Vacuum Techniques Pumps PDF

Vacuum techniques
Pumps
Dr. G. Mirjalili, Physics Dept. Yazd University

Vacuum theory and
pumping laws
How the
vacuum is
created?

Production of vacuum
• to reduce gas density in given volume to below
atmospheric pressure with pump
• enclosed vessel has continuous sources which launch
gas into volume and present pump with continuous gas
load
• vacuum achievable at steady state is result of dynamic
balance between gas load and ability of pump to remove
gas form volume

Vacuum pumps and their
characteristics
• Gas transfer pumps:

(a) Positive displacement pumps that transfer
repeated volumes of gas from inlet to outlet
by compression ( e.g. rotary pump).
(b) Kinetic pumps that continuously transfer gas
from inlet to outlet by imparting momentum to
gas molecules (e.g. Diffusion pump,
turbomolecular pump).
• Entrapment/capture pumps,
retain molecules by sorption or

condensation on internal surfaces
(e.g. sorption pump, sublimation
pump, sputter ion pump,
cryogenic pump).
Low vacuum pumps
(1atm-10-3)
mbar
Roughing Pumps
1
Vacuum (units) Typical High
Pressure
1.3x10-9 1.3x10-6 1.3x10-3 1 atm.
1 Torr =
1 mm-Hg
1x10-6 Torr 1 mTorr 1 Torr 760 Torr
1 Pascal =
1 N/m2
0.133x10-3 Pa 0.133 Pa 133 Pa 101,333 Pa
Typical Low Pressure
Ultrahigh Vacuum High Vacuum Rough Vacuum

VACUUM PUMPING METHODS
VACUUM PUMPS
(METHODS)
Gas Transfer Entrapment

Vacuum Pump Vacuum Pump
Positive Displacement Kinetic Adsorption

Vacuum Pump Vacuum Pump Pump
Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Displacement Pump Pump Pump Pump Pump
Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Pump Pump Ring Pump Pump Pump Pump
Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Pump Piston Pump Pump Pump Pump Pump Pump
Multiple Vane Sliding Vane Axial Flow Gas Jet Diffusion Self Purifying Evaporation
Rotary Pump Rotary Pump Pump Pump Ejector Pump Diffusion Pump Ion Pump
Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Plunger Pump Pump Pump Diffusion Pump Pump
Molecular
Drag Pump
Dry Roots
Cryopump
Pump Pump
Turbomolecular
Pump
Dr. G. Mirjalili, Physics Dept. Yazd University Condenser
Name of Pump Mechanism of Pumping
Mechanical (roughing)* Compression of gas
Sorption Physical or chemical absorption
Diffusion* Intermolecular collisions
Turbo Molecular collisions with surfaces
Ion Ionization and implantation of gas
Cryo(genic) Solidification of gas by liquid He
*used in lab

PUMP OPERATING RANGES
Ultra High
High Vacuum Rough Vacuum
Vacuum
Rotary Vane Mechanical Pump
Rotary Piston Mechanical Pump
Dry Mechanical Pump
Sorption Pump
Blower/Booster Pump
Venturi Pump
High Vac. Pumps
Ultra-High Vac. Pumps
10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

Dr. G. Mirjalili, Physics Dept. Yazd University P (mbar)
VACUUM SYSTEM USE
9 1 Chamber
8
2 High Vac. Pump
1 3 Roughing Pump
7
8 3a Foreline Pump
4 Hi-Vac. Valve
5 5 Roughing Valve
4
6 Foreline Valve
7
7 Vent Valve
2 8 Roughing Gauge
6 9 High Vac. Gauge
3a 3
Mechanical pumps
• Mechanical pumps (displacement pumps) remove gas atoms
from the vacuum system and expel them to atmosphere, either
directly or indirectly
• In effect, they are compressors and one can define a
compression ratio, K, given by
Pout
K
Pin
• K is a fixed value for any given pump for a particular gas species
when measured under conditions of zero gas flow.

Rotary Vane, Oil-Sealed
Mechanical Pump

Pump Mechanism

Gas ballastting

Pump Down Curves

The Molecular Sieve/Zeolite
Trap

Trap Rotary pump

Single &Dual Stage

How 2-stage rotary pump Works

OIL BACKSTREAMING
PRESSURE LEVELS: LESS THAN 0.2 mbar

Other types of Mechanical pumps
Rotary Vane
Rotary Piston
Roots
Dry pump

Dry Vacuum Pumps

Root pump

How Root Pump works

One Stage Roots Blower
Pump Assembly

Vacuum system use for Root
pumps
12 1 Chamber
11
2 Foreline
3 Roughing Valve
1 3 4 4 Roughing Gauge
5 Roughing Pump
9 2 6 Foreline
7 Foreline Valve
8 Foreline Gauge
9 High Vacuum Valve
10 10 Booster/Blower
11 Vent Valve
7 6 12 High Vacuum Gauge
8
5
Diaphragm pumps

Diaphragm pumps

Diaphragm Pump
• Eccentric shaft produces
alternate expansion /
compression process
• Inlet / outlet via reed
valves
• Ultimate vacuum 100 - 0.1
torr - limited by external
leakage past valves,
internal back-streaming,
dead volume
• Compression ratio
typically 10 - 30
• Pumping speed: single
unit 0.1-0.7 l/s, parallel
units up to 5.3 l/s
Diaphragm Pump
• High resistance to
chemical attack
• Oil free - used with
roots blower or
cryopump for
completely oil-free
system
• Lifetime ~ 5000
hours
Diaphragm pump

Piston Type Pump

Piston design

Sorption Pump

Sorption Pump Components

Sorption pumps
The sorption pump has no moving parts and therefore

no oils or other lubricants. (5 liters of liquid nitrogen)
HIGH VACUUM PUMPS
2
VACUUM PUMPING METHODS
VACUUM PUMPS
(METHODS)
Gas Transfer Entrapment

Vacuum Pump Vacuum Pump
Positive Displacement Kinetic Adsorption

Vacuum Pump Vacuum Pump Pump
Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Displacement Pump Pump Pump Pump Pump
Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Pump Pump Ring Pump Pump Pump Pump
Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Pump Piston Pump Pump Pump Pump Pump Pump
Multiple Vane Sliding Vane Axial Flow Gas Jet Diffusion Self Purifying Evaporation
Rotary Pump Rotary Pump Pump Pump Ejector Pump Diffusion Pump Ion Pump
Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Plunger Pump Pump Pump Diffusion Pump Pump
Molecular
Drag Pump
Dry Roots
Cryopump
Pump Pump
Turbomolecular
Pump
Dr. G. Mirjalili, Physics Dept. Yazd University Condenser
PUMP OPERATING RANGES
Ultra High
High Vacuum Rough Vacuum
Vacuum
Roughing Pumps
Liquid Nitrogen Trap
Diffusion Pump
Turbo Pump
Cryo Pump
Ion Pump
Tit. Subl. Pump
10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

P (Torr)
VACUUM SYSTEM USE (high vacuum)
9
8
1 Chamber
1 2 High Vac. Pump
7
8 3 Roughing Pump
3a Fore Pump
5 4 Hi-Vac. Valve
4
5 Roughing Valve
8
6 Foreline Valve
22 7 Vent Valve
8 Roughing Gauge
6
9 High Vac. Gauge
3
3a
Diffusion pumps

Diffusion pumps
• diffusion pump is one form of a fluid entrapment pump

– a fluid (usually oil) is heated and vaporized
– the vapor is A sent through a nozzle with supersonic speed
– the pump fluid vapor is condensed on a cooled surface
• Gas molecules are transported to the bottom of the pump by the pump
fluid, where it is evacuated by a backing pump (usually a rotary vane
pump) through the pump exhaust (the foreline)
• In order to work, the pump cannot be started until the foreline pressure
is sufficiently low (~millitorr)

Water ejector pump (Liquid Jet pump)

Pump Construction

How the Pump Works

How the Pump Works
-A coil heater (1) raises the temperature of

the oil pool (2) inside the pump body (3)
with external cooling coils (4)
-The pump body is bolted to the vacuum

system by a flange (5)
-The oil vapor rises through the housing that

has 4 exit nozzles (A – D).
- The oil vapor exits the nozzles at high

velocity (7) and collides with gas molecules
(6), imparting a downward momentum to
them.

Release of Vapors

First stage vapors are
separated from others

Pumping Speed
1 2 3 4
Pumping Speed (Air)
Critical Point
1. Compression Ratio Limit

2. Constant Speed
3. Constant Q (Overload)
4. Mechanical Pump Effect
10-10 10--3 10--1

Inlet Pressure (Torr)
Maximum Tolerable Foreline Pressure
(critical pressure)

LN2 reservoir with baffles

How the LN2 Trap Works
Approximate Vapor
Gas Pressure (mbar)
Water (H2O) 10-22

Argon (A) 500
Carbon Dioxide (CO2) 10 -7
Carbon Monoxide (CO) >760
Helium (He) >760
Hydrogen (H2) >760
Oxygen (O2) 350
>760
Neon (Ne)
760
Nitrogen (N2)
<10 -10
Solvents
Diffusion pump characters

Diffusion pump Fluids

Diffusion pumps -- additional information
• “The only justification for calling them diffusion pumps is due to
the observation that the molecules of the pumped gas penetrate
some distance into the vapor jet in a manner resembling
diffusion of one gas into another.” (Hablanian, High Vacuum
Technology)
• Original pumping fluid (before 1928) was mercury, since it did
not break down and early oils did -- over 99% today use oil
• The boiler pressure inside a nozzle is 1 to 2 torr, while at the
center of the vapor stream it is about 0.1 torr
• A cold trap is often used in the high vacuum side to reduce oil
backstreaming

Diffusion pumps -- additional information
• Low cost per unit pumping speed, very high pumping speeds
• Very well understood
• Hard to destroy
• Continuous operating expense (LN2)
• Potential for serious vacuum accidents
• “Open system”:Forbidden in certain applications

Vacuum system use for diffusion
pumps
Chamber
LN2 cold trap
Diffusion pump
Rotary
pump
• Turbomolecular
pumps

Turbomolecular pumps (high
vacuum and UHV)
• Medium to high cost per unit pumping speed
• Very clean, pumps rare gases
• Requires periodic maintenance which can be
expensive
• Difficult to reach very low UHV base pressures
• “Open system”:Forbidden in certain
applications

Pump Operation
Molecule V
Moving Wall with Speed V
Principle of the Turbomolecular Pump

Turbomolecular pumps
• Operation can be extended to higher pressure
by adding a drag stage

Principal of Turbomolecular pump

Rotor - stator assembly

Turbomolecular pump principle
• To maximise the compression ratio, blade tip velocities
need to be comparable to molecular thermal velocities.
• For a single blade, at zero flow
Pout 12
K 
Pin  21
• where α12 is the forward transmission probability
• and α21 is the reverse transmission probability
• It can be shown that
 Vb M 
K  exp  
 2kN 0 T 
• where Vb is the blade velocity

Compression ratio

high vacuum
moving rotors impart
downward momentum
to gas molecules
low pressure
stages moving rotors only:
a “molecular drag
pump”
med. pressure
fixed stators
stages decelerate the
molecule for the
next rotor “hit”
without the stators,

high pressure the next rotor could
stages not impart additional
fore velocity to the gas
vacuum molecule
Turbomolecular Pump
INLET FLANGE ROTOR BODY
STATOR BLADES
HIGH PUMPING SPEED
HIGH COMPRESSION
BEARING
EXHAUST
HIGH FREQ. MOTOR
BEARING

A typical turbomolecular pump

Turbomolecular Pumps
• Similar in design to a
jet engine.
Alternating rotor and
stator blade
assemblies turn at
20,000-90,000 rpm to
force out molecules.
Requires a region of
low or medium
vacuum behind and in
front of pump.
Pfeiffer Vacuum GmbH
Turbomolecular pump.
• Turbo pumps cannot pump from atmosphere

and cannot eject to atmosphere, so they require:
1-roughing (fore vacuum) pumps to reduce the
pressure in the vacuum system before they can
be started and
2-backing pumps to handle the exhaust.
• There are many types of roughing and backing
pumps. Most accelerators now use clean (dry)
pumps to avoid oil contamination in the system.

Turbopump (con’t)
• contains no oil and is capable of reducing the pressure into the ultrahigh
vacuum range
• operates as a “molecular bat”
- rotor blades spinning at speeds as high as 6x104 rpm,
- gives a blade velocity at a radius of 10 cm of 3.8x106 cm/s.
- the mean velocity of a molecule of N2 at 300 K is 4.8x104 cm/s
• Because the rotor blades are slanted downward, the gas
molecules are driven towards the pump outlet
• Blade sizes increase towards the high pressure exit port
∀• Stator (stationary) blade sets are placed between rotor blade sets
• Pumping efficiency is greatest when the spacing between blades is less

than the mean free path of the molecules. (~5 cm at 10-3 Torr)

Turbo pumps speed

Vacuum system use for Turbo
pumps
6
7 1 Chamber
1 2 Turbo Pump
4 3 Roughing Pump
4 Vent Valve
5 5 Roughing Gauge
22 6 High Vac. Gauge
Rotary pump
3
Turbo pump &Rotary pump
Turbomolecular Pump
Process chamber High rotation speed turbine
imparts momentum to gas atoms
Inlet pressures: <10 mTorr
Foreline pressure: < 1 Torr
Requires a rough pump
Good choice for toxic and
explosive gases –
-gases are not trapped in pump
foreline
All gases are pumped at approx.
the same rate
Pumping Speeds:
20 – 2000 liters per sec
adapted from Lesker.com
Ion Pumps

Ion Getter Pump
A getter
Is a material
that reacts
with a gas
molecule to
form a solid
nonvaporizable
material

Ion pump
• The ion pump works by ionizing
gas molecules and accelerating
them into walls coated with freshly-
evaporated titanium
– the gas ions strike a titanium
cathode and cause sputtering
– the sputtered Ti is reactive and
will getter reactive gases (N2,
O2)
– the gas ions can be buried by
self-ion implantation
• A strong magnetic field is applied
to cause the electrons to move in
helical paths and increase the
ionization efficiency
Ion pump (sputter- Ion pump, getter Ion
pump)

Ion pumps
• Main components
– Array of parallel
stainless tubes
– Various charged
surfaces
– Titanium or tantalum
coated surfaces
• Trap molecules with
varying speeds via
chemical reactions
Varian Scientific Instrumentation, Inc.
Ion pumps
• Ion pumps have several serious disadvantages
– low pumping speeds (inert gases are pumped
especially poorly)
– can only be started at low pressures (~ 10-4 torr)
– can “arc-over” if pressure increases suddenly
• However, ion pumps are very clean and can produce
very high vacuums (<10-12 torr)

Ion pump
• Expensive per unit pumping speed

• Low pumping speed
• Generates hydrocarbons
• Has a memory effect
• Very low maintenance
• Moderately difficult to destroy
• Excellent base pressures
• Does not pump rare gases well
• Does not pump hydrogen
• Closed system: very safe against
vacuum accidents
A typical
ion-pump

Ion Pumps
• Current (per cell) – and hence pumping
speed – depends on voltage, magnetic
field, pressure and history.
1.05 < n < 1.2
I  kP n
Pump life depends on quantity of gas pumped
> 20 years at 10-9 mbar
Prone to generate particulates
Leakage current unpredictable, so pressure
indication below 10-8 mbar unreliable
Ion Pumps

Ion Pumps
Diode Differential Starcell Triode
Diode
Voltage +7kV +7kV +2-5kV -5kV
Pumping Speed Highest Good Good Lowest
(Active gases)
Pumping Speed Lowest Good Higher Highest
(Noble gases)
Starting Pressure Lowest Lowest Good Highest
UHV Low Low Good Highest
Cost Lowest Higher Low Highest

Ion Pumps
Pumping in the basic diode Penning cell

Ion Pumps
• The Diode pump has poor pumping speed
for noble gases
• Remedies
– Differential Ion; Noble Diode
• “Heavy” cathode
– Triode
– Special Anode shape e.g. Starcell

• Cryopumps

Cryo-condensation

Cryopumps

Pumping by Cryocondensation
molecules
Cold surface

Cryopumps
• Similar in principle to
the ion pump but uses
a cryogenically cooled
surface of activated
charcoal or zeolites to
condense and trap
gas molecules.
Kurt J. Lesker Vacuum Technology

Cryosorption in charcoal

Charcoal placement

Cryopumps
Cryopumps condense gases on cold
surfaces to produce vacuum
Typically there are three cold surfaces:
• Inlet array condenses water and
hydrocarbons (60-100 Kelvin)
• Condensing array pumps argon,
nitrogen and most other gases (10-20
K)
• Adsorption is needed to trap helium,
hydrogen and neon in activated carbon (Campbell)
at 10-12 K. These gases are pumped
very slowly!
Warning: all pumped gases are trapped inside the pump, so explosive, toxic
and corrosive gases are not recommended. No mech. pump is needed until regen.
adapted from www.helixtechnology.com
Cryopumps
• Expensive per unit pumping speed

• Very high pumping speeds are possible
• Pumping hydrogen (pumps everything)
• Requires periodic recharging
• Vibration can be a serious problem
Types of Cryogenic Pumps
• There are two major classes of such
pumps
– Liquid Pool
• Liquid helium temperature (~4K)
– Closed cycle
• Refrigerator (~12K)
• Supplemented by cryosorption

Cyro pump (Liquid Pool)

Cyro pump (Closed cycle )

Cryogenic Pump Speed

Getter Pumps
• When a gas molecule impinges on a clean metal film,
the sticking probability can be quite high.
• For an active gas with the film at room temperature,
values can be between 0.1 and 0.8. These fall with
coverage.
• For noble gases and hydrocarbons sticking coefficients
are very low (essentially zero)
• Evaporated films, most commonly of titanium or barium,
are efficient getters and act as vacuum pumps for active
gases.

Getter pumps
• In recent times, thin films of getter material have been
formed on the inside of vacuum vessels by magnetron
sputtering
• These have the advantage of
– pumping gas from the vacuum chamber by gettering
– and of stopping gases from diffusing out of the walls
of the vessels

Getter Pumps
• For vacuum use, the most common getter
pump is the titanium sublimation pump

Titanium sublimation pumps (HV and
UHV)
• Very inexpensive and simple

• Requires periodic maintenance,
which is cheap
• Often misused, which limits their
performance
• Selective in what it pumps (good for
oxygen, N2, air, not for rare gases)
A typical titanium sublimation pump

Others Getter Pumps
• An important class of getter pumps are the Non
Evaporable Getters (NEGs)
• These are alloys of elements like Ti, Zr, V, Fe, Al which
after heating in vacuo present an active surface where
active gases may be gettered
• Traditionally, the getters take the form of a sintered
powder either pressed into the surface of a metal ribbon
or formed into a pellet

Getter Pumps

Getter Pumps

• Vacuum cycle

Pumpdown Curve
• Conditions:
– Chamber closed and sealed
– Vacuum pump on and all isolation valves open
– No gas flowing into the chamber
• What would an ideal pumpdown curve look
like?
• What effect would the following have on the
ideal curve?
– Real (Gross) Leak
– Virtual Leak
– Permeation Leak
– Outgassing
– Backstreaming
Pumpdown procedure

Venting procedure

System pumpdown

Standard Vacuum Cycle
• Step 0: Start at atmospheric pressure at t=o
– load wafer and close chamber
– alternative, start at loadlock pressure (~100mT)
• a loadlock is a separate vacuum chamber that
prevents the chamber from being exposed to
atmosphere
• Step 1: Pump down to base pressure

– remove atmospheric contaminants from the
chamber
– verify system integrity
– continue to next step: when pressure falls below a
trigger point
– abort: if base pressure is not reached within a
certain amount of time, indicating a leak or a pump
• Step 2: Introduce gasses and stabilize
pressure
– pressure increases from base pressure to process
pressure
– most reactive gas is introduced last
– throttle valve controls conductance to achieve
desired process pressure (effects residence time of
gasses)
– continue to next step: when pressure reads within a
specified range
– abort: if process pressure is not reached within a
certain amount of time, indicating a pressure control
problem

• Step 3: Process
– equilibrium is maintained through controlled gas flow
and controlled (throttled) pressure
– RF power (if applicable) is introduced
– continue to next step: when pre-set time is reached,
or endpoint is detected (for etch process)
– abort: if pressure drifts outside of desired range

• Step 4: Pump Out
– gas flows and RF Power (if applicable) are turned off
– throttle valve opens wide
– purpose is to remove the majority of the reactive
gasses from the chamber
– continue to next step: when base pressure is
reached for a minimum length of time
• Step 5: Purge
– inert gas (usually nitrogen - why?) is introduced into
the chamber
– pressure inside the chamber increases to a trigger
point
– presence of nitrogen restores viscous flow allowing
residual reactive gasses to be efficiently pumped
(rinsed) out
– continue toDr. G. Mirjalili, Physics Dept. Yazd University
next step: when a minimum pressure is
• Step 6: Second Pump Out
– turn off nitrogen
– pump out nitrogen and residual reactive gasses to
base pressure
– continue to next step: when base pressure is
reached for a minimum length of time
– Note: steps 5 and 6 may be repeated
• Step 7: Vent
– close all valves between chamber and pump
– flow nitrogen directly into chamber
– pressure increases from base pressure to
atmospheric (or loadlock) pressure
– continue to next step: when atmospheric pressure is
reached
• Step 8: Open Chamber and Unload Wafer
Abort Conditions
• Abort = Failure to meet all conditions required
to continue processing.
– Pressure not in range, Gas flow not in range,
Electrical or mechanical malfunction, Timeout,
Interlock tripped.
– Accompanied by an audible and visible alarm.
• Abort Priority:
– 1. System immediately goes to safest possible state.
– 2. Possible recovery of product material.
• Safest Possible State:
– Shut off all gas flows.
– Shut off RF power (if applicable).
– Pump(s) on, all isolation and throttle valve(s) wide
open.

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Vacuum techniques

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

• Gas transfer pumps:

retain molecules by sorption or

1.3x10-9 1.3x10-6 1.3x10-3 1 atm.

Typical Low Pressure

Ultrahigh Vacuum High Vacuum Rough Vacuum

Dr. G. Mirjalili, Physics Dept. Yazd University

Gas Transfer Entrapment

Positive Displacement Kinetic Adsorption

Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Dr. G. Mirjalili, Physics Dept. Yazd University

10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

PRESSURE LEVELS: LESS THAN 0.2 mbar

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

The sorption pump has no moving parts and therefore

Gas Transfer Entrapment

Positive Displacement Kinetic Adsorption

Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

Dr. G. Mirjalili, Physics Dept. Yazd University

• diffusion pump is one form of a fluid entrapment pump

is sufficiently low (~millitorr)

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

-A coil heater (1) raises the temperature of

-The pump body is bolted to the vacuum

-The oil vapor rises through the housing that

- The oil vapor exits the nozzles at high

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

Dr. G. Mirjalili, Physics Dept. Yazd University

1. Compression Ratio Limit