CC PHNG PHP CH TO

MNG HA HC
HV: Trn Th Thanh Thy
CHK18

CC LOI MNG HA
Mng nhy kh/lng:
Al2O3,Ta2O5, Si3N4-> mng nhy pH
ZnO:Ga, SnO2:Sb -> nhy hi cn..
Mng chng n mn:
Tb-Fe-Co hay Tb/Fe-Co
Al-SiO2, Al2O3:Mg
Mng ngn khuch tn:
Ta-Si-N, ZnO, Ni (Al/Si trong bn dn loi n)
ZnAl3 (Al/Au)
TiN, TiO2 dng tinh th hay v nh hnh
(PbTiO3/Si)
CM BIN KH/LNG LP NGN
KHUCH
TN
LP CHNG
OXI HA HOC
N MN
Solgel
Phn x
CVD,MOCVD
(metalorganic CVD),
PECVD,LPE
LPCVD,EPD, spray
pyrolysis
Phn x
ALD(atomic
layer
deposition),
PE-ALD,
CCVD
(combustio
n CVD)
Phn x
TVA (thermionic
vacuum arc)
PE-ALD, PLD
(pulse laser
deposotion)
PHNG PHP SOLGEL
Sol (solution), Gel(gelation)
y l phng php ha hc t tng hp cc
phn t huyn ph dng keo rn
(precursor:SnCl4.5H2O, SbCl3.2H2O) trong
cht lng sau d to thnh nguyn liu lng
pha ca b khung cht rn,c cha y dung
mi cho n khi xy ra qu trnh chuyn tip
Sol-gel.
Cc alkoxide M(RO) l la chn ban u to
ra dung dch solgel vi cc xc tc thch hp.
C CH TO DUNG DCH
SOLGEL T ALKOXIDE
M(OR)+H2O -> M(OH) + R(OH) (thy phn)
M(OH)+M(OH)-> MOM + H20 (ngng t)
M(OH)+M(OR)-> MOM +ROH (ngng t)
V D: to mng SiO2
Thy phn:
(C2H5O)3-Si-OC2H5 + H2O -> (C2H5O)3-Si-OH
+ C2H5OH
Ngng t:
(C2H5O)3-Si-OH + OH-Si- (OC2H5)3 ->
(C2H5O)3-Si-O-Si-(OC2H5)3
alkoxide
sol
CC K THUT TO MNG T
DUNG DCH SOLGEL
K thut ph nhng (dip coating)
K thut ph quay (spin coating)
K thut ph dng chy (flow coating)
K thut phun (spray coating)..
Capillary coating
DIP COATING
Ph nhng vt liu c
mt cong nh mt
knh, thu knh.
C th ph nhng vt
liu c dy t 20nm
n 50micromet bng
cch chn nht ca
cht lng sao cho ph
hp.
Deposition system:
Deposition speed 0.1 to 85 mm/min
Speed adjustment 0.1 mm/min (ly lm n v)
Arm stroke 145 mm
Deposition cycles Unlimited
Delay times Adjustable from 1 to 9999 seconds
Dipper motor Servo controlled DC motor
Maximum size of substrate 100x100x10 mm (100 % immersion)
Drive Belt system:
Linear range of movement of
dipper unit
0 to 600 mm
Speed of linear movement 0.01 to 400 mm/min
Barrier motor High precision micro Stepp driven
stepper motor
CC THNG S K THUT CA MY
0
0.8
U
h
g
q

=
h
q
0
U

g
: dy lp cht
lng
: nht cht
lng
:vn tc rt
:khi lng ring
cht lng
: gia tc trng
trng
FLOW COATING
- dy ca mng ph
thuc: nghing ca ,
nht cht lng,tc
bay hi dung dch
-S dng i vi
khng bng phng v
ph trn din tch ln
- C th thc hin quay
mu sau khi ph tng
dng u ca dy
mng mng.


K THUT PH QUAY MU
Phng php ny s dng lc quay li tm
ph mng, mng c ng u cao nh
lc li tm cn bng vi lc o nht ca
dung dch
Cc bc tin hnh:


0
2
0
3
(1 / ).
2
A A
A
m
h
q

e
| |
=
|
\ .
DY LP PH KHNG
PH THUC LNG
DUNG DCH CHO LN
0 A

e
q
m
:khi lng ring ban u ca
cht lng
: khi lng ring
: vn tc gc ca
: nht ca cht lng
: tc bay hi ca cht lng
Capillary coating
- Tit kim vt liu
- Ph c nhiu lp
- iu chnh dy mng
bng cch iu chnh tc
slot-tube
.( )
a
v
h k d =
X L NHIT CHO MNG
-Trong qu trnh to mng khu x l nhit rt
quan trng v n nh hng trc tip n vi
cu trc ca mng. Giai on ny c tc
dng lm bay hi ht dung mi cn li trong
mng, vt cht kt ni vi nhau chc ch
hn hnh thnh nn bin ht lm nh hng
n vi cu trc ca mng. i vi mng nhy
kh cu trc xp ca mng rt c quan
tm
-Sau khi x l nhit ta c th tin hnh ph
in cc d dng cho vic phn tch mu.
K THUT PH C IN
PHNG PHP NHC IM
Chemical Vapor
Deposition (CVD)
+i hi nhit v p sut thp
+ chu nhit cao
+kh ph mng c nhiu thnh phn
Physical Vapor
Deposition (PVD)
+Kh ph mng c nhiu thnh phn.
+Bung chn khng phi c p sut cao.
+ phi tng thch.
+Kh to b mt phng

Sol-gel

+Kh duy tr tinh khit
+Gm nhiu bc tin hnh phc tp (hiu
sut thp), tn thi gian.
+Ch c duy nht c nhit cao
PHNG PHP CCVD
( Combustion Chemical Vapor Deposition)
HNH NH THC T

Left: One of nGimat's small pilot facilities for production of nanopowders
Right: nanopowder-producing CCVC flame.
U IM
C kh nng sn xut vt liu a thnh phn
mt cch n gin v nhanh chng nh iu
chnh dung dch ha hc-> m rng phm vi
ng dng
iu chnh c kch thc, hnh dng v
hnh thi hc ca cc ht nano.
My hot ng mi trng khng kh bnh
thng
NHC IM
Tin cht phi ha tan c v d bt la
Dng c t tin
K THUT PLD
(pulse laser deposition)
Phng php PLD c ch trong vi nm va qua v
phng php ny ph c thnh cng nhng hp cht
phc tp. K thut PLD ln u tin s dng ph mng
siu dn YBa2Cu3O7. K t nhiu vt liu kh ph bng
nhng phng php bnh thng , c bit l nhng hp
cht gm nhiu loi oxit khc nhau c ph thnh cng
bi phng php ny. Phng php ny dng ph
nhng mng nhy PH nh Al2O3, Ta2O5, cc loi mng
chng oxi ha hoc n mn
Loi Sensor pH pH pH
Mng Sensor Al2O3 Si3N4 Ta2O5

Khong o
(pH)
2-12 2-12 2-12
Cng
(mV/pH)
54-56 53-55 56-58
Thi gian
hng
ng(pht)
1 1 1
bn 3 nm 6 thng 1 nm
LCH S PHT TRIN CA PLD
1916 Albert Einstein gi nh qu trnh pht x kch
thch.

1960 Theodore H. Maiman xy dng my maser
(microwave amplification by stimulated emission
radiation)-my khuch i vi sng bng bc x cm ng
s dng thanh ruby nh l mi trng tc dng laser.

1962 Breech v Cross s dng laser ruby lm bay hi
v kch thch nguyn t t b mt cht rn

1965 Smith v Turner s dng laser ruby ph mng
. Dnh du s khi u ca k thut PLD
u thp nin 80- nh du s to ra thit b ph mng
bng laser v k thut epitaxy . Mt vi nhm nghin cu
t c nhng kt qu ng ch trong vic sn xut
ra nhng mng mng bng cch s dng k thut ny

1987 PLD thnh cng trong vic ch to nhng mng
mng siu dn nhit

Cui thp nin 80 PLD l mt k thut kh ni ting
trong vic ch to mng mng v c ch n rt
nhiu.
1990s s pht trin nhanh chng ca laser ko theo
s pht trin ca k thut PLD.

2000s- Drs. Koinuma and Kawasaki nghin cu ci tin h
thng PLD to ra nhng mu c cht lng cao v
gim thi gian ph mng
Nguyn tc hot ng
Metals Ceramics Others
Ag, Au, Cu, Ir, Ni, Rh, Pt, Ru,
Zn
Al
2
O
3
, Al
2
O
3
MgO, 3Al
2
O
3
2SiO
2
, BaCeO
3
,
BaCO
3
, BaTiO
3
, BST, doped-CeO
2
, Cr
2
O
3
, Cu
x
O,
[La
.95
Ca
.05
]CrO
3
, Fe
2
O
3
, In
2
O
3
, ITO, LaAlO
3
,
LaPO
4
, LSC, LSM, MgO, Mn
2
O
3
, MoO
3
, Nb
2
O
5
,
NiO, NSM, PbSO
4
, PbTiO
3
, PdO, PLZT, PMN,
PMT, PNZT, PZT, RbO
x
, RhO
x
, RuO
2
, SiO
2
,
Spinels (e.g. NiAl
2
O
4
, NiCr
2
O
4
), Silica Glasses,
SnO
2
, SrLaAlO
4
, SrRuO
3
, SrTiO
3
, Ta
2
O
5
, TiO
2
,
V
2
O
5
, WO
3
, YBa
2
Cu
3
O
x
, YbBa
2
Cu
3
O
x
, YIG, YSZ,
YSZAl
2
O
3
, YSZ-Ni, ZrO
2
, ZnO (+ dopants in
many cases)
Over 10 polymers
(polyimides, Nafion
TM
,
epoxies), numerous
composites of metals,
ceramics and polymers
Substrates Used
Al, Brass, Ag, Cu, Pt, Ni, Stainless and C-Steel, Al
2
O
3
, Fiber Tows, Glass, Graphite, LaAlO
3
, MgO, Nafion
TM
,
NiCr, Optical fibers, OPP, PET, Polycarbonate, Silica, Si, Si-Ti/Pt wafers, SiC, Si
3
N
4
, Superalloys, Teflon
TM
, Ti,
TiAl alloy, YSZ, powders
Some Applications
Adhesion, capacitors, catalytic applications, corrosion resistance, gas diffusion barriers, electronics,
engines, ferroelectric materials, flat panel displays, fuel cells, interface layers, optics, piezoelectrics, resistors,
RF and millimeter wave components solar cells, superconductors, thermal barrier, thermal control, and wear
resistance
VT LIU PH
PLD-3000
Bia
Thit b gi