correct measurement result of the work

Work thickness measurement cannot
thickness cannot be obtained with
490 Warning WRN execute due to work cutting
already-cut-frames. Measurement shall be
complete.
done with uncut works.
Can not continue processing for work After work thickness measurement, please
491 Warning WRN
thickness unmeasured. run the process again.
In case of the wafer transfer mode,

remove frames. When transferring frames,
Frame is detected within the machine
492 Warning WRN change the "transfer mode" to that of
in the wafer transfer mode.
the frame (SYS: 24958) and start the
processing.
In case of the frame transfer mode,

remove wafers. When transferring wafers,
Wafer is detected within the machine
493 Warning WRN change the transfer mode to that of the
in the frame transfer mode.
wafer (SYS: 24958) and start the
processing.
20/162
Confidential
Event
Type
Cassette has been detected despite the
wafer transfer setting. When processing
Cassettes has been set in the wafer
494 Warning WRN the cassette, change the transfer mode
transfer mode.
to that of the frame (SYS: 24958) and
set the cassette again.
FOUP has been detected despite the frame

transfer setting. When processing the
FOUP has been set in the frame
495 Warning WRN FOUP, change the transfer mode to that
transfer mode.
of the wafer (SYS: 24958) and set the
FOUP again.
Could not find the wafer that should be

on the pre-alignment.
Wafer is not found on Wafer-
496 Warning WRN Press [Reject] if the wafer is removed.
prealignment.
And press [START] to continue the
process.
Could not find the wafer that should be

on the Wafer-hand.
497 Warning WRN Wafer is not found on Wafer-hand. Press [Reject] if the wafer is removed.
And press [START] to continue the
process.
Transfer mode is "Wafer mode", but Please confirm whether the recipe is
498 Warning WRN
the recipe is for frame. proper.
Transfer mode is "Frame mode", but Please confirm whether the recipe is
499 Warning WRN
the recipe is for wafer. proper.
After the product frame unload, please

do auto cassette dress on auto
Auto cassette dress has been
500 Warning WRN operation.\nOr after pressing
reserved.
button(dress skip), please do the
operation.
Because work dress exist in t equipment,

it is not possible to perform the stage
It is not possible to perform the
501 Warning WRN dress cutting.\nAfter the work dress is
stage dress cutting.
transported in a cassette, please
restart the process.
If the air micro cylinder moves up after

the table height measurement, the tape
Tape thickness cannot be measured as thickness cannot be measured. If the
505 Warning WRN
the air micro cylinder moved up. work on the cutting table is
resume the process.
If the air micro cylinder moves up

after the table height measurement, the
Work thickness cannot be measured as work thickness cannot be measured.\nIf
506 Warning WRN
the air micro cylinder moved up. the work on the cutting table is
resume the process.
Cutter set is no executed after table

exchange.\nPlease do the contact and
508 Warning WRN Cutter set is not executed. optical cutter set in blade maintenance
screen.\nIf the OPC unit is not exist,
please do contact cutter set.
509 Guide CAL Stopped by kerf ckeck result check. -
21/162
Confidential
Event
Type
Please select the spindle to execute the
Please select the spindle to execute verification cut. if height adjustment
510 Guide CAL
the verification cut. by verification cut has been completed,
please press Start Button.
Semi auto cut cannot execute in a

511 Warning WRN Semi auto cut cannot execute.
verification cut recipe.
Please unload work or start to cutting

512 Warning WRN Exceeded work outside usage lines.
without verification cut.
Because there is no information to

resume cutting, it is possible to cut
again a Work has been processed. \nIf it
is needed to continue cutting the Work
The necessary information to resume on the cutting table, please execute
516 Warning WRN cutting is not saved before shutting Manual Alignment, and then cut the Work
down. with Semi-Auto Cut. Remove the Work in
the equipment (including the work in the
Inspection tray or Dress Cassette), and
process the Work if additional
processing is needed.
It failed to copy data at the time of

It failed to copy data at the time phase switching.\nPlease push "START"
517 Warning WRN
of phase switching. button to start the processing.
Processing continues.
520 Warning WRN Stopped by stocker access.
There is no blade to be replaced in Please supplemented with blade in the

521 Guide CAL
stocker. stocker maintenance screen.
Please dispose of the blade in the

522 Guide CAL Stocker disposal slot is full.
stocker maintenance screen.
Can not be executed because of the

523 Guide CAL
ABES operation.
Because the blade attatchment state

check has not been completed, product
Blade attachment status check by cutting can not be started. Please
524 Guide CAL
kerf check is not successful. execute blade exchange again or change
the setting of kerf check Wmin
evaluation limit.
Because the manual blade exchange has

not been completed normally, the
ABES Auto blade exchange can not be
525 Warning WRN attatchment state of the blade and nut
executed.
is undefined. Please execute manual
blade exchange.
Cannot execute since Abes pallet Please unload the Abes pallet then try
526 Warning WRN
interfere. again.
ABES can not be executed because

527 Warning WRN there is a blade in the storage
slot.
Because it is recognized as product

530 Warning WRN Dress work is left in the equipment. work, please remove dress work after
system initialize.
22/162
Confidential
Event
Type
Verify kerf detection
532 Guide CAL Paused chop cutterset.
environment.\nPress [START] to resume.
Cannot change recipe by Lot is

533 Warning WRN Change recipe after lot end.
executing.
543 Guide CAL Completed error-work process. Please replace blade.
Stopped by tilt/skew map measurement

544 Guide CAL -
check.
Tilt/Skew map measurement is

545 Guide CAL -
completed.
X-Scan will be stopped by clearing this

alarm.\nPlease confirm the situation of
547 Guide CAL Re-executing X-Scan.
the work on the cutting table, and
resume the process.
Round cut result check should be

548 Warning WRN -
executed.
701 Warning WRN Active recipe is not selected. Select recipe data.
Work size is set smaller than index

702 Warning WRN Ensure that recipe data is properly set.
size,
The cutting sequence of device map

is incorrect.
Larger work size is set for the recipe

Table size and work size do not data than that set in the current table
704 Warning WRN
match. size. Check the table size setting as
well as the work size.
Correlation of work size and work

center is invalid.
Thickness of work and tape in recipe

data are invalid.
Current setting may lead Ensure work size and multi work
707 Warning WRN
interference of Works. position.
Cannot execute WMS on no-WMS recipe

data.
709 Warning WRN Active blade data is not selected. Please create blade data.
Not executable process step is

requested.
711 Warning WRN Recipe parameter[ID:%3] is invalid. Ensure that recipe data is properly set.
Define angle or angle factor against V

712 Warning WRN V blade angle is not set.
blade.
Flange diameter is set larger than

713 Warning WRN Ensure that blade data is correct.
blade diameter.
23/162
Confidential
Event
Type
Blade seize and flange size are set
as same size.
715 Warning WRN Blade size is set incorrect. Ensure that blade data is correct.
716 Warning WRN Flange size is set incorrect. Ensure that blade data is correct.
Exposure limit is set smaller than

717 Warning WRN Confirm thickness of tape or blade data.
tape thickness.
Ensure that the value of exposure data

The exposure data [ID:%3] is set to
718 Warning WRN of blade.\nThe limit value must be set
zero.
to a value other than zero.
Exposure limit is set larger than

blade exposure.
Ensure that maximum wear Limit of

Maximum wear Limit　[ID:%3] is set
720 Warning WRN blade.\nMaximum wear Limit must be set
to zero.
to a value other than zero.

Maximum wear Limit [ID:%3, %4] is
721 Warning WRN blade.\nThe warning value must be set to
wrong.
a value less than maximum wear Limit.

Maximum wear Limit [ID:%3] is bigger
722 Warning WRN blade.\nMaximum wear Limit must be set
than the exposure.
to a value less than the exposure.
Ensure that override data is properly

723 Warning WRN Override setting is incorrect.
set.
Ensure that override data is properly

724 Warning WRN Override setting is not set.
set.
Initial speed of override data is Ensure that override data is properly

725 Warning WRN
not set correctly. set.
Override interlock error has

726 Error ALM Load correct override data and continue.
occurred.
727 Warning WRN Override data does not exist. Configure override data properly.
Cannot rotate over 40000 rpm on Set spindle rotation speed less than
728 Warning WRN
current spindle. 40,000rpm to continue.
729 Warning WRN Dress data is not selected.
Cut channel data is not set Ensure that cut channel data is properly
730 Warning WRN
correctly. set.
731 Warning WRN Failed to select cut line. Please set the cut line again.
Block size is set smaller than index

size,
Work size is set smaller than block

size,
24/162
Confidential
Event
Type
Maximum cut lines Limit Margin is
not set correctly.
Maximum cut distance Limit Margin is

not set correctly.
Maximum cut lines Limitis not set

correctly.
Maximum cut distance Limit is not

set correctly.
Ensure that cutting method is properly

738 Warning WRN Cutting method is not correctly set.
set.
739 Warning WRN Can not edit using data.
740 Error ALM
Chop DY execution CH3 or CH4 is not Please confirm whether chop DY execution
741 Warning WRN
effective in the execution recipe. CH is effective in the execution recipe.
742 Warning WRN Dress data is not found. Dress data is not found.
Ensure that the value of exposure margin

The exposure margin data [ID:%3, %4] data of blade.\nThe limit value must be
743 Warning WRN
is wrong. set to a value less than the warning
value.
The spindle rotation speed is lower Ensure the specified spindle rotation
744 Warning WRN
than guaranteed speed. speed.
Number of skip or edge skip lines

745 Warning WRN Confirm the skip settings in dress data.
exceeds processible lines.
746 Warning WRN Cannot set truing for auto dress Do not set truing for auto dress.
Dress Stage and X-axis is turned Please check work size(RCPID:40004) and
748 Warning WRN
interfere settings. cut margin(RCPID:43007).
To execute manual environment

Set environment stabilizer data in stabilizer, environment stabilization
749 Warning WRN
recipe data need to be set inrecipe data. Set
environment stabilization data in recipe
changed transfer axis HW Please confirm transfer axis in escape

751 Warning WRN
setting(ID=10044). position and system reboot.
752 Warning WRN CST size is not set correctly. Ensure that CST size is correct.
Frame sensor detection ratio lower Check frame sensor detection ratio lowe
755 Warning WRN
limit exceeded upper limit. limit and upper limit.
25/162
Confidential
Event
Type
Different shape data between cut
756 Warning WRN Check dress data.
information and dress data
Cannot use work dress and stage Do not set both stage dress and cassette
757 Warning WRN
dress in ONE LOT dress in LOT.
Reserved auto dress data and active If auto dress is unnecessary, perform
758 Warning WRN
dress data is different [Dress skip].
759 Warning WRN Cannot set double stage dress data Set one stage dress data.
Execute dress in dress screen. If auto

Cannot execute stage dress in
760 Warning WRN dress is unnecessary, perform [Dress
current setting
skip].
Cannot set same dress plate on dress Confirm dress sequence in recipe and
762 Warning WRN
sequence in recipe. specified dress data.
Current setting may lead Confirm dress sequence in recipe and

763 Warning WRN
interference of Plates. specified dress data.
Set the temporary cut speed within

The temporary cut speed is over the
764 Warning WRN recipe data of limit for temporary
limit of recipe data setting.
cutting speed.
Set the temporary cut speed within

The temporary cut speed is over the
765 Warning WRN system data of limit for temporary
limit of system data setting.
cutting speed.
Set the temporary cut height within

The temporary cut height is over the
766 Warning WRN recipe data of limit for temporary
limit of recipe data setting.
cutting height.
Set the temporary cut height within

The temporary cut height is over the
767 Warning WRN system data of limit for temporary
limit of system data setting.
cutting height.
Basic width of V-groove [ID:%4] is Please edit basic width of V-groove in

768 Warning WRN
not set. recipe data.
V-groove width correction value Please edit V-groove width correction

769 Warning WRN
[ID:%4] is not set. value in recipe data.
Cut height correction value [ID:%4] Please edit cut height correction value
770 Warning WRN
is not set. in recipe data.
The setting of ID:%3 are different Please set the same value to the phase
771 Warning WRN
between phase recipes. recipes.
Please copy the recipe with model data,

Model are different between phase
772 Warning WRN please create a phase recipe from
recipes.
there.
773 Warning WRN Remained exposure setting error Confirm the remained exposure setting.
Please set Cutting process[ID:49065] to

774 Warning WRN It is no cutting mode.
Exec.
Please set Auot cleaning

775 Warning WRN Auto cleaning function is enabled.
function[ID:24528] to OFF.
26/162
Confidential
Event
Type
Please set the recipe parameter
The settings of optional operation [ID:49065] to same value in one LOT, and
776 Warning WRN
are different in one LOT. also set the parameter [ID:49066] to
same value.
Ensure that the value of exposure data

The exposure data [ID:%3, %4] is
783 Warning WRN of blade.\nThe limit value must be set
wrong.
to a value less than the warning value.
Ensure that the value of exposure margin

The exposure margin data [ID:%3] is
784 Warning WRN data of blade.\nThe limit value must be
set to zero.
set to a value other than zero.
Exclusion area or OF length is set Please set Exclusion or Orientation flat

787 Warning WRN
bigger than work size. length to a value less than Work size.
Initial dress start step by new blade

Initial dress start step by new
788 Warning WRN [ID:55674] must be set the value\nless
blade is wrong.
than Dress end step [ID:55501].
Initial dress start step by used blade

Initial dress start step by used
789 Warning WRN [ID:55675] must be set the value\nless
blade is wrong.
than Dress end step [ID:55501].
Initial dress start step by new blade

Initial dress start step by new [ID:55674] must be set the value\nless
790 Warning WRN
blade is wrong. than Initial dress start step by used
blade [ID:55675].
Can't start process because cutting Please remove the frame from CT or
791 Warning WRN
pass is set. confirm system data [ID:24528].
Can't start process because cutting Please remove the frame from CT or
792 Warning WRN
pass is set. confirm recipe data [ID:49065].
Can't start process because washing Please remove the frame from ST or
793 Warning WRN
pass is set. confirm recipe data [ID:49066].
Please check blade data and change it to

795 Warning WRN The blade is NOT V-blade.
V-blade.
Manual height correction is not Please check recipe data settings, and
796 Warning WRN
enable for this SP. enable manual hheight correction
The correction height is over the

797 Warning WRN Set the correction height within limit .
limit.
The CH that alignment execution is set

Cutting CH is set to the alignment "PASS" can not be cut.\nIf you want to
798 Warning WRN
pass. cut, please set "EXEC" to alignment
execution.
Cutting order of the cutting viewer is

initial value of Cut method(User
799 Warning WRN User cutting interlock(Cut order) setting). Please confirm the cutting
order of the recipe, and, set a Cut
order.
Cutting order of the cutting viewer is

not the initial value of the Cut
800 Warning WRN User cutting interlock(Cut order) method(User setting). Please set it
again after changing Cut method of the
recipe, and, initialize Cut order.
27/162
Confidential
Event
Type
Cut type of all cutting lines of cutting
viewer is set in Index. Please set it in
801 Warning WRN User cutting interlock(Cut type)
Cut type of the recipe any place other
than Index.
Non-Index is set in Cut type of the

cutting line of the cutting viewer.
802 Warning WRN User cutting interlock(Cut type) Please set it again after changing Cut
method of the recipe, and, initialize
Cut type.
Kerf edge adjustment and Laser adjust

function are not available at the same
Cut correction setting is
803 Warning WRN time. Please set recipe data [ID:43733]
conflicting.
to "OFF" or set recipe data [ID:43841]
to NOT "Kerf edge".
Round cutting cannot be executed to Please change the setting of recipe data
804 Warning WRN
a multi work. to the correct value.
Please change the speed to low or change

The round cutting speed is over the
805 Warning WRN the cut speed-setting(ID:42808) to
maximum speed.
"Rotation speed".
813 Warning WRN Cannot use stage dress in sub dress Do not set stage dress in sub dress.
If performing work thickness

Cannot use work thickness measurement,
814 Warning WRN
measurement function. please set [All Work] to Multi align
Method[RCP:44192].

815 Warning WRN
measurement function. please set other than [Pass] to
Alignment execution[RCP:44047].

816 Warning WRN
measurement function. please set [GRID] to Alignment
type[RCP:44001].
Offset of multi point Y offset Please set the multi point Y offset of
817 Warning WRN
exceeds 1/2 index size. recipe in less than 1/2 index.
0 is set to X distance after the 2nd

Multi point Y offset X distance point.\nX distance after the 2nd point
818 Warning WRN
setting error. of the recipe, please set distance from
the 1st point.
Step kerf check process is set to H Please Step kerf check process setting
819 Warning WRN
and F. is change to Half-cut or Full-cut.
Cutting X direction between the twin Please set the cutting X direction
820 Warning WRN
SP is the different settings. between the twin SP the same.
Specific cutting position is outside

824 Warning WRN Please check specific cutting position.
the cutting range.
Please change the DIW1 temperature

specification method to
825 Warning WRN DIW1 thermometer is not exist.
[Temperature]\nin utility interlocking
spindle rotation control function.
28/162
Confidential
Event
Type
Please change the SPC temperature
specification method to
826 Warning WRN SPC thermometer is not exist.
[Temperature]\nin utility interlocking
spindle rotation control function.
Work dress data at recipe has been Please check the setting of automatic
829 Warning WRN
set stage dress data. dress data in recipe.
Stage dress data at recipe has been Please check the setting of automatic
830 Warning WRN
set work dress data. dress data in recipe.
Please set "CO2 bubbling water flow

The setting of CO2 bubbling water is
833 Warning WRN setting (ID:49577)" to other options
not correct.
except "ST".
Y1 and Y2 axis may interfere because of

the difference of speed-related system
Y1 and Y2 axis parameter check error parameters. Except special reason,
834 Warning WRN
(SYS[ID:%3, %4]) please change these parameters same
value. Default value has been described
in instruction manual.

the difference of speed-related driver
parameters. Except special reason,
Y1 and Y2 axis parameter check error
835 Warning WRN please change these parameters same
(DRV[ID:%3, %4])
value, then restart machine. Default
value has been described in instruction
manual.

836 Warning WRN

837 Warning WRN
Over the upper limit of Blade Ensure the specified spindle rotation
838 Warning WRN
rotation speed speed.
839 Warning WRN Recipe parameter[ID:%3] is invalid. Verification cut cannot execute.
Because kerf check execution line

specifaction method is set "Viewer", it
It will not be able to use the jump will not be able to use jump kerf check
841 Warning WRN
kerf check function. function.\nPlease set kerf check
execution line specifaction mehod to
"Data".
Because special cutting method (User

Cut, Cross Cut, Divide Cut, Rouncd Cut,
It will not be able to use the jump
842 Warning WRN e.t.c.) is effective, it will not be
kerf check function.
able to use the jump kerf check
function.
29/162
Confidential
Event
Type
Because jump kerf lines is too large,
It will not be able to use the jump it will not be able to use the jump kerf
843 Warning WRN
kerf check function. check function.\nPlease set line to less
than tolerance lines.
The maximum number of phase is Please set the max phase count to the
844 Warning WRN
different from the actual number. maximum number of -Pn.
Can not set the "CUT" in the phase

Phase process specified setting is
845 Warning WRN process of phase 1.\nPlease set the
illegal.
"ALN+CUT" or, "ALN".
Please set the value less than self-

Phase of alignment result copy
846 Warning WRN phase number to "Phase of alignment
setting is illegal.
result copy".
Please set the "ALN+CUT" or, "ALN" to

847 Warning WRN phase process of "Phase of alignment
setting is illegal.
result copy".
It does not exist recipe of alignment

848 Warning WRN result copy.\nPlease confirm the
setting is illegal.
setting.
Please set the recipe data of the

849 Warning WRN alignment result copy source and the
setting is illegal.
copy destination to the same value.
Alignment copy source are different

model data from the copy
850 Warning WRN destination.\nPlease copy the recipe
setting is illegal.
with model data, please create a phase
recipe from there.
851 Error ALM
Adjust the work size (ID: 40004) or the

Pattern layout radius is set outside pattern layout radius (ID:44795) after
852 Warning WRN
the work. checking the work size and the pattern
layout position.
When X specify mode is used, "Fine

search exec mode" can not be specified
853 Warning WRN Alignment parameter setting error. "round". Please confirm how to align and
either of the following settings should
be changed. ID:44387, 44794
When specifying cutting sequence for

Individual work alignment can not
854 Warning WRN multiwork function is valid, individual
execute.
work alignment can not execute.
Cutting CH is not specified in

855 Warning WRN Cutting CH is not set. specifying cutting sequence for
multiwork function.
The same cutting sequence is specified

Cutting sequecnce is set to be
856 Warning WRN in specifying cutting sequence for
dupulicated.
multiwork function.

Individual work phase cut can not
857 Warning WRN multiwork function is valid, individual
execute.
work phase cut can not execute.
30/162
Confidential
Event
Type
multiwork function is valid, change CH
Change CH cutter set can not
858 Warning WRN cutter set can not execute. Please use
execute.
cutter set for speciying cutting
sequence.
When "Fine search exec mode" is

specified "round", alignment correction
function can not be executed. Please set
859 Warning WRN Alignment parameter setting error.
"Align correct mode" (ID: 43841) to
"OFF", or set "Fine search exec mode"
(ID: 44794) to "standard".
The setting of Spinner wash valve is Please check the setting of "Spinner
860 Warning WRN
not correct. wash valve select (ID:48204)".
Please re-execute after checking the

Bright calibration has started with
861 Warning WRN following settings and disabling the
image emphasis processing enabled.
image emphasis. ID:10002, 10424, 10425.
Using multi-recipe in 1LOT, the

Please set the recipe parameter
862 Warning WRN settings of cleaning before cutting
[ID:48223] to same value in one LOT.
are different.
When using the spinner warm air drying

Spinner drying can not be performed function in the recipe setting, it is
867 Warning WRN
with warm air type. necessary to disable the multi-recipe
setting (SYSID: 20154).
Please set Exclusion area or Orientation

Exclusion area or OF height is set
870 Warning WRN flat height to a value less than Work
bigger than work half size.
half size.
Please confirm the settings of the

876 Warning WRN Exclusive functions are enabled. functions. And disable the function
unnecessary.
The Y position offset diff. (OPC1- Please retry after adjusting the another
878 Warning WRN
OPC2) exceeded the limit. OPC.
Please check that the blade diameter and

Z down limit correction value the data of it match for both spindles.
879 Warning WRN
exceeded allowable value. If it occurs repeatedly, adjust with
SP2.
Default recipe is not

883 Warning WRN
selected.(SYSID:24747)
Detected disconnection leads

1101 Error ALM Check communication status.
communication error.
HOST communication error has Correct errors through analyzing Host

1102 Error ALM
occurred. message protocol.
Check status of system control or host

1103 Warning WRN VID from HOST cannot be configured.
communication control.
1104 Warning WRN No alarm code is defined. Define alarm code or set it again.
Establish communication or report online

1105 Warning WRN Connection is not established.
status.
NO authorization of load or REDUME Operate through Host or use under

1106 Warning WRN
from HOST. offline.
31/162
Confidential
Event
Type
Release error status and wait for Hosts'
1107 Guide CAL Process aborted by HOST command. command. Resuming process using [START]
is also available.
Operate through Host or configure PPID

1108 Warning WRN PPID from HOST is not assigned.
manually.
No authorization for start process Operate through Host or use under

1109 Warning WRN
from HOST. offline.
Change system status to offline or

Connection control status error has
1110 Error ALM execute "DISABLE", then restart from
occurred.
online again.
Change automation status to online

Failed to be online since HOST is
1111 Warning WRN through Host, or try it again from
offline
offline status.
Processed number of Lot, which HOST

1112 Guide CAL Execute "Lot-End".
required, is exceeded.
The communication establishment

1113 Error ALM Confirm Host status.
timed out.
Barcode authorization error in HOST

has occurred.
Remote command timed out is

occurred.
1116 Error ALM Recipe change from HOST is failed. Ensure that correct recipe is set.
System is stopped by stop signal

1117 Guide CAL
from HOST.
Cannot start process without START process after permission came from
1118 Warning WRN
permission from HOST. HOST.
Check if the license file is available

Environmental conditions are not on the SECS screen. In addition, check
1119 Error ALM
enough for the SECS communication. if the GEM driver is installed. If not,
turn OFF the parameter "ID: 11055."
1120 Warning WRN Loopback error occurred.
Can not execute because HOST is

1121 Warning WRN Please set online.
offline.
Can not download execute recipe in

offline.
1123 Error ALM Fail to upload data. Confirm the connection status of HOST.
Data download from the Host has Check the connection status of the Host.
1124 Error ALM
failed. See "Help" for details.
1125 Error ALM Host has determined frame ID is NG. Please execute recovery action.
32/162
Confidential
Event
Type
No response from the Host within the
time limit for the frame barcode
reading. Request the investigation to
1126 Error ALM No response from the Host.
staff in charge of the Host. In
addition, select the operation mode of
the frame. See "Help" for details.
1127 Error ALM Host requested to re-read frame ID. Please check for the error condition.
Host requested the pre-alignment

1128 Error ALM Please check for the error condition.
frame abort.
Host has determined cassette ID is

NG.
Host response for cassette ID is

timeout.
1131 Guide CAL Recipe change from HOST is succeed.
1132 Error ALM HOST request is time out. Confirm the connection status of HOST.
Confirm LAN cable status.\nConfirm SECS

Failed to be online since connection
1133 Warning WRN communication setting.\nConfirm Host
is not established.
status.
Processing from the HOST after the end,

1134 Warning WRN HOST is being processed.
and then re-execute.
Please resend the remote sensing start

1135 Error ALM Is not ready for remote sensing
request.
Please try to delete again few hours

later. If you want to delete it
1136 Error ALM Fail to delete data.
immediately, you may be able to delete
it after rebooting the machine.
Please push [EXIT] and cancel the blade

1137 Error ALM HOST request is time out. exchange. When exchanging the blade
offline, go offline and exchange it.
Please check the blade to attach and

Scanned IDs are not permitted by
1138 Warning WRN scan IDs for blade ID and blade data
HOST.
name.
Scanned IDs are wrong. Please cancel the

1139 Error ALM Scanned IDs are wrong.
blade exchange
1140 Warning WRN Cannot upload data in offline. Please set online.
Check the connection status of the Host.

1141 Error ALM Data upload to the Host has failed.
Start request could not be received from

Host request for remote start is the host within the waiting time of the
1142 Error ALM
timeout. request. Confirm the connection status
of HOST.
Retry after few seconds.\nIf a

Failed to import Saw-NET_PW upload
1143 Warning WRN repetitive error occurs, set SYSID:
data into the M/C
26530 to OFF,ON
33/162
Confidential
Event
Type
1201 Error ALM Access mode violation. Please check for the access mode.
1202 Warning WRN Carrier verification failure. Please remove carrier.
1203 Error ALM Slot map read failed. Please remove carrier.
1204 Error ALM Slot map verification failed. Please remove carrier.
Attempt to use out of service load

1205 Error ALM Please remove carrier.
port.
1206 Error ALM Carrier presence error. Please remove carrier.
1207 Error ALM Carrier placement error. Please remove carrier.
1208 Error ALM Carrier dock/undock failure. Please remove carrier.
1209 Error ALM Carrier open/close failure. Please remove carrier.
1210 Error ALM Duplicate carrier ID. Please remove carrier.
1211 Error ALM Carrier removal error. Please remove carrier.
1212 Error ALM PIO failure. Please check for the PIO.
Internal buffer carrier move

1213 Error ALM Please remove carrier.
failure.
Press [Verify OK] button, if the carrier

1214 Guide CAL Please verify the carrier ID. ID is OK.\nPress [Verify NG] button, if
the carrier ID is NG.
Press [Verify OK] button, if the SlotMap

1215 Guide CAL Please verify the Slot Map is OK.\nPress [Verify NG] button, if the
SlotMap is NG.
1216 Error ALM Access mode violation during unload. Please check for the access mode.
1217 Error ALM General invalid state failure. Please remove carrier.
The PJCommand can't be processed

1219 Error ALM Start the control job first.
when CJ hasn't been started.
Job state in which the command can not

1223 Guide CAL CJ Command failed.
be executed.\nConfirm job state.
Job state in which the command can not

1224 Guide CAL PJ Command failed.
be executed.\nConfirm job state.
Frame belonging to other Process Job Remove the frame in the equipment, and
1225 Warning WRN
resides in the equipment. press [START] to resume the process.
34/162
Confidential
Event
Type
Remove the frame in the equipment, and
1226 Guide CAL The Control Job has been aborted.
press [LotCancel] to cancel the carrier.
1227 Warning WRN Failed to create 1CJ-1PJ. Confirm status.
If there is any frame in the equipment

1228 Warning WRN The carrier has stopped. remove it. Press [LotCancel] to remove
the carrier.
This function is not supported for

1229 Guide CAL
online-remote mode.
Please create CJ and PJ from HOST.\nOr

CJ and PJ does not exist. Can't
1230 Warning WRN please press [START] after switching to
start.
Online-Local or Offline.
Please create CJ and PJ from HOST.\nOr

CJ and PJ does not exist. Can't
1231 Warning WRN please press [Manual Load] after
manual load.
switching to Online-Local or Offline.
There is no start button on the

screen.\nPlease start from the Auto
1232 Warning WRN Can't start.
Operation screen which a start button is
within.
Can't dequeue Process Job that is part

1233 Guide CAL Can't dequeue Process Job.
of a Control Job.
Processing from the HOST after the end,

1234 Guide CAL HOST is being processed.
and then re-execute.
Control Job of other QUEUED state does

not exist. Please create a new Control
1235 Guide CAL CJ DESELECT failed.
Job. Then, please DESELECT the Control
Job of SELECTED state.
CJ STOP command from the GUI is not

1236 Guide CAL CJ STOP failed. supported in this state.\nPlease send
the CJ STOP command from the HOST.
CJ ABORT command from the GUI is not

1237 Guide CAL CJ ABORT failed. supported in this state.\nPlease send
the CJ ABORT command from the HOST.
CJ CANCEL command from the GUI is not

1238 Guide CAL CJ CANCEL failed. supported in this state.\nPlease send
the CJ CANCEL command from the HOST.
CJ RECUME command is not supported in

1239 Guide CAL PJ RESUME failed. this state.\nPlease send the CJ RECUME
command after changing state.
CJ STOP command from the GUI is not

1240 Guide CAL CJ STOP failed. supported in this state.\nPlease send
the CJ STOP command from the HOST.
CJ ABORT command from the GUI is not

1241 Guide CAL CJ ABORT failed. supported in this state.\nPlease send
the CJ ABORT command from the HOST.
35/162
Confidential
Event
Type
Recipe cannot be selected as the
relevant barcode cannot be found in the
No specified barcode ID on barcode
1301 Warning WRN barcode list. Register the barcode on
combination list.
the barcode list screen and scan the
barcode again.
File reading test to the AD-NET

1302 Warning WRN Try again later.
server has failed.
File writing test to the AD-NET

1303 Error ALM Touch [Help] button to see the detail.
server has failed.
Data upload to the AD-NET server has

failed.
Data download from the AD-NET server

has failed.
No barcode list can be found in the

1306 Warning WRN Check the AD-NET connection status.
AD-NET server.
Recipe download has failed as the

No relevant recipe for the barcode relevant recipe for the AD-NET server
1307 Warning WRN
ID is found in the AD-NET server. could not be identified. Upload the
relevant recipe to the AD-NET server.
1308 Warning WRN Can not connect to AD-NET server. Confirm the connection status of AD-NET.
Online command timed out is

1309 Warning WRN Confirm the connection status of AD-NET.
occurred.
1310 Error ALM Can not copy to active data. Change to another data then try again.
Change the AD-NET connection status to

This processing is not allowed as Online on the AD-NET screen of the
1311 Warning WRN
the AD-NET is Offline. Engineering maintenance. See "Help" for
details.
Can not download execute recipe in

offline.
1313 Error ALM Fail to connect AD-SERVER. Confirm the connection status of AD-NET.
1314 Error ALM Invalid AD-SERVER name. Confirm the setting of AD-SERVER name.
1315 Error ALM Can not copy to editing data. Change to another data then try again.
Can not access data in startup or

1316 Error ALM Retry after startup.
shutdown.
1317 Error ALM Fail to connect AD-SERVER. Confirm the connection status of AD-NET.
Fail to get access-authority to AD- Confirm the setting of AD-SERVER

1318 Warning WRN
SERVER. function.
Can not execute because already

1319 Warning WRN Retry after log collecting.
collecting log.
36/162
Confidential
Event
Type
Can not execute because already
1320 Warning WRN Retry after data backuping.
backuping data.
Can not execute because AD-SERVER

1321 Warning WRN Retry after few seconds.
access is busy.
1322 Warning WRN Cancel log collect.
No blade data is correcponding to Confirm the existence of blade

1323 Warning WRN
the barcode ID. corresponding to server.
No dress data is correcponding to Confirm the existence of dress

1324 Warning WRN
the barcode ID. corresponding to server.
Cannot receive response from host

1325 Warning WRN Retry after input data confirmation.
server.
Retry after confirming the host data and

1326 Warning WRN Request is denied by host server.
input data.
Designed data is not existed. Failed

1327 Warning WRN Confirm data in AD-NET.
to change the data.
Confirm input data in Barcode input

1328 Warning WRN Lack of required data for allowance.
screen.
1401 Error ALM System error is occurred. Confirm the connection status of AD-NET.
1402 Error ALM Response timeout . Confirm the connection status of AD-NET.
Can not connect to the remote

1403 Error ALM Confirm the connection status of AD-NET.
service.
Confirm the connection status of

1404 Error ALM Invalid equipment address.
machine.
1405 Error ALM Machine S/N mismatch. Input correct machine S/N.
1406 Error ALM Machine type mismatch. Input correct machine type.
Cancel the registration of machine to

1407 Error ALM Machine is already registered.
register again.
1408 Error ALM Invalid command. Please install software again.
1409 Error ALM Data conversion error. Confirm the connection status of AD-NET.
1410 Error ALM Equipment is offline. Set machine online.
1411 Error ALM AD-NET is disabled on equipment. Set AD-NET setting available.
Reference environment data

1412 Error ALM Confirm the connection status of AD-NET.
registration error.
1413 Error ALM Data list creation error. Confirm the connection status of AD-NET.
37/162
Confidential
Event
Type
1414 Error ALM Data creation error. Confirm the connection status of AD-NET.
1415 Error ALM Data copy error. Confirm the connection status of AD-NET.
1416 Error ALM Data rename error. Confirm the connection status of AD-NET.
1417 Error ALM Group move error. Confirm the connection status of AD-NET.
1418 Error ALM Group rename error. Confirm the connection status of AD-NET.
1419 Error ALM Data deletion error. Confirm the connection status of AD-NET.
The edit display is being prepared.

1420 Warning WRN Please push the edit button again Retry after few seconds.
after it waits for a while.
Editting data is selected. Can not

1421 Warning WRN Quit editting data on AD-Client.
continue process.
Confirm the connection status of AD-

Setting file is not fount.Confirm
1422 Error ALM NET.Barcode list is deleted, please
the settings of batch.
carry barcode list again.
1423 Error ALM Failed connection to machine Confirm machine connection status.
1424 Error ALM Found not-input data Set value in not-input data.
1425 Error ALM Found same named data Specify data name that is not existed.
1426 Error ALM Found same named group Specify group name that is not existed.
Environment setting is not

1427 Error ALM Restart and set environment data.
completed. Quit application.
Cannot register without machine to Specify data folder that machine uses or
1428 Error ALM
use specified data folder specify data folder on machine again.
Welcome to AD-NET. Set app data

1429 Guide CAL Set application before operate client.
before operating client.
1430 Guide CAL Quit application. OK?
Delete Machine ID: {0}、Machine

1431 Guide CAL
name: {1}. OK?
1432 Guide CAL Delete specified data. OK?
Found specified data on copy folder.

1433 Guide CAL
Sure to overwrite?
Save current data and get

1434 Guide CAL
information. OK?
38/162
Confidential
Event
Type
1435 Error ALM Invalid server name. Confirm customer server settings.
1436 Error ALM Can not login to the server. Confirm customer server settings.
1437 Error ALM Can not find the file specified. Confirm customer server settings.
Can not delete data folder because

1438 Error ALM Remove all machines from data folder.
it is used by one or more machine.
1439 Error ALM Invalid format of barcode file. Check barcode file.
Can not switch to online because

Check machine registration on the
1440 Error ALM machine is not registered on the
server.
server.
Cannot connect to data folder

1441 Error ALM Confirm AD-NET connection status.
server.
System error(Illegal data folder

structure)
System error(Connection failure to

AD proxy server)
System error(Time out to AD proxy

server)
1445 Error ALM Invalid command. Please install software again.
Cannot execute layout data file whie

1446 Error ALM Execute again after.
other user is editing.
Cannot edit the data of the previous

version.
1448 Error ALM Editor is not installed. Please install editor to AD-NET Client.
Cannot connect to customer HOST Confirm the connection from AD-Server to

1449 Warning WRN
server. customer HOST server.
Response from host is invalid (null Please confirm host server status or
1450 Warning WRN
response). confirm communication time out.
Number of data is invalid at Please confirm the response data (number

1451 Warning WRN
response data. of delimiter.)
Please confirm the response data

1452 Warning WRN Data contains invalid character.
(Invalid character.)
Operator management file might be

1501 Guide CAL Failed to change operator. corrupted.\nDelete unedittable Operator
settings.
1502 Guide CAL Failed to change active recipe. Please restart machine.
1503 Guide CAL Failed to change active blade. Please restart machine.
39/162
Confidential
Event
Type
1504 Guide CAL Invalid character is input. Input strings available to use.
1505 Guide CAL File is not exists. Please restart machine.
1506 Guide CAL Folder does not exist. Please restart machine.
1507 Guide CAL The password is invalid. Enter correct password.
1508 Guide CAL Input value is out of range. Input values in range.
Number of strings must be set less than

1509 Guide CAL Too many character are input.
32.
1510 Guide CAL Operator ID is not selected. Select operator name.
1511 Guide CAL Recipe data is not selected. Select recipe data.
1512 Guide CAL Blade data is not selected. Select blade data.
1513 Guide CAL Recipe data name is not set. Input name of recipe data.
1514 Guide CAL Blade data name is not set. Input name of blade data
1515 Guide CAL Group name is not set. Input group name.
Once change to other recipe data then

change back to current recipe again.
1516 Guide CAL Failed to loading recipe data.
\nIf error occurs repeatedly, create new
recipe data.
Once change to other blade data then

change back to current blade again. \nIf
1517 Guide CAL Failed to loading blade data.
error occurs repeatedly, create new
blade data.
Active recipe data cannot be

1518 Guide CAL Load other recipe data, then delete.
deleted.
1519 Guide CAL Active Blade data cannot be deleted. Load other blade data, then delete.
Data is remained in the group to be

1520 Guide CAL Move data in group then delete.
deleted.
Same named operator ID is already Input operator ID which is not

1521 Guide CAL
exists. previously registered.
Same named group name is already Input group name which is not previously
1522 Guide CAL
exists. registered.
Same named recipe data name is Input recipe name which is not
1523 Guide CAL
already exists. previously registered.
40/162
Confidential
Event
Type
Same named blade data name is Input blade name which is not previously
1524 Guide CAL
already exists. registered.
1525 Error ALM Failed to create directory. Please restart machine.
1526 Error ALM Failed to delete data folder. Please restart machine.
1527 Error ALM Failed to open file. Please restart machine.
In order to use that barcode ID,

register through the button [Register
1528 Warning WRN Read barcode ID is unregistered.
new barcode] on the barcode list screen.
In order to change the registered

The barcode ID is already information of the barcode ID, do so
1529 Warning WRN
registered. through the button [Edit] on the barcode
list screen. See "Help" for details.
No recipe data is correcponding to Specify barcode ID that is not

1530 Warning WRN
the barcode ID. registered yet.
No blade data is correcponding to Specify barcode ID that is not

1531 Warning WRN
No dress data is correcponding to Specify barcode ID that is not

1532 Warning WRN
Try again. If the error occurs

1533 Warning WRN Failed to create file.
Specify registered barcode

1534 Warning WRN ID.\n[Register new barcode]:Register
combination list.
specified new barcode ID.
Please try to delete again few hours

later. If you want to delete it
1535 Error ALM Access error deleting files.
immediately, you may be able to delete
it after rebooting the machine.
1537 Warning WRN Parameter value is invalid. Check parameter on screen.
1538 Warning WRN Fail to upload data. Confirm the connection status of HOST.
Confirm the connection status of

1539 Warning WRN Fail to download data. HOST.\nPlease check SML format recipe
files compressed.
Please set the recipe of a download

There are multiple recipes to
1540 Warning WRN folder to one recipe by HOST.
download folder.
Then,please push a EXIT button.
Execution recipe is not imported

1541 Guide CAL
into equipment.
1542 Warning WRN Fail to upload data. Retry after a few seconds.

1543 Warning WRN Specify registered barcode ID.
combination list.
41/162
Confidential
Event
Type
Scanned barcode isn’t associated
1544 Warning WRN Please scan corresponding barcode.
with exec blades’ data.
Barcode associated with exec Please scan each corresponding barcode,

1545 Error ALM
blades’ data was not scanned. and then press [START] again.
When you need reading other barcode, you

The barcode reading for target cancel exchange processing by [EXIT]
1546 Warning WRN
spindle has been already finished. pressing, and please do it again from a
beginning.
Reserve recipe data cannot be

1547 Guide CAL Load other recipe data, then delete.
deleted.
Reserve recipe data cannot be

1548 Guide CAL Load other recipe data, then rename.
renamed.
Touch [START] again on the barcode ID

Cannot start without the recipe
1549 Error ALM setting screen after recipe change and
change or lot name entry by barcode.
lot name entry.
Blade data name and blade lot ID are Please scan codes corresponding to the
1552 Error ALM
wrong. blade dataname and blade lot ID.
Scanned blade data name doffers between

Blade data name and blade lot ID are
1553 Error ALM the barcode list and resume barcode
wrong.
list.
There's no correspondence of barcode

1556 Warning WRN Please create barcode list file.
list file in the equipment.
The blade serial number is

1558 Warning WRN duplicated. The blade has already
been registered.
1559 Warning WRN Invalid format of blade barcode.
1560 Warning WRN Found no master setting file.
The format of master setting file is

1561 Warning WRN
not correct.
Create new blade data or copy other

1562 Error ALM The blade data not found.
blade data.
Failed to load setting file in Check download/upload function settings

1601 Warning WRN
down/upload function. file.
Received error from Recipe download

1602 Warning WRN Check download program.
program.
1603 Warning WRN No recipe files were downloaded. Check download program.
No comparison text file was

downloaded.
Abnormal format in comparison text

1605 Warning WRN Check comparison text file.
file.
Shortage items in comparison text

1606 Warning WRN Check comparison text file.
file.
42/162
Confidential
Event
Type
Mismatch between download recipe and
1607 Warning WRN Check recipe data.
text file.
Received error from Recipe upload

1608 Warning WRN Check upload program.
program.
After cassette setting, recipe was

1609 Warning WRN Download recipe before execute.
not downloaded.
1610 Warning WRN No recipe download program. Check download program.
1611 Warning WRN No recipe upload program. Check upload program.
No configuration file for Check download/upload function settings

1612 Warning WRN
download/upload function. file.
Recipe download/upload function Check download/upload function settings

1613 Warning WRN
error. file.
Only ONE down load recipe file is

Multiple down loaded recipe files
1614 Warning WRN available.\nCheck the specification of
were found.
down load program.
Failed to load setting file in Check download/upload function settings

1701 Warning WRN
down/upload function. file.
Received error from Blade download

program.
1703 Warning WRN No blade files were downloaded. Check download program.
Received error from Blade upload

1704 Warning WRN Check upload program.
program.
1705 Warning WRN No blade download program. Check download program.
1706 Warning WRN No blade upload program. Check upload program.
No configuration file for Check download/upload function settings

1707 Warning WRN
download/upload function. file.
Blade download/upload function Check download/upload function settings

1708 Warning WRN
error. file.
Only ONE down load blade file is

Multiple down loaded blade files
1709 Warning WRN available.\nCheck the specification of
were found.
down load program.
1801 Error ALM Fail to connect eSiS SERVER. Confirm the connection status of eSiS.
1802 Error ALM Response timeout . Confirm the connection status of eSiS.
The response from the eSiS server is

1803 Error ALM Confirm the send event log.
invalid.
1804 Error ALM Fail to send data. Confirm the status of FTP.
43/162
Confidential
Event
Type
Failed to load setting file in eSiS
1805 Warning WRN Check eSiS function settings file.
function.
ISUPCI library is required for Restart after confirming the ISUPCI

1806 Warning WRN
communicating with eSiS. library.
Process cannot be online. There is a When the work being processed is

1807 Warning WRN
work in progress. finished, and try again.
Cannot start. Operator ID is not

1808 Warning WRN Enter operator ID.
entered.
Restart after switching connection

status Online or Offline.\n
Com status is red : connection error.
Cannot start by Disconnected or
1809 Warning WRN Confirm network status.\n
Server error.
Com status is yellow : Error occurred at
eSiS Host Server. Confirm the details at
Event Log.
Resume process after alignment is

2001 Warning WRN Alignment is not completed.
completed.
Model registration cannot be conducted

with the alignment pass recipe. When
Current Recipe data is set as
2002 Warning WRN registering a model with the active
alignment pass setting.
recipe, set the alignment operation (ID:
44047) to auto.
Light condition of model and

2003 Warning WRN Apply model after manual alignment.
registered data are mismatch.
Exchange configuration of each CH's main

index size in recipe data, or activate
Can't detect chip shift with current
2004 Error ALM only high magnification(rough and fine
rough alignment data.
align.(ID 44048)="PM(HI)". Then execute
model teaching.
Cannot execute alignment out of If error occurs repeatedly, register

2005 Warning WRN
alignment area. alignment model again.
Cross coordinate calculated by

respective alignments of 1st and 2nd CH
does not match, and thus the error
larger than the setting of the recipe
parameter (ID44060: Residual XY limit
between CHs) has been detected.
2006 Error ALM Residual error of alignment result. Following are the possible factors:
1. Rotation center is deviated →
Execute the rotation center correction.
2. One of the channels failed the
pattern detection and the correct cross
position could not be calculated. →
Review the registered model.
Execute test alignment and ensure

pattern detection results. Completes
Different position in rough successfully:Verify or adjust rotation
2007 Error ALM
alignment and fine alignment. correction. Pattern detection fails:
register model again. Execute manual
alignment to continue.
Failed to search rough alignment Execute test alignment, then configure

2008 Error ALM
target. fine alignment target score (ID:44050).
44/162
Confidential
Event
Type
Pattern may be detected incorrectly due
to the disturbance (i.e. water). Check
the processing position after the
The target detection in the fine
2009 Error ALM restart. If the error persists, score
alignment failed.
(ID=44050) check, blow adjustment and
re-registration of model are
recommended.
2010 Error ALM Failed rough theta alignment. Execute manual alignment.
Set the alignment timeout time (ID:

2011 Error ALM Alignment time out error.. 44110) longer than the actual alignment
time.
Execute test alignment and Score limit

(ID:44050) using fine alignment model
Ratio of completed alignment line
2012 Error ALM pattern detection score. Or, teach cut
exceeded error limit.
position by manual alignment or teach
model position by model teach.
The work may be already cut. Remove

2013 Error ALM Detected kerf on not-cut work.
work.
Mismach on measured work size and Ensure that work size equals to recipe
2014 Warning WRN
recipe on Inch-size-check. data.
Ensure work edge detection status using

2015 Error ALM Work edge detection error. test alignment, then adjust edge
detection condition data.
Change setting (rough and fine alignment

to be Special(ID 44048), special
Current chip size in recipe cannot
2016 Warning WRN alignment setting to be High Mag only
guarantee the operation.
PMtID:44106), then execute model
teaching.
Change setting (rough and fine alignment

Change alignment operation setting to be Special(ID 44048), special
2017 Warning WRN
to "High Mag ONLY". alignment setting to be High Mag only
PMtID:44106), then register model again.
Work shape recognition exceeded

2018 Error ALM Reconsider limit value of recipe data.
limit.
Result of work centering function is Execute [CIRCULAR work CENTER

2019 Warning WRN
not executed. DETECTION].
Ensure that thickness of work/tape, and

focus tolerance (ID:44097) are set
Differences of AF results and work properly, then confirm work height with
2020 Error ALM
thickness exceeds limit. manual focus. If data and actual
measurement results is correct execute
Focus adjustment.
Check if there is a device on the table

or if a camera is positioned over the
2021 Error ALM Failed to focus peak detection.
device with a pattern. If the error
persists, adjust the focus manually.
45/162
Confidential
Event
Type
Check the cutting position with the
trace mode to see if there is any
Cut line's Y pitch margin exceeded problem in the alignment result. When
2022 Error ALM
limit. the cutting position is acceptable, then
check if the limit threshold (ID: 44311)
of the recipe data is appropriate.
Verify cutting position using trace

X map execution detected bended line
2023 Error ALM mode. If position is OK, then adjust
which is out of range.
limit value of recipe data.
Check the cutting position with the

trace mode to see if there is any
problem in the alignment result. When
2024 Error ALM Allowable CH angle exceeded limit. the cutting position is acceptable, then
check if the tolerance of angle between
CHs (ID: 44051) of the recipe data is
appropriate.

Cutting line's theta pitch tolerance
exceeded limit.
Pattern to pattern dist. by index

2026 Error ALM
measurement exceeds limit.
Alignment model doesn't exists in

2027 Warning WRN No model registered. register model.
recipe data.
Model registered and functionality

2028 Warning WRN Register model again.
setting is inconsistent.
2029 Error ALM Detected shift of chip. Execute manual alignment.
Teach cut position by manual alignment

Failed to detect cutting angle from or teach model position by model
2030 Error ALM
alignment executed CH. teach.\nIf error occur repeatedly,
register alignment model again.
Unable to execute alignment cancel Select whether resuming process without

2031 Warning WRN
for Work already cut. cancelling alignment or remove work.
Move position of model, then teach it

2032 Error ALM Detected similar pattern.
again.
X position exceeded limit on 2

2033 Error ALM Ensure that camera position is correct.
camera position calibrate.
Y position exceeded limit at 2

2034 Error ALM Ensure that camera position is correct.
camera position calibrate.
Model search for 2 cameras position

2035 Error ALM
calibration failed.
Calibrated bright value exceeded

2036 Error ALM Try at another position.
limit.
Automatic focus compensation is

2037 Error ALM Adjust focus manually.
failed.
Result of pattern matching score Adjust threshold of correction model

2038 Error ALM
cannot exceed target score. search score.
46/162
Confidential
Event
Type
Y offset by alignment correction Ensure that correction limit is properly
2039 Error ALM
exceeded limit. set or work itself.
T offset by alignment correction Ensure that correction limit is properly

2040 Error ALM
exceeded limit. set or work itself.
Accumulated value of auto DY

2041 Error ALM Execute manual DY correction.
correction exceeded limit.
Alignment correction model search

2042 Error ALM Verify score or work itself.
error has occurred.
Move position of model, then teach it

2043 Error ALM Detected similar pattern.
again.
2044 Error ALM Loading model data is failed. No model registered. register model.
2045 Error ALM Model data is broken. Register a new model.
The selected model cannot be Move position of model, then teach it

2046 Error ALM
registered. again.
Magnification to register model is Change magnification to configured in

2047 Warning WRN
incorrect. recipe data.
Target detection failure during

2048 Error ALM
model verification search.
Circular shape measurement detection

2049 Error ALM Execute manual edge detection.
failed.
Teaching to perform T axis alignment

2050 Error ALM
is not completed.
2051 Error ALM T axis alignment is not executed.
2052 Warning WRN Alignment is completed. Verify position for cutting.
Cutting position with low Change the magnification to high on the

2053 Warning WRN magnification microscope cannot be stage panel of the screen and execute
registered. registration again.
Registration of alignment model is

2054 Warning WRN
failed.
2055 Warning WRN All line's alignment is completed.
2056 Warning WRN Alignment position is invalid.

or teach model position by model teach.
Failed to searching first target on
2057 Error ALM If the error persists, score check
rough alignment.
（ID=44094), blow adjustment and re-
registration of model are recommended.
47/162
Confidential
Event
Type
Adjust rough alignment score (ID:44049)
up to detection test alignment results.
Resume process if alignment position at
Failed to searching second target on
2058 Error ALM trace mode is correct. If pattern is out
rough alignment.
of view, verify work position. Or, teach
cut position by manual alignment or
teach model position by model teach.
2059 Error SEQ Failed to alignment process.
Cannot register alignment model

2060 Warning WRN
while cutting.
Confirm alignment start line and index

No θ detection line is specified in
2061 Error ALM measurement YT search line. And specify
recipe data.
θ detection line in alignment block.
Pattern may be detected incorrectly due

to the disturbance (i.e. water). Check
the processing position after the
Model search with the auto index restart. If the error persists, score
2062 Error ALM
calculation has failed. (ID=44050) check, pitch tolerance
(ID=44311) check, blow adjustment and
re-registration of model are
recommended.
Failed to detect focus origin

position.
Failed to detect appropriate bright

value.
Be sure that main index size in recipe

2065 Error ALM Variability is found in main index. data and real work's main index size are
consistent.
Y and T offset by alignment Ensure that correction limit is properly

2066 Error ALM
correction exceeded limits. set or work itself.
Alignment type is set to Edge Only Please edit Edge alignment parameters in
2067 Guide CAL
alignment. recipe.
Cannot execute rough-fine mode with Please check alignment parameters in

2068 Guide CAL
registered model. recipe.
Please confirm the state of the work

2069 Error ALM Detected crack on the work.
between the front/rear processing lines.
Magnification to register layout Change magnification to configured in

2070 Warning WRN
origin is incorrect. recipe data.
Magnification to register cut Change magnification to configured in

2071 Warning WRN
position is incorrect. recipe data.
2072 Warning WRN Cut-end position is incorrect. Check cut-start and cut-end position.
Ensure that Main/Sub Y position

Main/Sub model’s Y position tolerance (ID:44377) is properly set or
2073 Warning WRN
tolerance limit over. change. Try to register model again if
this error persists.
2074 Warning WRN Model data version error. Please perform model data registration.
48/162
Confidential
Event
Type
Layout detection function must be
enabled for GRID type alignment
Cannot execute GRID type alignment
2075 Error ALM execution on multi-angle device. Set
on multi-angle work.
multi-angle device setting as disable or
confirm angle of each CH.

Failed to detect cutting position or teach model position by model
2076 Error ALM
from alignment executed CH. teach.\nIf error occur repeatedly,
register alignment model again.
Center detection result Y exceeded

2077 Error ALM
limits.
Center detection result YT exceeded

2078 Error ALM
limits.
2079 Error ALM Center detection failed.
Alignment is canceled, execute

2080 Warning WRN
alignment once agin.
The extended model is not supporting for

The extended model is not X-free position specified
2081 Warning WRN
supporting. channels.\nPlease check your recipe
settings.
Cannot register index size less than

The measured index size is less than
2082 Warning WRN 0.1mm.Confirm each specification point
minimum size (0.1mm).
and register at proper position.
3rd or 4th specified point may be too

close to 1st or 2nd point.Confirm each
2083 Warning WRN The measured index size is 0 mm.
specification point and register at
proper position.
Cannot register index size larger than

block size. Confirm each specification
The measured index size is larger
2084 Warning WRN point on block size or index size
than block size.
registration and register at proper
position.
Y offset by confirmation of cut Pls. confirm correction limit in user

2085 Error ALM
position exceeded limit. data (ID:23121) and work condition.
T offset by confirmation of cut Pls. confirm correction limit in user

2086 Error ALM
position exceeded limit. data (ID:23122) and work condition.
Pls. confirm correction limit in user

Y and T offset by confirmation of
2087 Error ALM data (ID:23121,ID:23122) and work
cut position exceeded limits.
condition.
Please input X offset from the corner

X-free position's setting is not
2088 Warning WRN cross \nPlease confirm recipe (ID:44390
correct
～ID:44409).
If the work is not placed, perform work

2089 Guide CAL Could not recognize work
skip command.
The number of the alignment reject Confirm the work condition. To continue
2090 Error ALM
work exceeds the limit Lot operation, perform counter clear.
2091 Error ALM Failed to alignment process.
49/162
Confidential
Event
Type
Alignment correction before process Ensure that correction limit in recipe
2092 Error ALM
value exceeds YT limit data is properly set or work condition.
Switch layout detection(ID:44328) OFF or

Can't register sub model for rough-
2093 Warning WRN register model without sub model for
align with this recipe.
rough alignment.
Please check work shape, multi work

Cannot execute Inch-size-check
2094 Warning WRN setting, and alignment parameters in
function.
recipe.
Exceeded the limit for work load

2095 Error ALM Confirm the load position of the work.
position.
Cutting order set by cutting viewer Cutting order set by cutting viewer has
has been initialized.Please update been initialized.Please update cutting
2096 Warning WRN
cutting order after model order after model registration will be
registration will be done. done.
2097 Warning WRN Can not execute on out of work.
Pitch size is too long for the alignment

Could not complete auto theta
2098 Warning WRN area.\nConfirm the pitch size and the
alignment.
alignment area.
No pattern was found so that failed auto

2099 Warning WRN Failed auto theta alignment. theta alignment.\nConfirm the pitch
size.
Found similar pattern so that failed

2100 Warning WRN Failed auto theta alignment. auto theta alignment.\nRetry on an
unique pattern.
No pattern was found in X

2101 Warning WRN Confirm the pitch size.
straightness measurement.
Found similar pattern in X

2102 Warning WRN Retry on an unique pattern.
straightness measurement.
Press [Manual Re-alignment] to execute

2103 Error ALM Could not detect Re-alignment model.
Re-alignment.

2104 Error ALM Exceeded Y limit on Re-alignment.
Re-alignment.

2105 Error ALM Exceeded T limit on Re-alignment.
Re-alignment.

2106 Error ALM Exceeded YT limit on Re-alignment.
Re-alignment.

2107 Guide CAL Manual re-alignment timing.
Re-alignment.
2108 Warning WRN Failed rough theta alignment. Set position and height again.
Ensure that Pattern matching algorithm

Model registered and recipe setting (ID:44525) are set roperly.\n
2109 Warning WRN
is inconsistent. If setting is correct execute Model
registration.
50/162
Confidential
Event
Type
Ensure that Pattern detect sensitivity
Model registered and recipe setting
2110 Error ALM (ID:44526) are set properly.\nIf setting
is inconsistent.
is correct execute Model registration.
Street detection result Y exceeded

2111 Error ALM
limits.
Street detection result Width

2112 Error ALM
exceeded limits.
2113 Error ALM Street detection failed.
Cannot register at the main index Perform sub index registration at proper
2114 Warning WRN
size exceeded position. position.
This position has been already Perform sub index registration at proper
2115 Warning WRN
specified by other process. position.
Please check alignment parameters in

2117 Guide SEQ Failed to alignment process.
recipe.
Failed alignment by low contrast. Failed alignment by low contrast. Please

2126 Error ALM Please check water remain on the check water remain on the work or clean
work or clean microscope. microscope.
Alignment correction before process Ensure that correction limit in recipe

2127 Warning WRN
value exceeds YT limit data is properly set or work condition.
Failed alignment by low contrast. Please check water remain on the

2128 Warning WRN Please check water remain on the work\nIf the error occurs repeatedly,
work or clean microscope. please clean microscope.

2129 Error ALM Please check water remain on the work\nIf the error occurs repeatedly,

2130 Warning WRN Please check water remain on the work\nIf the error occurs repeatedly,

2131 Error ALM Please check water remain on the work\nIf the error occurs repeatedly,
Cut Front pos and Cut Rear pos are Please set a Cut Front pos , and Cut
2132 Warning WRN
not set. Rear pos.
2133 Warning WRN Cut Front pos are not set. Please set a Cut Front pos.
2134 Warning WRN Cut Rear pos are not set. Please set a Cut Rear pos.
Teaching point is out of alignment

2135 Warning WRN Please teach inside of alignment area.
area.
Work No. that attempted to execute

alignment correction is not a work No.
Can not run the alignment correction
2136 Warning WRN during cutting.\nPlease run the
in this work no.
alignment correction in the work No.
during cutting.
51/162
Confidential
Event
Type
Channel that attempted to execute
alignment correction is not a channel
Can not run the alignment correction
2137 Warning WRN during cutting.\nPlease run the
in this channel.
alignment correction in the channel
during cutting.
Line that attempted to execute alignment

Can not run the alignment correction correction is already cutting.\nPlease
2138 Warning WRN
in this line. run alignment correction in the uncut
line or final cutting line.
Reference line of alignment correction

Can not run the alignment correction was not found.\nPlease run alignment
2139 Error ALM
in this line. correction In line near the last
cutting.
Pls. confirm Y correction limit

(ID:23335) in user data and work
Y offset by automatic confirmation
2140 Error ALM condition.\nPress [Manual confirmation
of cut position exceeded limit.
of cut position] to confirm the cut
position by manually.
Pls. confirm T correction limit

(ID:23336) in user data and work
T offset by automatic confirmation
2141 Error ALM condition.\nPress [Manual confirmation
of cut position exceeded limit.
of cut position] to confirm the cut
Pls. confirm Y and T correction limit

Y and T offset by automatic (ID:23335,23336) in user data and work
2142 Error ALM confirmation of cut position condition.\nPress [Manual confirmation
exceeded limit. of cut position] to confirm the cut
Pls. confirm alignment score and work

Could not detect model on automatic condition.\nPress [Manual confirmation
2143 Error ALM
confirmation of cut position. of cut position] to confirm the cut

Cut line's Y tolerance from align
base line exceeded limit.

Cut line's theta tolerance from
align base line exceeded limit.
Different work thickness between

Please perform the model update
2146 Warning WRN current recipe and model
registration.
registration.
Failed to calcurate CH angle because Plese close work size setting to actual
2147 Error ALM detected position distance was too work. Or, please expand alignment area
close to work size setting. setting to include whole device of work.
Alignment cannot be performed in a

2148 Warning WRN
round cutting recipe.
Teach cut position by cross teach or

teach model position by model teach,
2149 Error ALM Failed to model detection. then continue alignment.\nIf error
occurs repeatedly, register alignment
model again.
52/162
Confidential
Event
Type
Please confirm alignment T limit in
2150 Error ALM Channel angle exceeded limit.
recipe data.
Please confirm expand-contract Y limit

2151 Error ALM Work expanded size exceeded limit.
in recipe data.
The current parameter settings for edge

Work edge align param setting error alignment function is not supporting
2152 Warning WRN
[ID:%3]. now. Please check the instruction manual
and recipe setting.
The current parameter settings for edge

alignment is not supported now.\n
2154 Warning WRN Edge alignment param setting error. Please check the recipe setting.\n
RCPID 44306:Align search mode\n
RCPID 44332:Block-end model
Magnification to teach model Change magnification to configured in

2155 Warning WRN
position is incorrect. recipe data.
Unable to teach a cross position

which used combination of center
2156 Warning WRN
alignment settings. Please select
other recovery action.
Failed to detect cutting angle from Please confirm how to align, and change
2157 Error ALM
alignment executed CH. following recipe setting. ID:44796
As a result of the alignment, the sub

index position has exceeded the main
index position.Enable the sub index
Sub index position exceeded main
2161 Warning WRN cutting position correction
index position.
function(RCPID:41032) or set so that the
position and the number of sub index do
not exceed the main index.
Block-end model is not supported in STD

STD alignment param setting alignment.\n
2164 Warning WRN
error.(Ext. line) Please check the recipe setting.\n
RCPID 44332:Block-end model
Check visually if the kerf bears any

problem. If the error persists, set
properly the X position of the kerf
check, lighting value, focus value and
2501 Error ALM Detection of the kerf failed.
executing frame on the kerf check
environment registration screen.\n01
Restart-------------Cancel error and
resume cutting.
Can't evaluate kerf with current Reconsider proper kerf check model area
2502 Error ALM
model window data. and limits.
Execute test kerf check and ensure

results is OK. If problem observes,
2503 Error ALM Auto kerf check error is occurred.
verify blade status.\n\n01 Restart------
-------Cancel error and resume cutting.
2504 Error ALM Manual kerf check error is occurred. Verify that kerf is OK.

2505 Error ALM Change of kerf width exceeds limit. results is OK. If problem observes,
verify blade status.
53/162
Confidential
Event
Type
Ensure that setting of cutting height
Cutting height for kerf check is
2506 Warning WRN for kerf check in recipe parameter is
invalid.
properly set.
Cannot register the condition at

2507 Warning WRN
current position.
Check details of errors in the error

Cutting quality check error is
2508 Error SEQ list.\n\n01 Restart-------------Cancel
occurred.
error and resume cutting.
Can't execute kerf check with this

2509 Guide CAL Cutting is not executed.
SP.
It reached the kerf check execution

2510 Guide CAL Please confirm it.
line.
Ensure that correction limit in recipe

Offset value by alignment correction data is properly set or work
2511 Error ALM
exceeded limit. itself.\n\n01 Restart-------------Cancel
Check if the model score (ID=43831)

during the search and the delay time for
water drain (ID=43843) are set properly.
Model search error for the alignment
2512 Error ALM If the error persists, blow adjustment
correction has occurred.
and re-registration of model are
recommended.\n01 Restart-------------
Cancel error and resume cutting.
Execute the manual alignment correction.

As the processing has started with the
manual alignment, the manual correction
shall be applied on the alignment
correction as well.
2513 Guide CAL Manual alignment correction timing.
With the setting of "Auto first" for the
alignment correction (SYSID: 24776) of
the manual alignment work of the system
data, the mode can be changed to the
auto alignment correction.
Current magnification is different Please change magnification and try

2514 Guide CAL
from recipe setting. again.
Check visually if the kerf position

bears any problem. DY value (kerf center
DY evaluation error has occurred in
2515 Error ALM shift) exceeded the error limit. \n01
the auto kerf check.
Restart-------------Cancel error and
resume cutting.

problem. Wmin (Kerf width) is out of
Wmin evaluation error has occurred
2516 Error ALM within upper/lower limit. \n01 Restart--
in the auto kerf check.
-----------Cancel error and resume
cutting.

problem. Wmax (Max. kerf width including
Wmax evaluation error has occurred
2517 Error ALM the chipping) exceeded the upper
in the auto kerf check.
limit.\n01 Restart-------------Cancel
54/162
Confidential
Event
Type
Lmax limit error occurred in auto results is OK. If problem observes,
2518 Error ALM
kerf check. verify blade status.\n\n01 Restart------

F-chip limit error occurred in auto results is OK. If problem observes,
2519 Error ALM

R-chip limit error occurred in auto results is OK. If problem observes,
2520 Error ALM

F-area limit error occurred in auto results is OK. If problem observes,
2521 Error ALM

R-area limit error occurred in auto results is OK. If problem observes,
2522 Error ALM
Confirm the position of the groove. If

The gap of center of kerf exceeds cut position should be corrected,
2523 Error ALM
error limit. operator should perform manual alignment
correction.
Confirm the position of the groove and

The gap of center of blade kerf the kerf. If cut position should be
2524 Error ALM against center of laser kerf exceeds corrected, operator should perform
the error limit. manual DY correction and manual
alignment correction.
Cutting quality test check error is

2525 Guide SEQ Please check the kerf check setting.
occurred.

Gray level score limit error results is OK. If problem observes,
2538 Error ALM
occurred in auto kerf check. verify blade status.\n\n01 Restart------
Verify that kerf is OK. Adjust

2540 Warning WRN Failed to kerf detection. illumination and focus, then register
optical condition for kerf check.
Offset value by alignment correction Ensure that correction limit in recipe

2541 Warning WRN
exceeded limit. data is properly set or work itself.
Please check water remain on the

Failed alignment by low contrast. work\nIf the error occurs repeatedly,
2542 Error ALM Please check water remain on the please clean microscope.\n01 Restart----
work or clean microscope. ---------Cancel error and resume
cutting.
Failed street detection after Please verify cutting line, or confirm

2543 Error ALM
cutting. recipe setting.
Abnormal condition detected around Please verify cutting line, and confirm
2544 Error ALM
street. street edge check setting.
55/162
Confidential
Event
Type
Street detection after cutting Please verify cutting line, or confirm Y
2545 Error ALM
result Y exceeded limits. limit setting.
Can't execute V-blade height

2549 Guide CAL Cutting is not executed.
correction with this SP.
Height correction Value exceed the Please change height correction value or
2550 Warning WRN
limit. its limit value.

The width of laser kerf exceed the
2551 Error ALM results is OK. If problem observes,
error limit.

Lmax limit error occurred in laser
2552 Error ALM results is OK. If problem observes,
kerf check.

The width of laser kerf exceed the
2553 Guide CAL results is OK. If problem observes,
error limit.

Lmax limit error occurred in laser
2554 Guide CAL results is OK. If problem observes,
kerf check.
Verify that laser groove is OK. Adjust

illumination and focus, then register
2555 Error ALM Failed to laser groove detection.
optical condition for laser groove
detection.
Verify that laser groove is OK. Adjust

illumination and focus, then register
2556 Guide CAL Failed to laser groove detection.
optical condition for laser groove
detection.
Execute manual dY compensation of both

Twin cutting DY relative check
2558 Error ALM spindles and ensure results is OK. If
error.
problem observes, verify blade status.
Press [Alarm Clear」 button and

Repeat kerf check execution error in
2559 Warning WRN continue. \nIf the error occurs
the same line.

results of groove detection . If problem
Wmax limit error occurred in laser
2560 Error ALM is observed in laser groove detection,
kerf check.
verify optical environment or blade
status.
If problem is observed in laser groove

Wmax limit error occurred in laser
2561 Guide CAL detection, verify optical environment or
kerf check.
blade status.

Front chipping size error occurred
in laser kerf check.
status.

Front chipping size error occurred
blade status.
56/162
Confidential
Event
Type
Rear chipping size error occurred in
laser kerf check.
status.

Rear chipping size error occurred in
laser kerf check.
blade status.

Front chipping area error occurred
status.

Front chipping area error occurred
blade status.

Rear chipping area error occurred in
laser kerf check.
status.

Rear chipping area error occurred in
laser kerf check.
blade status.
SRS is not completed before SRS execution is specified on recipe

2901 Warning WRN
executing alignment. data. Please execute SRS first.
SRS execution is NOT specified on

2902 Warning WRN Specify SRS execution on recipe data.
recipe data.
Confirm SRS time out setting and

2903 Warning WRN Time out error on auto SRS.
execution result.
Register SRS environment. Perform manual

2904 Error ALM Fail to recognize work shape on SRS. SRS, if error occures repeatedly then
continue the process.
Register SRS environment. Perform manual

2905 Error ALM Fail to detect start position. SRS, if error occures repeatedly then
Confirm recipe data and SRS execution

Detected work at out of area
2906 Error ALM result. Register SRS environment when
specified in recipe data.
any problem is found in result.
Confirm recipe data and SRS execution

Exceeded maximum limit of
2907 Error ALM result. Register SRS environment when
circumference points.
any problem is found in result.
2908 Warning WRN Can not execute SRS while cutting.
Please perform SRS environment

2909 Warning WRN SRS environment not registered.
regstration.
57/162
Confidential
Event
Type
If any problem is found in SRS result,
Detected smaller work size than register SRS environment. Perform manual
2910 Error ALM
minimum size on SRS. SRS for the work whose size is smaller
than 1/4 of view area.
Register SRS environment if

Could not connected circumference in circumference detection is failed.
2911 Error ALM
SRS result. Perform manual SRS if error occures
repeatedly.
The point outside the recipe setting Input the point within the range of the
2912 Error ALM
range was input. recipe setting.
Teach point makes a segment which Input the point where the resulting
2913 Error ALM
crosses with others segment does not cross with others
Perform SRS environment registration. If

Failed to detect after-2nd points
2914 Error ALM occurs repeatedly, perform manual SRS
over SRS.
and continue process.
Confirm the shape recognition

Could not self-check on shape result.\nIf occurs repeatedly, perform
2915 Error ALM
recognition. manual shape recognition and continue
process.
Confirm the recognition result. If

Exceeded the limit on work
2916 Error ALM recognition result is correct, update
recognition.
the limit data in recipe.
Press [Work skip] to skip this work.\n

Fail to detect 1st point for shape
2917 Error ALM Press [Skip error] to continue cutting
recognition.
without shape measurement.
Failed to detect point after 2nd for Press [Skip error] to continue cutting
2918 Error ALM
shape recognition. without shape measurement.
Measured work size by SRS exceeded Press [Skip error] to continue cutting
2919 Error ALM
tolerance. without shape measurement.
Failed to recognize work shape on

2920 Error ALM Perform SRS on cutting table.
pre-alignment SRS
Failed to recognize work shape on Please check the frame and the camera,
2921 Error ALM
pre-alignment SRS then execute the process again.
Rectangle work cannot execute fixed Please change the setting of recipe data
2922 Warning WRN
SRS to the correct value.
Need to perform work-shape

Press recovery button and perform work
2924 Guide CAL recognition before model
shape recognition.
registration.
Failed to detect 1st point of SRS Push [Skip error] to skip this error and
2927 Error ALM
for inspection. continue process.
Failed to detect point after 2nd of Push [Skip error] to skip this error and
2928 Error ALM
SRS for inspection. continue process.
Measured diameter by SRS for Push [Skip error] to skip this error and
2929 Error ALM
inspection exceeded tolerance. continue process.
Current blade is not available for

cutting.
58/162
Confidential
Event
Type
Ensure that cutting height is properly
3002 Warning WRN Cut height check error is occurred.
set.
3003 Warning WRN Current CH is not CH for cutting. Position it to cutting CH then continue.
Cutting position is not set

3004 Warning WRN Configure area for cutting correctly.
correctly.
Cutting position setting is

3005 Warning WRN Configure correct cutting position.
incorrect.
3006 Warning WRN It is out of the area for chop cut. Execute chop cut inside area defined.
Internal cutting sequence error is

occurred.
Can't cut with SP rotation speed Ensure that spindle rotation speed is
3008 Error ALM
lower than warning limit. properly set.
3009 Error ALM Cannot find cutting information. Please check for the error condition.
Cannot cut since blade may interfere

3010 Warning WRN Ensure cut height, then execute again.
in cutting table.
Cannot cut since blade may interfere

3011 Warning WRN Ensure cut height, then execute again.
in dress stage.
Cannot cut since blade wear is lower Please execute dress. Or please execute
3013 Warning WRN
than parameter. cutterset again.
Cut below the table within the Please check the cutting range of the
3014 Warning WRN
interlock range. recipe and the interlock range (23611).
Cannot cut since blade wear is

3015 Warning WRN Please execute blade exchange.
greater than parameter.
Unload work then try again.\nIf error

Attempted to start processing with
occur repeatedly, Acquire the log of the
3016 Warning WRN the alignment result not being
error occurrence and contact the field
reflected.
engineer.
Please check the result image.Proceed

[Work Skip]/[Unload all works] if
work(s) was already cut or execute [Env.
3401 Warning WRN Kerf was detected.
adjustment] if work hasn't groove but
detected. Push [Skip error] to skip this
error and continue process.
Run-time image is too dark.\n Execute

The contrast of the street is very
3402 Error ALM [Env. adjust] to adjust run time
low.
environment.
Cut-done line(s) is required to execute

Saw Street Check function. Please
3403 Error ALM Cannot detect cut-done line.
perform this operation after cutting was
started.
Saw street check function is

3404 Error ALM Please check the recipe.
disabled.
59/162
Confidential
Event
Type
Please check recipe data settings, and
Saw street check function wrong re-execute Saw Street Check’s
3405 Guide CAL
channel. environment registration for the correct
channel.
Washing water flow rate of two fluid Adjust the flow rate of two fluid flush
4001 Error ALM
cleaning is unstable. water with manual valve.
Washing air flow rate of two fluid Adjust the flow rate of two fluid flush
4002 Error ALM
cleaning is unstable. air with manual valve.
Washing water flow rate of two fluid

Adjust the flow rate of two fluid flush
4003 Error ALM cleaning exceeds the upper and lower
water with manual valve.
limits.
Washing air flow rate of two fluid

Adjust the flow rate of two fluid flush
4004 Error ALM cleaning exceeds the upper and lower
air with manual valve.
limits.
The mixing ratio (water / air) of

Adjust the flow rate of two fluid (water
4005 Error ALM two fluid cleaning exceeds the upper
/ air) with manual valve.
and lower limits.
The below are the possible cause of the

problem. \n1. When descending to the Z
position in the contact cutter set, the
conductivity signal is not
Normal blade size cannot be detected
4101 Error ALM perceived.\n2. When the conductivity
in the contact cutter set.
signal is perceived in the way.\nIn
either cases, check if attached blade
and the blade size match. If any water
droplet is to be found, remove it.
Blade size detection failure by Ensure blade size is correct or no water

4102 Error ALM
optical cutter set. on prism then try again.
Cannot detect contact cutter set Ensure that installed blade and selected
4103 Error ALM
signal. blade data is matched.
By executing [Cutter set] and [Retry],

Stable height cannot be detected in check the initial light amount. When the
4104 Error ALM
the optical cutter set. initial light amount is unstable,
execute [OPC cleaning].
If error occurs repeatedly, adjust

4105 Error ALM Optical cutter set failure.
optical unit
In regards to the height calculated from

the blade size of the blade data, the
actual height based on the cutter set
Actual cutter set height differs
marked the value out of the tolerance
4106 Error ALM from the predicted one by blade
(ID=50112, ID=50113), resulting in an
size.
error.
Specify the correct blade data size for
the installed blade size.
The blade diameter is indicated larger

than the previous cutter set result and
Cutter set of SP1 exceeded the exceeding the limit. Perform the cutter
4107 Error ALM
correction. set again.\nIf the result persists,
perform the contact and optical cutter
set. Additionally, clean the OPC prism.
60/162
Confidential
Event
Type
The smaller value was indicated for the
Cutter set of SP1 fell below the blade diameter.\nPerform the cutter set
4108 Error ALM
correction. again. When it is determined to be due
to the abnormal wear, replace the blade.
The larger blade size than that in the

blade replacement is detected. It the
Cutter set height exceeded that of result persists, possibility of error
4109 Error ALM
immediately after the replacement. detection (influence of water and such)
and new blade over threshold (ID:
50703).
The difference between the Z positions

of the contact cutter set and the OPC
has exceeded the limit. In order to
The distance between the table and calculate the table height in the OPC,
4110 Error ALM
OPC exceeded the limit. this value is used. If no false
detection is recognized (influence of
water and such), OPC and the table
height need to be adjusted mechanically.
Allowable contact cutter set

position is out of range.
Optical cutter set position is

4112 Error ALM Teach position of optical unit properly.
invalid.
Incorrect cutter set position after

4113 Error ALM Adjust contact cutter set position.
table replacement.
Blade eccentricity value exceeds

4114 Error ALM Please check the blade.
limit.
Execute cutter set again.\n[No limit

Cutter set correction (positive)
4115 Error ALM check]:Execute cutter set again without
exceeded limit.
limit check.
The smaller value was indicated for the

blade diameter. Perform the cutter set
again. When it is determined to be due
Cutter set correction (negative)
4116 Error ALM to the abnormal wear, replace the blade.
exceeded limit.
Touch [Restart with no limit check] to
skip the checking of the excess of the
negative correction amount.
Ensure blade size is correct, or no

Cutter set position is higher than wafer on cutting area then try
4117 Error ALM
new blade height. again.\n[No limit check]:Execute cutter
set again without limit check.
Load a work for manual environment

Execute manual environment stabilizer and execute environment
4121 Warning WRN
stabilizer and execute cutter set stabilizer. After unloading the work,
execute contact + optical cutter set.
Load a work for manual environment

Execute manual environment stabilizer and execute environment
4122 Warning WRN
stabilizer and execute cutter set stabilizer. After unloading the work,
execute contact cutter set.
If error occurs repeatedly, adjust

4124 Error ALM CT/OPC offset is exceeded limit.
optical unit
61/162
Confidential
Event
Type
than the previous cutter set result and
Cutter set of SP2 exceeded the exceeding the limit. Perform the cutter
4130 Error ALM
correction. set again.\nIf the result persists,
The indicated value for the blade

diameter is smaller than the limit.
Cutter set of SP2 fell below the
4131 Error ALM Perform the cutter set again. When it is
correction.
determined to be due to the abnormal
wear, replace the blade.
Please register after an X axis

The location which can't be
coordinate is put back in the
4140 Error ALM registered with a contact cutter
range.\nWhen an area isn't appropriate,
set.
please confirm the table size.
Please redo contact cutter set location

The X execution location of the
4141 Error ALM registration.\nAn error occurred by one
cutter set is unjust.
of spindle 1 or 2.
Press [Manual kerf detect] or [Kerf

detect environment adjustment].\nIf no
4142 Error ALM Failed to kerf detection. kerf is present, please execute contact
cutterset or optical cutterset first and
then tyu chop cutterset again.
The blade and the blade size is correct.

"Retry (cut offset)" is cut retry
Blade size detection failure by offset(ID:23507), it moved down the deep
4150 Error ALM
contact cutter set. blade. During implementation, after
confirming that there are no scratches
on the table, it should be performed.
Please check the attachment and

4 points tilt of replaced table
4151 Error ALM attachment condition of the mounting
exceeded threshold.
part of the table.
Please set start angle of 4 points tilt

Start angle is out of range of the 4 function so that it falls within
4152 Warning WRN
points tilt function cutter set. possible range start angle and possible
range end angle.
Please confirm position of contact

Difference of measurement height
4153 Error ALM cutterset does not have substance and
exceeded threshold.
garbage or a wound.
Please unload the work, exchange the

Extra Table cutter set is no longer
4154 Warning WRN Extra Table, or change the execution
executable.
coordinates of the cutter set.
Extra table set is not enough to Perform blade replacement and replace
4155 Warning WRN
run. the Extra table.
Extra table cutter set offset Execute the OPC cutter set and set the
4156 Warning WRN
setting does not exist. offset between Extra table CT.
Difference between kerf width and design

value of blade thickness is over
Difference between kerf width and
4158 Warning WRN tolerance. Please flat the blade tip by
blade thickness is over tolerance.
truing cutting or execute blade
exchange.
62/162
Confidential
Event
Type
Difference of detected blade size
between long kerf and short kerf is over
Uneven wear amount is over
4159 Warning WRN tolerance. Please flat the blade tip by
tolerance.
truing cutting or execute blade
exchange.
Pls. try Manual Cutter Set and Manual

4160 Warning WRN Uneven blade wear detected. Dress. If condition does not improve,
execute blade exchange.

than the cutter set result and exceeding
Cutter set of SP1 exceeded the the limit in a row. Perform the cutter
4161 Error ALM
correction in a row. set again.\nIf the result persists,

than the cutter set result and exceeding
Cutter set of SP2 exceeded the the limit in a row. Perform the cutter
4162 Error ALM
correction in a row. set again.\nIf the result persists,
Dress position is out of dress

4201 Warning WRN
stage.
4202 Warning WRN Dress data setting is invalid. Reconfirm dress data.
4203 Warning WRN Failed to dress using product work. Change to dress work.
Cannot start since all dress work in

4204 Warning WRN Change to new DRESS cassette.
DRESS cassette is end.
No processing works are in the dress

cassette. Or the dress cassette is not
4205 Warning WRN Dress cassette is not placed. placed. If the dress cassette has been
already placed in the position, then the
sensor may be not functioning correctly.
Cut all dress work in DRESS Set new DRESS work then continue
4206 Warning WRN
cassette. process.
Used whole work for blade start Set new balde start dressing work then
4207 Warning WRN
dressing. continue process.
Set new auto dress work then continue

4208 Warning WRN Used whole work for auto dress.
process.
4209 Guide CAL Dress is completed.
Used all dress work before completed

4210 Warning WRN Set new dress work.
dress condition.
4211 Warning WRN Found no dress work. Set dress work.
Ejected dress work into inspection

4212 Guide CAL Continue production wafer process.
tray.
4213 Guide CAL Execute auto dress. Execute auto dress.
63/162
Confidential
Event
Type
4214 Guide CAL Completed auto dress. Continue production wafer process.
4215 Warning WRN Dress cassette is in end forcedly. Set next casette.
Cannot start dress. Production work Unload production work in the system
4216 Warning WRN
is remained in system. then start dress again.
Press [Dress cassette access] to open

4217 Warning WRN Set dress work on inspection tray. inspection tray and set work. Then
continue operation.
Fail to get access-authority to Fail to get access-authority to stage

4218 Warning WRN
stage dress. dress.
4219 Warning WRN Dress data is not for stage dress. Dress data is not for stage dress.
Can not continue dress with dress Set new dress work in inspection tray
4220 Warning WRN
work in inspection tray. then continue dress.
Found the number of dress works that can

be processed in machine.
4221 Warning WRN Cannot load dress work.
Unload dress work or reject all dress
works then try again.
Found work in the unload slot of the

4222 Warning WRN Remove the work in unload slot.
cassette
Detected hand put work during auto

4223 Warning WRN Remove hand put work.
dress.
Can not start; dress work is in the

4224 Warning WRN Unload or reject dress work.
machine
Check the condition of the blade

dressing.
4225 Guide CAL Dress cut is completed. Operation has paused due to the function
to pause after the dress data or the
auto dress cutting (DRSID: 58035).
Can not start; outside of the slot

4226 Warning WRN Unload or reject dress work.
range dress work is in the machine
4227 Guide CAL Truing is completed Inspect dress quality.
Cannot teach position which is over

4228 Warning WRN Teach truing position again.
softlimit
Fail to get access-authority to

4229 Warning WRN Check access-authority to truing.
truing
Set CH1 or CH2 to dress execute CH of

4230 Warning WRN Dress execute CH is Both CH
dress data.
Cannot execute truing because blade

4231 Warning WRN Confirm truing setting of dress data.
interferes in table
Cannot find manual load work for Set work on inspection tray then try
4232 Warning WRN
truing again.
64/162
Confidential
Event
Type
Cannot move since dress stage may
Cannot move since dress stage may interfere in work. If thick work
4241 Warning WRN
interfere in work. cutting, please set RCPID:49052(Auto
dress function) to OFF.
To restart Auto-Dress, please press the

button [START] on the auto operation
screen. It is also possible to execute
Manual Dress is not available now
4242 Warning WRN Manual-dress, after press the button
since the Dress-work is in process.
[Unload] to unload the Dress-work in the
equipment.
There is a risk that cut the processed

line again so the Dress cannot be
processed correctly. The Dress-work will
be treated as a used work when it is
unloaded after press the button [Unload
Dress data was changed, so the
& Abort]. In spite of the error, it is
4243 Warning WRN starting position of cutting Dress
possible to resume cutting if the
was initialized.
cutting condition has not been changed.
Specify the starting/ending position
with [Manual Alignment] and then resume
cutting. See "Help" for
details.
It can't be cut for the added Please unload the Dress-Work and do
4244 Warning WRN
number. dress cut by the new Work.
Specify the cutting start position of

Stage truing Cutting start position
4245 Warning WRN the dress board corresponding to the
is not specified.
spindle specified for cutting.
Contact cutter set execution timing now,

It is the timing of the contact
4246 Guide CAL please execute the contact cutter set
C.SET.
after unload frame.
Stage truing Cutting can not be executed

Stage truing cutting can not be on the dress board on which stage dress
4247 Warning WRN
executed. cutting was done. Please change the
dressboard.
Stage truing Stage dress cutting can not

Stage dress cutting can not be be executed on a dressed board on which
4248 Warning WRN
executed. cutting was done. Please change the
dressboard.
Automatic truing cutting can not be Automatic dress execution recipe has
4249 Warning WRN
executed. designated stage truing
Execution dress data or execution

parameter was changed after truing start
4250 Warning WRN Stage truing cutting can not start.
position setting. Please truing start
position set agaein.
Auto truing by blade data specification

Auto truing can not execute by blade
4251 Warning WRN can not be executed. Please set with
data.
recipe data.
Auto truing at change CH can not be

Auto truing can not execute by
4252 Warning WRN executed. Please turn OFF specification
change CH.
at change CH.
65/162
Confidential
Event
Type
Correct value exceeds upper and
4501 Error ALM Limit sensor should be adjusted.
lower limit.
Flange edge fixing jig is not Ensure that jig is properly placed and
4502 Warning WRN
properly placed. tightened.
4503 Warning WRN Flange edge fixing jig is placed. Remove Jig.
4504 Guide CAL Flange edge fixing is completed. Remove Jig.
Flange edge fixing chuck table Ensure that chuck table is properly
4505 Error ALM
vacuum failure. installed.
Focus height adjustment is not Execute "Focus height adjustment "

4506 Error ALM
executed. again.
Check if the installed blade is

appropriate.
Mechanical adjustment is necessary if
the error persists.
With the following parameter setting,
the tolerance can be specified.
DY correction has exceeded the System data
4507 Error ALM
tolerance. DY correction limit (SYSID: 20225)
DY correction limit after the start of
BL (SYSID: 20224)
Recipe data
DY correction limit (RCPID:40081)
Dress data
DY correction limit (DRSID:55628)
Ensure that if correct blade is

Accumulated DY correction value
4508 Error ALM installed.\nIf error occur repeatedly,
exceeds limit.
mechanical adjustment is required.
Correction cannot be conducted with Change the magnification to high on the

4509 Error ALM
the low magnification microscope. stage panel of the screen and try again.
Incorrect constitute of correction

map.
4511 Warning WRN No data in correction map.
Execution point is out of correction

4512 Warning WRN
map.
Standard pixel sizes are defined for

each microscope type in the following
parameters.
Config. parameter 10401 ～ 10406, 10422,
10423
Adjustment value of the pixel size
4513 Error ALM The result of the pixel size adjustment
is out of range.
exceeds the range of ±20% from the
standard pixel size.
Adjust the result again so that the
pixel size would settle within the
range.
4514 Warning WRN Cover interlock is enable. Disable cover interlock.
66/162
Confidential
Event
Type
Cannot move because of interference Calibrate start position and stroke
4515 Error ALM
in edge fixing jig. size.
4516 Warning WRN Found more than 2 works in machine. Execute ARM running with ONE work.
4517 Warning WRN Found no process work. Set work for arm running.
Basic height adjustment for elevator

4518 Warning WRN
is not executed.
Finger height adjustment is not

4519 Warning WRN
executed.
Finger handling position adjustment

4520 Warning WRN
is not executed.
The sensor is monitored to check the

work transfer of the finger, yet the no
4521 Error ALM Protrusion sensor would not react. reaction was detected.
To adjust the vacuum height of the pre-

The shift of vacuum position of the aligner, cutting table or the spinner
4522 Warning WRN frame of ARM1 is out of the table, the alarm position needs to be
tolerance. adjusted beforehand. See "Help" for
details.
Confirm vacuum height.\nIf error occurs

Failed to measure pre-alignment
4523 Warning WRN repeatedly, mechanical adjustment is
frame vacuum height of ARM1.
required.
Finger load position adjustment is

4524 Warning WRN
not executed.
ARM1 Pre-alignment vacuum position

4525 Warning WRN
is not adjusted.
4526 Warning WRN ARM1 ST adjustment is not adjusted.
Spinner load position is not

4527 Warning WRN
adjusted.
4528 Warning WRN ARM1 CT position is not adjusted.
Dry nozzle center position is not

4529 Warning WRN
adjusted.
When the work is found to be protruded

from the cassette, place it back to the
4530 Warning WRN Protrusion sensor is detected as ON. slot.
If the work is properly set, the sensor
may be the factor of the problem.
Adjustement is not executed on high

4531 Warning WRN Adjust by high mag camera.
mag camera.
Adjustement is not executed on low

4532 Warning WRN Adjust by low mag camera.
mag camera.
67/162
Confidential
Event
Type
There is no data for planarity
4533 Warning WRN
correct.
Pre-alignment running cannot be

4534 Warning WRN
started at during cutting.
Running can not be started, because

4535 Warning WRN
finger is projected.
Remove key and close maintenance door,

4536 Warning WRN Edge condition key is inserted
then try again.
Open maintenance door and insert key,

4537 Warning WRN Edge condition key is not inserted
then try again.
4538 Warning WRN Cover interlock is unavailable Switch cover interlock ON and try again.
Adjust the sensor head position

Position of the TMS sensor head is mechanically to make the value of the
4539 Warning WRN
out of range. TMS sensor within the range of ±
0.5000[mm].
Teaching was performed out of the Perform the teaching on the cutting
4540 Warning WRN
range of the cutting table. table.
The height adjustment of

4543 Warning WRN opening/closing of FOUP is not
executed.
The reference height adjustment of

4544 Warning WRN
the elevator FOUP is not executed.
Loading height adjustment of wafer

4545 Warning WRN
pre-alignment is not executed.
The loading position adjustment of

4546 Warning WRN
the hand is not executed.
The height adjustment of the wafer

4547 Warning WRN loading from the elevator is not
executed.
The height adjustment of the wafer

4548 Warning WRN loading from the elevator INSP is
not executed.
The loading position adjustment of

4549 Warning WRN
the hand INSP is not executed.
value of airmicro could not be Please adjust to be able to measure the

4550 Warning WRN
acquired in the measuring range. correct value.
Air micro has detected an abnormal Please adjust to be able to measure the
4551 Warning WRN
measurements value. correct value.
Please carry it out with a wafer

4552 Warning WRN It is not a wafer handling mode.
handling mode.
For a cassette without the door,

For a cassette without the door, this
4553 Warning WRN this loader adjustment is
loader adjustment is unnecessary.
unnecessary.
4554 Warning WRN Can not detect FOUP cassette. Please confirm FOUP cassette.
68/162
Confidential
Event
Type
4555 Warning WRN There is no wafer on HAND. Please confirm a wafer on HAND.
4556 Warning WRN There is no wafer on WPREA. Please confirm a wafer on WPREA.
Teach position on the sub- table is Please teach the correct location on the
4557 Warning WRN
incorrect sub table.
Please confirm the BBD head is shielded

4558 Error ALM Auto-adjust of offset was failed.
from all light and check the board.
Please confirm the BBD head is exposed

4559 Error ALM Auto-adjust of gain was failed.
to light completely and check the board.
Please confirm all light on the prism

4560 Error ALM Auto-adjust of offset was failed. light receiving side is shielded, and
check the board.
Please confirm all light is received by

4561 Error ALM Auto-adjust of gain was failed.
the receiver side, and check the board.
4562 Warning WRN Performed teach on the work. Perform the teaching out of the work.
Teaching was performed out of the Perform the teaching on the cutting
4563 Warning WRN
range of the cutting table. table.
Please check there is no mistake in the

cutting table.Also, please make sure
Last adjustment and current table
4564 Error ALM that there is no dust or dirt on the
height does not match.
bottom of the table.\nIf the error
occurs repeatedly, contact to ACCRETECH.
Please first check there are any

problems on the cutting table and
whether the air micro is measuring on
Calculation result exceeds upper and
4565 Error ALM the table or not.\nAlso, check whether
lower limit. [ID:30094]
the air pressure of air-micro is normal
and the sensor of air micro is giving
correct values or not.
Please reconsider the setting and

Max/Min thickness difference of work
4566 Error ALM perform work thickness measurement
is over allowable value.
again.
Teaching was performed out of the

4567 Warning WRN Perform the teaching on the work.
range of the work,
The blade interferes with the jig.

4568 Warning WRN The blade interferes with the jig.
Please use a jig was in the blade size.
Set an appropriate flush valve in the

4569 Warning WRN Cleaning nozzle valve not set. flushing nozzle valve (SYSTEM-ID: 22305
to 22308).
Cleaning nozzle reference position Please select valve to be adjusted and

4570 Warning WRN
adjustment can not be executed. re-execute.
5001 Warning WRN Maintenance cover is OPEN. Close Maintenance cover, then continue.
Cannot rotate spindle while

5002 Warning WRN Close Maintenance cover, then continue.
Maintenance cover is OPEN.
69/162
Confidential
Event
Type
Cannot move X/T axis while Stage
5003 Warning WRN Close Stage cover, then continue.
cover is OPEN.
5004 Warning WRN Oil pan cover is OPEN.
Turn on the driving power supply to

5005 Warning WRN Motor power is turned OFF.
continue the processing.
Turn on the driving power supply to

continue the processing.
The driving power has to be turned ON
for the spindle rotation.
Turn power for drive unit ON, then

continue.
Turn power for drive unit ON, then

continue.
Cover cannot be locked since

5009 Warning WRN Close Maintenance cover, then continue.
Maintenance cover is OPEN.
Cannot unlock Maintenance cover Stop the spindle to continue the

5010 Warning WRN
since Spindle is running. processing.
Cannot unlock Maintenance cover

5011 Warning WRN Resume process after system is stopped.
since machine is running.
Cover cannot be locked since Stage

5012 Warning WRN Close Stage cover, then continue.
cover is OPEN.
Press [Reject] button to turn off vacuum

5013 Warning WRN Cannot unlock Stage cover.
of table, then continue.
Cannot unlock stage cover because

5014 Warning WRN Resume process after system is stopped.
System is running.
The fan of the left side electrical unit

2 located at the upper right of the back
side of the machine is not functioning
properly.
Following are the possible factors:
・Due to the cable damage, APL power
Error in the left fan sensor of the supply has been short-circuited, and the
5015 Fatal ALM elec. unit 2 (rear side of the fuse on the board was tripped.
machine). ・Power supply was disconnected as the
connector fell out.
Recovery is necessary by detecting the

damaged part of the cable or the
connector that was fallen out.
70/162
Confidential
Event
Type
The fan of the right side electrical
unit 2 located at the upper right of the
back side of the machine is not
functioning properly.
・Due to the cable damage, APL power
Error in the center fan sensor of supply has been short-circuited, and the
5016 Fatal ALM the elec. unit 2 (rear side of the fuse on the board was tripped.
machine). ・Power supply was disconnected as the
connector fell out.
Recovery is necessary by detecting the

damaged part of the cable or the
connector that was fallen out.
5017 Fatal ALM PC Fan Sensor failure. Ensure that PC fan properly works.
5018 Fatal ALM ATX Fan Sensor failure. Ensure that ATX Fan is running.
5019 Guide CAL Stage cover is closed. Please restart machine.
Detected shortage backup battery

5020 Danger ALM Replace control unit's backup battery.
capacity on control unit.
Power supply to the ATX power (power of

the PC and microscope power) was
disconnected.
5021 Danger ALM Blackout was detected. ・Disconnection of the power supply on
the factory side due to the power
failure and such.
・Short circuit breaker is tripped due
to the short circuit caused by the water
leakage.
Detected external power unit failure Check status of external power

5022 Danger ALM
(AC FAIL). distribution unit.
External power unit failure (UPS Check status of external power

5023 Danger ALM
FAIL.). distribution unit.
Voltage sag protector is serious Check error message on Voltage sag

5024 Error ALM
failure. protector.
Decrease of the fixed vacuum pressure of

the cutting table has been detected.
Continued operation may cause the shift-
cut and height error.
Identify the cause and solve the
problem.
Vacuum pressure of the table has
5025 Error ALM Following are the possible factors:
decreased.
・Air leakage from where the cutting
table is installed or the vacuum line of
the cutting table.
・Squished or twisted vacuum line
・Decrease of the vacuum pressure due to
the inhalation of the foreign substance.
71/162
Confidential
Event
Type
Decrease of the vacuum pressure of the
fixed work on the cutting table has been
detected.
cut or height error.
Identify the cause and solve the
problem.
Vacuum pressure of the work was
5026 Error ALM Following are the possible factors:
decreased.
・Air is leaking as the work is not at
the center of the table during the work
transfer or the operation is in
progress.
・Squished or twisted vacuum line
・Decrease of the vacuum pressure due to
the inhalation of the foreign substance.
Spindle cooling water flow rate

declining.
cut or spindle damage.
Check the flow of the coolant water at

the at the connecting port (IN)(OUT) of
the spindle coolant water at the back
side of the machine.
Coolant water of the spindle has
5027 Fatal ALM When the flow of the coolant water
decreased.
cannot be confirmed, check if the
coolant water is being supplied or if
there is any clogging in the pipe of the
coolant water.
If the flow of the coolant water is

appropriate, it may be the flow rate
sensor error.
Replace the coolant sensor.
Detected Z axis initial position

5028 Fatal ALM Replace Z axis initial position sensor.
sensor disconnection.
System shutdown in process… Please

5029 Guide CAL Power OFF button was pressed.
wait.
5030 Guide CAL EMO button was pressed. Restart system.
Close the maintenance door, turn on the

5031 Fatal ALM Maintenance door opened. driving power, and touch [System
initialize] to continue.
5032 Error ALM Stage cover is OPEN. Close Stage cover, then continue.
Close the oil pan cover, turn on the

5033 Fatal ALM Oil pan cover is OPEN. motor power, and press [System
initialize] to continue.
Power unit for handling is turned

5034 Guide CAL Continue process.
ON.
N2 inlet pressure value is below N2

5035 Error ALM N2 inlet pressure is low. pressure sensor threshold.\nEnsure that
N2 pressure sensor propely works.
72/162
Confidential
Event
Type
Air supply has been decreased. Secure
Decrease of the air has been sufficient air supply.
5036 Fatal ALM
detected. If the air supply is sufficient, it may
be the sensor error.
Water amount in the oil pan is

increasing to the point of almost
overflowing.
Stop the machine once to prevent the
water leakage and clean the drainage of
the oil pan to secure the water
discharge.
5037 Fatal ALM Overflow has been detected.
If the water increase in the oil pan is
not confirmed, it may be the sensor
error.
Check the sensor and perform the
maintenance tasks or replacement as
necessary.
Investigate the cause of the leakage

such as the damage on the bellows.
Detected water leakage(Under
5038 Fatal ALM Check the leakage sensor 1 on the I/O
spindle2).
screen for the sensor status.See "Help"
for details.

Detected water leakage(Under X
axis).
for details.

Detected water leakage(Under
spindle1).
for details.
Confirm the operation of circuit

5041 Fatal ALM Detected sensor's power breakage.
protector.
Detected optional EMO sensor

5042 Fatal ALM Ensure that sensor works.
failure.
Sensor failure on SP coolant water Z

axis initial pos.
5044 Fatal ALM Control unit's fan Sensor failure. Please restart machine.
5045 Fatal ALM External power unit failure. Please restart machine.
Machine will be shut down as EMO is

activated.
Air decrease, overflow or water leakage
may have occurred (One of the sensors of
Air decrease, overflow or water the air decrease, overflow or water
5046 Fatal ALM
leakage has been detected. leakage has been detected.)
Check if the air supply is enough, water
is not overflowed or leaking.
Sensor status can be checked on the I/O
screen.
73/162
Confidential
Event
Type
Close Maintenance cover, then ress
5047 Error ALM Maintenance cover was opened.
[System initialize] to continue.
5048 Error ALM Stage cover was opened. Close Stage cover, then continue.
Check if the maintenance cover is

Lock sensor would not react to the closed. If the error occurs even when
5049 Error ALM lock cylinder of the maintenance the cover is closed, check if the lock
door. cylinder opens/closes properly and the
status of the sensor.
Cannot activate Stage cover Lock Ensure that lock cylinder sensor of
5050 Error ALM
Cylinder. Stage cover.
5051 Error ALM System temperature is unstable. Adjust room tempreture and try again.
Cooling water temperature is Adjust water tempreture in thermostatic

5052 Error ALM
unstable. water unit and try again.
Check air pressure on pipes and

5053 Error ALM Air supply pressure is unstable.
facilities.
Adjust pressure of DI water and try

5054 Error ALM DI water pressure is unstable.
again.
5055 Error ALM N2 pressure is unstable. Adjust N2 pressure and try again.
5056 Error ALM Detected additive pump failure. Ensure bubbler unit properly works.
5057 Fatal ALM Detected IO driver error in chamber. Please restart machine.
Detected IO drive setting error in

chamber.
5059 Warning WRN Detected circulation system error. Check circulation system.
Circulation system error is

5060 Warning WRN Check circulation system.
occurring.
OPEN/CLOSE sensor of mist shutter are

both ON. Confirm the actual shutter
Detected mist shutter open/close
5061 Error ALM position and OPEN/CLOSE sensor status
sensor failure.
and adjust if it is necessary. See
"Help" for details.
Sensor timeout error. Sensor of

"Open/Close" did not respond within the
time (SYSID: 23009 Mist shutter check
Opening/closing of the mist shutter
5062 Error ALM time).
has failed.
Check the open/close status of the mist
shutter. When it is not working, make
necessary adjustments on the IO screen.
5063 Warning WRN Tool tray is open. Please close tool tray.
5064 Warning WRN Mist shutter is OPEN. Close mist shutter.
74/162
Confidential
Event
Type
5065 Warning WRN Mist shutter is CLOSE. Open mist shutter.
5066 Warning WRN Confirm the resistivity of DIW1. Adjust resistivity of bubbler.
Adjust resistivity of bubbler then try

5067 Error ALM Resistivity of DIW1 is not stable.
again.
5068 Warning WRN Confirm the resistivity of DIW2. Adjust resistivity of bubbler.

5069 Error ALM Resistivity of DIW2 is unstable.
again.
Tempreture of inside machine is

5070 Warning WRN Adjust tempreture and try again.
unstable.
Adjust tempreture of water in

5071 Error ALM Tempreture of DIW1 is unstable.
thermostatic water unit.

Investigate cause of water leakage and

Water leakage in spinner .(above
5073 Fatal ALM recover. See "Help" for
transfer-electric unit)
details.
Investigate cause of water leakage and

Water leakage in spinner .(under
5074 Fatal ALM recover. See "Help" for
spinner unit)
details.
Vacuum pressure of spinner is

5075 Error ALM Adjust vacuum sensor.
dropped.
Retrieve the work, for it may not be

suctioned to the ARM1.
Check the following as a cause of the
5076 Error ALM ARM1 vacuum pressure has decreased.
problem.
Positional error in work transfer / Air
leakage / Vacuum sensor trouble

problem.
Check if the inspection door can be

closed properly on the maintenance
Detected inspection door OPEN while screen.
5078 Error ALM
elevator is running. If no problem is found on the door, then
check the disconnection or damage of the
signal wires.
75/162
Confidential
Event
Type
Frame overhang sensor is turned ON while
the elevator shaft is in motion.
Remove interfering object between the
elevator and transfer unit.\nWhen the
Detected overhang of frame while frame is protruded, return it back to
5079 Error ALM
elevator is running. either the cassette or the inspection
tray.\nWhen there is no interfering
object, check the overhang sensor and
its movement. See "Help" for
details.
Eject object around elevator.\nIf no

Detected response of area sensor object is found, confirm operation of
5080 Warning WRN
while elevator is running. area sensor. See "Help" for
details.

Detected response of area sensor2
5081 Error ALM object is found, confirm operation of
while elevator is running.
area sensor.
5082 Error ALM Error on CO2 bubbler. Confirm that if the bubbler is working.
5083 Warning WRN Confirm resistivity of bubbler. Adjust resistivity of the bubbler.
Confirm exhaust pressure on back side of

5084 Error ALM Exhaust pressure is dropped.
the machine.
Investigate cause and recover the high

5085 Error ALM High pressure is not running.
pressure pump.
Cut water mixture pump is not Investigate cause and recover the cut
5086 Error ALM
running. water mixture pump.
5087 Warning WRN Detected sensor error on elevator. Restart machine.
5088 Error ALM Detected homotherm error. Check homotherm system.
5089 Fatal ALM Detected internal mist fan stop. Check internal mist fan.
5090 Warning WRN Homotherm error is occuring. Check homotherm system.
RIGHT Fan sensor error: Electric Ensure Electric unit4 fan operation. The
5091 Fatal ALM
unit2.(Backside) fan is on UPPER LEFT of the machine.
Ensure Trans fan operation. The fan is

5092 Fatal ALM Trans fan sensor error. on LOWER RIGHT at the BACK side of the
machine.
Ensure Transfer area fan operation. The

5093 Fatal ALM Transfer area fan sensor error. fan is on LOWER LEFT at the BACK side of
the machine.
Cannot move mist shutter because of

5094 Warning WRN
interference in ARM1
Cannot move mist shutter because of

5095 Warning WRN
76/162
Confidential
Event
Type
Close the tool tray and continue the
processing.
5096 Warning WRN Tool tray is open. Check the sensor if an error still
persists even after closing the tray.
5097 Warning WRN Detected motor off. Power on motor.
5098 Warning WRN Detected motor off. Power on motor.

5099 Error ALM Resistivity of DIW2 is unstable.
again.

Adjust streaming flow valve and try

5101 Error ALM Streaming flow rate is unstable.
again
Confirm the supply rate of DIW2 and

DIW2(Water membrane/Spinner
5102 Error ALM valve open status. Adjust supply rate
cleaning) flow rate is dropped.
and valve regulation.

problem.
5104 Error ALM Vacuum pressure of ARM1 is dropped. Adjust vacuum sensor.
Work vacuum pressure is dropped Ensure work is properly set, or adjust

5105 Error ALM
down. vacuum sensor.

problem.

dropped.

dropped.
An error in the electromagnetic switch 1

Found welding on electromagnetic or 2 has been detected.
5109 Fatal ALM
open-close unit. Turn OFF the breaker and contact us. See
"Help" for details.
Detected response of elevator cover

5110 Error ALM Confirm operation of elevator cover.
Cannot operate the machine under this

status. After turning OFF the power,
Safety module error was detected at
5111 Fatal ALM turn OFF the main breaker then restart
control unit
the machine. If the error occurs
77/162
Confidential
Event
Type
Detected water leakage at drain port The sealing at drain port may be
5112 Fatal ALM
on high pressure pump deteriorated. Replace the O-ring.
Detected water leakage(Under X

5113 Fatal ALM Find out root cause of water leakage.
axis・option).
Cutting cannot be conducted while the

mist shutter is open. Execute the
recovery command [Esc ARM cover open]
Mist shutter has opened during
5114 Error ALM and close the mist shutter after the
cutting.
machine is stopped completely. In case
the mist shutter is closed, adjust the
sensor position.
Close the mist shutter and resume the

5115 Warning WRN Mist shutter is open.
operation.
Cannot check sensor of detergent

5116 Error ALM Ensure Detergent pump
pump.
5117 Warning WRN Vacuum pressure of ARM1 is dropped. Adjust vacuum sensor.

PC in restoration.
The scrap box is not attached

5130 Fatal ALM Please check on scrap box.
normally.
The scrap box is not attached

5131 Warning WRN
normally.
5132 Fatal ALM Overflow is detected. Clean Scrap box.
Cannot check connection to detergent Check pump's power supply and cable
5133 Error ALM
pump. connection.
Please check cutting water temperature,

Cutting table area temperature is cutting table area temperature, and
5134 Error ALM
unstable. cutting table area thermometer
condition.
Switch the water curtain to ON, and

please confirm its flow in the utility
screen.\nIf it has a problem, please
5135 Error ALM Water curtain flow is unstable.
check its flow setting, the water piping
in machine and the water line in
factory.
Switch the water membrane to ON, and

please confirm its flow in the utility
screen.\nIf it has a problem, please
5136 Error ALM Water membrane flow is unstable.
check its flow setting, the water piping
in machine and the water line in
factory.
78/162
Confidential
Event
Type
Switch the N2 pressure to ON, and please
confirm it in the utility screen.\nIf it
N2 pressure of bubbling water is
5137 Error ALM has a problem, please check its setting,
unstable.
the N2 piping in machine and the N2 line
in factory.
Cutting cannot be conducted while the

mist shutter is open. Execute the
recovery command [Esc ARM cover open]
Mist shutter has opened during
5139 Error ALM and close the mist shutter after the
spindle rotation.
machine is stopped completely. In case
the mist shutter is closed, adjust the
sensor position.
Vacuum pressure of the ARM1 If a wafer is found to be fallen from

5146 Error ALM
Bernoulli chuck has been decreased. the chuck, it shall be removed.
Vacuum pressure of the ARM2 If a wafer is found to be fallen from

5147 Error ALM
Bernoulli chuck has been decreased. the chuck, it shall be removed.
After the motor power is OFF, by

inertia, about 10 minutes spindle
Motor power has been disconnected
5148 Guide CAL rotation does not stop.\nMake sure that
while spindle is running.
the spindle is stopped, please do the
operation.
A water leak or thermal abnormality in

Circulation system error(level 1)
5149 Warning WRN the circulation system occurred. Please
occurred.
check the circulation system.
The water level of the tank or the water

Circulation system error(level 2)
5150 Warning WRN level sensor is abnormal.Please check
occurred.
the circulation system.
Circulation system error(level 3) Filter1 or Filter2 became clogged.

5151 Warning WRN
occurred. Please check the circulation system.
There is a problem with the power

5152 Error ALM Please check the external CO2 bubbler.
supply of external CO2 bubbler.
External CO2 bubbler has been water

leakage.
Resistivity of external CO2 bubbler Adjust resistivity of external CO2

5154 Error ALM
is not stable.(Upper limit) bubbler then try again.

5155 Error ALM
is not stable.(Lower limit) bubbler then try again.
There is a problem with the power

supply of external CO2 bubbler.
External CO2 bubbler has been water

leakage.

5158 Error ALM
is not stable.(Upper limit) bubbler then try again.

5159 Error ALM
is not stable.(Lower limit) bubbler then try again.
Adjust pressure of DI water and try

5160 Error ALM DI water pressure is unstable.
again.
79/162
Confidential
Event
Type
5161 Error ALM Exhaust pressure is out of range. the machine.Exhaust pressure is out of
range.

5162 Warning WRN Exhaust pressure was out of range. the machine.Exhaust pressure is out of
range.

5163 Warning WRN Exhaust pressure was dropped. the machine.Exhaust pressure is out of
range.
N2 inlet pressure value is out of range

N2 inlet pressure is out of normal N2 inlet lower limit [SYS:24892] and N2
5164 Error ALM
range. inlet upper limit [SYS:24891].\nSee
"Help" for details.
Switch circulation system to remode mode

5165 Warning WRN Circulation system is in local mode.
and then restart the process please.
Circulation system is in error state

5166 Warning WRN Check the circulation system please.
or loacal mode.
If you are after the power supply has

5167 Warning WRN UPS ACFAIL been restored after the alarm release,
please running resumed.
Please check the error that is displayed

5168 Error ALM UPS Battery voltage drop
on the UPS device.
Please check the error that is displayed

5169 Error ALM UPS Unit failure
on the UPS device.

been restored after the alarm release,
please running resumed.\nIn addition,
5170 Warning WRN UPS ACFAIL (1 line cutting stop) when the operation resumed because the
work has not been completed cutting, be
careful on the same line overlap
cutting.

5171 Warning WRN UPS ACFAIL (Cut end pause) been restored after the alarm release,

5172 Warning WRN UPS ACFAIL (Unload pause) been restored after the alarm release,
Please if you work there is to check the

cutting situation on the CT.\n
If the work is not completed cutting,
The last time, was shut down after
5173 Warning WRN when the operation resumed, Note on the
the detection of the power failure.
same line overlap cutting.\n
If there is no abnormality, after the
alarm release, please cutting resumes.
Cannot drain water because the ABES

5178 Warning WRN
Pallet linkting.
Cannot move because of interference

5179 Warning WRN
in ABES and mist shutter.
80/162
Confidential
Event
Type
Resistivity of DIW1 is out of normal
5180 Guide CAL Resistivity of DIW1 is not stable. range. Please confirm the status of
bubbler.
Resistivity of DIW2 is out of normal

5181 Guide CAL Resistivity of DIW2 is not stable. range. Please confirm the status of
bubbler.
Open the machine cover and remove the

Remove the rejected work from the
5182 Guide CAL rejected work from the machine manually
machine.
please.
Open the machine cover and remove the

Remove the rejected work from the rejected work from the machine manually
5183 Guide CAL
machine. please.\n\n请打开机盖，取出机器内的工
件。
Flow quantity of additive pump is Please confirm a additive pump, and a

5186 Error ALM
out of range. flow sensor.
Detect threshold error signal of Please confirm a additive pump, and a

5187 Error ALM
flow quantity sensor. flow sensor.
Please check the condition of the

Additive pump setting is valid, but
5190 Error ALM additive pump and whether the cable is
control valve is OFF.
broken.
Cutting table vacuum pressure is Ensure that cutting table is properly

5201 Error ALM
unstable. set, or adjust vacuum sensor.
5202 Warning WRN Work vacuum error at Cut area. Place work on cut table.
The blow pressure for the work on the

cutting table may not be sufficient
Work is present on the cutting
5203 Warning WRN enough. Adjust the pressure (speed
table.
controller adjustment) and the cutting
work blow time (ID: 20210).
5204 Warning WRN Cutting table does not exist. Set up cutting table and continue.
5205 Warning WRN Cutting table is found. Remove table and continue.
5206 Warning WRN Cannot find work. Ensure that vacuum holds work properly,
5207 Warning WRN New work is found. Continue process.
Ensure that cutting table is properly

5208 Warning WRN Cannot find cutting table.
set, or adjust vacuum sensor.
5209 Warning WRN Cutting table is found. Continue process.
5210 Guide CAL Work in process is rejected. Place work on table.
Work pressure in the cutting unit has

exceeded the tolerance (ID:20720,
5211 Error ALM Work vacuum pressure is unstable.
20729). Check the work before resuming
the operation. See "Help" for details.
81/162
Confidential
Event
Type
An error was found in the conductivity
check of the spindle brush.
Replace the brush if the spindle brush
Problem in the circuit of the
5212 Error ALM is worn.
spindle brush has been detected.
If no abrasion was observed, check the
connection of the related cables and
connectors.
Applied voltage to the cutting table is

unstable. Cutting table may not be
completely in the insulated state. Clean
the table and its periphery (remove
Problem in the circuit of the cutter
5213 Error ALM water droplets and swarf). If the
set has been detected.
problem cannot be solved, the problem
might stem from the mechanical
insulation. In such a case, contact a
field engineer.
5214 Error ALM Detected spindle lock signal. Continue process.
Detected cutting table circuit

5215 Error ALM Verify circuit of cutting table.
failure.
Solve root cause that table is not

5216 Error ALM Table is not electrically floated.
electrically grounded.
Check if there is any foreign object. If

not, touch [System initialize] to
5217 Fatal ALM X axis is out of control. initialize all axes.\nMechanical
adjustment is necessary if the error
persists.
Press [System Initialize] for all axes

5218 Warning WRN X axis is not initialized.
initialization.
X axis position exceeds software

5219 Warning WRN Check size system data.
limit.
Unable to move since Z axis may Move Z axis to safe position then
5220 Warning WRN
interfere in the blade. continue.
Unable to move since T axis may Move T axis to safe position then
5221 Warning WRN
interfere in the table. continue.

Detected driver alarm while X axis initialization.\nIf error occur
5222 Fatal ALM
servo turning ON. repeatedly, mechanical adjustment is
required.

5223 Fatal ALM
servo turning OFF. repeatedly, mechanical adjustment is
required.

5224 Fatal ALM
was initializing. repeatedly, mechanical adjustment is
required.

initialization.\nIf error occur
5225 Fatal ALM Detected X axis driver alarm.
repeatedly, mechanical adjustment is
required.See "Help" for details.
82/162
Confidential
Event
Type
5226 Fatal ALM Detected X axis parameter error.
required.
Touch [System initialize] to initialize

all axes.
Limit sensor has reacted during the
5227 Error ALM If the error recurs, there may be the
X-axis movement.
problem in the limit sensor or the
cable. See "Help" for details.

5228 Fatal ALM Detected X axis driver servo alarm.
required.

5229 Fatal ALM Detected X axis positioning timeout.
required.
Cannot turn servo OFF while X axis Incorrect operation of incorrect

5230 Error ALM
is running. parameter is set.
Ensure that speed of each axis are

5231 Error ALM Detected X axis over-speed error.
properly set.

5232 Fatal ALM Detected T axis positioning timeout.
required.

5233 Warning WRN T axis is not initialized.
initialization.
T axis position exceeds software

limit.
Cannot move T axis because of Move Z axis to safe position then

5235 Warning WRN
interference in blade. continue.
Cannot move T axis because cut table Move X axis to safe position, then
5236 Warning WRN
interferes in machine. continue.
Cannot move T axis because cut table Move X axis to safe position, then
5237 Warning WRN
interference in machine. continue.

Detected driver alarm while T axis initialization.\nIf error occur
5238 Fatal ALM
is in process. repeatedly, mechanical adjustment is
required.

5239 Fatal ALM
required.

5240 Fatal ALM
required.
83/162
Confidential
Event
Type
5241 Fatal ALM
required.
Press [System Initialize] for full axis

5242 Error ALM Detected T axis limit while running.
initialization.

5243 Fatal ALM Detected T axis servo alarm.
required.

5244 Fatal ALM T axis is out of control. initialize all axes.
the error persists.
Cannot turn servo OFF while T axis Incorrect operation of incorrect

5245 Error ALM

5246 Error ALM Detected T axis over-speed error.
properly set.
5247 Fatal ALM Detected IO driver error in stage. Please restart machine.
Detected IO driver parameter setting

error in stage.
Please check if table data and

5249 Warning WRN
attached table are fit.
Cannot move because of interference Close frame clamper then continue

5250 Warning WRN
in frame clamper. process.
Cannot move because frame clamper

5251 Warning WRN Retract opc unit then continue.
interferes in OPC unit.
Cannot move because frame clamper Move Z axis to safe position then
5252 Warning WRN
interferes in spindle. continue.
Cannot move X axis because of Move Z axis to safe position then

5253 Warning WRN
interference in blade. continue.
Cannot move X axis because of Move Z axis to safe position then

5254 Warning WRN
interference in ARM2. continue.
Cannot move T axis because of

5255 Warning WRN
Cannot move T axis because of

5256 Warning WRN
Cannot move because frame clamper Move up microscope cylinder then

5257 Warning WRN
interferes in Microscope. continue.
When a work is transferred from the arm

to the cutting unit, the work is
vacuumed at the unit, however, the
5258 Warning WRN Work vacuum error at Cut area.
sensor would not be turned ON. If the
error persists, check the target frame,
work status and the vacuum sensor.
84/162
Confidential
Event
Type
Ensure work is OK, or adjust vacuum
5259 Error ALM Work vacuum pressure is unstable.
sensor.
Sensor timeout error. The projection and

retraction sensor did not react within
the specified time (SYSID: 24010
Timeout time of vertical movement of the
Detected time out on dress stage
5260 Error ALM dress stage).
up/down motion.
Check the projection and retraction
movement of the dress stage. When it is
not working, make adjustment on the IO
screen as necessary.
Detected time out on dress stage

position change.
Sensor timeout error. The vacuum sensor

would not be turned ON/OFF within the
specified time (SYSID: 24012 Timeout
Detected time out on stage dress
5262 Warning WRN time of the dress stage vacuum time).
vacuum on/off
Adjust or replace the dress board as
necessary in the dress board
replacement.
Can not down for not escape

5263 Warning WRN
position.
Can not turn to dress position for

5264 Warning WRN
not up state.
Check if the vacuum sensor can be turned

ON in the dress stage vacuum ON/OFF. If
the error persists, adjust or replace
the dress board as necessary in the
dress board replacement.\nDress board
replacement-------Change to the Dress
5265 Error ALM Dress stage vaccuum pressure is low.
start position setting.\nDress start
pos--------------Change to the Dress
start position setting.\nRestart--------
-------------Cancel error and resume
cutting.
Vacuum pressure of frame clamper is

dropped.
Can not detect Frame on frame

5267 Warning WRN Please check frame on cut table.
clamper.
Vacuum OFF of the frame vacuum Vacuum pressure is not enough or the
5268 Error ALM
clamper could not be detected. sensor may be out of order.
Can not move dress stage up because

5269 Warning WRN
of interference in ARM1.
Can not move dress stage up because

5270 Warning WRN
of interference in ARM2.

5271 Fatal ALM Detected T axis positioning timeout.
required.
85/162
Confidential
Event
Type
5272 Fatal ALM Detected T axis driver alarm.
required.

5273 Fatal ALM Detected T axis parameter error.
required.
Press [System Initialize] for full axis

5274 Error ALM Detected T axis limit while running.
initialization.
Cannot move because frame clamper

5275 Warning WRN Move down the dress stage then continue.
interferes in dress stage.
5277 Warning WRN Mecha clamper is not closed. Please confirm Mecha clamper.
Cutting table is smaller than size

5278 Warning WRN Check cutting table.
setting.
Cutting table is bigger than size

5279 Warning WRN Check cutting table.
setting.
It was not able to confirm that

5281 Warning WRN Please remove the frame.
Mecha clamper was closed.
The problem may reside in the movement

of the dress stage unit into/out of the
position. Move the dress stage on the
maintenance screen and if the operation
Timeout error has occurred due to fails, replace the unit cylinder.
5292 Error ALM the moving the dress stage into/out When cylinder driving is available,
of the position. sensor malfunction may be the reason. In
such a case, turn ON/OFF the sensor,
adjust the position and check if the
sensor reacts for dress stage movement.
If not, replace the sensor.
Can not move dress stage project

5293 Warning WRN
because of interference in ARM1.
Can not move dress stage project

5294 Warning WRN
because of interference in ARM2.
Press [System Initialize] for all axis

5303 Fatal ALM A difference in T axes was detected.
required.

5304 Fatal ALM Theta axis In-position wasn't fixed.
required.
Confirm work position or existance of

Stage Sub table vacuum pressure is
5305 Error ALM water on wafer or adjust vacuum pressure
unstable.
sensor.
5306 Warning WRN Can not detect work on Sub table. Please check work on Sub table.
The specified position is not on the

5307 Warning WRN Move the microscope to the sub-table.
sub-table.
86/162
Confidential
Event
Type
Adjust or replace the hardware after
Failed to turn OFF the vacuum of the confirming the vacuum pressure and
5308 Error ALM
cutting table. whether the sensor is ON/OFF on the IO
operation screen.
5309 Warning WRN Cannot find work. Ensure that vacuum holds work properly,
5310 Warning WRN Flame exists on cutting table. Remove Flame and continue.
Mirror wafer is not exists on sub

5311 Warning WRN Set mirror wafer and continue.
table.
On the dress board replacement screen,

adjust the position of the dress board
Dress stage vacuum pressure is
5312 Error ALM or replace the board. For change of the
unstable.
dressing start position after
replacement, set the start position.
X axis cannot move by unstable of

5313 Warning WRN
ABES pallet connection.
X axis cannot move by SP Y axis

5314 Warning WRN
interferes and ABES pallet.
X axis cannot move by SP Z axis

5315 Warning WRN
interferes and ABES pallet.
Can not Open frame clamper because

5316 Warning WRN
of interference in ABES pallet.
X axis cannot move since the blade

5317 Warning WRN
clamp has not retracted.
X axis cannot move since the ABES

5318 Warning WRN
pallet has not been vacuumed.
Dress stage cannot ascend by

5319 Warning WRN
interference of the ABES pallet.
Dress stage cannot be projected by

5320 Warning WRN
interference of ABES pallet.
Error signal has been detected from Check the indication of the ionizer and
5321 Error ALM
the ionizer above the cutting table. solve the cause of the error.
Clean discharge needle. After cleaning,

Found decreasing amount of ion of
5322 Error ALM discharge ion until no error status in
ionizer above the cutting table.
Transfer I.O operation screen.
Confirm installation of ionizer then

Unbalanced ion of ionizer above the
cutting table.
OPEN/CLOSED sensors of ionizer shutter

Abnormal status of the shutter of are both ON. Confirm the actual shutter
5324 Error ALM
the ionizer above CT was detected. position and OPEN/CLOSED status of the
sensors. Adjust them if it is necessary.
87/162
Confidential
Event
Type
The operation timed out. Open/Closed
sensor did not respond within the time
(SYSID: 23612).
Opening/closing the shutter of
5325 Error ALM Check the open/closed status of the
ionizer above CT has failed.
shutter of the ionizer above the cutting
table. When it is not working, make
necessary adjustments on the IO screen.
The ionizer above CT cannot be

5326 Warning WRN turned ON because water membrane is
in use.
Water membrane cannot be turned ON

5327 Warning WRN
because the ionizeｒ above CT is ON.
The shutter of ionizer above CT

5328 Warning WRN cannot be opened while ionizer is
eliminating.
The ionizer above CT cannot be

5329 Warning WRN turned on because the shtter is
closed.
Flow rate of the blade cooling water (F)

has exceeded the tolerance . Adjust the
Flow rate of the blade cooling water
5401 Error ALM flow rate to settle within the tolerance
(F) has exceeded the tolerance.
and resume the operation. See "Help" for
details.
Flow rate of the blade cooling water (R)

has exceeded the tolerance . Adjust the
Flow rate of the blade cooling water
(R) has exceeded the tolerance.
details.
Flow rate of the DI water has exceeded

Flow rate of the DI water has the tolerance. Adjust the flow rate to
5403 Error ALM
exceeded the tolerance. settle within the tolerance and resume
the operation. See "Help" for details.
Spindle coolant water flow rate is Ensure that spindle coolant water
5404 Warning WRN
unstable. supplies, then continue.
Flow rate of the spindle cooling water

Flow rate of the spindle cooling
5405 Error ALM has exceeded the tolerance. Confirm
water has exceeded the tolerance.
supply rate to machine.
The value has exceeded the load current

limit threshold. Check how the spindle
and blade are installed, or the
Load current of the spindle has
5406 Fatal ALM processing condition of the rotation or
exceeded the limit threshold.
the cutting speed. Adjust the blade and
spindle in case of the excess of the
load current due to the oscillation.
Flow rate of the cutting water has

exceeded the tolerance. Adjust the flow
Flow rate of the cutting water has
5407 Error ALM rate to settle within the tolerance and
exceeded the tolerance.
resume the operation. See "Help" for
details.
88/162
Confidential
Event
Type
Flow rate of the cutting washing water
has exceeded the tolerance. Adjust the
Flow rate of the cutting washing
water has exceeded the tolerance.
details.
Cutting water temperature is Let coolant water temperature stable,

5409 Error ALM
unstable. then try again.
Blade coolant water temperature is Let coolant water temperature stable,

5410 Error ALM
Spindle coolant water temperature is Let coolant water temperature stable,

5411 Fatal ALM
DI water specific resistance is

5412 Error ALM Adjust bubbler unit and try again.
unstable.
5413 Error ALM Bubbler resistivity is unstable. Adjust bubbler unit and try again.
5414 Error ALM Detected blade damage. Replace blade.
Check if the blade is damaged. If

damaged, replace with new one.
Upon the restart, whether to continue
the cutting with the both spindle (in
5415 Error ALM Detected whole blade damage.
case no damage is found) or with the
single spindle can be selected.\n01 BBD
adjustment--------Change to the BBD
adjustment.
Please replace blade.\n\n01 BBD

5416 Error ALM Detected partial blade damage. adjustment--------Change to the BBD
adjustment.
5417 Error ALM BBD sensor is contaminated. Execute sensor cleaning.
5418 Warning WRN Flange Cover1 is open. Close flange cover 1 then continue.
5419 Warning WRN Flange Cover2 is open. Close flange cover 1 then continue.

5420 Fatal ALM Y axis is out of control. initialize all axes.
the error persists.

5421 Fatal ALM Detected Y axis scale alarm.
required.
5422 Fatal ALM Detected Y axis correction error. Input correct correction map.

5423 Warning WRN Y axis is not initialized.
initialization.
Y axis position exceeds software

limit.
89/162
Confidential
Event
Type
Cannot move Y axis because of Move Z axis to safe position then
5425 Warning WRN
interference in cut table. continue.
Cannot move Y axis because of impact Move Y axis to safe position, then
5426 Warning WRN
of both Y axes. continue.

Detected driver alarm while Y axis initialization.\nIf error occur
5427 Fatal ALM
required.

Detected driver alarm while Y axis initialization.\nIf error occur
5428 Fatal ALM
required.

Driver alarm is detected while Y initialization.\nIf error occur
5429 Fatal ALM
axis initializing. repeatedly, mechanical adjustment is
required.

5430 Fatal ALM Detected Y axis driver alarm.
required.

5431 Fatal ALM Detected Y axis parameter error.
required.
Press [System initialize] to initialize

all axes.
5432 Error ALM Detected Y axis limit while running.
the error persists.

initialization.
5433 Fatal ALM Detected Y axis servo alarm.
If error occur repeatedly, mechanical
adjustment is required.

5434 Fatal ALM Detected Y axis positioning timeout.
required.
User tried to turn servo OFF while Y Incorrect operation of incorrect

5435 Error ALM
axis is running. parameter is set.

5436 Error ALM Detected Y axis over-speed error.
properly set.

Fine sensor cannot be detected while initialization.\nIf error occur
5437 Fatal ALM
Y axis initializing. repeatedly, mechanical adjustment is
required.

5438 Fatal ALM Z axis is out of control.
required.
90/162
Confidential
Event
Type
5439 Error ALM Z axis cannot be initialized.
required.
5440 Fatal ALM Detected Z axis correction error. Input correct correction map.

5441 Warning WRN Z axis is not initialized.
initialization.

Z axis position exceeds software initialization.\nIf error occur
5442 Warning WRN
limit. repeatedly, mechanical adjustment is
required.
Cannot move Z axis to out of it's

focus limit.

Detected driver alarm while Z axis initialization.\nIf error occur
5444 Fatal ALM
required.

5445 Fatal ALM
required.

5446 Fatal ALM
required.

5447 Fatal ALM Detected Z axis driver alarm.
required.

5448 Fatal ALM Detected Z axis parameter error.
required.

5449 Error ALM Detected Z axis limit while running.
initialization.

5450 Fatal ALM Detected Z axis servo erro.
required.

Z axis positioning timeout has initialization.\nIf error occur
5451 Fatal ALM
detected. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while Z axis Incorrect operation of incorrect

5452 Error ALM

5453 Error ALM Detected Z axis over-speed error.
properly set.
91/162
Confidential
Event
Type
5454 Fatal ALM Detected spindle driver alarm.
required.
If the error persists, replace the

5455 Fatal ALM Spindle inverter error has occurred.
inverter.
5456 Fatal ALM Spindle in process is locked. Check balance of blade and continue.
Check cable connection and check

5457 Fatal ALM Spindle can not rotate stably.
driver's functionality.
Verify parameter defines Spindle off

5458 Error ALM Spindle stop action timed out.
time.
Cannot turn servo OFF while spindle Incorrect operation of incorrect

5459 Error ALM

Spindle driver's initialization is initialization.\nIf error occur
5460 Fatal ALM
failed. repeatedly, mechanical adjustment is
required.

5461 Warning WRN Spindle is not initialized.
required.

Detected driver alarm while spindle initialization.\nIf error occur
5462 Fatal ALM
starts rotating. repeatedly, mechanical adjustment is
required.

5463 Fatal ALM
stops rotating. repeatedly, mechanical adjustment is
required.

5464 Fatal ALM
is connected. repeatedly, mechanical adjustment is
required.

5465 Fatal ALM
is cutting Work. repeatedly, mechanical adjustment is
required.

5466 Fatal ALM Detected spindle parameter error.
required.

5467 Fatal ALM Detected IO driver error in spindle.
required.

Detected IO driver parameter setting initialization.\nIf error occur
5468 Fatal ALM
error in spindle. repeatedly, mechanical adjustment is
required.
92/162
Confidential
Event
Type
The shaft cannot be locked when the
5469 Error ALM Spindle shaft cannot be locked. spindle is rotating. Please wait till
the spindle rotation stops.
The cylinder of the shaft lock or the

5470 Error ALM Can not unlock spindle shaft. sensor may be out of order. Replace the
part. See "Help" for details.
Cannot lock spindle shaft since

5471 Warning WRN Stop spindle and continue.
Spindle is running.
Spindle cannot be rotated while the Unlock the shaft to proceed the
5472 Warning WRN
shaft is locked. processing.
Flange cover is different to Check flange cover and blade size

5473 Warning WRN
parameter. parameter.
5474 Error ALM Pool water flow is unstable. Adjust pool water and continue.
Cannot move Y axis because of

5475 Warning WRN

5476 Warning WRN
Cannot move Z axis because of

5477 Warning WRN

5478 Warning WRN

5479 Warning WRN
5481 Error ALM Detected F axis correction error. Please check for the error condition.
Cannot rotate spindle, cover

5482 Warning WRN Switch cover interlock ON and try again.
interlock is unavailable
5484 Warning WRN Absorption senor OFF Please check the absorption valve
Spindle coolant water flow was over Ensure that spindle coolant water
5485 Fatal ALM
the upper level. supplies, then continue.

5486 Warning WRN Y1 axis status is error
initialization.

5487 Warning WRN Y2 axis status is error
initialization.
Please replace blade.\nIn addition,

please verify work itself because there
5490 Error ALM Detected whole blade damage. might have a incomplete cut.\n01 BBD
adjustment.
Please replace blade.\nIn addition,

please verify work itself because there
5491 Error ALM Detected partial blade damage. might have a incomplete cut.\n01 BBD
adjustment.
93/162
Confidential
Event
Type
Please verify blade.\nIn addition,
Cutting was stopped because blade
5492 Warning WRN please verify work itself because there
breakage signal was detected.
might have a incomplete cut.
5495 Error ALM Cannot open/close flange cover. Please check for the error condition.
Switch the upside cutting water to ON,

please make sure the amount of water in
Upside cutting water flow rate is
5496 Error ALM the utility information screen.
unstable.
Adjust upside cutting water and
continue.
5501 Error ALM Spindle type is invalid. Please check the spindle type.
Cannot move X axis because of

5503 Warning WRN Check system data of size-related
interference in Dress Stage.


Cannot move X axis because of

interference in Thickness Work.
Please clean BBD unit. If this warnings

5507 Error ALM BBD unit is dirty. occur repeatedly, please adjust the BBD
unit.
There is a possibility the adjustment

5508 Warning WRN BBd value is not appropriate. results is appropriate.
Please adjust BBD unit once more.
Please open the flange cover for BBD

5509 Warning WRN Flage cover is Closed.
dirty detection .
Please check the UP/DOWN sensor of CT

5510 Error ALM CT washing brush UP/DOWN error.
washing brush.
Please move CT washing brush to up

5511 Error ALM CT washing brush Interference error.
position then continue process.
Please clean SP2 BBD unit. If this

5512 Error ALM SP2 BBD unit is dirty. warnings occur repeatedly, please adjust
the BBD unit.

5513 Warning WRN SP2 BBD value is not appropriate. results is appropriate.
Please adjust SP2 BBD unit once more.
Please clean both of SP BBD unit. If

5514 Error ALM Both SP BBD unit is dirty. this warnings occur repeatedly, please
adjust the BBD unit.

Both SP BBD value is not results is appropriate.
5515 Warning WRN
appropriate. Please adjust both of SP BBD unit once
more.
5516 Fatal ALM Detected shaft lock.
94/162
Confidential
Event
Type
A difference in Y1 axes was initialization.\nIf error occur
5517 Fatal ALM
required.

A difference in Y2 axes was initialization.\nIf error occur
5518 Fatal ALM
required.
Switch the blade high coolant water to

ON, please make sure the amount of water
Blade high coolant water flow rate
5527 Error ALM in the utility information screen.
is unstable.
Adjust blade high coolant water and
continue.
Cannot move spindle Y axis because

5528 Warning WRN
of interference in ABES Pallet.
Cannot move spindle Z axis because

5529 Warning WRN
of interference in ABES Pallet.
Cannot close flange cover since New

5530 Warning WRN
blade clamp is moving forward.
Cannot close flange cover since Used

5531 Warning WRN
blade clamp is moving forward.
Cannot move spindle Y axis because

5532 Warning WRN
of interference in ABES nut driver.
Please review the blade's closest

A value less than the closest
approach distance and the value of the
5533 Warning WRN approach distance for thick blade
blade's closest approach distance
was set.
margin.
Blades exceeding 3 mm can not be used in

5534 Warning WRN The blade thickness is abnormal. the state where the thick blade function
is not effective.
The value has exceeded the load current

limit threshold. Check how the spindle
and blade are installed, or the
Load current of the spindle has
5535 Warning WRN processing condition of the rotation or
exceeded the limit threshold.
the cutting speed. Adjust the blade and
spindle in case of the excess of the
load current due to the oscillation.
The vibration value of the spindle

5537 Warning WRN Spindle vibration value is abnormal. during cutting detected abnormalvalue.
Please check the condition of the blade.
Please adjust the cutting air flow rate

The cutting air flow rate is outside
5541 Error ALM to the normal range, and then resume the
the normal range.
operation.
An error signal from cutting air

5542 Error ALM Please confirm the cutting air pressure.
flow rate sensor was detected.
Please adjust the cutting air pressure

The cutting air pressure is outside
5543 Error ALM to the normal range, and then resume the
the normal range.
operation.
95/162
Confidential
Event
Type
An error signal from cutting air
5544 Error ALM Please confirm the cutting pressure.
pressure sensor was detected.
An error signal from the chiller for

5545 Fatal ALM Please confirm the chiller.
spindle cooling water was detected.
It may interfere in the blade. Move Z

5601 Warning WRN OPC shutter interferes in blade.
axis to safe position then continue.
5602 Error ALM Cannot open OPC1 shutter. Please check for the error condition.

problem.
\n1. Shutter defect -> Open/close the
shutter on the maintenance screen.
Replace the shutter if it cannot be
5603 Error ALM Cannot close OPC1 shutter.
opened/closed.
\n2. Sensor trouble -> Turn ON/OFF the
sensor and adjust the position. If the
sensor cannot be turned ON/OFF, replace
the sensor.
5604 Error ALM Cannot open OPC2 shutter. Please check for the error condition.
5605 Error ALM Cannot close OPC2 shutter. Please check for the error condition.
Detected sensor failure while

5606 Error ALM Ensure that OPC shutter properly works.
opening OPC shutter.

5607 Error ALM Ensure that OPC shutter properly works.
closing OPC shutter.

problem. \n1. Wafer influence -> Adjust
Initial light amount is short for the OPC air blow. \n2. Unclean prism ->
5608 Error ALM
the OPC. Clean the prism. \n3. Poor voltage ->
Adjust the voltage of the substrate of
OPC cutter set.
Adjust optical unit blow time or clean

Initial light value for OPC unit is prism, \nIf error occur repeatedly,
5609 Error ALM
unstable. optical cuter set adjustment is
required.
Clean prism.\nIf happened after blade

Initial light value for OPC is less replacement, confirm Blade Data.\nIf
5610 Error ALM
than system data. error occur repeatedly, OPC board
Spot diameter is too small on OPC Clean prism.\nIf error occur repeatedly,
5611 Error ALM
unit. OPC board adjustment is required.
Spot diameter cannot be detected on Clean prism.\nIf error occur repeatedly,

5612 Error ALM
OPC unit. OPC board adjustment is required.
Start of spotting cannot be Clean prism.\nIf error occur repeatedly,

5613 Error ALM
confirmed. OPC board adjustment is required.
Clean prism.\nIf error occur repeatedly,

5614 Error ALM End of spotting cannot be confirmed.
OPC board adjustment is required.
96/162
Confidential
Event
Type
1/2 of initial light data cannot be Clean prism.\nIf error occur repeatedly,
5615 Error ALM
detected. OPC board adjustment is required.
Sample data of optical cutter set Clean prism.\nIf error occur repeatedly,
5616 Error ALM
cannot be fully collected. OPC board adjustment is required.
5617 Error ALM
cannot be fully saved. OPC board adjustment is required.
Sample data of OPC cannot be fully Clean prism.\nIf error occur repeatedly,
5618 Error ALM
collected in time. OPC board adjustment is required.
5619 Error ALM
lacks. OPC board adjustment is required.
Calculation results of OPC is out of Clean prism.\nIf error occur repeatedly,

5620 Error ALM
spot diameter. OPC board adjustment is required.
Detected Zero devided while optical Clean prism.\nIf error occur repeatedly,
5621 Error ALM
cutter set calculation. OPC board adjustment is required.
Restart machine.\nIf error occur

Detected IO driver error in optical
5622 Fatal ALM repeatedly, OPC board adjustment is
cutter set.
required.
Restart machine.\nIf error occur

5623 Fatal ALM repeatedly, OPC board adjustment is
error in OPC.
required.
Cannot move because of interference Move opc unit to safe position then
5624 Warning WRN
in OPC unit. continue.
Cannot move X axis because of Move X axis to table turn safe position
5625 Warning WRN
interference in OPC unit. then continue.
Cannot move Z axis because spindle Move Z axis to escape position then
5626 Warning WRN
interferes in OPC unit. continue.
Detected sensor failure while opc Ensure that opc projection properly
5627 Error ALM
unit projection. works.

problem. \n1. Problem in cylinder of the
OPC unit -> Turn ON/OFF the cylinder of
the OPC unit on the maintenance screen.
5628 Error ALM OPC unit cannot be operated. If it does not open/close, replace the
cylinder. \n2. Sensor trouble -> Turn
ON/OFF the sensor and adjust the
position. If the sensor cannot be turned
ON/OFF, replace the sensor.
Valid data of optical cutter set Clean prism.\nIf error occur repeatedly,
5629 Error ALM
lacks. OPC board adjustment is required.
Detected Zero devided while optical Clean prism.\nIf error occur repeatedly,
5630 Error ALM
cutter set processing data. OPC board adjustment is required.
Detected sensor failure while Ensure that microscope top/bottom

5801 Error ALM
raising microscope. cylinder properly works.
97/162
Confidential
Event
Type
If the vertical movement of the
microscope unit cannot be controlled
through the maintenance screen, consider
the cylinder replacement.
5802 Error ALM If the microscope vertical cylinder
lowering microscope.
sensor cannot be turned ON/OFF despite
the sensor position adjustment, consider
the sensor replacement.See "Help" for
details.

5803 Error ALM Microscope unit cannot be raised up. If the microscope vertical cylinder
details.

5804 Error ALM Microscope unit cannot be lowered If the microscope vertical cylinder
details.
Z axis may interfere in microscope unit.

Microscope may interfere in cut
5805 Warning WRN Move Z axis to safe position then
table.
continue.
Detected sensor failure while Ensure that microscope shutter properly

5806 Error ALM
opening microscope shutter. works.
Detected sensor failure while Ensure that microscope shutter properly

5807 Error ALM
closing microscope shutter. works.
Ensure that microscope shutter properly

5808 Error ALM Microscope shutter cannot be opened.
works.
Ensure that microscope shutter properly

5809 Error ALM Microscope shutter cannot be opened.
works.
Detected error while live camera

magnification change.
Detected error while live camera is

stopped.
Detected IO driver error in

microscope.

error in microscope.
Cannot change magnification. Axis

exceeds software limit
98/162
Confidential
Event
Type
Microscope unit might dropped
down.\nMake sure the safety of the
Detected dropped down of the
5816 Error ALM equipment, please run the reject if
microscope unit.
necessary.\nThen please ask them to
check the microscope unit to engineer.
The work thickness of the execution Check the work thickness on CT. Press
5817 Warning WRN
recipe has been changed. [CHECK] after checking safety.
Since the microscope or spindle

interferes with work, it is not possible
to perform the Chop DY correction. When
It is not possible to perform the
5818 Warning WRN performing Chop DY correction, please
Chop DY correction.
performed in the work of less than 2mm.
Or, DY correction method(SYS 20237) set
to "1 line cut".
The work thickness of the dress data Check the work thickness on CT. Press
5821 Warning WRN
has been changed. [CHECK] after checking safety.
Close the CST2 load port.\n

Cannot move elevator because CST2 If the port is colsed correctly, confirm
5901 Warning WRN
LDPT is opened the operation of the CST2 load port open
sensor.
Close inspection door, then continue

5902 Warning WRN Inspection door is OPEN.
process.
Detected Elevator axis limit while Press [System Initialize] for all axes
5903 Error ALM
running. initialization.
Detected elevator axis over-speed Ensure that speed data of each axis are
5904 Error ALM
error. properly set.
Touch [System initialize] to initialize

all axes.
Detected driver alarm while Elevator
5905 Warning WRN Mechanical adjustment is necessary if
axis was running.
the error persists. See "Help" for
details.
Press [Transport initialize] for

Detected servo alarm on Elevator transport axes initialization.\nIf error
5906 Error ALM
axis. occur repeatedly, mechanical adjustment
is required.
Detected area sensor failure while

5907 Error ALM Confirm operation of area sensor.
Elevator is running.

5908 Error ALM Elevator axis is out of control.
required.
Cannot move elevator while UV door

5909 Warning WRN Close UV door, then continue process.
is opened.
Elevator axis exceeds software

5910 Warning WRN Check elevator size data in system data.
limit.
Elevator axis has not been Touch [System initialize] to initialize

5911 Warning WRN
initialized. all axes.
Could not obtain full sample data of

5912 Error ALM Cofirm the opeation of frame sensor.
sensing.
99/162
Confidential
Event
Type
5913 Error ALM Cannot save any more sensing data. Cofirm the opeation of frame sensor.
Cannot move elevator because of Move ARM1Y axis to safe position then
5914 Warning WRN
interference in finger. continue process.
Eject object between elevator and

transport area.\nIf frame is overhanged,
Cannot move elevator. Frame is not
5915 Warning WRN set it back into cassette or inspection
stowed correctly.
tray. If no object is found, confirm
operation of overhang sensor.
Close the inspection door to continue

Cannot lock inspection door while the processing. If the alarm recurs even
5916 Warning WRN
door is opened. after the door is closed, check the
inspection door sensor.
Sample data of frame sensing cannot

5917 Error ALM Cofirm the opeation of frame sensor.
be fully collected.
If the work is out from the cassette

slot, place it back to the original
position.
Detected overhang error while If any foreign object is not to be
5918 Error ALM
elevator is running. found, the problem may be the incorrect
installation or the failure of the
sensor.
Remove any unnecessary object around the

elevator.
If any foreign object is not to be
Detected area sensor1 error while
5919 Warning WRN found, the problem may be the incorrect
elevator is running.
installation or the failure of the
sensor.
Detected area sensor2 error while

elevator is running.
Do not move the cassette while the

elevator is in motion.\n If the cassette
Detected change status in Cassette1 is not moved, adjust the position, then
5921 Error ALM
sensor1. consider the possibility of the false
sensor installation or the mechanical
trouble.See "Help" for details.

5922 Error ALM

5923 Error ALM
Confirm that if the machine size data is

5924 Warning WRN Detected limit slot.
properly set.
100/162
Confidential
Event
Type
Driver alarm detection while initialization.\nIf error occur
5925 Fatal ALM
initializing elevator axis. repeatedly, mechanical adjustment is
required.

Detected driver alarm while turning initialization.\nIf error occur
5926 Fatal ALM
on elevator axis servo. repeatedly, mechanical adjustment is
required.

5927 Fatal ALM
off elevator axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while elevator Wrong operation or invalid parameter is
5928 Error ALM
is running. set.
Detected IO driver error on

5929 Fatal ALM Restart machine.
elevator.
Detected invalid IO driver parameter

on elevator.
Insert frame properly.\nIf frame is

Frame is not set correctry in
5931 Error ALM inserted properly, check operation of
cassette.
the frame sensor.
Cannot move elevator because UV door

5932 Warning WRN Close UV door.
is OPEN.
Base plate of cassette2 is not set

5933 Warning WRN Close tray and try again.
properly.
Transmitting time out on RS Confirm if the reader is working or RS

5934 Error ALM
communication error. communication status.
Receiving time out on RS Confirm if the reader is working or RS

5935 Error ALM
communication error. communication status.
5936 Error ALM Cannot read barcode. Input barcode ID or reject work.
Received error message from barcode Confirm if the reader is working or RS

5937 Error ALM
reader BL500. communication status.
Cassette is removed while loading or Set cassette properly and continue

5938 Error ALM
unloading work. process.
5939 Warning WRN No work is found in inspection tray. Set work in inspection tray.
5940 Warning WRN Detected work in inspection tray. Eject work from inspection tray.
The work position information in

inspection tray and result of work
Cannot detect work in inspection sensing in the tray are mismatch.
5941 Warning WRN tray contrary to position Confirm that if the work is properly set
information. in the tray. If the work is set
properly, confirm the operation of work
sensor in the tray.
Detected new work in inspection

5942 Warning WRN Continue process.
tray.
101/162
Confidential
Event
Type
Cannot detect work in bottom slot of
5943 Warning WRN Set work on bottom slot of cassette1.
cassette1.
Remove interfering object between the

elevator and transfer unit.\n When the
frame is protruded, return it back to
Elevator cannot be moved as the
5944 Warning WRN either the cassette or the inspection
frame protrusion has been detected.
tray.\n When there is no interfering
object, check the condition of the
protrusion sensor.

5945 Warning WRN Detected object on area sensor. object is found, confirm operation of
area sensor.
Do not move cassette while elevator is

running.\nIf the cassette is not moved,
Detected change status in Cassette2
5946 Error ALM confirm operation of cassette sensor
sensor1.
while elevator is running. And adjust
sensor if it is necessary.

sensor2.

sensor3.
Do not move DRESS cassette while

elevator is running.\nIf the cassette is
Detected change status in DRESS
5949 Error ALM not moved, confirm operation of cassette
cassette 8 inch sensor.
sensor while elevator is running. And
adjust sensor if it is necessary.

Close the CST2 load port.\n

Detected CST2 LDPT open status while If the port is colsed correctly, confirm
5951 Error ALM
elevator is running the operation of the CST2 load port open
sensor.
5952 Error ALM Detected UV door OPEN. Close UV door then continue process.
Close UV maintenance door then continue

5953 Error ALM Detected UV maintenance door OPEN.
process.
Close the inspection door to continue

5954 Error ALM Inspection door is open.
the processing.
5955 Warning WRN Detected new cassette
5956 Warning WRN Can not detect cassette
102/162
Confidential
Event
Type
Found different size cassette on
5957 Warning WRN
Cassette1.

5958 Warning WRN
Cassette1.
5959 Warning WRN Detected sensor error on Cassette1.

5960 Warning WRN
Cassette2.

5961 Warning WRN
Cassette2.
5962 Warning WRN Detected sensor error on Cassette2.

5963 Warning WRN
Dress cassette.

5964 Warning WRN
Dress cassette.
Detected sensor error on Dress

5965 Warning WRN
cassette.
Check if there are double-stacked works

5966 Error ALM Found double frame in ONE SLOT.
in the cassette.
5967 Warning WRN Can not detect Cassette1
Do not move the cassette while in the

frame transfer.\n If the cassette is not
Detected change Sensor status in moved, check the condition of the
5968 Warning WRN
Cassette1. cassette sensor during the transfer
movement, and adjust the position as
necessary.See "Help" for details.
Do not move cassette while loader is

running. If the cassette is not moved,
Detected change Sensor status in
Cassette2.
while loader is running. And adjust

Dress Cassette.
Can not handle frame in cassette because

cassette1 is not properly set on
5971 Warning WRN Cassette1 is not properly set.
elevator.
Set cassette properly then START again.

elevator.
103/162
Confidential
Event
Type
Confirm the inspection door lock
status.\n
Detected illegal inspection door
5973 Error ALM If the door is properly closed, close
open
door then continue operation. If the
lock is damaged, replace the lock.
%3, %4 Slot sensing correction Ensure that correction limit in system

5974 Warning WRN
exceeded limit. data is properly set or frame itself.

sensor1.

Detected change status in Cassette1 is not moved, check the condition of the
5976 Error ALM
sensor2. cassette sensor while the elevator is in
motion, and adjust the position as

sensor3.

sensor1.

sensor2.

sensor3.


104/162
Confidential
Event
Type
frame transfer.If the cassette is not
moved, check the condition of the
cassette sensor during the transfer
5983 Warning WRN necessary.\n
Cassette1.
There is also a risk of Work falling if
continue the processing. Please confirm
the position of the Work on the pre-
alignment.\n

confirm operation of cassette sensor
5984 Error ALM sensor if it is necessary.\n
Cassette2.
alignment.

Dress Cassette.
alignment.
Operations of pullout and stowing cannot

be conducted as the cassette 1 is not
5986 Warning WRN Cassette1 is not properly set. properly set in the elevator.
Set a cassette properly and resume the
operation.See "Help" for details.

elevator.

5988 Error ALM

5989 Error ALM

5990 Error ALM
105/162
Confidential
Event
Type
sensor1.

sensor2.

sensor3.



frame transfer.If the cassette is not
moved, check the condition of the
cassette sensor during the transfer
5996 Error ALM necessary.\n
Cassette1.
alignment.\n

Cassette2.
alignment.

Dress Cassette.
alignment.
106/162
Confidential
Event
Type
Operations of pullout and stowing cannot
be conducted as the cassette 1 is not
5999 Warning WRN Cassette1 is not properly set. properly set in the elevator.
Set a cassette properly and resume the
operation.See "Help" for details.

elevator.
Can not load or unload work in cassette

because dress cassette is not properly
6001 Warning WRN Dress cassette is not properly set
set on elevator.
Please continue processing after

6002 Error ALM Found tilt frame.
confirming the frame in the cassette.
Check if the frame is not tilted in the

Only one of the two frame sensors cassette.
6003 Error ALM
has detected the presence of a work. If not, check the position and
sensitivity of the frame sensor.
Sensor of the elevator cover has

Detected response of elevator cover
6004 Error ALM reacted. Resume the operation after the
safety check.
Elevator cannot move as the elevator

6005 Warning WRN Close the cover and try again.
cover is open.
6006 Error ALM Cassette Clamp TimeOut. Cassette Clamp TimeOut.
6007 Error ALM Cassette UnClamp TimeOut. Cassette UnClamp TimeOut.
Cannot Cassette UnClamp because of The unclamped, please go the OHT

6008 Error ALM
interference in elevator. transport position.
6009 Error ALM IO state is abnormal. Please check the status of the OHT.
Please check with OHT, the connection

TR_REQ signal didn't turn ON within
6010 Error ALM state of the device. If there is no
specified time.(TP1=%3)
problem, please reset the OHT.

BUSY signal didn't turn ON within

CST wasn't detected/removed within

BUSY signal didn't turn OFF within

VALID signal didn't turn OFF within
107/162
Confidential
Event
Type
Please check state of the sensor in the
transport screen, or driving state of
6015 Warning WRN Tray lock TimeOut. the valve.
If you frequent, please go the
mechanical adjustment of the valve.

6016 Warning WRN Overhang prevention bar TimeOut. the valve.
You can not use the UV function

6017 Warning WRN because it uses a special two-stage Please check your settings.
cassette.
You can not use the dress cassette

6018 Warning WRN because it uses a special two-stage Please check your settings.
cassette.
Set of Special two-stage cassette

6019 Warning WRN Please check your settings.
and Cassette type is invalid.

6020 Warning WRN Safety cover TimeOut. the valve.
Please check the tray.

6021 Warning WRN Tray is not closed. If error occur repeatedly, mechanical

Detected change status in Cassette
sensor1.

running.\nIf the error occurs even if
6023 Error ALM the cassette is not moved, check the
sensor2.
operation of cassette sensor. Then
adjust sensor if necessary.

sensor3.

running.\nIf the error occurs even if
6025 Error ALM the cassette is not moved, check the
sensor4.
operation of cassette sensor. Then
adjust sensor if necessary.

sensor5.
108/162
Confidential
Event
Type
Check if the 12 inch Foup Lock/Unlock
Cannot detect lock/unlock status of
6027 Error ALM properly.\nIf it moves properly, confirm
12inch casette lock.
operation of Lock/Unlock sensor.

Detected sensor error while moving
lock/unlock 12 inch casette lock.

8inch casette lock.

lock/unlock 8 inch casette lock.
Check if the Foup door Lock/Unlock

FOUP.
Check if the Foup door Lock/Unlock

lock/unlock FOUP.
Check if the Foup move Front/Rear

Cannot detect front/rear status of
FOUP.
operation of Front/Rear sensor.
Check if the Foup move Front/Rear

front/rear FOUP.
operation of Front/Rear sensor.
Check if the sensing sensor move

Cannot detect front/rear status of Front/Rear properly.\nIf it moves
6035 Error ALM
sensing sensor. properly, confirm operation of
Front/Rear sensor.
Check if the sensing sensor move

Detected sensor error while moving Front/Rear properly.\nIf it moves
6036 Error ALM
front/rear sensing sensor. properly, confirm operation of
Front/Rear sensor.

6037 Warning WRN confirm operation of cassette sensor
Cassette.
Elevator FOUP vacuum pressure is

6038 Error ALM Check Foup door.
unstable.
Because it detects different from

6039 Warning WRN the Cst that has been set Cst, you Check Foup.
can not lock .
Because it detects different from

6040 Warning WRN the Cst that has been set Cst, you Check Foup.
can not lock .
FOUP remove form elevator remains Please close Foup door before Foup
6041 Warning WRN
open the FOUP door. remove.
Cannot move opener because of

6042 Warning WRN Check Cst height.
interference in Foup.
109/162
Confidential
Event
Type
Cannot move opener because of
6043 Warning WRN Check Foup opener.
interference in opener.
Cannot move sensing sensor because

6044 Warning WRN Check Elevator height.
of interference in Cst.

of interference in Foup door.

of interference in equipment.
Please continue processing after

6047 Error ALM Found double wafer in ONE SLOT.
confirming the wafer in the FOUP.
Cannot detect wafer correctly, found Please continue processing after

6048 Error ALM
tilt wafer(%4). confirming the wafer in the FOUP.
Check if the wafer is not tilted in the

FOUP.
Only one side of wafer sensor
6049 Error ALM If the error occurs even if it is not,
detected the wafer.
check the sensitivity of the wafer
sensor.
Move the ARM1 hand to the position where

Cannot move elevator because of
6050 Warning WRN it does not hit the elevator. Then
interference in Hand Y.
6051 Warning WRN Failed to detect FOUP. Check FOUP.
6052 Warning WRN Detected other CST or FOUP. Check FOUP.
6053 Warning WRN FOUP is not Locked. Check FOUP.
6054 Warning WRN Failed to detect FOUP door. Check FOUP door.
6055 Warning WRN Failed to clamp FOUP door. Check FOUP door.
6056 Warning WRN Failed to release FOUP door. Check FOUP door.
Cannot move Elevator because of

6057 Warning WRN Check Hand Y position.
interference in Hand .
Cannot move Elevator because of

6058 Warning WRN Check sensing sensor position.
interference in Sensing Sensor.
Cannot lock FOUP Door because of

6059 Warning WRN Please move Foup Door Front
interference in equipment.
Cannot move Foup door because of

interference in elevator.
If wafer is protruding, set it back into

Wafer protruding sensor ON is
6061 Warning WRN the FOUP. If no wafer is protruding ,
detected.
please check the signal of the sensor.
110/162
Confidential
Event
Type
If the back-and-forth movement of the
cassette try cannot be performed on the
maintenance screen, please consider the
Timeout was detected while moving exchange of the cylinder.If the sensor
6062 Error ALM
the cassette tray back and forth. of the cassette tray position cannot be
turned ON/OFF despite the sensor
position was adjusted properly, please
consider the exchanges of the sensors.
If the rotation of the cassette try

cannot be performed on the maintenance
screen, please consider the exchange of
Timeout was detected while rotating the cylinder.If the sensor of the
6063 Error ALM
the cassette tray. cassette tray position cannot be turned
ON/OFF despite the sensor position was
adjusted properly, please consider the
exchanges of the sensors.
Check whether the cassette tray moves

Abnormality was detected in the
back and forth properly.If there is no
6064 Error ALM sensor while moving the cassette
problem with the movement, confirm the
tray.
sensor is working properly or not.
Check whether the cassette tray rotates

Abnormality was detected in the
properly. If there is no problem with
6065 Error ALM sensor while rotating the cassette
the rotation, confirm the sensor is
tray.
working properly or not.
Check whether the cassette is set

properly. If there is no problem with
6066 Warning WRN Cassette is not set properly.
the cassette setting, confirm the sensor
is working properly or not.
Can't move the elevator because the Please move the cassette tray to the
6067 Warning WRN CST-tray is not in the docked docked position, and then move the
position. elevator.
Can't move the CST-tray because it

6068 Warning WRN isn't at the angle of docked
position.
Can't rotate the CST-tray because it

6069 Warning WRN
isn't in the position of loadport.
Can't move the CST-tray because the

6070 Warning WRN
ELV isn't at the height for OHT.
6071 Warning WRN The cassette tray is locked.

Detected Spinner rotating axis limit initialization.\nIf error occur
6101 Warning WRN
while running. repeatedly, mechanical adjustment is
required.

Detected servo alarm on spinner initialization.\nIf error occur
6102 Error ALM
rotating axis. repeatedly, mechanical adjustment is
required.
EA/EB alarm have been detected.

Detected driver alarm while ST is Failure of the encoder adjustment of the
6103 Error ALM
moving. spinner axis motor or the noise may be
the cause.
111/162
Confidential
Event
Type
Spinner rotating axis is out of initialization.\nIf error occur
6104 Error ALM
control. repeatedly, mechanical adjustment is
required.
Detected limit while clean nozzle is Press [System Initialize] for all axes
6105 Error ALM
moving. initialization.

Detected servo alarm on clean initialization.\nIf error occur
6106 Error ALM
nozzle. repeatedly, mechanical adjustment is
required.
EA/EB alarm have been detected.

Detected driver alarm while clean Failure of the encoder adjustment of the
6107 Error ALM
nozzle is in process. washing nozzle motor or the noise may be
the cause.
Press [Washing Nozzle Initialize] for

Washing Nozzle axes initialization.\nIf
6108 Error ALM clean nozzle axis is out of control.
error occur repeatedly, mechanical
If the vertical movement of the spinner

table cannot be controlled through the
maintenance screen, consider the
cylinder replacement.
Cannot conduct the vertical movement
6109 Error ALM If the cylinder sensor of the spinner
of the spinner table.
table cannot be turned ON/OFF despite
details.

Detected driver alarm while initialization.\nIf error occur
6110 Fatal ALM
initializing spinner rotating axis. repeatedly, mechanical adjustment is
required.
Check if the spinner moves UP/DOWN

up/down spinner table.
operation of UP/DOWN sensor.

6112 Fatal ALM
on spinner axis servo. repeatedly, mechanical adjustment is
required.
If the movement of the dry nozzle in the

spinner unit cannot be controlled
through the maintenance screen, check up
Dry nozzle in the spinner unit is the dry nozzle.
6113 Error ALM
out of control. If the dry nozzle sensor cannot be
position adjustment, consider the sensor
replacement.

6114 Fatal ALM
off spinner axis servo. repeatedly, mechanical adjustment is
required.
112/162
Confidential
Event
Type
Check if the drying nozzle moves
CENTER/REAR properly.\nIf it moves
6115 Error ALM Detected time out on dry nozzle.
properly, confirm operation of
CENTER/REAR sensor.
CENTER/REAR sensor of drying nozzle are

Detected sensor error while dry both ON. Confirm the actual nozzle
6116 Error ALM
nozzle is running. position and CENTER/REAR sensor status
and adjust if it is necessary.
Cannot turn servo OFF while spinner Wrong operation or invalid parameter is
6117 Error ALM
is rotating. set.
Spinner rotating axis is not Press [System Initialize] for all axes
6118 Warning WRN
initialized. initialization.
Cannot rotate spinner at over Ensure that speed data of each axis are
6119 Error ALM
maximum rotation speed. properly set.
Cannot rotate spinner because of Move Z axis of ARM1 to safety position

6120 Warning WRN
interference in ARM1. then continue process.
Spinner washing nozzle has not been Touch [System initialize] to initialize
6121 Warning WRN
initialized. all axes.
Cannot move clean nozzle over Confirm that if the machine size data is
6122 Warning WRN
software limit. properly set.
Cannot move clean nozzle because of Move down the spinner table then
6123 Warning WRN
interference in spinner. continue process.
Move the drying nozzle to the storing

Washing nozzle cannot be moved as
position on the IO operation screen for
6124 Warning WRN the drying nozzle has not yet
the transfer unit. Then resume the
retracted.
operation.
Cannot move up ST while clean nozzle Eject cleaning nozzle then continue
6125 Warning WRN
is on ST. process.
Cannot move up ST while dry nozzle Eject drying nozzle then continue
6126 Warning WRN
is on ST. process.
Cannot move clean nozzle at over Ensure that speed data of each axis are
6127 Error ALM
maximum speed. properly set.
Cannot move dry nozzle while ST is Move down the spinner table then
6128 Warning WRN
UP. continue process.
Presence of a work on the spinner

6129 Warning WRN Place a work on the spinner table.
table cannot be detected.
Processing cannot be continued as Remove the work from the spinner table
6130 Warning WRN
the work is on the spinner table. and continue the operation.
Cannot start cleaning since spinner Move down the spinner table then
6131 Warning WRN
table is UP. continue process.
Dry nozzle cannot be moved as the

Move the washing nozzle to the proper
6132 Warning WRN washing nozzle has not yet moved
position, and proceed the operation.
away.
Spinner rotating axis is not on load Rotate spinner table to frame load angle
6133 Warning WRN
position. then continue process.
113/162
Confidential
Event
Type
Cannot rotate ST because of Move Z axis of ARM2 to safety position
6134 Warning WRN
interference in ARM2. then continue process.
Confirm that if the machine size data is

6135 Warning WRN Spinner axis exceeds software limit.
properly set.

Detected driver alarm while initialization.\nIf error occur
6136 Fatal ALM
initializing clean nozzle. repeatedly, mechanical adjustment is
required.

6137 Fatal ALM
on clean nozzle servo repeatedly, mechanical adjustment is
required.

6138 Fatal ALM
off clean nozzle servo repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while clean Wrong operation or invalid parameter is
6139 Error ALM
nozzle is running. set.
Detected OFF signal of down sensor If error occures repeatedly, replacement

6140 Error ALM
at spinner while cleaning or adjustment of hardware is required.
Place the work again if it is not at the

Spinner work vacuum pressure is center of the spinner table.
6141 Error ALM
unstable. Also, adjust the vacuum pressure if it
is low.
The work position information in spinner

table and result of spinner work vacuum
Cannot detect work on spinner table are mismatch. Confirm that if the work
6142 Warning WRN
contrary to position information. is properly vacuumed. If the work is
properly vacuumed, confirm the operation
of work vacuum sensor.
6143 Guide CAL Detected new work on spinner table. Continue process.
Cannot work vacuum OFF on spinner

6144 Error ALM Adjust spinner vacuum sensor.
table.
Move ARM1 Z axis safety position or

Cannot move up spinner because of
6145 Warning WRN continue process after spinner rotation
interfere in ARM1.
is stopped.
Move ARM2 Z axis safety position or

Cannot move up spinner because of
6146 Warning WRN continue process after spinner rotation
interfere in ARM2.
is stopped.
Pipe of high pressure pump is

6147 Error ALM Replace pipe of high pressure pump.
stopped up.
Check the indication of the ionizer and

Error signal has been detected from
6148 Error ALM solve the cause of the error.See "Help"
the ionizer of the spinner unit.
for details.
6149 Fatal ALM Detected IO driver error on spinner. Restart machine.

on spinner.
114/162
Confidential
Event
Type
Check if the air tubes are connected
6151 Warning WRN Detected spinner N2 pressure down.
properly and pressure from factory.
6152 Warning WRN Spinner N2 pressure is unstable. Adjust N2 pressure and try again.
Detected air pressure down on Check if the air tubes are connected
6153 Error ALM
spinner cleaning. properly and pressure from factory.
Detected water pressure down on Check if the water is provided properly

6154 Error ALM
spinner cleaning. to machine.
Insufficient flow rate for the Adjust the flow rate valve for the
6155 Error ALM
spinner washing water. washing water to increase the rate.
Detected invalid flow rate of rinse Check if the water is provided properly
6156 Error ALM
water. to machine.
Detected invalid flow rate of Check if the water is provided properly

6157 Error ALM
bubling water. to machine.
Adjust cleaning water flow rate then try

6158 Warning WRN Rinse water flow rate is unstable.
again.
High pressure cleaning water flow Adjust cleaning water flow rate then try
6159 Warning WRN
rate is unstable. again.
Low pressure cleaning water flow Adjust cleaning water flow rate then try
6160 Warning WRN
rate is unstable. again.
Adjust cleaning water flow rate then try

6161 Warning WRN Bubling water flow rate is unstable.
again.
Water cannot be supplied to the

Descend the table and supply the DI
6162 Warning WRN spinner unit as the ST has
water again.
ascended.
Can not up spinner table while DIW Stop discharging DIW then up spinner
6163 Warning WRN
is discharged. table again.
Detected spinner rotating axis If work has been cutting, restart

6164 Error ALM
initializing timeout. machine after cutting is completed.
6165 Warning WRN Work vacuum error at Spinner area. Set work on spinner table.
Place the work again if it is not at the

Presence of a work on the spinner center of the spinner table.
6166 Warning WRN
table cannot be detected. Also, adjust the vacuum pressure if it
is low.
Check if the work is placed at the

Spinner work vacuum pressure is center of the spinner table. Check and
6167 Error ALM
unstable. adjust the vacuum pressure as
Check if the work is placed at the

Spinner work vacuum pressure is center of the spinner table. Check and
6168 Error ALM
unstable. adjust the vacuum pressure as

Cannot detect up/down status of
spinner.
115/162
Confidential
Event
Type
up/down spinner table.
Press recovery button for axes

Detected driver alarm while ST is initialization.\nIf error occur
6171 Error ALM
moving. repeatedly, mechanical adjustment is
required.
Press [Washing nozzle initialize] for

Detected servo alarm on spinner washing nozzle initialization.\nIf error
6172 Error ALM
rotating axis. occur repeatedly, mechanical adjustment
is required.

transport axes initialization.\nIf error
6173 Error ALM Spinner axis is out of control.
occur repeatedly, mechanical adjustment
is required.

Detected servo alarm on clean initialization.\nIf error occur
6174 Error ALM
nozzle. repeatedly, mechanical adjustment is
required.

Detected driver alarm while clean initialization.\nIf error occur
6175 Error ALM
nozzle is in process. repeatedly, mechanical adjustment is
required.
Press [Retry] or [Washing Nozzle

Initialize] for Washing Nozzle axes
clean nozzle axis is out of control
6176 Error ALM initialization.\nIf error occur
during spinner cleaning.
required.
If the movement of the dry nozzle in the

spinner unit cannot be controlled
through the maintenance screen, check up
Dry nozzle in the spinner unit is the dry nozzle.
6177 Error ALM
out of control. If the dry nozzle sensor cannot be
replacement.
Check if the drying nozzle moves

CENTER/REAR properly.\nIf it moves
6178 Error ALM Detected time out on dry nozzle.
CENTER/REAR sensor.
CENTER/REAR sensor of drying nozzle are

Detected sensor error while dry both ON. Confirm the actual nozzle
6179 Error ALM
nozzle is running. position and CENTER/REAR sensor status
Cannot work vacuum OFF on spinner

6180 Error ALM Adjust spinner vacuum sensor.
table.

ionizer in spinner unit.

Unbalanced ion of ionizer in spinner
unit.
116/162
Confidential
Event
Type
Confirm the bubbling water and N2 supply
Spinner bubbling water flow rate is amount.
6183 Error ALM
out of normal range If no problem is found in supply, adjust
discharge amount.
Water pressure sensor for the bubbling

water indicates an error. Adjust the
supply of water of the bubbling washing.
An error has been detected in the
When no problem is found in the supply
6184 Error ALM water pressure sensor for the
amount, then adjust the amount of the
spinner bubbling washing.
discharge. Longer time of the "ID: 23095
Spinner bubbling wash stabilizing time"
may prevent the error from happening.
Check if the N2 is properly supplied to

Insufficient flow rate of N2 for the the machine and adjust the flow rate
6185 Error ALM
spinner bubbling water. sensor to supply the N2 air as
necessary.
Confirm the rinse water supply amount.

Spinner rinse water flow rate is out
6186 Error ALM If no problem is found in supply, adjust
of normal range
discharge amount.
Check the high-pressure pump. If no

Insufficient pressure of the high-
6187 Error ALM problem is found, adjust the pressure
pressure pump.
sensor to flow the air.
Remove the work on the spinner table and

6188 Warning WRN Work exists on the spinner table.
continue.
The frame of arm1 cannot execute Remove the frame on the spinner table
6189 Warning WRN
Spinner ionizer. and continue.
Please confirm the set value of the

spinner High pressure washing in the
utility screen.
limit check error on the high-
6190 Error ALM Or confirm the High pressure pump
pressure pump pressure
pressure.
If no problem is found in supply, adjust
discharge amount.

ST wafer vac. Sensor is sitll confirming the vacuum pressure and
6191 Error ALM
remained ON at ST to ARM1. whether the sensor is ON/OFF on the IO
operation screen.

ST wafer vac. Sensor is sitll confirming the vacuum pressure and
6192 Error ALM
remained ON at ST to ARM2. whether the sensor is ON/OFF on the IO
operation screen.
Detected spinner washing nozzle If work has been cutting, restart

6193 Error ALM
moving timeout. machine after cutting is completed.
The unit may be faulty.

Please reconsider the setting so that
An abnormality occurred in the
6194 Error ALM spinner drying can be continued with
spinner hot air drying unit.
room temperature air, or replace the
unit.
117/162
Confidential
Event
Type
If it recurs after retrying, the unit
may be faulty.
An abnormality occurred in the Please reconsider the setting so that
6195 Error ALM
spinner hot air drying unit. spinner drying can be continued with
room temperature air, or replace the
unit.
Please restart after adjusting work so

Can not clean the back side of the that the ARM 2 holds the work just above
6196 Error ALM
tape. the spinner table and the cleaning
nozzle is located at the work center.

6197 Error ALM solve the cause of the error.See "Help"
the ionizer of the spinner unit.
for details.

ionizer in spinner unit.

Unbalanced ion of ionizer in spinner
unit.
Close UV door or adjust position of door

6301 Warning WRN UV door is OPEN.
sensor.
Open UV door or adjust position of door

6302 Warning WRN UV door is CLOSE.
sensor.
OPEN/CLOSE sensor of UV door are both

Detected sensor failure while ON. Confirm the actual door status and
6303 Error ALM
controling UV door. OPEN/CLOSE sensor status and adjust if
it is necessary.
If any foreign objects are found on the

way of the opening/closing of the door,
remove them.
If not, check the following as a cause
of the problem.\nIf the UV door cannot
Opening/closing of the UV unit door
6304 Error ALM open/close through the maintenance
could not be detected.
screen, replace the door cylinder.
Adjust the sensor position for the UV
door, and if it still cannot be turned
ON/OFF, replace the sensor. See "Help"
for details.
6305 Warning WRN Tray is not fixed in UV unit. Set tray that match to work size.
Cannot irradiate UV while Close UV maintenance door then continue

6306 Warning WRN
maintenance door is OPEN. process.
Cannot irradiate UV before lamp is

6307 Warning WRN Fix the UV lamp then continue.
fixed.
Check if work is exist in UV unit or

6308 Warning WRN Cannot detect work in UV unit.
operation of work sensor.
Eject work from UV unit then continue

6309 Warning WRN Found work in UV unit.
process.
118/162
Confidential
Event
Type
Replace the UV lamp, for the irradiation
time has exceeded the upper limit (ID:
6310 Error ALM Time for replacement for UV lamp. 22502). Touch the help button to check
the replacement procedure of the UV
lamp.
Total UV irraditation counts over

6311 Error ALM Replace UV lamp.
maximum limit.
The work position information in UV unit

and result of work sensor are mismatch.
Cannot detect work in UV unit
6312 Warning WRN Confirm that if the work is properly
contrary to position info.
set. If the work is properly set,
confirm the operation of work sensor.
6313 Guide CAL Detected new work in UV unit. Continue process.
6314 Warning WRN Wrong tray size is found in UV tray. Set tray that match to work size.
Confirm brightness of UV lamp and

6315 Error ALM UV lamp brightness error.
operation of brightness sensor.
6316 Error ALM UV unit N2 flow rate error. Confirm N2 valve status for UV unit.
Coolant fan in UV unit is not Confirm if the fan is rotating and

6317 Error ALM
running. wiring to fan rotating sensor.
Work sensor in UV unit cannot sense Confirm UV unit position and eject work
6318 Error ALM
work. then continue process.
Although unloaded work from UV unit,

Work sensor in UV unit keeps status work sensor in the unit is still ON.
6319 Error ALM
ON. Confirm the operation of work sensor in
the unit.
The light amount fell below (ID:22503).

Replacement is necessary for the UV lamp
Light amount of the UV lamp %3 has
6320 Error ALM indicated on the error screen. Touch the
decreased.
help button to check the replacement
procedure of the UV lamp.
UV irradiation time is not

6321 Warning WRN Set UV irradiation time of recipe data.
specified.
6322 Warning WRN Cannot calculate irradiation time. Check the parameter for luminometer.
Confirm the parameter of brightness of

6323 Warning WRN Cannot calculate irradiation time.
recipe data.
Confirm the operation of UV unit. If the

UV lamp quantity %3 exceeded the
6324 Error ALM error occur repeatedly, UV unit may be
upper threshold
in failure.
The illumination has fallen below the

lower limit (ID:22635). Replacement is
Illumination of the UV lamp has necessary for the UV lamp indicated on
6325 Error ALM
decreased. the error screen. Touch the help button
to check the replacement procedure of
the UV lamp.
119/162
Confidential
Event
Type
Confirm the operation of UV unit. If the
UV lamp intensity %3 exceeded the
6326 Error ALM error occur repeatedly, UV unit may be
upper threshold
in failure.
6327 Fatal ALM Detected IO driver error on UV. Restart machine.

on UV.
6329 Error ALM Detected N2 flow sensor error on UV. Please check for the error condition.
Brightness of UV%3 is lower than

6330 Error ALM Replace UV lamp.
threshold.
Cannot deal with the Cassette-UV Unload or reject the frame then try
6331 Warning WRN
during the frame processing. again.
Command cannot be executed during Please execute the process again after
6332 Warning WRN
the Cassette-UV processing. the "Lot cancel".
There is no lot for the Cassette-UV Set cassette on the elevator or frame in
6333 Warning WRN
to start. the inspection tray.
Set the parameters of recipe data to

6334 Warning WRN UV execution is unavailable.
enable UV execution.
UV irradiation time is not

6335 Warning WRN Set UV irradiation time of system data.
specified.
Confirm the parameter of brightness of

6336 Warning WRN Cannot calculate irradiation time.
system data.
If this error occurs repeatedly, please

Failed to pull out the work from UV
6337 Error ALM adjust the elevator or the finger
unit.
properly.
Please remove the work in the UV unit

Failed to pull out the work from UV
6338 Warning WRN manually.After removing the work execute
unit.
[reject UV] again.
Please assume the frame of the UV slot

reject after letting system
6339 Warning WRN System initialize is not completed. initialization complete. Or give me it
after taking a frame out of a UV slot by
manual operation.

6401 Warning WRN ARM1 X axis is not initialized.
initialization.

not, touch [Transport initialize] to
6402 Error ALM ARM1 X axis is out of control. initialize axes.
the error persists.
Detected ARM1 X axis limit while Press [System Initialize] for all axes
6403 Error ALM
ARM1 X axis position exceeds Confirm that if the machine size data is
6404 Warning WRN
120/162
Confidential
Event
Type
Detected driver alarm while ARM1 X initialization.\nIf error occur
6405 Error ALM
axis is in process. repeatedly, mechanical adjustment is
required.

6406 Error ALM Detected servo alarm on ARM1 X axis.
required.
Detected over speed error on ARM1 X Ensure that speed data of each axis are
6407 Error ALM
axis. properly set.
Cannot move ARM1 X because of Move ARM2 Y axis safety position, then
6408 Warning WRN
interference in ARM2. continue process.
Cannot move ARM1 X because of Open mist shutter, then continue

6409 Warning WRN
interfere in closed mist shutter. process.
Perform initialization of axes.

\n[Transport initialize]: Initialization
6410 Warning WRN ARM1 Y axis is not initialized. of the axis of the transfer unit.
\n[System initialization]:
Initialization for all axes.

6411 Error ALM ARM1 Y axis is out of control.
is required.
Detected ARM1 Y axis limit while Press [System Initialize] for all axes
6412 Error ALM
ARM1 Y axis position exceeds Confirm that if the machine size data is
6413 Warning WRN

Detected driver alarm while ARM1 Y transport axes initialization.\nIf error
6414 Error ALM
axis is in process. occur repeatedly, mechanical adjustment
is required. See "Help" for details.

6415 Error ALM Detected servo alarm on ARM1 Y axis.
is required.
Detected over speed error on ARM1 Y Ensure that speed data of each axis are
6416 Error ALM
axis. properly set.
Cannot move ARM1 Y because of Move ARM1 Z axis safety position, then
6417 Warning WRN

6418 Warning WRN ARM1 Z axis is not initialized. of the axis of the transfer unit.
\n[System initialization]:
Initialization for all axes.

6419 Error ALM ARM1 Z axis is out of control. initialize axes.
the error persists.
121/162
Confidential
Event
Type
Detected ARM1 Z axis limit while Press [System Initialize] for all axes
6420 Error ALM
ARM1 Z axis position exceeds Confirm that if the machine size data is
6421 Warning WRN

Detected driver alarm while ARM1 Z initialization.\nIf error occur
6422 Error ALM
required.

6423 Error ALM Detected servo alarm on ARM1 Z axis.
required.
Detected over speed error on ARM1 Z Ensure that speed data of each axis are
6424 Error ALM
axis. properly set.
ARM1 Z-axis cannot move as it Move ARM1 Y axis safety position, then
6425 Warning WRN
interferes with the ARM2. continue process.
Cannot move ARM1 Z because finger Move ARM1 Y axis safety position, then
6426 Warning WRN
interferes in ARM2. continue process.
UP/DOWN sensor of finger are both ON.

Detected sensor failure on finger Confirm the actual finger status and
6427 Error ALM
while turning up/down. UP/DOWN sensor status and adjust if it
is necessary.
It may be the malfunction of the finger

unit. Command the extension/retraction
of the finger on the maintenance screen.
If no response is observed, mechanical
adjustment will be necessary. When the
movement of the finger is normal, it may
ARM1 finger cannot be
6428 Error ALM be the sensor failure. Turn ON/OFF the
extended/retracted.
sensor to check and adjust the position
as necessary. Then try to extend/retract
the finger again. If the sensor cannot
respond to the movement, replace with
new one. See "Help" for
details.
Cannot move ARM1 out of movable Press [System Initialize] for all axes
6429 Error ALM
range. initialization.
6430 Error ALM
6431 Warning WRN ARM1 is in cut area.
122/162
Confidential
Event
Type
Sensors for the extension/retraction of
the finger are both OFF/ON. Command the
extension/retraction of the finger on
the maintenance screen. If no response
is observed, mechanical adjustment will
Sensor error has been detected while be necessary. When the movement of the
6432 Error ALM
extending/retracting the finger. finger is normal, it may be the sensor
failure. Turn ON/OFF the sensor to check
and adjust the position as necessary.
Then try to extend/retract the finger
again. If the sensor cannot respond to
the movement, replace with new one.
Finger cannot be extended for it Move the Y-axis of ARM1 to the proper
6433 Warning WRN
interfere with the elevator. position to proceed the operation.
Cannot down finger because of Move ARM1 X axis safety position, then
6434 Warning WRN
interference in machine. continue process.
Cannot move ARM1 Y because finger Adjust elevator height where finger can
6435 Warning WRN
interferes in elevator. handle frame properly.
Cannot down finger or move ARM1. Move ARM1 Z axis safety position, then
6436 Warning WRN
They interfere in ARM2. continue process.
Cannot down finger. It interferes in Move ARM1 Y axis safety position, then
6437 Warning WRN
Pre-alignment work. continue process.
Finger could not handle work

6438 Error ALM Restart process again.
correctly.

6439 Fatal ALM
axis was initializing. repeatedly, mechanical adjustment is
required.

6440 Fatal ALM
on ARM1 X axis servo. repeatedly, mechanical adjustment is
required.

6441 Fatal ALM
off ARM1 X axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ARM1 X Wrong operation or invalid parameter is
6442 Error ALM
axis is running. set.
Cannot move ARM1 X. It interferes in Move ARM1 Z axis safety position, then
6443 Warning WRN
Pre-alignment guide. continue process.
Cannot move ARM1 X axis because of Move ARM1 Y axis safety position, then
6444 Warning WRN
Cannot move ARM1 X axis because of Move ARM1 Z axis safety position, then
6445 Warning WRN

Detected driver alarm while ARM1 Y initialization.\nIf error occur
6446 Fatal ALM
required.
123/162
Confidential
Event
Type
6447 Fatal ALM
on ARM1 Y axis servo. repeatedly, mechanical adjustment is
required.

6448 Fatal ALM
off ARM1 Y axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ARM1 Y Wrong operation or invalid parameter is
6449 Error ALM
Cannot move ARM1 Y axis because of Move ARM1 X axis safety position, then
6450 Warning WRN

Detected driver alarm while ARM1 Z initialization.\nIf error occur
6451 Fatal ALM
required.

6452 Fatal ALM
on ARM1 Z axis servo. repeatedly, mechanical adjustment is
required.

6453 Fatal ALM
off ARM1 Z axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ARM1 Z Wrong operation or invalid parameter is
6454 Error ALM
Cannot move ARM1 Z axis since Wait for spinner table rotating stop,
6455 Warning WRN
spinner is rotating. then continue process.
6456 Fatal ALM Detected driver error on ARM1. Restart machine.
Detected invalid driver parameter on

ARM1.
6458 Warning WRN Work vacuum error at ARM1. Confirm ARM1 work vacuum pressure.
Processing cannot be continued as Remove the work from the arm and
6459 Warning WRN
the work is in the ARM1. continue the operation.
The work position information on ARM1

and result of work vacuum sensor are
Cannot detect work on ARM1 contrary mismatch. Confirm that if the work is
6460 Warning WRN
to position information. properly svacuumed. If the work is
of vacuum sensor.
6461 Guide CAL Detected new work on ARM1. Continue process.
124/162
Confidential
Event
Type
ARM1 vacuum pressure has exceeded the
tolerance (ID: 22636/ID: 22624). Check
if the vacuum position of the ARM1 is
6462 Error ALM ARM1 vacuum pressure is unstable.
correct. If the position is correct,
adjust the vacuum sensor. See "Help" for
details.
6463 Error ALM Cannot work vacuum OFF on ARM1. Adjust vacuum pressure.
Received an error signal from bar type

An error occurred in ARM1 bar type
6464 Error ALM ionizer. Confirm the status of the
ionizer.
ionizer.
Amount of ions from ARM1 bar type

6465 Error ALM Clean discharge needles of the ionizer.
ionizer decreased.
Detected invalid voltage on ARM1

6466 Error ALM Confirm ionizer status.
ionizer.
Confirm the status in the machine, and

Amount of ions from ARM1 bar type is
6467 Error ALM enter the [IO operation] screen,
abnormal.
neutralize till the warning dismissed.
ARM1 Y-axis cannot move as ARM1 Z- Move ARM1 Z axis safety position, then
6468 Warning WRN
axis interferes with the machine. continue process.
Cannot move ARM1 X because finger

6469 Warning WRN Move finger UP, then continue process.
interferes in machine.
Cannot move ARM1 Z because finger Move ARM1 Y axis safety position, then
6470 Warning WRN
interferes in machine. continue process.
Cannot move ARM1 Z because of Move ARM1 X axis safety position, then
6471 Warning WRN
Detected work on both ARM1 and cut Eject one frame or set both frame in
6472 Warning WRN
table. proper status then continue process.
Retrieve the work which failed the

positioning to the cassette, and start
Failed to position work on pre- over the transfer operation. If the
6473 Error ALM
alignment. error persists, adjust the sensor for
the work positioning in the pre-
alignment unit.See "Help" for details.
Detected over torque limit error on Finger and Machine may interfere in
6474 Error ALM
ARM1 Y axis. Arm1, mechanical adjustment is required.
Cannot move ARM1 X axis because of

6475 Warning WRN
interference in Spindle
Cannot move ARM1 Y axis because of

6476 Warning WRN
Cannot move ARM1 Z axis because of

6477 Warning WRN

6478 Warning WRN
interference in Elevator

6479 Warning WRN
interference in PA work
125/162
Confidential
Event
Type
As a frame is out from the cassette,
6480 Warning WRN
finger cannot be extended.
Cannot move ARM1 Z axis since finger

6481 Warning WRN
interferes in chamber
Found works on both ARM1 and spinner

6482 Warning WRN
table.

6483 Warning WRN
interference in chamber

6484 Warning WRN

6485 Warning WRN
Check the work vacuum position of the

ARM1.
[Pre-alignment reject]: Work of the pre-
alignment unit is treated as being
rejected. Remove the work on the pre-
6486 Warning WRN Work cannot be detected in the ARM1.
alignment unit and touch the button.
[Retry]: Transfer movement is retried.
[Unload & abort]: Work on the pre-
alignment unit is unloaded and treated
as being aborted.

ARM1.
\n[Spinner reject]: Work of the spinner
6487 Warning WRN Work cannot be detected in the ARM1.
unit is treated as being rejected.
Remove the work on the spinner unit and
touch the button.
Check if the finger is hitting inside

the machine. Mechanical adjustment is
necessary if the error persists.
Detected over torque limit error on [Transport initialize]: Initialization
6488 Error ALM
ARM1 Y axis. of the axis of the transfer unit.
[Retry]: Work loading is retried. [Work
abort]: Remove the loading work and
touch the button to abort the operation.
The finger (ARM1 Y axis) may be

interfering with the machine or the
frame while moving. Restart the finger
Torque limit over error has detected
6489 Error ALM to check if it is not interfering with
on the ARM1 Y-axis.
anything. If the error persists,
transfer and mechanical adjustments will
be necessary.
Eject work from ARM1, then continue

6490 Warning WRN Work is found on ARM1.
process.

process.
126/162
Confidential
Event
Type
Confirm that if ARM1 vacuumes properly
position on frame. If it vacuumes
properly positon, check the operation of
vacuum sensor.

process.
Confirm that if ARM1 vacuumes properly

position on frame. If it vacuumes
properly positon, check the operation of
vacuum sensor.
Check the work is properly placed on the

Failed to position work on pre- pre-alignment unit. If the work and the
6497 Error ALM
alignment. sensor are placed incorrectly, adjust
the correction value.
ARM1 X exists at an abnormal Press [System Initialize] for all axes

6498 Error ALM
position. initialization.
ARM1 Y exists at an abnormal Press [System Initialize] for all axes

6499 Error ALM
Perform initialization of axis and

Initialization is necessary as the
6500 Error ALM position of the ARM1 Z-axis is
of the axis of the transfer unit.
incorrect.
\n[System initialize]: Initialization
for all axes.
6501 Warning WRN Finger is not projected.
6502 Warning WRN Finger is not retracted.
Found an unknown frame at the

6503 Error ALM Confirm the unloading slot.
unloading slot.
6504 Warning WRN Arm1 inch size is incorrect Check arm1 inch adjustment
As the ARM is in motion, the

6505 Warning WRN transfer operation cannot be Execute again after stopping arm.
performed.
The finger cannot be retracted

6506 Warning WRN (rotated) as it may be holding the Open finger, then cotinue process.
work.
Check if the finger is hitting inside

the machine. Mechanical adjustment is
necessary if the error persists.
Detected over torque limit error on [Transport initialize]: Initialization
6507 Warning WRN
ARM1 Y axis. of the axis of the transfer unit.
[Retry]: Work loading is retried. [Work
abort]: Remove the loading work and
touch the button to abort the operation.
127/162
Confidential
Event
Type
The finger (ARM1 Y-axis) may be
interfering with the machine or the
frame while moving. Restart the finger
Detected over torque limit error on
6508 Warning WRN to check if it is not interfering with
ARM1 Y axis.
anything. If the error persists,
transfer and mechanical adjustments will
be necessary.
Close operation of mechanical arm If error occur repeatedly, mechanical

6509 Error ALM
clamper has timed out. adjustment is required.
Open operation of mechanical arm If error occur repeatedly, mechanical

6510 Error ALM
Received an error signal from spot type

An error occurred in ARM1 spot type
6511 Error ALM ionizer. Confirm the status of the
ionizer.
ionizer.
Confirm the status of the ionizer

controller.Clean discharge needle of the
Amount of ions from ARM1 spot type
6512 Error ALM ionizer,or enter the [IO operation]
ionizer is not stable.
screen, neutralize till the warning
dismissed.
OPEN/CLOSE sensor of ARM1 mecha- Please remove the frame carefully by I/O
6513 Error ALM
clamper is abnormal. opereation.
If the finger's extension/stowing

movement cannot be controlled through
the maintenance screen, replace the
Extension and stowing of the finger cylinder.
6514 Error ALM
could not be detected. Adjust the sensor position for the
finger door, and if it still cannot be
turned ON/OFF, replace the sensor. See
"Help" for details.
Close operation of mechanical arm1 If error occur repeatedly, mechanical

6515 Error ALM
wafer clamper has timed out. adjustment is required.
Open operation of mechanical arm1 If error occur repeatedly, mechanical

6516 Error ALM

ARM1 Bernoulli vacuum pressure is
unstable.
sensor.
If the wafer is not at the correct

vacuum position, readjust the ARM1
transfer on the wafer loading adjustment
Vacuum error of ARM1 Bernoulli
6518 Error ALM screen. If the wafer is on the vacuum
chuck.
position, check and adjust the ARM1
vacuum sensor and vacuum pressure on the
IO operation screen.

Failed to turn OFF the ARM1 confirming the vacuum pressure and
6519 Error ALM
Bernoulli chuck vacuum. whether the sensor is ON/OFF on the IO
operation screen.

Failed to turn OFF the vacuum of confirming the vacuum pressure and
6520 Error ALM
ARM1. whether the sensor is ON/OFF on the IO
operation screen.
128/162
Confidential
Event
Type
If the wafer is not at the right
position for the vacuum, readjust the
ARM1 transfer on the wafer loading
Vacuum error of ARM1 Bernoulli adjustment screen. If the wafer is on
6521 Warning WRN
chuck. the right position, adjust it after
confirming the vacuum pressure and
sensor of ARM1 on the IO operation
screen.
Work is detected from both the ARM1

6522 Warning WRN -
and the cutting table.
Cannot perform by interference of

6523 Warning WRN -
fall protection hook and CT.

6524 Warning WRN
fall protection hook and ST.
ARM1 cannot move as it interferes

6525 Warning WRN -
with the edge sensor.

6526 Warning WRN -
fall protection hook and WPA.
ARM1 X axis cannot move as it

6527 Warning WRN -
interferes with the WPA.
ARM1 Y axis cannot move as it

6528 Warning WRN -
interferes with the WPA.
ARM1 Z axis cannot move as it

6529 Warning WRN -
interferes with the hand.
ARM1 Z axis cannot move by

6530 Warning WRN -
interferes of wafer on the WPA.
Execute after the hand for the wafer

6531 Warning WRN -
transfer and the WPA.
Coninue the processing after ARM1 Z

6532 Warning WRN -
axis escape.
Check Pre-alignment work.\nPress [Retry]

6533 Error ALM Pre-alignment frame can not move. when there is work.\nPress [Pre-align
unload] when work is not.
Expand-Contract sensor of ARM1 are both

Detected sensor error while ARM1 X ON. Confirm the actual ARM1 position and
6534 Error ALM
axis is moving. Expand-Contract sensor status and adjust
if it is necessary.
If the expand/contract movement of the

X-axis of ARM1 cannot be controlled
Cannot conduct the expand and
6535 Error ALM If the X-axis sensor of ARM1 cannot be
contract of the X-axis of ARM1.
replacement.
ARM1 cannot move as it interferes

6536 Warning WRN
with the ABES transfer axis.
129/162
Confidential
Event
Type
Finger cannot move as the ABES
6537 Warning WRN
transfer axis is not retracted.
Arm1 vacuum does not OFF, please remove

6538 Error ALM Cannot work vacuum OFF on ARM1.
work by manual manipulation.

ARM1.
\n[Retry]: Transfer movement is retried.
6539 Warning WRN Work vacuum error at ARM1. \n[Spinner reject]: Work of the spinner
unit is treated as being rejected.
Remove the work on the spinner unit and
touch the button.

6540 Error ALM

6601 Warning WRN ARM2 X axis is not initialized.
initialization.

6602 Error ALM ARM2 X axis is out of control. initialize axes.
the error persists.
Detected ARM2 X axis limit while Press [System Initialize] for all axes
6603 Error ALM
ARM2 X axis position exceeds Confirm that if the machine size data is
6604 Warning WRN

6605 Error ALM
required.

6606 Error ALM Detected servo alarm on ARM2 X axis.
required.
Detected over speed error on ARM2 X Ensure that speed data of each axis are
6607 Error ALM
axis. properly set.
Cannot move ARM2 X because of Move ARM1 Z axis safety position, then
6608 Warning WRN
ARM2 X axis may interfere in closed Open mist shutter, then continue
6609 Warning WRN
mist shutter. process.

[Transport initialize]: Initialization
6610 Warning WRN ARM2 Y axis is not initialized. of the axis of the transfer unit.[System
initialization]: Initialization for all
axes.
Check there is nothing is interfering

the ARM2 Y-axis and touch [Transport
6611 Error ALM ARM2 Y axis is out of control. initialize] to initialize axes.
the error persists.
Detected ARM2 Y axis limit while Press [System Initialize] for all axes
6612 Error ALM
130/162
Confidential
Event
Type
ARM2 Y axis position exceeds Confirm that if the machine size data is
6613 Warning WRN
Touch [Transport initialize] to

initialize axes.
Detected driver alarm while ARM2 Y
6614 Error ALM Mechanical adjustment is necessary if
axis is in process.
the error persists. See "Help" for
details.

6615 Error ALM Detected servo alarm on ARM2 Y axis.
is required.
Detected over speed error on ARM2 Y Ensure that speed data of each axis are
6616 Error ALM
axis. properly set.
ARM2 Y-axis cannot move as it Move ARM1 Z axis safety position, then
6617 Warning WRN
interferes with the ARM1 Z-axis continue process.
UP/DOWN sensor of ARM2 are both ON.

Detected sensor error while ARM2 Z Confirm the actual ARM2 position and
6618 Error ALM
axis is moving. UP/DOWN sensor status and adjust if it
is necessary.
If the vertical movement of the Z-axis

of ARM2 cannot be controlled through the
maintenance screen, consider the
Cannot conduct the vertical movement cylinder replacement.
6619 Error ALM
of the Z-axis of ARM2. If the Z-axis sensor of ARM2 cannot be
replacement.See "Help" for details.
Cannot move ARM2 Z axis since Wait for spinner table rotating stop,
6620 Warning WRN
spinner is rotating. then continue process.
Cannot move ARM2 Z because of Move ARM1 Z axis safety position, then
6621 Warning WRN
Move ARM1 Z axis safety position, then

6622 Warning WRN ARM2 is not on UP position.
continue process.
OPEN/CLOSE status of both Pre-alignment

Detected sensor error while moving guide are mismatch. Confirm the actual
6623 Error ALM
Pre-alignment guide. guide position and OPEN/CLOSE sensor
status and adjust if it is necessary.
6624 Error ALM
6625 Error ALM
6626 Warning WRN ARM2 is in cut area.
Eject work from Pre-alignment, then

6627 Warning WRN Work is found on Pre-alignment.
continue process.

6628 Fatal ALM
required.
131/162
Confidential
Event
Type
6629 Fatal ALM
on ARM2 X axis servo. repeatedly, mechanical adjustment is
required.

6630 Fatal ALM
off ARM2 X axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ARM2 X Wrong operation or invalid parameter is
6631 Error ALM
Cannot move ARM2 X because of Move ARM2 Y axis to cut table, then
6632 Warning WRN
interference in machine Y. continue process.
Cannot move ARM2 X because of Move ARM2 Z axis safety position, then
6633 Warning WRN
interference in machine Z. continue process.

Detected driver alarm while ARM2 Y initialization.\nIf error occur
6634 Fatal ALM
required.

6635 Fatal ALM
on ARM2 Y axis servo. repeatedly, mechanical adjustment is
required.

6636 Fatal ALM
off ARM2 Y axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ARM2 Y Wrong operation or invalid parameter is
6637 Error ALM
Cannot up ARM2 because of Move ARM1 Z axis safety position, then

6638 Warning WRN
Cannot move ARM2 Y because of Move ARM1 Z axis safety position, then
6639 Warning WRN
interference in ARM1 on CT. continue process.
Cannot move ARM2 Y because of Move ARM2 Y axis safety position, then
6640 Warning WRN
interference in machine X. continue process.
Cannot move ARM2 because of Move ARM1 Y axis safety position, then
6641 Warning WRN
6642 Fatal ALM Detected driver error on ARM2. Restart machine.

ARM2.
Processing cannot be continued as Remove the work from the arm2 and
6645 Warning WRN
the work is in the ARM2. continue the operation.
132/162
Confidential
Event
Type
The work position information on ARM2
and result of work vacuum sensor are
Cannot detect work on ARM2 contrary mismatch. Confirm that if the work is
6646 Warning WRN
to position information. properly vacuumed. If the work is
of vacuum sensor.
6647 Guide CAL Detected new work on ARM2. Continue process.

6648 Error ALM ARM2 vacuum pressure is unstable. water on frame or adjust vacuum pressure
sensor.
Cannot detect CLOSE sensor status of Confirm the motion of Pre-alignment

6650 Error ALM
Pre-alignment. guide.
Failed to pull out work from Check if work is exist in Pre-alignment

6651 Warning WRN
cassette. or confirm the operation of work sensor.
The work position information on Pre-

alignemnt and result of work sensor are
Cannot detect work on PA contrary to mismatch. Confirm that if the work is
6652 Warning WRN
position information. properly set. If the work is properly
set, confirm the operation of work
sensor.
6653 Guide CAL Detected new work on Pre-alignment. Continue process.
6654 Error ALM Detected ionizer error on ARM2. Confirm ionizer status.
Detected ionizer error on pre- Received error signal from ionizer.

6655 Error ALM
alignemnt lower. Confirm the operation status of ionizer.
Cannot move ARM2 Z because of Move ARM2 X axis safety position, then
6656 Warning WRN
interference in machine X. continue process.
Cannot move ARM2 Z because of Move ARM2 Y axis safety position, then
6657 Warning WRN
interference in machine Y. continue process.
Cannot move ARM2 Z because of Move ARM2 Z axis safety position, then
6658 Warning WRN
interference in machine Z. continue process.
Detected work on both ARM2 and cut Eject one frame or set both frame in
6659 Warning WRN
table. proper status then continue process.

6660 Warning WRN
interference in spindle

6661 Warning WRN

6662 Warning WRN
6663 Error ALM It is time to clean ARM2 ionizer. Clean discharge needle on ionizer.
Detected invalid discharge on ARM2 Received error signal from ionizer.

6664 Error ALM
ionizer. Confirm the operation status of ionizer.
133/162
Confidential
Event
Type
It is time to clean pre-alignemnt
6665 Error ALM Clean discharge needle on ionizer.
lower ionizer.

solve the cause of the error before
6666 Error ALM the ionizer of the pre-alignment
resuming the operation. See "Help" for
unit.
details.

6667 Warning WRN
table.

6668 Warning WRN

6669 Warning WRN
Check if work is exist in Pre-alignment

6670 Warning WRN No work is found on prealignment
or confirm the operation of work sensor.
Check if work is exist in Pre-alignment

or confirm the operation of work
Failed to pull out work from
6672 Warning WRN sensor.\nCheck Elevator height and
cassette.
adjust elevator height where finger can
handle frame properly.
If the pre-alignment guide cannot

open/close through the maintenance
screen, replace the cylinder.
Opening/closing of the pre-alignment
6673 Error ALM Adjust the "Close" sensor position for
guide could not be detected.
the pre-alignment guide, and if it still
cannot be turned ON/OFF, replace the
sensor. See "Help" for details.

6674 Error ALM Adjust the "Close" sensor position for
Eject work from Pre-alignment, then

continue process.

6677 Error ALM ARM2 vacuum pressure is unstable. water on frame or adjust vacuum pressure
sensor.

process.
Remove the work from the pre-alignment

and continue the operation.
Or consider the possibility of the
problem with the pre-alignment sensor.

6680 Warning WRN
interference in dress stage.
134/162
Confidential
Event
Type
Both UP sensor and Down sensor on Confirm the sensor poistion and
6681 Warning WRN
ARM2 indicates ON or OFF. operation.
It is time to clean pre-alignemnt Check the work state, and clean

6682 Error ALM
upper ionizer. discharge needle on ionizer.
Detected invalid discharge on pre- Check the work and, confirm the
6683 Error ALM
alignemnt upper ionizer. operation status of ionizer.

6684 Error ALM
ARM2 Y exists at an abnormal Press [System Initialize] for all axes

6685 Error ALM
6686 Warning WRN ARM2 is not on DOWN position.
6687 Warning WRN Arm2 inch size is incorrect Check arm2 inch adjustment

6688 Warning WRN Adjust the "Close" sensor position for

6689 Warning WRN Adjust the "Close" sensor position for
Cannot detect CLOSE sensor status of Confirm the motion of Pre-alignment

6690 Warning WRN
Pre-alignment. guide.
Close operation of mechanical arm If error occur repeatedly, mechanical

6691 Error ALM
Open operation of mechanical arm If error occur repeatedly, mechanical

6692 Error ALM
OPEN/CLOSE sensor of ARM2 mecha- Please remove the frame carefully by I/O
6693 Error ALM
clamper is abnormal. opereation.

6694 Warning WRN ARM2 Hand Y axis is not initialized.
initialization.

6695 Error ALM ARM2 Hand Y axis is out of control.
required.
Detected ARM2 Hand Y axis limit Press [System Initialize] for all axes
6696 Error ALM
while running. initialization.
ARM2 Hand Y axis position exceeds Confirm that if the machine size data is
6697 Warning WRN
135/162
Confidential
Event
Type
Detected driver alarm while ARM2 initialization.\nIf error occur
6698 Error ALM
Hand Y axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ARM2 Hand Y initialization.\nIf error occur
6699 Error ALM
axis. repeatedly, mechanical adjustment is
required.
Detected over speed error on ARM2 Ensure that speed data of each axis are
6700 Error ALM
Hand Y axis. properly set.
ARM2 WPrea Z axis is not Press [System Initialize] for all axes
6701 Warning WRN

6702 Error ALM ARM2 WPrea Z axis is out of control.
required.
Detected ARM2 WPrea Z axis limit Press [System Initialize] for all axes
6703 Error ALM
ARM2 WPrea Z axis position exceeds Confirm that if the machine size data is
6704 Warning WRN

6705 Error ALM
WPrea Z axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ARM2 WPrea Z initialization.\nIf error occur
6706 Error ALM
required.
6707 Error ALM
WPrea Z axis. properly set.
ARM2 WPrea T axis is not Press [System Initialize] for all axes
6708 Warning WRN

6709 Error ALM ARM2 WPrea T axis is out of control.
required.
Detected ARM2 WPrea T axis limit Press [System Initialize] for all axes
6710 Error ALM
ARM2 WPrea T axis position exceeds Confirm that if the machine size data is
6711 Warning WRN

6712 Error ALM
WPrea T axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ARM2 WPrea T initialization.\nIf error occur
6713 Error ALM
required.
136/162
Confidential
Event
Type
6714 Error ALM
WPrea T axis. properly set.
Close operation of mechanical arm2 If error occur repeatedly, mechanical

6715 Error ALM
Open operation of mechanical arm2 If error occur repeatedly, mechanical

6716 Error ALM
Check if the sensing sensor moves

Cannot detect detection/escape detection/escape properly.\nIf it moves
6717 Error ALM
status of wafer sensing sensor. properly, confirm operation of
detection/escape sensor.
Check if the sensing sensor moves

detection/escape properly.\nIf it moves
6718 Error ALM detection/escape wafer sensing
sensor.
detection/escape sensor.

ARM2 Hand vacuum pressure is
unstable.
sensor.

ARM2 WPrea vacuum pressure is
unstable.
sensor.
Cannot move Hand Y axis because of

6721 Warning WRN Check Cst height.
interference in ARM1.
Cannot move Hand Y axis because of

6722 Warning WRN Check WPrea Z height.
interference in WPrea.
Cannot move WPrea Z axis because of

6723 Warning WRN Check Hand Y position.
interference in Hand.
Cannot initialize WPreaZ because of

6724 Error ALM Please remove wafer on WPrea.
WPrea exist wafer.
Cannot move WPrea T because of

6725 Warning WRN Check WPrea Z height.
interference in Hand.
Cannot move Hand Y because of

6726 Warning WRN Please make sure FOUP is placed.
interference in Cst.

6727 Warning WRN Please check open FOUP door.
interference in FOUP door.

interference in equipment.

ARM2 Bernoulli vacuum pressure is
unstable.
sensor.
Position information of the hand and the

vacuum result do not match. Check if the
Work position information of the vacuum of the hand is appropriate.\
6730 Warning WRN
hand does not match. nCheck if the vacuum sensor of the hand
is working properly when it is
vacuuming.
137/162
Confidential
Event
Type
The position information of the wafer
pre-alignment and the vacuum result do
not match. Check if the wafer pre-
Work position information of the
6731 Warning WRN alignment is vacuumed properly.\ nCheck
wafer pre-alignment does not match.
if the vacuum sensor of the wafer pre-
alignment is working properly when it is
vacuuming.
Clean sensor.\nIf error occur

Sample data of WPrea cannot be fully
6732 Error ALM repeatedly, WPrea adjustment is
collected.
required.

saved.
required.

collected in time.
required.

6735 Error ALM Sample data of WPrea lacks. repeatedly, WPrea adjustment is
required.
ARM2-HAND Y exists at an abnormal Press [System Initialize] for all axes

6736 Error ALM
ARM2-WaferPrealignment Z exists at Press [System Initialize] for all axes

6737 Error ALM
an abnormal position. initialization.
Change the size in the pre-alignment

Changing inch size at prealignment unit.
6738 Warning WRN
was not done. If the sensor malfunctions, it should be
fixed or replaced with new one.
If the hand is not at the vacuum

position, readjust the vacuum height of
the hand on the wafer loading adjustment
6739 Error ALM The hand could not vacuum the wafer. screen. If the wafer is on the vacuum
position, check and adjust the hand
vacuum sensor and vacuum pressure on the
IO operation screen.
Check if there is anything interfering

with the wafer.
6740 Error ALM Loading of the wafer failed.
Remove the wafer and initialize the
system to recover.
Check if there is anything interfering

with the wafer.
6741 Error ALM Unloading of the wafer failed.
Remove the wafer and initialize the
system to recover.
Readjust the height of the wafer pre-

alignment unit and the hand for the
wafer transfer on the adjustment screen.
Vacuum error of the ARM2 wafer pre-
6742 Error ALM If the transfer height bears no problem,
alignment.
check the vacuum sensor and pressure on
the IO operation screen and perform the
necessary adjustment.
Remove the wafer and resume the

The shift amount of the wafer center
6743 Error ALM processing. If the problem recurs, the
exceeded the limit.
machine should be readjusted.
138/162
Confidential
Event
Type
Check if the wafer shape matches with
that of the recipe setting.
6744 Error ALM Notch could not be detected.
Check if the center detection sensor
reacts properly on the IO screen.
Check if the wafer shape matches with

Orientation flat could not be that of the recipe setting.
6745 Error ALM
detected. Check if the center detection sensor
reacts properly on the IO screen.
If the wafer is not at the vacuum

position, readjust the ARM2 transfer on
the wafer loading adjustment screen. If
Vacuum error of the ARM2 Bernoulli
6746 Error ALM the wafer is on the vacuum position,
chuck.
check and adjust the ARM2 vacuum sensor
and vacuum pressure on the IO operation
screen.

position, readjust the hand transfer on
6747 Error ALM Vacuum error of the ARM2 hand. the wafer is on the vacuum position,
check and adjust the hand vacuum sensor
screen.

position, readjust the transfer height
of the wafer pre-alignment on the wafer
Vacuum error of ARM2 wafer pre-
6748 Error ALM loading adjustment screen. If the wafer
alignment.
is on the vacuum position, check and
adjust the vacuum sensor and vacuum
pressure on the IO operation screen.
Check the vacuum pressure and whether

Failed to turn OFF the ARM2 the sensor is ON/OFF on the IO operation
6749 Error ALM
Bernoulli chuck vacuum. screen, and adjust the hardware or
replace with new one as necessary.

Failed to turn OFF the vacuum of the sensor is ON/OFF on the IO operation
6750 Error ALM
ARM2. screen, and adjust the hardware or

Failed to turn OFF the vacuum of the the sensor is ON/OFF on the IO operation
6751 Error ALM
wafer hand. screen, and adjust the hardware or

Failed to turn OFF the vacuum of the the sensor is ON/OFF on the IO operation
6752 Error ALM
wafer pre-alignment. screen, and adjust the hardware or

Vacuum error of ARM2 wafer pre- the sensor is ON/OFF on the IO operation
6753 Error ALM
alignment. screen, and adjust the hardware or
Remove the wafer from HAND, then

6754 Warning WRN Wafer is found on HAND.
Wafer is found on Wafer- Remove the wafer from Wafer-

6755 Warning WRN
Prealignment. Prealignment, then continue the process.
139/162
Confidential
Event
Type
Cannot move by interference of wafer
6756 Warning WRN
on the WPA and hand.
Cannot move by interference of WPA

6757 Warning WRN
and wafer on the hand.

6758 Warning WRN
on the WPA and machine.

6759 Warning WRN
on the WPA and ARM1.
Cannot move by interference of frame

6760 Warning WRN

6761 Warning WRN

6762 Warning WRN
and frame on the ARM1.

6763 Warning WRN
and wafer on the ARM1.
Cannot move by interference of the

6764 Warning WRN
WPA and ARM1.
Cannot move by interferes of WPA

6765 Warning WRN
sensor and ARM1.

6766 Warning WRN
ARM2 Z axis and frame on ST.

6767 Warning WRN
fall protection hook and CT.

6768 Warning WRN
fall protection hook and ST.
Cannot define the work type(frame or Cannot move since the frame is set in
6769 Warning WRN
wafer) at spinner table. the pre-alignment unit.
Cannot define the work type(frame or

6770 Warning WRN ARM2 is holding the frame.
wafer) at spinner table.
Frame center on the ST unit is

6771 Warning WRN Check the frame position in the ST unit.
deviated.
Please enter the IO operation screen,

Light amount of center-finding put up the wafer-center-finding sensor,
6772 Warning WRN
sensor is less than the threshold. confirm the status of the sensor and the
amount of light.

position, readjust the ARM2 transfer on
Vacuum error of ARM2 Bernoulli
6773 Warning WRN the wafer is on the vacuum position,
chuck.
check and adjust the ARM2 vacuum sensor
screen.
140/162
Confidential
Event
Type
Please check the Work on the pre-
alignment first.\nPress the [Pre-align
unload] to unload the Work on the pre-
alignment.\nPress the [Pre-align reject]
to continue the processing either when
Cannot move ARM because work
6774 Warning WRN there is no Work on the pre-alignment or
detected on Pre-alignment.
after removing the Work on the pre-
alignment which is not supposed to be
processed.\nWhen the machine is running,
please do the recovery operations after
the machine stops.
Please identify work of spinner table as

arm 2. When there is not work, please
6775 Error ALM confirm whether arm 2 and an adsorption
table.
sensor of spinner table operate
normally.
ARM2 cannnot move by interferes of

6776 Warning WRN
the ABES transfer axis.
6777 Error ALM Arm2Y axis is not a PREA position. Confirm the ARM2Y axis position.

6778 Error ALM

solve the cause of the error before
6779 Error ALM the ionizer of the pre-alignment
resuming the operation. See "Help" for
unit.
details.
It is time to clean pre-alignemnt Check the work state, and clean

6780 Error ALM
upper ionizer. discharge needle on ionizer.
Detected invalid discharge on pre- Check the work and, confirm the
6781 Error ALM
alignemnt upper ionizer. operation status of ionizer.
Please eliminate static electricity on

6782 Error ALM Detected static electricity error.
frame.
Static electricity shutter open Please check the static electricity

6783 Error ALM
error. measuring device.
Static electricity shutter close Please check the static electricity

6784 Error ALM
error. measuring device.
TMS controller's RS communication

6801 Error ALM Confirm the TMS controller.
error [%3].

6802 Error ALM Confirm the TMS connect.
time out.

6803 Error ALM Cconfirm the TMS controller.
received invalid command.
6804 Warning WRN
interfere in TMS Unit. continue.
Ensure that TMS top/bottom cylinder

6805 Error ALM TMS unit cannot work.
properly works.
TMS table height offset measurement Execute "TMS table height offset
6806 Warning WRN
is not executed. measurement " again.
141/162
Confidential
Event
Type
6807 Warning WRN TMS unit not exist. Confirm TMS function setting.
The measurement data is out of

6808 Error ALM Execute measurement again.
allowable range.
The thickness of the tape is out of

6809 Error ALM Execute measurement again.
allowable range.
TMS sensor was lowered out of the Perform the teaching on the TMS
6810 Warning WRN
range of the cutting table measurement position.
Execute the [Set TMS sensor head] and

6811 Warning WRN TMS sensor has not been adjusted yet
[Height offset measure].
The thickness of the work is out of The thickness of the work is out of
6812 Error ALM
allowable range. allowable range.
Please execute recovery action or check

6901 Error ALM Frame ID characters length is over.
the barcode.
Wrong characters were detected from Please execute recovery action or check
6902 Error ALM
barcode. the barcode.
6903 Error ALM Detecetd frame barcode reader error. Please execute recovery action.
Frame barcode reader RS

6904 Error ALM Please execute recovery action.
communication time out.
Check if the reading position of the

barcode by the scanner is correct, and
6905 Error ALM Frame barcode cannot be read. adjust the position as necessary. In

6906 Error ALM Frame ID characters length is over.
the barcode.
6907 Error ALM

6908 Error ALM Detecetd frame barcode reader error.
the barcode reader.
Frame barcode reader RS Please execute recovery action or check

6909 Error ALM
communication time out. the barcode reader connection.

barcode by the scanner is correct, and
6910 Error ALM Frame barcode cannot be read. adjust the position as necessary. In
Cassette ID characters length is

6911 Error ALM Please check the barcode.
over.
Wrong characters were detected from

barcode.
Detecetd cassette barcode reader

error.
Cassette barcode reader RS

142/162
Confidential
Event
Type
6915 Error ALM Cassette barcode read time out. Please adjust reading position.
Cassette ID characters length is

over.
Wrong characters were detected from

barcode.
Detecetd cassette barcode reader

6918 Error ALM Please check the barcode reader.
error.
Cassette barcode reader RS Please check the barcode reader

6919 Error ALM
communication time out. connection.
6920 Error ALM Cassette barcode read time out. Please adjust reading position.

combination list.
No recipe data is correcponding to

the barcode ID.
OPEN/CLOSE sensor of barcode shutter are

Detected sensor failure while both ON. Confirm the actual shutter
6923 Error ALM
opening barcode shutter. position and OPEN/CLOSE sensor status
Sensor timeout error. Sensor of

"Open/Close" did not respond within the
time (SYSID: 25572 Shutter wait time for
Opening/closing of the barcode barcode).
6924 Error ALM
shutter has failed. Check the open/close status of the
barcode shutter. When it is not working,
make necessary adjustments on the IO
screen.
Please set Barcode read

Lower prealignment barcode and
position[SYSID:25530] to other than
6925 Error ALM Preload SRS can not be used
"Lower prealignment". Or, please set SRS
simultaneous.
setting[RCPID:49402] to OFF.
Please change Tranfe mode [SYSID:24958].

The transport mode and the frame BCD
6926 Error ALM Or, please change Barcode read position
read position is incorrect.
[SYSID:25530].
Please confirm whether there is a

The frame barcode reading function barcode on Work and the setting of
6927 Guide CAL
is disabled by recipe. recipe parameter(ID:49999), then
Please disable switching active recipe

Exclusive functions are both by frameID function[SYSID:24542] or
6928 Warning WRN
enabled. setting framebarcode reading by recipe
function[SYSID:26534].
Detected IO control board

initialization failure.
143/162
Confidential
Event
Type
communication with HA1269 communication
master substrate.
Check the installation and connection
7002 Fatal ALM status of the following substrates and
communication error.
identify the source of the error.
HA1269, HA1259, HA1261, HA1260, HA1262,
HA1208,
HA1258, HA1152, HA1263.

initialization error.
An error has been detected from HA1271

substrate.
Detected IO driver error in IO
7004 Fatal ALM It may be the substrate failure or the
board.
cable disconnection. See "Help" for
details.

error in IO board.
Detected axes control board

correction error.

initialization process of HA1255
mechatrolink communication master
substrate.
If an error code is indicated on the
Detected axis control board
7201 Fatal ALM servo pack, identify the cause of the
initialization failure.
error.
Or identify the error by examining the
control board and cables of the axes
connected with mechatrolink. See "Help"
for details.

communication with HA1255 mechatrolink
communication master substrate.
Detected axes control board servo pack, identify the cause of the
7202 Fatal ALM
communication error. error.
for details.
An error has been received from

mechatrolink.
servo pack, identify the cause of the
Detected IO driver error in axis
7203 Fatal ALM error.
control board.
for details.

parameter error.

correction error.
144/162
Confidential
Event
Type
Cutting cannot be executed any further
8001 Warning WRN as the cutting distance of the blade has
exceeded the limit.
exceeded the limit. Replace the blade.
The cut line number in place of

8002 Error ALM Maximum cut line number is exceeded. occurrence has become greater than the
max cut line number.\nReplace blade.

Wear amount of the blade has
8003 Warning WRN as the wear amount of the blade has
exceeded the limit.
exceeded the limit. Replace the blade.
8004 Warning WRN Total wear amount is about to limit. Replace blade.
Blade exposure has fallen below the Blade exposure fell below the limit.
8005 Warning WRN
tolerance. Replace the blade.
Current exposure is nearly to its

limit.
8007 Warning WRN Total cut line is about limit. Replace blade.
Total cut line number is about

limit.

Remaining exposure for the cutting as the remaining exposure of the blade
8009 Warning WRN
work has fallen below the limit. has fallen below the limit. Replace the
blade. See "Help" for details.
If reminder margin warning and bump

The exposure margin of the blade has
8010 Warning WRN height(ID:40085) is correct ,replace
exceeded the warning value.
blade.
Replace the blade as the wear amount of

The wear amount of the blade has the blade has exceeded the warning
8011 Warning WRN
exceeded the warning value. limit. With the button [Cut continue],
the cutting can be continued.
Replace the blade as the exposure amount

The exposure amount of the blade has of the blade has exceeded the warning
8012 Warning WRN
exceeded the warning value. limit. With the button [Cut continue],
the cutting can be continued.

The cutting distance of the blade distance of the blade has exceeded the
8013 Warning WRN
has exceeded the warning value. warning limit. With the button [Cut
continue], the cutting can be continued.
Replace the blade as the number of

The number of cutting lines of the cutting lines of the blade has exceeded
8014 Warning WRN blade has exceeded the warning the warning limit. With the button
value. [Continue cutting], the cutting can be
continued.
The wear amount of the blade has

8015 Warning WRN exceeded the warning value during Please prepare to replace of the blade.
cutting.
The exposure amount of the blade has

cutting.
145/162
Confidential
Event
Type
The cutting distance of the blade
8017 Warning WRN has exceeded the warning value Please prepare to replace of the blade.
during cutting.
The number of cutting lines of blade

8018 Warning WRN has exceeded the warning value Please prepare to replace of the blade.
during cut.
There is a possibility of a new Please check because there is a

8019 Warning WRN
blade. possibility of new blade.
The exposure margin in place of

The exposure margin became height occurrence has become less than
8020 Error ALM
where will be hurt flange. zero.\nThe blade can not be done cutting
anymore. Replace blade.
Replace the blade as the exposure margin

The exposure margin of the blade has of the blade has exceeded the warning
8024 Warning WRN
exceeded the warning value limit. With the button [Continue
cutting], the cutting can be continued.
The exposure margin of the blade has

cutting

as the cutting distance of the blade has
8026 Warning WRN exceeded the limit. Replace the
exceeded the limit.
blade.\n[Continue by single SP]: Cutting
is conducted with the single SP only.
The cut line number in place of

occurrence has become greater than the
8027 Error ALM Maximum cut line number is exceeded. max cut line number.\nReplace

as the wear amount of the blade has
Wear amount of the blade has
8028 Warning WRN exceeded the limit. Replace the
exceeded the limit.
Replace blade.\n[Continue by single SP]:

8029 Warning WRN Maximum cut line number is exceeded. Cutting is conducted with the single SP
only.
Blade exposure fell below the limit.

Blade exposure has fallen below the Replace the blade.\n[Continue by single
8030 Warning WRN
tolerance. SP]: Cutting is conducted with the
single SP only.

Current exposure is nearly to its
8031 Warning WRN Cutting is conducted with the single SP
limit.
only.

8032 Warning WRN Total cut line is about limit. Cutting is conducted with the single SP
only.

Total cut line number is about
8033 Warning WRN Cutting is conducted with the single SP
limit.
only.
146/162
Confidential
Event
Type
Remaining exposure for the cutting height(ID:40085) is correct ,replace
8034 Warning WRN
work has fallen below the limit. blade.\n[Continue by single SP]: Cutting

The exposure margin of the blade has height(ID:40085) is correct ,replace
8035 Warning WRN
exceeded the warning value. blade.\n[Continue by single SP]: Cutting
Replace the blade as the wear amount of

the blade has exceeded the warning
The wear amount of the blade has limit. With the button\n[Cut continue]:
8036 Warning WRN
exceeded the warning value. The cutting can be continued.\n[Continue
by single SP]: Cutting is conducted with
the single SP only.
Replace the blade as the exposure amount

of the blade has exceeded the warning
The exposure amount of the blade has limit.\n[Cut continue]: The cutting can
8037 Warning WRN
exceeded the warning value. be continued.\n[Continue by single SP]:
Cutting is conducted with the single SP
only.

distance of the blade has exceeded the
The cutting distance of the blade warning limit.\n[Cut continue]: The
8038 Warning WRN
has exceeded the warning value. cutting can be continued.\n[Continue by
single SP]: Cutting is conducted with
the single SP only.
Replace the blade as the number of

cutting lines of the blade has exceeded
Total cut line number is about the warning limit. \n[Cut continue]: The
8039 Warning WRN
limit. cutting can be continued.\n[Continue by
single SP]: Cutting is conducted with
the single SP only.
The wear amount of the blade has Please prepare to replace of the
8040 Warning WRN exceeded the warning value during blade.\n[Continue by single SP]: Cutting
cutting. is conducted with the single SP only.
The exposure amount of the blade has Please prepare to replace of the
cutting. is conducted with the single SP only.
The cutting distance of the blade Please prepare to replace of the

8042 Warning WRN has exceeded the warning value blade.\n[Continue by single SP]: Cutting
during cutting. is conducted with the single SP only.
The number of cutting lines of blade Please prepare to replace of the

8043 Warning WRN has exceeded the warning value blade.\n[Continue by single SP]: Cutting
during cut. is conducted with the single SP only.
Replace the blade as the exposure margin

of the blade has exceeded the warning
The exposure margin of the blade has limit.\n[Cut continue]: The cutting can
8044 Warning WRN
exceeded the warning value. be continued.\n[Continue by single SP]:
Cutting is conducted with the single SP
only.
The exposure margin of the blade has Please prepare to replace of the
cutting is conducted with the single SP only.
147/162
Confidential
Event
Type
Cutter set block is out of allowable Replace cutter set block, and then
8201 Error ALM
range. adjust contact position.
Cutter set block position (T) is out Replace table and adjust contact cutter
8202 Error ALM
of allowable range. set position.
Cutter set block position (X) is out Replace table and adjust contact cutter
8203 Error ALM
Cutter set block position (Y) is out Replace table and adjust contact cutter
8204 Error ALM
Chop cut condition is not completed. Set

8205 Error ALM Exceeded sub table work usage area.
new sub table work.
Dress condition is not completed. Set

8301 Guide CAL Exceeded dress work usage area.
new dress work.

8302 Guide CAL Exceeded dress work usage area.
new dress work.

8303 Guide CAL Exceeded dress stage usage area.
new dress stage.

8306 Guide CAL Exceeded dress stage usage area.
new dress stage.
Life of spindle brush exceeded

8401 Error ALM Replace spindle crush.
limit.
8402 Warning WRN Life of blade nut exceeded limit. Replace the blade nut.
8601 Warning WRN
interfere in AMM Unit. continue.
Multi-connection error of the air Check the connection status of the air
8602 Warning WRN
micro-gauge. micro again.
See the description on the error code in

Acquisition error of the the command section of the
8603 Warning WRN
measurement. "Specification of the Accretech USB Gage
Open Interface."

the command section of the
8604 Warning WRN 0 origin reset error.
"Specification of the Accretech USB Gage
Open Interface."

8605 Warning WRN Error at the end of the measurement.
Open Interface."

8606 Warning WRN Setting error of the distance.
Open Interface."

Error in the measurement the command section of the
8607 Warning WRN
preparation. "Specification of the Accretech USB Gage
Open Interface."
148/162
Confidential
Event
Type
8608 Warning WRN Error in the gauge ID acquisition.
Open Interface."
8609 Warning WRN Jig has remained on the CT. Please remove the jig.
Check the pressure of the air micro on

Air pressure of the air micro is
8610 Error ALM the air micro position adjustment screen
unstable.
and preform the adjustment as necessary.
Ensure that air micro top/bottom

8611 Error ALM air micro unit cannot work.
cylinder properly works.
Basic height adjustment for air Execute air micro basic pos calibration
8612 Warning WRN
micro is not executed. in air micro machine adjust screen.
Air micro basic height calibration try air micro basic pos calibration in
8613 Warning WRN
failure. air micro machine adjust screen again.
8614 Warning WRN air micro unit not exist. Confirm air micro function setting.
Please unload a frame and check the tape

8615 Warning WRN The tape thickness isn't measured.
measuring setteing.
Please check work thickness has been set

correctly.
Than the actual thickness, if you enter
Unable to move since air micro a thin value,
8616 Error ALM
interfere in work. Since the air micro might interfere with
the work,
Please be sure to enter the correct work
thickness.
Check the connection with the LMM

LMM controller's RS communication
8701 Error ALM controller.\nAlso, make sure that power
time out.
is supplied to the LMM controller.
Check the connection with the LMM

LMM controller's RS communication
8702 Error ALM controller.\nAlso, make sure that power
received invalid command.
is supplied to the LMM controller.
Please check work thickness [ID:40002]

The measurement data is out of
8703 Warning WRN or tape thickness [ID:40003] has been
allowable range.
set correctly.

8704 Error ALM Ensure that LMM shutter properly works.
opening LMM shutter.

8705 Error ALM Ensure that LMM shutter properly works.
closing LMM shutter.
8706 Error ALM LMM shutter cannot be opened. Ensure that LMM shutter properly works.
8707 Error ALM LMM shutter cannot be opened. Ensure that LMM shutter properly works.
Please check work thickness [ID:40002]

Ratio of completed WMS point
8708 Error ALM or tape thickness [ID:40003] has been
exceeded error limit.
set correctly.
149/162
Confidential
Event
Type
Please check WMS area [ID:49143] or
Start line[ID:49140] or
8709 Error ALM WMS measurement point none.
Interval[ID:49140] or Lines [ID:49141]
has been set correctly.
ABES Pallet T axis is not Press [System Initialize] for all axes
8801 Warning WRN

ABES Pallet T axis is out of initialization.\nIf error occur
8802 Error ALM
required.
Detected ABES Pallet T axis limit Press [System Initialize] for all axes
8803 Error ALM
ABES Pallet T axis position exceeds Confirm that if the machine size data is
8804 Warning WRN

Detected driver alarm while ABES initialization.\nIf error occur
8805 Error ALM
Pallet T axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ABES Pallet initialization.\nIf error occur
8806 Error ALM
T axis. repeatedly, mechanical adjustment is
required.
Detected over speed error on ABES Ensure that speed data of each axis are
8807 Error ALM
Pallet T axis. properly set.

8808 Fatal ALM
Pallet T axis was initializing. repeatedly, mechanical adjustment is
required.

8809 Fatal ALM
on ABES Pallet T axis servo. repeatedly, mechanical adjustment is
required.

8810 Fatal ALM
off ABES Pallet T axis servo. repeatedly, mechanical adjustment is
required.
Cannot turn servo OFF while ABES Wrong operation or invalid parameter is
8811 Error ALM
Pallet T axis is running. set.
Detected driver error on ABES

Pallet.

ABES Pallet.
Please check the obstacle on the new

blade clamp movable part.\n
New blade clamp could not be go to
8814 Error ALM If the clamp is moving forward, please
front.
adjust or replace front sensor of blade
clamp.
150/162
Confidential
Event
Type
blade clamp movable part.\n
New blade clamp could not be
8815 Error ALM If the clamp is moving backward, please
escaped.
adjust or replace rear sensor of blade
clamp.

blade clamp.\n
8816 Error ALM New blade clamp could not be opened
If the clamp is opened, please adjust or
replace blade clamp sensor.

blade clamp.\n
8817 Error ALM New blade clamp could not be closed
If the clamp is closed, please adjust or
Please check the obstacle on the used

blade clamp.\n
8818 Error ALM Used blade clamp could not be opened
If the clamp is opened, please adjust or
Please check the obstacle on the used

blade clamp.\n
8819 Error ALM Used blade clamp could not be closed
If the clamp is closed, please adjust or
If the blade is not stored, please

Blade could not be stored in blade adjust the blade take out position.\n
8820 Error ALM
buffer. If the blade is stored, please adjust or
replace of the blade sensor.
If the blade is not taken out, please

Blade could not be taken out from adjust the blade take out position.\n
8821 Error ALM
blade buffer If the blade is taken out, please adjust
or replace of the blade sensor.
Trying to take out the blade in blade

buffer despite there is no blade.\n
8822 Error ALM There is no blade on blade buffer.
If the blade is existed, please adjust
Trying to store the blade in blade

Blade is already exist on blade buffer despite exist the blade.\n
8823 Error ALM
buffer. If the blade is not existed, please
adjust or replace of the blade sensor.
Please recover of the dropped blade.\n

8824 Error ALM Blade was dropped. Please check the blade dropped unit, and
adjust or replace unit.
8825 Error ALM Nut drver rotation status error.
Mounting of the nut is abnormal.\n

8826 Error ALM Error of nut fastening Please adjust the blade exchange
position.
Please check the obstacle on the nut

driver movable part.\n
8827 Error ALM Nut driver could not be go to front. If the nut driver is moving forward,
please adjust or replace front sensor of
nut driver.
151/162
Confidential
Event
Type
Please check the obstacle on the nut
driver movable part.\n
8828 Error ALM Nut driver could not be escaped. If the nut driver is moving backward,
please adjust or replace rear sensor of
nut driver.
Please check the obstacle on the edge

condition glindstone movable part.\n
Edge condition grindstone could not If the edge condition glindstone is
8829 Error ALM
be go to front. moving forward, please adjust or replace
front sensor of edge condition
glindstone.
Please check the obstacle on the edge

condition glindstone movable part.\n
Edge condition grindstone could not If the edge condition glindstone is
8830 Error ALM
be escaped. moving backward, please adjust or
replace rear sensor of edge condition
glindstone.
Please check the obstacle on the

deflection sensor movable part.\n
Deflection sensor could not to be go
8831 Error ALM If the deflection sensor is moving
to front.
forward, please adjust or replace front
sensor of deflection sensor.
Please check the obstacle on the

deflection sensor movable part.\n
Deflection sensor could not to be
8832 Error ALM If the deflection sensor is moving
escaped.
backward, please adjust or replace rear
sensor of deflection sensor.
Cannot move pallet T axis while Please escape the blade clamp, then
8833 Warning WRN
blade clamp does not escape. resume operation.
Please open the mist shutter, then

8834 Warning WRN Pallet and mist shutter interfere.
resume operation.
There is no blade in the Used blade Install the blade to the Used blade
8835 Warning WRN
clamp. clamp.
There is no blade in the New blade Install the blade to the New blade
8836 Warning WRN
clamp. clamp.
Adjustment jig is not set on the Set the adjustment jig to the Used blade
8837 Warning WRN
Used blade clamp. clamp.
Adjustment jig is not set on the New Set the adjustment jig to the New blade
8838 Warning WRN
blade clamp. clamp.
8839 Warning WRN Blade exist in New blade clamp. Please remove blade in New blade clamp.
8840 Error ALM Blade on the pallet has been lost.
An unexpected blade was detected on

8841 Error ALM
the pallet.
Rough adjustment of the nut driver Finish the rough adjustment of the nut
8842 Warning WRN
position is not executed. driver position and execute again.
Adjustment of the nut driver Finish the adjustment of the nut driver
8843 Warning WRN
position is not executed. position and execute again.
152/162
Confidential
Event
Type
New blade clamp position rough Finish the rough adjustment of the New
8844 Warning WRN
adjustment isn't executed. blade clamp position and execute again.
Adjustment of the New blade clamp Finish the adjustment of the New blade
8845 Warning WRN
position is not executed. clamp position and execute again.
Adjustment of the blade buffer Finish the adjustment of the blade

8846 Warning WRN
position is not executed. buffer position and execute again.
Detected timeout while ABES Pallet T

axis initializing.
The blade can not move because there

8848 Warning WRN
is a blade in the New blade clamp.
The blade can not move because there

8849 Warning WRN
is a blade in the buffer.
New blade clamp cannot move forward

8850 Warning WRN
by closed flange cover.
Used blade clamp cannot move forward

8851 Warning WRN
by closed flange cover.
Although there was a response from the

specified torque at the time of the nut
8852 Error ALM Nut status error in the nut setting. setting, the setting status of the nut
is an error. Check if the nut is
correctly attached.
The blade are grabbed by both the Used

8853 Error ALM Blade is grabbed by both clamps. and New blade clamps. Remove either one
of the blades.
Blade has already been installed in Remove the blade from the spindle and
8854 Error ALM
the spindle. execute again.
Move the ABES Pallet T axis to the

The device cannot move forward at
8855 Warning WRN defined position and then move the
the current Pallet T axis position.
device forward.
ABES Transfer Z axis is not Press [System Initialize] for all axes
9001 Warning WRN

ABES Transfer Z axis is out of initialization.\nIf error occur
9002 Error ALM
required.
Detected ABES Transfer Z axis limit Press [System Initialize] for all axes
9003 Error ALM
ABES Transfer Z axis position Confirm that if the machine size data is
9004 Warning WRN
exceeds software limit. properly set.

9005 Error ALM
Transfer Z axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ABES initialization.\nIf error occur
9006 Error ALM
Transfer Z axis. repeatedly, mechanical adjustment is
required.
153/162
Confidential
Event
Type
9007 Error ALM
Transfer Z axis. properly set.

9008 Fatal ALM
Transfer Z axis was initializing. repeatedly, mechanical adjustment is
required.

9009 Fatal ALM
on ABES Transfer Z axis servo. repeatedly, mechanical adjustment is
required.

9010 Fatal ALM
off ABES Transfer Z axis servo. repeatedly, mechanical adjustment is
required.
9011 Error ALM
Transfer Z axis is running. set.
ABES Transfer Y axis is not Press [System Initialize] for all axes
9012 Warning WRN

ABES Transfer Y axis is out of initialization.\nIf error occur
9013 Error ALM
required.
Detected ABES Transfer Y axis limit Press [System Initialize] for all axes
9014 Error ALM
ABES Transfer Y axis position Confirm that if the machine size data is
9015 Warning WRN
exceeds software limit. properly set.

9016 Error ALM
Transfer Y axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ABES initialization.\nIf error occur
9017 Error ALM
Transfer Y axis. repeatedly, mechanical adjustment is
required.
9018 Error ALM
Transfer Y axis. properly set.

9019 Fatal ALM
Transfer Y axis was initializing. repeatedly, mechanical adjustment is
required.

9020 Fatal ALM
on ABES Transfer Y axis servo. repeatedly, mechanical adjustment is
required.

9021 Fatal ALM
off ABES Transfer Y axis servo. repeatedly, mechanical adjustment is
required.
154/162
Confidential
Event
Type
9022 Error ALM
Transfer Y axis is running. set.

Transfer.

ABES Transfer.
Execute system initialization and resume

the operation.\n
9025 Error ALM ABES X position is invalid.
and contact the field engineer.\n
recovery again.
Execute system initialization and resume

the operation.\n
9026 Error ALM ABES YZ position is invalid.
and contact the field engineer.\n
recovery again.
Please adjust the pallet removable

position.\n
9027 Error ALM ABES Z could not be clamped.
If the ABES Z is clamped, please adjust
or replace ABES Z clamp sensor.

position.\n
9028 Error ALM ABES Z could not be relased.
If the ABES Z is released, please adjust
or replace ABES Z clamp sensor.

position.\n
9029 Error ALM ABES X could not be linked.
If the ABES X is linked, please adjust
or replace ABES X link sensor.

position.\n
9030 Error ALM ABES X could not be released.
If the ABES X is released, please adjust
or replace ABES X link sensor.
Please adjust or replace ABES X link

9031 Error ALM ABES X-Link position is invalid.
sensor.
Please check the pallet vaccum pipes.\n

Pallet vaccum sensor did not turn
9032 Error ALM If there is no problem with the pipes,
OFF
please adjust or replace vaccum sensor.
Please check the pallet vaccum pipes.\n

9033 Error ALM Pallet vaccum sensor did not turn ON If there is no problem with the pipes,
please adjust or replace vaccum sensor.
Cannot move ABES Z axis because of Please escape the ARM1, then resume
9034 Warning WRN
interference in ARM1. operation.
Cannot move ABES Y axis because of Please escape the ARM1, then resume
9035 Warning WRN
Cannot move ABES Z axis because of Please escape the ARM2, then resume
9036 Warning WRN
155/162
Confidential
Event
Type
Cannot move ABES Y axis because of Please escape the ARM2, then resume
9037 Warning WRN
Cannot move ABES Z axis while blade Please escape the blade clamp, then
9038 Warning WRN
clamp does not escape. resume operation.
Cannot move ABES Y axis while blade Please escape the blade clamp, then
9039 Warning WRN
clamp does not escape. resume operation.
Please move ABES Z stocker access

Cannot move ABES Y axis in the
9040 Warning WRN position or escape position, then resume
current ABES Z position.
operation.
Cannot move ABES Z axis in the Please move ABES Y removable position,
9041 Warning WRN
current ABES Y position. then resume operation.
Cannot move ABES Y axis because of Please clamp ABES Z, then resume
9042 Warning WRN
do not connect pallet. operation.
Cannot move ABES Z axis because of Please clamp ABES Z, then resume
9043 Warning WRN
do not connect pallet. operation.
Cannot move ABES Z axis because of Please close the blade clamp, then
9044 Warning WRN
interference in finger. resume operation.
Please adjust or replace ABES X link

9045 Error ALM ABES Pallet position is invalid.
sensor and ABES Z clamp sensor.
Cannot switch link chuck table

Please move pallet link position, then
9046 Warning WRN because of CT is not in the pallet
resume operation.
link position.

position.
ABES X could not be move link
9047 Error ALM If the ABES X is move link psition,
position.
please adjust or replace ABES X link
sensor.

position.
ABES X could not be move load
9048 Error ALM If the ABES X is move load position,
position.
please adjust or replace ABES X link
sensor.
The operation cannot be continued since

The pallet is not vacuumed to the the pallet is not vacuumed to the chuck
9049 Error ALM
chuck table. table. Vacuum the pallet and execute
again.

The pallet is not connected with the the pallet is not connected with the
9050 Error ALM
cutting table. cutting table. Connect the two and
execute again.

The pallet is not fixed to the the pallet is not fixed to the transfer
9051 Error ALM
transfer axis. axis. Fix the pallet with the Z clamp
and execute again.
Adjustment of the pallet removal Finish the adjustment of the pallet

9052 Warning WRN
position is not executed. removal position and execute again.
Detected timeout while ABES Z axis

initializing.
156/162
Confidential
Event
Type
Detected timeout while ABES Y axis
initializing.
9055 Error ALM Lost pallet vacuum on chuck table. Lost pallet vacuum on chuck table.
Since the ABES-Z axis is above the

Z axis pallet connection cannot be deceleration position, the Z axis pallet
9056 Warning WRN
canceled. connection cannot be canceled. Move it
below the deceleration position.
Since the ABES-Z axis is below the

ABES-X axis cannot be moved back and deceleration position, the ABES-X cannot
9057 Warning WRN
forth. be moved back and forth. Either turn the
vacuum on or retract the ABES-Z axis.
The ABES-X axis cannot be moved back and

ABES-X axis cannot be moved back and forth since the Z axis clamp and the
9058 Warning WRN
forth. pallet are connected. Release the Z axis
pallet connection.
ABES-Z axis cannot be lowered since the

9059 Warning WRN ABES-Z axis cannot be lowewed. pallet chuck table on the removal
position.Move it removal position.

ABES transfer axis is not at the the pallet is not on the stocker
9060 Error ALM
stocker position. position.Move it stocker position and
execute again.

ABES transfer axis is not at the ABES transfer axis is not at the pallet
9061 Error ALM
pallet removal position. removal position.Plese execute again
after pallet loading.
Cannot move ABES X axis because of Please escape the ARM1, then resume
9062 Warning WRN
Cannot move ABES X axis because of Please escape the ARM2, then resume
9063 Warning WRN
ABES Stocker T axis is not Press [System Initialize] for all axes
9201 Warning WRN

ABES Stocker T axis is out of initialization.\nIf error occur
9202 Error ALM
required.
Detected ABES Stocker T axis limit Press [System Initialize] for all axes
9203 Error ALM
ABES Stocker T axis position exceeds Confirm that if the machine size data is
9204 Warning WRN

9205 Error ALM
Stocker T axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ABES Stocker initialization.\nIf error occur
9206 Error ALM
T axis. repeatedly, mechanical adjustment is
required.
157/162
Confidential
Event
Type
9207 Error ALM
Stocker T axis. properly set.

9208 Fatal ALM
Stocker T axis was initializing. repeatedly, mechanical adjustment is
required.

9209 Fatal ALM
on ABES Stocker T axis servo. repeatedly, mechanical adjustment is
required.

9210 Fatal ALM
off ABES Stocker T axis servo. repeatedly, mechanical adjustment is
required.
9211 Error ALM
Stocker T axis is running. set.
ABES Stocker Z axis is not Press [System Initialize] for all axes
9212 Warning WRN

ABES Stocker Z axis is out of initialization.\nIf error occur
9213 Error ALM
required.
Detected ABES Stocker Z axis limit Press [System Initialize] for all axes
9214 Error ALM
ABES Stocker Z axis position exceeds Confirm that if the machine size data is
9215 Warning WRN

9216 Error ALM
Stocker Z axis is in process. repeatedly, mechanical adjustment is
required.

Detected servo alarm on ABES Stocker initialization.\nIf error occur
9217 Error ALM
Z axis. repeatedly, mechanical adjustment is
required.
9218 Error ALM
Stocker Z axis. properly set.

9219 Fatal ALM
Stocker Z axis was initializing. repeatedly, mechanical adjustment is
required.

9220 Fatal ALM
on ABES Stocker Z axis servo. repeatedly, mechanical adjustment is
required.

9221 Fatal ALM
off ABES Stocker Z axis servo. repeatedly, mechanical adjustment is
required.
158/162
Confidential
Event
Type
9222 Error ALM
Stocker Z axis is running. set.

Stocker.

ABES Stocker.
If the blade is not taken out, please

Blade of the stocker could not bt adjust the blade take out position.\n
9225 Error ALM
taken out. If the blade is taken out, please adjust
If the blade is not stored, please

Blade could not be stored in the adjust the blade take out position.\n
9226 Error ALM
stocker. If the blade is stored, please adjust or
replace of the blade sensor.
Please take out blade from disposal

9227 Error ALM Disposal slot is full.
slot.
Please check the blade on stocker.\n

If the blade is exist, store the blade
9228 Error ALM There is no blade on stocker. and register the blade data.\n
If the blade is not existed, please
adjust or replace of the blade sensor.
Blade has not been registered for Please store the blade. Then, register
9229 Warning WRN
the exchange. the blade data.
Detected the door of stocker is Please close the door and check the
9230 Error ALM
open. safety, then resume operation.
Please close the door, then resume

9231 Warning WRN Door of stocker is open.
operation.
Cannot move stocker T axis while Please escape the blade clamp, then
9232 Warning WRN
Cannot move stocker Z axis while Please escape the blade clamp, then
9233 Warning WRN
Please attach the jig blade only to slot

9234 Warning WRN Jig blade is not found in Stocker.
4. Do not install blades in other slots.
Adjustment of the blade handling Finish the adjustment of the blade

9235 Warning WRN
position is not executed. handling position and execute again.
Detected timeout while ABES Stocker

T axis initializing.
Detected timeout while ABES Stocker

Z axis initializing.

9238 Error ALM Blade barcode cannot be read. barcode by the scanner is correct, and
adjust the position as necessary.
9239 Error ALM Detecetd blade barcode reader error. Please execute recovery action.

9240 Error ALM Blade ID characters length is over.
the barcode.
159/162
Confidential
Event
Type
9241 Error ALM
Blade barcode reader RS

Specify barcode ID that is not

No blade data is correcponding to registered yet.\n[Change registration] :
9243 Warning WRN
the barcode ID. Change registration of blade data with
specified barcode ID.
Blade serial number does not match

9244 Warning WRN
with blade registration.
Blade barcode ID does not match with

9245 Warning WRN
blade registration.
9246 Warning WRN Invalid format of blade barcode.
Please check the stocker door, then

9247 Warning WRN Stocker door cannnot be locked.
resume operation.
Please check the stocker door, then

9248 Warning WRN Stocker door cannnot be unlocked.
resume operation.
Blade barcord is not found in

9249 Warning WRN Please set to blade barcord in slot1.
Stocker.
9250 Warning WRN Blade barcord is exist in Stocker. Please remove blade barcord in slot1.
9251 Error ALM Stocker slot is full. Please take out blade from stocker slot.
Processing cannot be continued Finish the stocker maintenance and

9252 Error ALM
during stocker maintenance. execute again.
9601 Warning WRN Fail to export data. Please check LAN cable is connected.
Please check setting host name, login

9602 Warning WRN Unable to connect to shared folder.
ID, password, export pass.
9603 Warning WRN Export data does not select. Please select data.
Check the connection with the USB

9701 Warning WRN Failed connection to USB minicom.
minicom.
Failed acquire measured value from Check the connection with the USB
9702 Warning WRN
USB minicom. minicom.
Failed to auto zero set for USB Check the connection with the USB
9703 Warning WRN
minicom. minicom.
Faild to auto calibration for USB Check the connection with the USB
9704 Warning WRN
minicom. minicom.
USB minicom sampling result exceed Please make sure that there is no dust
9705 Error ALM
limit. or dirt on the measurement surface.
160/162
白紙
HT26000-R599-E
The 41st edition Iss
Produced by Dicer
Published by Tokyo
All right reserved

HT26000-R599-E12_S7.08-00 FULLY AUTOMATIC DICING MACHINE
AD3000T Parameter List
The 41st edition Issued: January ,2019
Produced by Dicer System Group, Tokyo Seimitsu.,Ltd

Published by Tokyo Seimitsu.,Ltd
All right reserved
TOKYO SEIMITSU CO., LTD., 2019

HT26000-R599-S7.08-00 - E - Alarm List

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HT26000-R599-S7.08-00 - E - Alarm List

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HT26000-R599-E12_S7.

FULLY AUTOMATIC DICING MACHINE

TOKYO SEIMITSU CO., LTD

System environment error if

USB memory may not be inserted to the

Cancel the alarm and restart the

Cancel the alarm and restart the

Cancel the alarm and restart the

please try again processing.\nIf the

Cancel the alarm and restart the

Cancel the alarm and restart the

please try again processing.\nIf the

Cancel the alarm and restart the

Unused I/O interrupt error is

118 Fatal ALM Sequence cannot be completed. Please restart machine.

Restart the machine after removing the

Cancel the alarm and continue the

The machine is in running, wait a Execute process while machine is

please try again processing.\nIf the

Could not restore system

please try again processing.\nIf the

127 Error ALM Failed to download data. Please restart machine.

128 Error ALM Failed to receive message. Please restart machine.

129 Error ALM Failed to system boot. Please restart machine.

Remove work or press [System

please try again processing.\nIf the

Restart the machine.

Format of the file is incorrect.

Format of the file is incorrect.

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Examine the specified recipe data

Lot processing cannot be proceeded due

Not enough capacity in external

Executed reboot machine. Confirm work

Please confirm that the data name does

Shut down the PC and restart the machine

Please reboot equipment after shut down

Please reboot equipment after shut down

Please check connection of a removable

AMM controller's USB communication

Cannot start DY correction as the Conduct the DY correction once the

I repaired, please re-execute. If this

Please note that we are restoring, but

Unable to start lot processing because

I failed in reading of an E-MTBF

Check the connection status (power cable

Check the driver parameter setting

Check the connection status

Unable to start lot processing because

Follow the procedure below for

This parameter cannot be edited

Ensure cutting position.\nPress [START]

Verify cutting results. \nPress [START]

305 Guide CAL Kerf check is requested. Execute Kerf check.

　　　FULLY AUTOMATIC DICING MACHINE