Mid Sem Presentation

on
MEMS based Sensors
Presented by-
Uday Pal – BTECH/10136/21
Adnan Salik – BTECH/10134/21
Pranoy Jana – BTECH/10173/21
Guided by – Dr. Priyank Saxena

Department of Electronics and Communication Engineering, BIT Mesra

Contents

 What is MEMS ?
 Advantages of MEMS-over conventional sensor
 Objective
 Literature Review
 Methodology
 Conclusion and Future Scope
INTRODUCTION

What is MEMS ?
 Microelectromechanical Systems (MEMS) are tiny integrated devices that
combine mechanical and electrical components.

 They are fabricated using microfabrication techniques similar to those used in

the semiconductor industry.

 Size ranges from 1 to 100 micrometers (0.001 to 0.1 mm).

 Perform various functions such as sensing, actuating, data processing, and

communication.

 MEMS technology merges at the nanoscale into nanoelectromechanical systems

(NEMS) and nanotechnology.
Advantages of MEMS-based sensor over
conventional sensor

 High Scalability in Manufacturing

 Extreme Sensitivity

 High-Frequency Operation

 Low Power Consumption

 Integration with Microelectronics

Objectives

 Design of a MEMS-based customised sensor.

 Doing literature review of research papers published after 2020 on MEMS-

based sensor like temperature and pH sensor.

 Implementation and study of sensor design on COMSOL Multiphysics

(Ver 5.6).
COMSOL Multiphysics

 Comsol Multiphysics is a simulation software to study multiple physical effects

on different model designs.

 We implemented designs of basic sensors on Comsol Multiphysics version 5.6

 It gives an idea of physical properties before implementing the sensors on

hardware thus helping us find faults.

Literature Review

 Temperature sensor
 pH sensor
Temperature Sensor
Paper
Bhar, I. and Mandal, N., 2022. A
review on advanced wireless
passive temperature
sensors. Measurement, 187,
p.110255.
https://doi.org/10.1016/j
.measurement.2021.1102
55
Tang, C., Wang, Y., Li, Y., Zeng, S.,
Kong, L., Li, L., Sun, J., Zhu, M.
and Deng, T., 2023. A review of
graphene-based temperature
sensors. Microelectronic
Engineering, p.112015.
https://doi.org/10.1016/j.mee.202
3.112015
Principle
Works on Inductor-capacitor (LC) resonator-
based sensors
Capacitive sensing has been utilized to sense
and measure temperature with the help of
Si/Au bi-morphs coupling between primary
(reading side) and secondary side (sensing
side) of the LC sensor
Graphene is used as the connecting material.
Graphene is used due to its excellent
conductivity and ultra-high carrier mobility.
It has negative temperature coefficient and
shows semiconductor like properties.
These properties change under the influence
of temperature.
Merits
It has the facility of the passive, non-contact
and wireless sensing
Very advantageous in various field where
direct contact with the measurand body is
difficult like furnaces, automobile engines,
rotating objects, human body etc.
Conductivity of graphene is 2600 W/mK
which is very high and thus shows very fast
response.
Graphene based temperature sensors can
be made flexible on substrates like
Silicon/Silicon Dioxide and Silicon
Nitride(Si3N4).
Suggestions and Improvements
A team led by A.D. De Hennis has developed a wireless
microsystem that can passively measure various physical
parameters such as temperature, pressure, and humidity.
Researchers led by Y. Wang have developed a
temperature sensor specifically designed for extreme
environments with very high temperatures. This sensor
integrates a temperature-sensitive ceramic material that
possesses a high dielectric constant.
D. Marioli and colleagues have created an interdigitated
capacitor that adjusts its capacitance based on
temperature.
Professor Deng's research group has innovatively
proposed a three-dimensional (3D) FET-type graphene
temperature sensor. Compared with traditional 2D
sensors, 3D sensors have smaller area and higher
integration.
S. Hajian et al. used GO to product a highly sensitive
temperature sensor on a flexible substrate. The results
show that the sensor maintains a good temperature
linearity (R2 = 0.998) and has a relative high TCR
(−0.68%/°C).
Zeng et al proposed a high-temperature pressure sensor
based the graphene, which can avoid oxidation of
graphene at high temperatures by growing a layer of
Si3N4 on graphene. The temperature characteristics
indicate that the sensor can work normally at 50–420 °C.
Paper
Tang, C., Wang, Y., Li, Y., Zeng,
S., Kong, L., Li, L., Sun, J., Zhu,
M. and Deng, T., 2023. A review of
graphene-based temperature
sensors. Microelectronic
Engineering, p.112015.
https://doi.org/10.1016/j.mee.20
23.112015
Ma, L., Chen, D., Zheng, W., Li, J.,
Zahra, S., Liu, Y., Zhou, Y., Huang,
Y. and Wen, G., 2021. Advanced
electromagnetic metamaterials for
temperature sensing
applications. Frontiers in
Physics, 9, p.657790.
https://doi.org/10.3389/fphy.2021.
657790
Principle
Graphene has coefficient of thermal
expansion that when subjected to
temperature, generates stress within
graphene, causing it to stretch, shrink, or
fold
New sensing technologies based on the
resonant-type electromagnetic
metamaterials can be developed . The
resonant frequency and strength of resonant-
type electromagnetic metamaterials are
strongly correlated with unit cell structural
parameters and dielectric material
properties of substrates, and those structural
parameters and/or dielectric properties can
be varied by changing the temperature
Temperature Sensing Based on Temperature-
Sensitive Dielectric Inspired Metamaterials
such as the low-temperature co-fired
ceramic (LTCC) substrate, sea water, barium
titanate, lithium niobate, etc
Merits
Due to graphene’s excellent thermal
properties, there have been many
reports on graphene, graphene oxide
(GO) and reduce graphene oxide
(rGO) temperature sensors.
The metamaterial-inspired sensing
has the potential advantages including
the high precision, label-free, safety,
and can work properly in long-
distance wireless situation.
Advantages of miniaturization, high
flexibility and simple preparation
process.
Suggestions &Improvements
Liu et al. developed a flexible skin temperature sensor composed of
polyethyleneimine (PEI)/rGO bilayer. The sensor has a high sensitivity
(1.30%°C−1), a good linearity (R2 = 0.999) and an accuracy of 0.1 °C. They
solved the non-linear characteristic of conventional graphene structures.
Trung et al. suggested a FET-type temperature sensor which used rGO as a
temperature-sensitive material and tetrachloroethane (TTC) for packaging to
improve its stability. The temperature response of the rGO FET was
measured in the temperature range of 300–355 K. The experimental results
show that the device exhibits high sensitivity and good reproducibility.
Its dielectric constant changes with temperature increase/decrease are in a
very limited linear range. Therefore, its application become limited.
Therefore, it should be increased.
Ekmekci and Turhan-Sayan studied how a miniaturized metamaterial
sensor, operating at Xband, responds to temperature changes. By filling the
sensor with sea water as the background medium, they achieved a 158-MHz
resonant frequency shift corresponding to a 20°C temperature change. The
sensor exhibits an average sensitivity of 7.9 MHz per degree Celsius.
In 2014, Zhang and colleagues investigated temperature sensing using
barium titanate (Ba0.5Sr0.5TiO3, BST) as a dielectric material in
metamaterials. They found that the relative permittivity of the dielectric cut-
wire decreases with rising environmental temperature. As a result, the
electric resonant frequency shifts toward the blue end, yielding a calculated
temperature sensitivity of 25 MHz per degree Celsius.
Paper
Nag, A., Simorangkir, R.B., Gawade, D.R.,
Nuthalapati, S., Buckley, J.L., O'Flynn, B.,
Altinsoy, M.E. and Mukhopadhyay, S.C., 2022.
Graphene-based wearable temperature
sensors: A review. Materials & Design,
p.110971.
https://doi.org/10.1016/j.matdes.2022.1109
71
Ma, L., Chen, D., Zheng, W., Li, J., Zahra, S.,
Liu, Y., Zhou, Y., Huang, Y. and Wen, G.,
2021. Advanced electromagnetic
metamaterials for temperature sensing
applications. Frontiers in Physics, 9,
p.657790.
https://doi.org/10.3389/fphy.2021.657790
Principle
Graphene has been one of the most influential
elements in forming efficient, flexible sensors
due to its exceptional electrical, physical,
thermal and chemical properties.
rGO exhibits properties that are more similar
to those of pristine graphene, such as greater
electrical conductivity and carrier mobility as
compared to GO. The graphene-like
properties of rGO have made it an attractive
material for the development of
nano/hierarchical devices for various
applications, including batteries,
optoelectronics, supercapacitors.
Temperature Sensing Based on the Thermal
Expansion Coefficient Difference
The bending deformations due to the changes of
background temperature will alter the equivalent
capacitance/inductance parameters of the meta-
atom, thereby causing the resonant frequency shift
or resonance strength change
Merit
Advantages of Graphene are large
specific surface area, high electron
mobility, high tensile strength,
flexibility, transparency, and
biocompatibility.
Graphene possesses remarkable
properties, including exceptional
thermal conductivity surpassing that
of metals and carbon nanotubes . Its
excellent mechanical and electrical
characteristics, along with its unique
temperature-responsive behavior,
make it an ideal choice for
temperature sensing applications.
Additionally, integrating graphene
with substrate materials is relatively
straightforward due to its
electromechanical properties, unlike
metallic nanomaterials
The metamaterial-inspired sensing
has the potential advantages including
the high precision, label-free, safety,
and can work properly in long-
distance wireless situation.
Advantages of miniaturization, high
flexibility and simple preparation
process.
Suggestions & Improvements
Ren et al. developed capacitive-temperature sensors
employing GO in [106]. The devices consisted of a planar
coil and temperature sensitive capacitor forming an LC
tank whose resonant frequency was a function of
temperature. GO films, used as the sensing layer, was
synthesized using the modified Hummers method,
followed by exfoliation through ultra sonication process.
In their study, all prototypes displayed a negative
temperature coefficient of resistance (TCR). Notably, the
rGO-based prototype exhibited the highest sensitivity at
0.6345% per degree Celsius. Additionally, the developed
rGO sensor demonstrated remarkable mechanical
durability, maintaining stable resistance even under
pressure and deformation. This achievement was
attributed to reducing the space between graphene
layers by applying significant force during insulating layer
adhesion.
In their research, Singh and colleagues disrupted the
fundamental electromagnetic metamaterial unit
structure and introduced a novel Fano asymmetric
resonance. Through this approach, they achieved
impressive sensitivity levels: 7.75 × 10³ nm per refractive
index unit (RIU) for the quadrupole and 5.7 × 10⁴ nm per
RIU with the Fano resonance.
The sensitivity of Fano resonance gets enhanced due to
much stronger interaction of analyte layer with the
enhanced electric field in the capacitive gaps.
pH Sensor
Paper Principle
Scarpa, E., Mastronardi, V.M.,
Guido, F. et al. Wearable The design comprises of flexible piezoelectric
piezoelectric mass sensor based on resonators adorned with cylindrical hydrogel
pH sensitive hydrogels for sweat pH microstructures sensitive to pH variations.
monitoring. Sci Rep 10, 10854
(2020). These microstructures are crafted from an anionic
hydrogel synthesized through the co-polymerization
https://doi.org/10.1038/s41598-02 of a 10 kDa poly(ethylene glycol)-diacrylate (PEG-DA)
0-67706-y macromer with 2-carboxyethyl acrylate (CEA),
resulting in a pliable material with pH-responsive
attributes.
The pH sensitivity of the hydrogels stems from the
presence of carboxylic groups in CEA, which undergo
protonation in acidic environments and
deprotonation in alkaline conditions.
Guo, Y.; Zhang, Z.; Yao, B.; Chai, J.;
Zhang, S.; Liu, J.; Zhao, Z.; Xue, C.
Fabrication and Performance of a when Ta2O5 is exposed to the electrolyte, its surface
Ta2O5 Thin Film pH Sensor is hydrolyzed to form tantalum–hydroxy groups (Ta–
Manufactured Using MEMS OH) [4]. The surface is charged by receiving or
Processes. Sensors 2023, 23, 6061. releasing protons during the reaction with a solution
containing H+/OH , which in turn form the O , OH and
OH+ surface groups.
https://doi.org/10.3390/s23136061
Merits
The device exploits the flexibility of
piezoelectric AlN membranes
fabricated on a polyimide substrate
combined to the sensitive properties
of a pH responsive hydrogel based on
peG-DA/ceA molecules
This device shows a responsivity of
about 12 kHz/pH unit when measured
in artificial sweat formulation in the
pH range 3–8
The Ta2O5 thin film has an amorphous
microstructure, and its surface
roughness is less than 3.17 nm.
The detection accuracy and anti-
interference ability are improved.
Good linearity (R2 = 0.99904) and
sensitivity (63.12 mV/pH) are recorded
for the proposed sensing element in the
range of pH 2~12, drift and hysteresis
are equal to 5.1 mV and 5.8 mV,
respectively.
Suggestions and Improvements
This is the first time that hydrogel mass variations
are sensed by a flexible resonator, fostering the
development of a new class of compliant and
wearable devices.[1]
Peppas et al. [2] devised that Hydrogels show a
strong capability to absorb a high amount of water,
and possess biological and elastic (i.e. softness)
compatibility.
Dhanjai et al. [3] The smart hydrogels, show
selective responsive properties to target analyte and
may represent a more stable alternative to the
standard biological sensing element
In the practical application stage, it is also necessary to
consider the influence of many factors, such as
interfering ions (Cu2+, Fe2+ and Fe3+), enzyme
activity effects, microbial attachment, etc.
In the future, long-term stability of the proposed
sensor will be tested, and it will be applied for the long-
term monitoring of pH changes in the marine
environment and aquaculture systems.
Compared to the pH meter products, HANNA HI98194
and Seema pH838, manufactured with glass electrodes
on the market, the sensitivity and response time are
lower than the HANNA HI98194 products.
 Paper
Lin, W.C., Hsieh, C.T., Chang, M.C.
and Liao, C.H., 2022. MEMS Cavity-
Based pH Image Biosensor for Wound
Dressings to Monitor Hard-to-Cure
Wounds. IEEE Sensors
Journal, 22(19), pp.18978-18987.
doi: 10.1109/JSEN.2022.3197678
M. Shamsul Arefin, M. Bulut Coskun,
T. Alan, A. Neild, J. -M. Redoute and
M. R. Yuce, "A MEMS capacitive pH
sensor for high acidic and basic
solutions," SENSORS, 2014 IEEE,
Valencia, Spain, 2014, pp. 1792-
1794,
doi: 10.1109/ICSENS.2014.6985373
Principle
Fig: The fringing electrical field and parallel electrical
field in a pH buffer solution.
As a buffer solution containing ions filled on the sensor
surface, since ions can be identified as a virtual ground,
some fringing electrical fields will be absorbed by the
ions, so the RX electrode cannot receive too much
fringing electrical field.
The principle of operation of the sensor is based on the
logarithmic relation between the number of H+ or OH-
ions in a solution (and correspondingly the
permittivity) and pH.
When a solution is placed on top of the sensing
electrodes (Fig. 1), H+ modifies the fringe electric
fields generated by the electrodes. That leads to a
change in permittivity, which in return alters the
capacitance value.
Merits
The pH biosensor with MEMS cavity
structure exhibits a high sensitivity of
201 mV/pH, low drift voltage over time
of 2.08 mV, a fast response time of 5 s,
high precise repetition of 98.9%, and a
pH image of 20 frame rate/s.
The sensor is a 100 × 100 array, it
displays a detailed change in the pH
image of wound exudate to identify the
inflammation stage under pH 6 or
spontaneous reepithelization above pH
6 to indicate the need to change the
dressing, reducing the clinician’s wasted
resources on frequency change of
wound dressings.
The device can effectively measure pH
levels from 1 to 4 and pH levels from 10
to 12.
This technique provides high sensitivity,
low hysteresis, and low noise as well as
low fabrication cost.
Very importantly, the device and the
corresponding measurement circuitry
have the potential to be integrated in
an electronic pill for continuous non-
invasive measurement within the body.
Suggestions and Improvements
The author Lin has verified in his previous work the
readout circuit which are based on the analog intellectual
property of the lab-owned IC [5].
There are different types of pH sensors that have been
developed. The glass electrode is the very first system to
measure pH and now is a standard[6].
The sensor on optical principle by Crespo et al[7] is a
pH-sensitive inorganic material, for example, carbon
nanostructures and metal oxides. They can absorb
hydronium ions and form compounds with the general
chemical formula. These sensors have a general response
time .
should focus on wireless sensor data transmission as
well as shrinking the form factor of the chip and the
readout circuit further down.
Yuce et al [8] proposed in his paper how to integrate
the techniques into miniaturized electronic pill systems
.
Ghosh et al [9] showed how to measure gastric acid
(typical pH levels 1-2 ). This device has the potential to
incorporate that.
 Paper
Goicoechea, J., Zamarreño, C.R.,
Matias, I.R. and Arregui, F.J., 2008.
Optical fiber pH sensors based on
layer-by-layer electrostatic self-
assembled Neutral Red. Sensors
and Actuators B: Chemical, 132(1),
pp.305-311.
https://doi.org/10.1016/j.snb.200
8.01.056
Principle
The method used in this work for the fabrication of
the nanostructured sensitive films is the LbL method.
The cationic chemicals used for the fabrication of
the different films are poly (allylamine
hydrochloride) (PAH) and 3-amino-7 dimethylamino-
2-methylphenazine hydrochloride, commonly known
as Neutral Red (NR), which is the colorimetric indica
tor. The anionic polyelectrolyte was poly (acrylic
acid) (PAA).
Merits
The experimental results obtained for
sensors based on self-assembled
Neutral Red and poly(acrylic acid)
coatings showed a highly linear
response with a dynamic range of
2.5dB, fast response times (shorter
than 1s), low hysteresis (13.5%).
It has high resolution (0.03 pH points)
and high stability with negligible drift
in 30min and a low cross-sensitivity to
temperature.
Suggestions and Improvements
The error bars are greater in middle-range values of
pH mainly due to hysteresis effects. This hysteresis
value should result lower than a 13.5% of the total
dynamic range of the sensor. L´ opez-Higuera et al
[10] talked about hysteresis in their paper.
Roy et al [11]showed for some specific cases, it is
possible to build up LbL structures using only one
polymer and a small molecule as counter-
electrolyte .
Methodology
Paper Principle Diagram

The pressure sensor is part of a silicon die

V. Kaajakari, Practical MEMS,
Small Gear Publishing, Las
Vegas, 2009.
that has been bonded to a metal plate at 70
°C.
Fig.1 [1]
A thin membrane is held at a fixed potential
of 1 V. The membrane is separated from a
ground plane chamber sealed under high
vacuum. The sides of the chamber are
insulating to prevent a connection between
the membrane and the ground plane.

When the pressure outside of the sealed

Fig.2 [1]
chamber changes, the pressure difference
causes the membrane to deflect. The
thickness of the sealed chamber now varies
across the membrane and its capacitance to
ground therefore changes.

Fig.3 [1]