MEMS SENSOR IN VARIOUS DOMAIN

BIBEK MONDAL
M. Tech. (Instrumentation and Integrated Electronics)
22EE64R07
 THERMAL DOMAIN
TEMPERATURE
• Thermistor
• Principle operation :measure temperature by detecting the
resistance.
• Application :
• Range =-40°C to +125°C :temperature monitoring of vaccines,
medical laboratory equipment
in automotive industry such as battery management , in smartphone

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 MECHANICAL DOMAIN
FORCE
• Mems Load Cell
• Operating Principle: Measures force by detecting changes in
capacitance or resistance.
• Application:
• Upto 10N range: touch screens, force-sensitive buttons,
accurate force measurements during surgical procedures or
monitoring the performance of the devices.
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 PRESSURE
• Mems Barometer
• Operating Principle: Measures pressure by detecting
changes in capacitance or resistance and electric field.
Specification:
• Application(MS5637 ):
• Range= 10 to 2000 mbar: ventilators and blood pressure
monitor, weather forcasting and climate monitoring.

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 VELOCITY
• Mems Velocity Sensor
• Operating Principle: Measures velocity by detecting changes
in capacitance or resistance
Specification:
• Application(VSI-101):
• Range=0.1 to 50 in/s, Sensitivity=100 mV/in/s : machine
monitoring, to measure vibrations and detect faults in
machinery, engine testing and vehicle dynamics testing.
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 ACCELERATION
• Capacitive Acceleromter
• Operating Principle: Measures acceleration or vibrations by
detecting changes in capacitance or resistance
• Application(ADXL354):
• ±4 g range: tilt sensing, motion sensing, and shock detection.
• ±8 g and ±16 g ranges: vibration monitoring, impact sensing,
and freefall detection.

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 POSITION
• Mems Gyroscope
• Operating Principle: Measures position or displacement by
detecting changes in capacitance or resistance.
• Application(L3GD20):
• ±500 dps range : motion sensing, gaming, and virtual reality
• ±2000 dps range: navigation, altitude determination.

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 CHEMICAL DOMAIN
CONCENTRATION
• Mems Gas sensor
• Operating Principle: measure concentration by reacting
metal oxide with target gas or chemical species .
• Application(SGAS701):
0.2 to 5 ppm : detect the presence of carbon monoxide (CO) in
the air .

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 pH
• MEMS pH sensor
• Operating Principle: measure by detecting the changes
of electrical property of ion sensitive FET .
• Application:
• range of 2-12 pH: ph level of blood glucose, water quality in
rivers, lakes, and oceans

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 REACTION RATE
• MEMS reaction rate sensor
• Operating Principle: By detecting the change of beam’s
resonant frequency we can measure reaction rate.
• Application: monitor biological reactions such as enzyme kinetics,
rate of degradation of pollutants in water or air .

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 MAGNETIC DOMAIN

FLUX DENSITY
• Hall effect magnetometer
• PRINCIPLE OPERATION : works on Hall effect where a magnetic
field perpendicular to a current-carrying conductor causes a voltage
difference to appear across the conductor.
• APPLICATIONS
• up to 8 Gauss : use in compassing, navigation
• Up to 16 Gauss : magnetic field and determine the orientation of
the robot, orientation of the device.
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 MAGNETIZATION
Giant Magnetoresistive (GMR) sensors
• PRINCIPLE OPERATION : detects changes in magnetic
fields by measuring the deflection of a small cantilever
beam .
• APPLICATIONS :
• sensitivity of 1.45 mV/V/Oe and temperature range of -40°C to
125°C : current sensing, position sensing, and motion sensing

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 INTENSITY
• Photodiode or Phototransistor
• PRINCIPLE OPERATION : When light falls on a photodiode, it creates
electron-hole pairs in the p-n junction, which generates a flow of current
proportional to the intensity of the light.
• APPLICATION:
• 320-400 nm : smart watches to measure UV exposure
• 320-1100 nm :automatic brightness adjustment for displays,
optical communication systems
• 320-1100 nm :medical devices, such as pulse oximeters
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 WAVELENGTH
• Mems Wavelength Sensor
• PRINCIPLE OPERATION : operates on the principle of
interference of light.
• APPLICATIONS:
range of 700-1100 nm : wavelength-selective switch for optical
communication
range of 340-850 nm :detect light in the visible and near-infrared
(NIR) regions

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 POLARIZATION
• Polarization-Sensitive Optical Array (PSOA)
• PRINCIPLE OPERATION : By detecting the phase shift of
birefrigent elements we can detect polarization .
• APPLICATIONS:
2-14 µm and a sensitivity=0.1 mV/W: polarization state of
infrared light.

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 PHASE
• Micromachined Interferometric Sensor (MIS)
• PRINCIPLE OPERATION : The phase of light can be measured
by passing the light through the interferometer .
• APPLICATIONS:
used in lithography to pattern and etch materials ,

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 ELECTRICAL DOMAIN

VOLTAGE
• Electrostatic MEMS voltage sensors
• PRINCIPLE OPERATION: measure voltage by detecting
the change of resistance of piezoresistive material .
• APPLICATIONS : measure voltage in batteries which used
in vehicle and portable electronic , measure voltage in
renewable energy system .

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 CHARGE
• Electrostatic MEMS voltage sensors
• PRINCIPLE OPERATION: measure charge by detecting
the change of capacitance of electrode .
• APPLICATIONS:
• measure charge in batteries which used in vehicle and portable
electronic
• monitor the charge and current in various medical equipment

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 ELECTRICAL DOMAIN

CURRENT
• Hall effect Sensor
• PRINCIPLE OPERATION: measure current detecting the
magnetic field which is generate by current carrying
conductor .
• APPLICATIONS: measure current in various electronic
equipment.

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THANK YOU

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