STMicroelectronics(AMK)

Exyte Services (Singapore) Pte. Ltd.

16 International Business Park #03-00 Singapore 609929

Work Method of Statement for Doc. No.

Date: 27 Oct 2018 NH4OH 25%, H2O2 30%, HCL 37%,
EXSS-STM-HK-MOS-014
HF 49%, H2SO4 96% Chemical
Revision No. 00 Systems Pressure Test (Hook- Up) Page No. 1 of 5

Project Title : STMicroelectronics Project

Client : STMicroelectronics

Contractor : Exyte Services (Singapore) Pte. Ltd.

System : NH4OH 25%, H2O2 30%, HCL 37%, HF 49%, H2SO4 96% Systems

Project No. : M-71281

Document No. : EXSS-STM-HK-MOS-014

Document Title : Work Method of Statement for NH4OH 25%, H2O2 30%, HCL 37%,
HF 49%, H2SO4 96 % Systems

DESCRIPTION NAME DESIGNATION SIGN/DATE

ORIGINATOR M. Zar Ni QA/QC

REVIEWED BY T.Benny Project Engineer

REVIEWED BY Lai Chin Wee Site Manager

APPROVED BY

EXSS-STM-HK-MOS-014 Exyte Services QA/QC Dept:

 STMicroelectronics(AMK)

Exyte Services (Singapore) Pte. Ltd.

16 International Business Park #03-00 Singapore 609929

Work Method of Statement for Doc. No.

Date: 27 Oct 2018 NH4OH 25%, H2O2 30%, HCL 37%,
EXSS-STM-HK-MOS-014
HF 49%, H2SO4 96% Chemical
Revision No. 00 Systems Pressure Test (Hook- Up) Page No. 2 of 5

TABLE OF CONTENTS

Section Description Page

1.0 Purpose 3

2.0 Scope of Work 3

3.0 Reference Document 3

4.0 Locations 3

5.0 Test Pressure and Holding Time 3

6.0 Test Boundary and Isolation 4

7.0 Step by Step Work Activity 4~5

EXSS-STM-HK-MOS-014 Exyte Services QA/QC Dept:

 STMicroelectronics(AMK)

Exyte Services (Singapore) Pte. Ltd.

16 International Business Park #03-00 Singapore 609929

Work Method of Statement for Doc. No.

Date: 27 Oct 2018 NH4OH 25%, H2O2 30%, HCL 37%,
EXSS-STM-HK-MOS-014
HF 49%, H2SO4 96% Chemical
Revision No. 00 Systems Pressure Test (Hook- Up) Page No. 3 of 5

1.0 PURPOSE
Ensure no one gets injured and get no incident/accident during Pressure test for
Ammonium Hydroxide 25%(NH4OH 25%), Hydrogen Peroxide 30%(H2O2 30%),
Hydrochloric Acid 37%(HCL 37%), Hydrofluoric Acid 49%(HF 49%), Sulphuric
Acid 96%(H2SO4 96%) double containment chemical Systems in under Hook-Up
Package work be performed at STMicroelectronics (AMK) project.

2.0 SCOPE OF WORK

To conduct pressure test of the NH4OH 25%, H2O2 30%, HCL 37%,HF 49%, H2SO4 96%
Hook-Up Package, Ammonium Hydroxide 25%, Hydrogen Peroxide 30%,
Hydrochloric Acid 37%, Hydrofluoric Acid 49%, Sulphuric Acid 96% chemical Systems
pipe work in STMicroelectronics (AMK) project.

3.0 REFERENCE DOCUMENTS

3.1 Risk Assessment (Applicable to EHS Department)

3.2 Safe work procedures (Applicable to EHS Department)
3.3 Latest Construction / As-built drawing.
3.4 Specification Appendix 1 Table outlined the summary of Hook Up
Qualification for Field Pressure Testing.

4.0 LOCATIONS

STM(Ang Mo Kio) AMK6, 6E, 2E, AMJ9 Level-1 sub-fab, cleanroom level-2 & level- 3
5.0 TEST PRESSURE AND HOLDING TIME
Testing Pressure : 29 psi Clear PVC (Outer Layer)
Holding time : 2 hours as per STM specification
Allowance of pressure drop : Zero decay

Testing Pressure : 58 psi PFA Tube (Inner Layer)

Holding time : 4 hours as per STM specification
Allowance of pressure drop : Zero decay

EXSS-STM-HK-MOS-014 Exyte Services QA/QC Dept:

 STMicroelectronics(AMK)

Exyte Services (Singapore) Pte. Ltd.

16 International Business Park #03-00 Singapore 609929

Work Method of Statement for Doc. No.

Date: 27 Oct 2018 NH4OH 25%, H2O2 30%, HCL 37%,
EXSS-STM-HK-MOS-014
HF 49%, H2SO4 96% Chemical
Revision No. 00 Systems Pressure Test (Hook- Up) Page No. 4 of 5

6.0 TEST BOUNDARY ISOLATION

Test boundary and test limit clearly show in P&ID (or) Lay-out drawing.

7.0 STEP BY STEP WORK ACTIVITY stop here now

I) PREPARATION

1) Conduct line walk/check with Exyte Services team, STM QA and STM hook-up
team member/engineer
2) Pipe work Hook-Up qualification checklist to sign and Punch list ‘A’ item need to be
cleared prior to pressure test
3) Apply permit for pressure testing and get approval from STM engineer and safety
department
4) Find out the isolation points and pressure gauge location,
5) Prepare N2 air charge in point (Use N2 cylinder for charging) ,
6) Mark all the location layout drawing (Highlighted in the attached drawing)
7) Check pressure gauge calibration certificates, pressure gauge range, and pressure
gauge calibration period shall be within one year.
8) Take over the area and barricade with warning signboard to prevent from any
accident/incident during pressure test.

II) CONDUCT (N2) NITROGEN AIR PRESSURE TEST

Clear PVC Outer Layer Tesing

1) Close all the isolation valves to isolate testing zone

2) Install the pressure gauge for NH4OH,H2O2,HCL,HF,H2SO4 chemical lines testing
3) Make sure that all the socket coupling joints and threaded joints to be tightened
properly before filling the N2 air to chemical hook up pipe lines(Clear PVC outer).

4) Connect hoses from nitrogen cylinder source to charge in the chemical lines.
5) Open N2 cylinder main valve to charge in the clear PVC outer layer pressure test.

EXSS-STM-HK-MOS-014 Exyte Services QA/QC Dept:

 STMicroelectronics(AMK)

Exyte Services (Singapore) Pte. Ltd.

16 International Business Park #03-00 Singapore 609929

Work Method of Statement for Doc. No.

Date: 27 Oct 2018 NH4OH 25%, H2O2 30%, HCL 37%,
EXSS-STM-HK-MOS-014
HF 49%, H2SO4 96% Chemical
Revision No. 00 Systems Pressure Test (Hook- Up) Page No. 5 of 5

6) Pressure up 0~5 psi, hold pressure for 15-20 minutes and check for any leakage and
monitoring.
7) Slowly increase pressure up from 5~10psi, 10psi~15psi, 15psi~20psi, 20psi~29psi
gradually pressure increase for monitoring.
8) Ensure all inline valves are opened within the test boundary limit.
9) If found no leak, hold pressure at 29 psi(for Clear PVC Outer Layer) and follow
QA/QC procedure for testing.

PFA Tube Inner Layer Testing

10) Install PFA tube into outer layer pipe lines after outer layer testing is passed.
11) Blank off the PFA tube both end sides for nitrogen air testing.
12) Connect hose from nitrogen cylinder source to charge in the PFA tube for testing.
13) Open N2 cylinder main valve to charge in the PFA tube(inner layer) pressure test.
14) Pressure up 0~5 psi, hold pressure for 15-20 minutes and check for any leakage &
monitoring.
15) Slowly increase pressure up from 5~15psi, 15psi~25psi, 25psi~35psi, 35psi~45psi
45 psi~ 55 psi gradually pressure increase for monitoring.
16) If found no leak, hold pressure at 58 psi for PFA tube inner layer and follow
QA/QC procedure for testing.

III) DEPRESURIZATION

1) Barricade the whole working area and put warning/caution signage

2) Release the nitrogen pressure form chemical pipe lines
3) Clean the area and remove all warning signs.
IV) SAFETY MEASURES TO BE TAKEN

 Barricade the work area during pressure test.

 Full time supervisor should supervise the whole testing activity.
 Don’t allow any work activity at testing zone.
Make sure housekeeping at all times and don’t leave any loose materials at floor
unattended.
Use proper warning and caution signage.

<<<<<<<<< The End >>>>>>>>>

EXSS-STM-HK-MOS-014 Exyte Services QA/QC Dept: