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MicroMachine
Presented by:
Vertically Challenged
Introduction
Richard Tu
Terrence Yu
What are Micromirrors?
• Change the angle of a reflected beam in
multiplexing and de-multiplexing of
optical signals
• Very precise and flawless
• Aim: raise the mirror to the desired
angle
Mirror Animation
Wafer
The Solution
• Provide initial lift to the mirror
Fixed
Hinge Mirror Lever Applied
Force
Wafer
Thermal Actuators
• Make use of differing arm thickness to
provide movement
• Problem: using the principles described,
it is difficult to obtain vertical movement
Vertical Thermal
Actuators
• Design 1: Built to provide a downward
motion but is overdriven; when current
is removed the actuator snaps up
Poly 0
Poly 1 2
20
Poly 2
More
Vertical Thermal
Actuators
• Design 2: Provides upward motion
through the use of thin flexible
connectors
Poly 0
Poly 1 2
20
Poly 2
Even More
Vertical Thermal
Actuators
• Design 3: U-shaped designed to
prevent thicker arm from conforming
Poly 0
2
Poly 1
Poly 2
20
Thermal Actuator
Animation
Poly 0
Poly0
More Levers
• Design 5: Flexible connector used to
transfer downward force of Vertical
Thermal Actuator to a lever
Poly 0 Poly0
Poly 1
Poly 2
Lever Animation
Staple
Poly 0
Poly 1
Poly 2
Staple Hinge
Staple Hinge Issues
Poly 0
Poly 2 Applied
Force
Rotating bar
Torsion Hinge
• Thin flexible rods attached to mirror on
either side Torsion
Hinge
Rotating
Bar
Applied
Poly 0
Mirror Force
Poly 1
Lever
Poly 2
Terrence
Thanks To
• Dr. Ash Parameswaran
• Rob Johnstone
• Shivalik Bakshi
• Coffee
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