:

-1 ) (
. A4
) ( :

.a

.b packaging
.c microfabrication .

-2 ) ( miniaturization Scaling
. ) (
.
.
. :Scaling
(
.
( Scaling
. :
Scaling Laws of Microactuators and Potential Applications of
Electroactive Polymers in MEMS , Chang Liu, and Y. Bar-Cohen
Proceedings of SPIE's 6th Annual International Symposium on Smart Structures and Materials, 1-5 March, 1999

-3 3 4MicrosystemDesign (Senturia) .
3.1,3.2,3.4:3
:4

4.1,4.3,4.5

-4 3 ThinfilmDeposition
. .