Scribd Logo
Upload

Welcome to Scribd!

  • TCO

    Uploaded by

    Taekjib Choi
    236 views20 pages
    transparent conducting oxides

    Original Title

    TCO.ppt

    Copyright

    © Attribution Non-Commercial (BY-NC)

    Available Formats

    PPT, PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    transparent conducting oxides

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPT, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    236 views20 pages

    TCO

    Uploaded by

    Taekjib Choi
    transparent conducting oxides

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPT, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 20

    Transparent Conducting oxide

    Materials Characterization lab

    TCO (Transparent Conducting Oxide)


    (TCO)
    Electronical Conductivity () ; 103 -1cm-2
    Optical Transmittance ; 80 %
    Band gap ; 3.3 eV
    , display, display, ,
    A-Si

    Free carrier type Oxygen deficiency


    Electric charge carrier density & Effective mass

    TCO (Transparent Conducting Oxide)


    (TCO)
    ITO (In2O3:Sn, Sn~10%)
    IZO (In2O3:Zn, Zn~5%)
    FTO (SnO2:F)
    ZnO
    A-IGZO (In2O3:Ga2O3:ZnO)

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)



    N-type :

    P-type :

    Dopant
    1. N-type ,
    ZnO ; - 4.35eV , Band gap 3.37eV

    MgO ; 1.37eV, Band gap 7.8eV


    carrier
    2. P-type Low work function
    Metal-Oxygen ; , 16(S, Se, Te)
    (CuAlO2)
    3.

    TCO (Transparent Conducting Oxide)

    TCO (Transparent Conducting Oxide)

    Magnetron sputtering
    PVD(Physical vapor deposition)
    DC, RF, reactive
    gas cathode
    Ar + e-(primary) = Ar+ + e-(primary) + e-(secondary)
    - target , target

    TCO (Transparent Conducting Oxide)

    Sputtering

    -.
    -. , step defect coverage
    -. (adhesion)
    -. , , , .
    -. Target , target .
    -. sputter etching pre-cleaning .
    -. O2, N2 reactive sputter , .

    TCO (Transparent Conducting Oxide)

    Sputtering

    -. High energy deposition damage


    damage .
    -. , UV, (100150)
    holder .

    -.
    Ar , , bias , .

    TCO (Transparent Conducting Oxide)

    Sputtering

    -.

    -.
    -. target
    -.
    -. Background : 110-5110-6 Torr
    -. Ar : 215mTorr
    -. Input power : 5001000W
    -. Reflected power "0" setting
    -. bias : -50-100W

    TCO (Transparent Conducting Oxide)

    Pulsed laser deposition (PLD)

    -.
    -. UV target
    -. Laser plume
    -. millitorr
    -.
    -. ~3 epitaxial
    -. p-type TCO

    TCO (Transparent Conducting Oxide)

    (Chemical vapor deposition, CVD)

    -.
    -. , ,
    -. (APCVD), (LPCVD), (PECVD), (MOCVD)
    -.
    -. ,

    TCO (Transparent Conducting Oxide)

    (Solution deposition)

    -. Sol-gel
    -. or

    -.
    -. alkoxide
    -. - : ,
    -. PVD PLD
    -. ,
    -. , ,
    -.

    TCO (Transparent Conducting Oxide)

    (aerosol spray pyrolysis)

    -.
    -.

    -.
    -. ,
    -. ,

    TCO (Transparent Conducting Oxide)

    Combination depositon methods

    -.
    -. target
    -. NiCo2O4 sputter
    -.

    TCO (Transparent Conducting Oxide)

    You might also like