Electro-­‐mechanical

 modeling  for  capacitive  MEMS  

I. M-­‐matrix  

Basically  is  used  for  sensor  modeling  to  extract  the  sensitivity  and  q  is  
variable:  
1 q
We =
2 C2
⎧ ⎛ ∂2 C ⎛ ∂C ⎞ ⎞
2

⎪ ⎜ C − 2C ⎜
2
⎟
⎪ ∂f 1 ∂ 2We 1 2 ⎜ ∂x 2 ⎝ ∂x ⎟⎠ ⎟
⎪ Z m = ∂ x = jω ∂x 2 = 2 jω q ⎜ C4 ⎟
⎪ ⎜ ⎟
⎪ ⎝ ⎠      
⎧ f ⎫ ⎡ Zm M ⎤ ⎧ x ⎫ ⎪
⎨ ⎬= ⎢ ⎥⎨ ⎬ ⇒ ⎨
∂f 1 ∂ 2We 1 ∂C q
⎩v ⎭ ⎢⎣ − M Z e ⎥ ⎩i ⎭ ⎪ M =
*
⎦ = =
⎪ ∂i jω ∂x ∂q jω ∂x C 2
⎪
⎪
⎪ Z = ∂v = 1 ∂ We = 1
2

⎪ e ∂i jω ∂q 2 jC0ω
⎩

Using  OP-­‐amp  with  high  input  impedance  the  current  is  null:  
∂v
Sensitivity  is   S = = M    
∂x

Variable  Gap   ∂ 2C
Variable  Area   = 0  
∂x 2

1 ∂2 ⎛ x 2 ⎞
2 2

Zm = q = 0     −q 2 ⎛ ∂C ⎞ −1 ⎛ ∂C ⎞ 2
Zm = = v  
jω ∂x 2 ⎜⎝ 2ε 0 A ⎟⎠ jω C 3 ⎜⎝ ∂x ⎟⎠ jω C ⎜⎝ ∂x ⎟⎠

v ⎛ ∂C ⎞ v ⎛ ∂C ⎞
M=   M=  
jω C ⎜⎝ ∂x ⎟⎠ jω C ⎜⎝ ∂x ⎟⎠

1 1
Ze =   Ze =  
jC0ω jC0ω

II. N-­‐matrix  
 Basically  is  used  for  actuator  modeling  to  extract  the  sensitivity  and  v  is  
variable:    
1
We = Cv 2
2
⎧ ∂f 1 ∂ 2We′ 1 ∂ 2C 2
⎪ Z m′ = ∂x = jω ∂x 2 = 2 jω ∂x 2 v
⎪      
⎧ f ⎫ ⎡ Z m′ N ⎤ ⎧ x ⎫ ⎪ ∂f ∂ 2
W ′ ∂C
⎨ ⎬=⎢ ⎥ ⎨ ⎬ ⇒ ⎨M = = e
= v
⎩i ⎭ ⎢⎣ −N Ye ⎥ ⎩v ⎭ ⎪ ∂v ∂x∂v ∂x
*
⎦
⎪
⎪
⎩Ye = jC0ω

For  null  displacement  we  can  deduce  the  transfer  function  as  follows:  

∂f
  H = = N    
∂v

Variable  Gap   ∂ 2C
Variable  Area   = 0  
∂x 2

1 ∂ 2C 2 C0 ⎛ V ⎞
2
Z m′ = 0  
Z m′ = v =    
2 jω ∂x 2 jω ⎜⎝ d ⎟⎠

∂C ⎛ v⎞ ⎛ ∂C ⎞ ε w
N= v = −C0 ⎜ ⎟   N =⎜ ⎟ v = − 0 v  
∂x ⎝ d⎠ ⎝ ∂x ⎠ d

Ye = jC0ω   Ye = jC0ω  

III. Mechanical  impedance  for  external  force:  

F F
Z m0 = = = jω m + b + ( k / jω )
x ω x
2
   
⎛ k⎞
⇒ Z m0 = b + ⎜ω m − ⎟
2
⎝ m⎠

2
k ⎛ ⎛ ω ⎞ ⎞ ⎛ ⎛ ω ⎞⎞
2 2
b
with ξ = ⇒ Z m0 = ⎜1 − ⎟ + 2ξ    
2 km ω ⎝ ⎜⎝ ω n ⎟⎠ ⎠ ⎜⎝ ⎜⎝ ω n ⎟⎠ ⎟⎠
 F/k
x=
2
   
⎛ ⎛ω ⎞ 2
⎞ ⎛ ⎛ ω ⎞⎞ 2

⎜ 1− ⎜ ⎟ ⎟ + ⎜ 2ξ ⎜ ⎟ ⎟
⎜⎝ ⎝ ω n ⎠ ⎟⎠ ⎝ ⎝ ω n ⎠ ⎠

IV. Application  on  mechanical  resonator:  

 
d dv dC
i= (Cv) = C + v x
dt dt dx
I ∂C ∂C
= jω C0 + jω X = Ye + jω X
V ∂x ∂x
∂C 2
∂C ∂C v
Ye + j
Fe
= Ye + j ∂x
∂x 2 ∂x 2
k ⎛ ⎛ ω ⎞ ⎞ ⎛ ⎛ ω ⎞⎞ k ⎛ ⎛ ω ⎞ ⎞ ⎛ ⎛ ω ⎞ ⎞    
2 2 2 2

⎜1 − ⎟ + 2ξ ⎜1 − ⎟ + 2ξ
ω ⎝ ⎜⎝ ω n ⎟⎠ ⎠ ⎜⎝ ⎜⎝ ω n ⎟⎠ ⎟⎠ ω ⎝ ⎜⎝ ω n ⎟⎠ ⎠ ⎜⎝ ⎜⎝ ω n ⎟⎠ ⎟⎠
2
⎛ ∂C ⎞ 2
⎜⎝ ⎟⎠ v 2
∂x N
Ye + j = Ye + j
2 Z m0
k ⎛ ⎛ ω ⎞ ⎞ ⎛ ⎛ ω ⎞⎞
2 2

⎜1 − ⎟ + 2ξ
ω ⎝ ⎜⎝ ω n ⎟⎠ ⎠ ⎜⎝ ⎜⎝ ω n ⎟⎠ ⎟⎠

⎧ 2 ∂C 2 2 ∂C
⎪N = v = Fe
⎪ ∂x ∂x
⎪
With     ⎨ Z m0 = Fe = 1    
⎪ x 2 2
k ⎛ ⎛ ω ⎞ ⎞ ⎛ ⎛ ω ⎞⎞
2

⎪ ⎜1 − ⎟ + 2ξ
⎪ ω ⎝ ⎜⎝ ω n ⎟⎠ ⎠ ⎜⎝ ⎜⎝ ω n ⎟⎠ ⎟⎠
⎩
 1 I N2
= = jω C0 +
Z MEMS V jω m + b + (k / jω )
jω m + b + (k / jω )
⇒ Z MEMS =
jω C0 ( jω m + b + (k / jω )) + N 2
⎛ 1 ⎞
( )
jω m / N 2 + b / N 2 + (
1 k
jω N 2
) Req + j ⎜ ω Leq −
⎝ Ceqω ⎟⎠
= =
⎛ 1 k ⎞ ⎡ ⎛ ⎞⎤
(
jω C0 ⎜ jω m / N 2 ) +b/ N +(
2
) +1 jω C0 ⎢ Req + j ω Leq − 1 − 1 ⎥
2 ⎟ ⎜
⎝ jω N ⎠
⎢⎣ ⎝ Ceqω C0ω ⎟⎠ ⎥⎦
⎛ ⎛ ω0 ⎞ 2⎞ ⎧ 2 2⎛ ω12 ⎞ C
Req + jω Leq ⎜ 1 − ⎜ ⎟ ⎟ ⎪ω = ω 2
+ ω 2
= ω 0 ⎜ 1 + ⎟ = ω 0 1 + eq
⎝ ⎝ω⎠ ⎠ ⎝ ω0 ⎠
A 0 1
⎪
2
C0
= with ⎨
⎡ ⎛ ⎛ω ⎞ ⎞⎤ 2
⎪ω 2 = 1 ;ω 2 = 1
jω C0 ⎢ Req + jω Leq ⎜ 1 − ⎜ A ⎟ ⎟ ⎥ ⎪ 0 LeqCeq 1 LeqC0
⎢⎣ ⎝ ⎝ ω ⎠ ⎠ ⎥⎦ ⎩  
Methodology  to  characterize  a  mechanical  resonator:  

We  first  determine  Keff  and  meff  then  we  compute  the  damping  coefficient  
keff meff
beff =  then  we  compute  the  ZMEMS  as  follows:  
Q

2nε 0 Lh
C0 = ×2
d
⎧ beff
⎪ Req = 2
⎪ N
 
⎛ ∂C ⎞ 2 ⎛ 2nε 0 h ⎞ 2 ⎪
2 2
N2
N =⎜ ⎟ v =⎜
2
v ⇒ ⎨Ceq =
⎝ ∂x ⎠ ⎝ d ⎟⎠ ⎪ keff
⎪ m
⎪ Leq = eff2
⎩ N

To  get  ZMEMS  purely  inductive  we  need   ω 0 < ω < ω A ,  and  for  high  Q  resonator  we  
⎛ ⎛ ω ⎞2⎞
⎜ 1− ⎜ 0 ⎟ ⎟
1 ⎜⎝ ⎝ ω ⎠ ⎟⎠
can  deduce   Req  0 and Z MEMS =      
jω C0 ⎛ ⎛ ω ⎞ 2 ⎞
⎜ 1− ⎜ A ⎟ ⎟
⎜⎝ ⎝ ω ⎠ ⎟⎠